1
|
Cooper D, Bruas L, Bryan M, Boureau V. Measuring electrical properties in semiconductor devices by pixelated STEM and off-axis electron holography (or convergent beams vs. plane waves). Micron 2024; 179:103594. [PMID: 38340549 DOI: 10.1016/j.micron.2024.103594] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/04/2023] [Revised: 01/24/2024] [Accepted: 01/25/2024] [Indexed: 02/12/2024]
Abstract
We demonstrate the use of both pixelated differential phase contrast (DPC) scanning transmission electron microscopy (STEM) and off-axis electron holography (EH) for the measurement of electric fields and assess the advantages and limitations of each technique when applied to technologically relevant samples. Three different types of samples are examined, firstly a simple highly-doped Si pn junction. Then a SiGe superlattice is examined to evaluate the effects of the mean inner potential on the measured signal. Finally, an InGaN/GaN microwire light-emitting diode (LED) device is examined which has a polarization field, variations of mean inner potential and a wurtzite crystal lattice. We discuss aspects such as spatial resolution and sensitivity, and the concept of pseudo-field is defined. However, the most important point is the need to limit the influence of diffraction contrast to obtain accurate measurements. In this respect, the use of a plane electron wave for EH is clearly beneficial when compared to the use of a convergent beam for pixelated DPC STEM.
Collapse
Affiliation(s)
- David Cooper
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France.
| | - Lucas Bruas
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
| | - Matthew Bryan
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
| | - Victor Boureau
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France; Interdisciplinary Center for Electron Microscopy, EPFL, 1015 Lausanne, Switzerland
| |
Collapse
|
2
|
Zhang Y, Xu T, Jiang W, Yu R, Chen Z. Quantification of Hybrid Topological Spin Textures and Their Nanoscale Fluctuations in Ferrimagnets. NANO LETTERS 2024; 24:2727-2734. [PMID: 38395052 DOI: 10.1021/acs.nanolett.3c04409] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/25/2024]
Abstract
Noncolinear spin textures, including chiral stripes and skyrmions, have shown great potential in spintronics. Basic configurations of spin textures are either Bloch or Néel types, and the intermediate hybrid type has rarely been reported. A major challenge in identifying hybrid spin textures is to quantitatively determine the hybrid angle, especially in ferrimagnets with weak net magnetization. Here, we develop an approach to quantify magnetic parameters, including chirality, saturation magnetization, domain wall width, and hybrid angle with sub-5 nm spatial resolution, based on Lorentz four-dimensional scanning transmission electron microscopy (Lorentz 4D-STEM). We find strong nanometer-scale variations in the hybrid angle and domain wall width within structurally and chemically homogeneous FeGd ferrimagnetic films. These variations fluctuate during different magnetization circles, revealing intrinsic local magnetization inhomogeneities. Furthermore, hybrid skyrmions can also be nucleated in FeGd films. These analyses demonstrate that the Lorentz 4D-STEM is a quantitative tool for exploring complex spin textures.
Collapse
Affiliation(s)
- Yuxuan Zhang
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China
| | - Teng Xu
- State Key Laboratory of Low-Dimensional Quantum Physics and Department of Physics, Frontier Science Center for Quantum Information, Tsinghua University, Beijing 100084, China
| | - Wanjun Jiang
- State Key Laboratory of Low-Dimensional Quantum Physics and Department of Physics, Frontier Science Center for Quantum Information, Tsinghua University, Beijing 100084, China
| | - Rong Yu
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China
| | - Zhen Chen
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China
| |
Collapse
|
3
|
Cui J, Sha H, Yang W, Yu R. Antiferromagnetic imaging via ptychographic phase retrieval. Sci Bull (Beijing) 2024; 69:466-472. [PMID: 38161093 DOI: 10.1016/j.scib.2023.12.044] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/20/2023] [Revised: 11/27/2023] [Accepted: 12/15/2023] [Indexed: 01/03/2024]
Abstract
Antiferromagnetic imaging is critical for understanding and optimizing the properties of antiferromagnetic materials and devices. Despite the widespread use of high-energy electrons for atomic-scale imaging, they have low sensitivity to spin textures. Typically, the magnetic contribution to the phase of a high-energy electron wave is weaker than one percent of the electrostatic potential. Here, we demonstrate direct imaging of antiferromagnetic lattice through precise phase retrieval via electron ptychography, paving the way for magnetic lattice imaging of antiferromagnetic materials and devices.
Collapse
Affiliation(s)
- Jizhe Cui
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China; State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China
| | - Haozhi Sha
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China; State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China
| | - Wenfeng Yang
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China; State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China
| | - Rong Yu
- School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084, China; State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China.
| |
Collapse
|
4
|
Nguyen KX, Jiang Y, Lee CH, Kharel P, Zhang Y, van der Zande AM, Huang PY. Achieving sub-0.5-angstrom-resolution ptychography in an uncorrected electron microscope. Science 2024; 383:865-870. [PMID: 38386746 DOI: 10.1126/science.adl2029] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/04/2023] [Accepted: 01/19/2024] [Indexed: 02/24/2024]
Abstract
Subangstrom resolution has long been limited to aberration-corrected electron microscopy, where it is a powerful tool for understanding the atomic structure and properties of matter. Here, we demonstrate electron ptychography in an uncorrected scanning transmission electron microscope (STEM) with deep subangstrom spatial resolution down to 0.44 angstroms, exceeding the conventional resolution of aberration-corrected tools and rivaling their highest ptychographic resolutions. Our approach, which we demonstrate on twisted two-dimensional materials in a widely available commercial microscope, far surpasses prior ptychographic resolutions (1 to 5 angstroms) of uncorrected STEMs. We further show how geometric aberrations can create optimized, structured beams for dose-efficient electron ptychography. Our results demonstrate that expensive aberration correctors are no longer required for deep subangstrom resolution.
Collapse
Affiliation(s)
- Kayla X Nguyen
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
| | - Yi Jiang
- Advanced Photon Source Facility, Argonne National Laboratory, Lemont, IL, USA
| | - Chia-Hao Lee
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
| | - Priti Kharel
- Department of Chemistry, University of Illinois Urbana-Champaign, Urbana, IL, USA
| | - Yue Zhang
- Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
| | - Arend M van der Zande
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
- Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois Urbana-Champaign, Urbana, IL, USA
| | - Pinshane Y Huang
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois Urbana-Champaign, Urbana, IL, USA
| |
Collapse
|
5
|
Jiang Y, Cao MC, Chen Z, Han Y. Optimizing Parameters for High-resolution and Low-dose Electron Ptychography. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:284-285. [PMID: 37613141 DOI: 10.1093/micmic/ozad067.131] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Yi Jiang
- Advanced Photon Source, Argonne National Laboratory, Lemont, IL, United States
| | - Michael C Cao
- Department of Materials Science and NanoEngineering, Rice University, Houston, TX, United States
| | - Zhen Chen
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
| | - Yimo Han
- Department of Materials Science and NanoEngineering, Rice University, Houston, TX, United States
| |
Collapse
|
6
|
Chen Z. Quantitative Measurements of Intrinsic Parameters of Spin Textures using 4D-Lorentz STEM. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:277. [PMID: 37613036 DOI: 10.1093/micmic/ozad067.127] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Zhen Chen
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
| |
Collapse
|
7
|
Huang J, Kang K, Schleife A, Huang PY. Electron Ptychography Simulations for Atomic-resolution Magnetic Imaging. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:282-283. [PMID: 37613144 DOI: 10.1093/micmic/ozad067.130] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Jeffrey Huang
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, United States
| | - Kisung Kang
- NOMAD Laboratory at Fritz-Haber-Institut der Max-Planck-Gesellschaft and IRIS-Adlershof of the Humboldt-Universität zu Berlin, Berlin, Germany
| | - André Schleife
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, United States
| | - Pinshane Y Huang
- Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, United States
| |
Collapse
|
8
|
Harikrishnan KP, Li YE, Crust KJ, Khandelwal A, Shao YT, Chen Z, Zhang C, Guguschev C, Xu R, Hwang HY, Schlom DG, Muller DA. Visualizing Polar Distortions and Interface Effects with Multislice Ptychography. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:1626-1627. [PMID: 37613802 DOI: 10.1093/micmic/ozad067.835] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- K P Harikrishnan
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, United States
| | | | - Kevin J Crust
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, United States
- Department of Physics, Stanford University, Stanford, CA, United States
| | - Aarushi Khandelwal
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, United States
- Department of Applied Physics, Stanford University, Stanford, CA, United States
| | - Yu-Tsun Shao
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, United States
- Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA, United States
| | - Zhen Chen
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
| | - Chenyu Zhang
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, United States
| | | | - Ruijuan Xu
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, United States
- Department of Applied Physics, Stanford University, Stanford, CA, United States
- Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, United States
| | - Harold Y Hwang
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, United States
- Department of Applied Physics, Stanford University, Stanford, CA, United States
| | - Darrell G Schlom
- Department of Materials Science and Engineering, Cornell University, Ithaca, NY, United States
- Leibniz-Institut für Kristallzüchtung, Berlin, Germany
- Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY, United States
| | - David A Muller
- School of Applied and Engineering Physics, Cornell University, Ithaca, NY, United States
- Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY, United States
| |
Collapse
|
9
|
Miao J, Murnane MM. A closer look at spin textures. NATURE NANOTECHNOLOGY 2023; 18:1-2. [PMID: 36418490 DOI: 10.1038/s41565-022-01262-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Affiliation(s)
- Jianwei Miao
- Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA.
- STROBE National Science Foundation Science & Technology Center, University of Colorado, Boulder, CO, USA.
| | - Margaret M Murnane
- STROBE National Science Foundation Science & Technology Center, University of Colorado, Boulder, CO, USA
- Department of Physics and JILA, University of Colorado and NIST, Boulder, CO, USA
| |
Collapse
|