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Behrens M, Lotnyk A, Bryja H, Gerlach JW, Rauschenbach B. Structural Transitions in Ge 2Sb 2Te 5 Phase Change Memory Thin Films Induced by Nanosecond UV Optical Pulses. MATERIALS (BASEL, SWITZERLAND) 2020; 13:E2082. [PMID: 32369916 PMCID: PMC7254329 DOI: 10.3390/ma13092082] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/01/2020] [Revised: 04/26/2020] [Accepted: 04/28/2020] [Indexed: 11/16/2022]
Abstract
Ge-Sb-Te-based phase change memory alloys have recently attracted a lot of attention due to their promising applications in the fields of photonics, non-volatile data storage, and neuromorphic computing. Of particular interest is the understanding of the structural changes and underlying mechanisms induced by short optical pulses. This work reports on structural changes induced by single nanosecond UV laser pulses in amorphous and epitaxial Ge2Sb2Te5 (GST) thin films. The phase changes within the thin films are studied by a combined approach using X-ray diffraction and transmission electron microscopy. The results reveal different phase transitions such as crystalline-to-amorphous phase changes, interface assisted crystallization of the cubic GST phase and structural transformations within crystalline phases. In particular, it is found that crystalline interfaces serve as crystallization templates for epitaxial formation of metastable cubic GST phase upon phase transitions. By varying the laser fluence, GST thin films consisting of multiple phases and different amorphous to crystalline volume ratios can be achieved in this approach, offering a possibility of multilevel data storage and realization of memory devices with very low resistance drift. In addition, this work demonstrates amorphization and crystallization of GST thin films by using only one UV laser with one single pulse duration and one wavelength. Overall, the presented results offer new perspectives on switching pathways in Ge-Sb-Te-based materials and show the potential of epitaxial Ge-Sb-Te thin films for applications in advanced phase change memory concepts.
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Affiliation(s)
- Mario Behrens
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Andriy Lotnyk
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
- Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China
| | - Hagen Bryja
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Jürgen W. Gerlach
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Bernd Rauschenbach
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
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Kowalczyk P, Hippert F, Bernier N, Mocuta C, Sabbione C, Batista-Pessoa W, Noé P. Impact of Stoichiometry on the Structure of van der Waals Layered GeTe/Sb 2 Te 3 Superlattices Used in Interfacial Phase-Change Memory (iPCM) Devices. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1704514. [PMID: 29761644 DOI: 10.1002/smll.201704514] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/26/2017] [Revised: 03/30/2018] [Indexed: 06/08/2023]
Abstract
Van der Waals layered GeTe/Sb2 Te3 superlattices (SLs) have demonstrated outstanding performances for use in resistive memories in so-called interfacial phase-change memory (iPCM) devices. GeTe/Sb2 Te3 SLs are made by periodically stacking ultrathin GeTe and Sb2 Te3 crystalline layers. The mechanism of the resistance change in iPCM devices is still highly debated. Recent experimental studies on SLs grown by molecular beam epitaxy or pulsed laser deposition indicate that the local structure does not correspond to any of the previously proposed structural models. Here, a new insight is given into the complex structure of prototypical GeTe/Sb2 Te3 SLs deposited by magnetron sputtering, which is the used industrial technique for SL growth in iPCM devices. X-ray diffraction analysis shows that the structural quality of the SL depends critically on its stoichiometry. Moreover, high-angle annular dark-field-scanning transmission electron microscopy analysis of the local atomic order in a perfectly stoichiometric SL reveals the absence of GeTe layers, and that Ge atoms intermix with Sb atoms in, for instance, Ge2 Sb2 Te5 blocks. This result shows that an alternative structural model is required to explain the origin of the electrical contrast and the nature of the resistive switching mechanism observed in iPCM devices.
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Affiliation(s)
- Philippe Kowalczyk
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
- Université Grenoble Alpes, CNRS, LTM, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Françoise Hippert
- LNCMI-EMFL-CNRS, Université Grenoble Alpes, INSA, UPS, 25, rue des Martyrs, F 38042, Grenoble Cedex 9, France
| | - Nicolas Bernier
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Cristian Mocuta
- Synchrotron SOLEIL l'Orme des Merisiers, Saint-Aubin - BP 48, F-91192, Gif-sur-Yvette Cedex, France
| | - Chiara Sabbione
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Walter Batista-Pessoa
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Pierre Noé
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
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Qian H, Tong H, He MZ, Ji HK, Zhou LJ, Xu M, Miao XS. Observation of carrier localization in cubic crystalline Ge 2Sb 2Te 5 by field effect measurement. Sci Rep 2018; 8:486. [PMID: 29323199 PMCID: PMC5765150 DOI: 10.1038/s41598-017-18964-w] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/25/2017] [Accepted: 12/12/2017] [Indexed: 11/09/2022] Open
Abstract
The tunable disorder of vacancies upon annealing is an important character of crystalline phase-change material Ge2Sb2Te5 (GST). A variety of resistance states caused by different degrees of disorder can lead to the development of multilevel memory devices, which could bring a revolution to the memory industry by significantly increasing the storage density and inspiring the neuromorphic computing. This work focuses on the study of disorder-induced carrier localization which could result in multiple resistance levels of crystalline GST. To analyze the effect of carrier localization on multiple resistant levels, the intrinsic field effect (the change in surface conductance with an applied transverse electric field) of crystalline GST was measured, in which GST films were annealed at different temperatures. The field effect measurement is an important complement to conventional transport measurement techniques. The field effect mobility was acquired and showed temperature activation, a hallmark of carrier localization. Based on the relationship between field effect mobility and annealing temperature, we demonstrate that the annealing shifts the mobility edge towards the valence-band edge, delocalizing more carriers. The insight of carrier transport in multilevel crystalline states is of fundamental relevance for the development of multilevel phase change data storage.
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Affiliation(s)
- Hang Qian
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China.,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Hao Tong
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China. .,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China.
| | - Ming-Ze He
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China.,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Hong-Kai Ji
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China.,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Ling-Jun Zhou
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China.,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Ming Xu
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Xiang-Shui Miao
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China.,School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
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