1
|
Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements. MICROMACHINES 2022; 13:mi13030343. [PMID: 35334635 PMCID: PMC8951410 DOI: 10.3390/mi13030343] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/31/2021] [Revised: 02/14/2022] [Accepted: 02/17/2022] [Indexed: 12/10/2022]
Abstract
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively.
Collapse
|
2
|
Abstract
The extraordinary sensitivity of plasmonic sensors is well-known in the optics and photonics community. These sensors exploit simultaneously the enhancement and the localization of electromagnetic fields close to the interface between a metal and a dielectric. This enables, for example, the design of integrated biochemical sensors at scales far below the diffraction limit. Despite their practical realization and successful commercialization, the sensitivity and associated precision of plasmonic sensors are starting to reach their fundamental classical limit given by quantum fluctuations of light-known as the shot-noise limit. To improve the sensing performance of these sensors beyond the classical limit, quantum resources are increasingly being employed. This area of research has become known as "quantum plasmonic sensing", and it has experienced substantial activity in recent years for applications in chemical and biological sensing. This review aims to cover both plasmonic and quantum techniques for sensing, and it shows how they have been merged to enhance the performance of plasmonic sensors beyond traditional methods. We discuss the general framework developed for quantum plasmonic sensing in recent years, covering the basic theory behind the advancements made, and describe the important works that made these advancements. We also describe several key works in detail, highlighting their motivation, the working principles behind them, and their future impact. The intention of the review is to set a foundation for a burgeoning field of research that is currently being explored out of intellectual curiosity and for a wide range of practical applications in biochemistry, medicine, and pharmaceutical research.
Collapse
Affiliation(s)
- Changhyoup Lee
- Institute of Theoretical Solid State Physics, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany.,Quantum Universe Center, Korea Institute for Advanced Study, Seoul 02455, Republic of Korea
| | - Benjamin Lawrie
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
| | - Raphael Pooser
- Quantum Information Science Group, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
| | - Kwang-Geol Lee
- Department of Physics, Hanyang University, Seoul 04763, Republic of Korea
| | - Carsten Rockstuhl
- Institute of Theoretical Solid State Physics, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany.,Institute of Nanotechnology, Karlsruhe Institute of Technology, 76021Karlsruhe, Germany.,Max Planck School of Photonics, 07745 Jena, Germany
| | - Mark Tame
- Department of Physics, Stellenbosch University, Stellenbosch 7602, South Africa
| |
Collapse
|
3
|
Hegazy SAEH, Kamel AM, Arafa II, Elhalwagy YZ. Improved Multi-Position Calibration Method for Mechanical Inertia Measurement Units. 2020 8TH INTERNATIONAL JAPAN-AFRICA CONFERENCE ON ELECTRONICS, COMMUNICATIONS, AND COMPUTATIONS (JAC-ECC) 2020. [DOI: 10.1109/jac-ecc51597.2020.9355909] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
|
4
|
A Theoretical and Empirical Investigation of Design Characteristics in a Pb(Zr,Ti)O 3-Based Piezoelectric Accelerometer. SENSORS 2020; 20:s20123545. [PMID: 32585870 PMCID: PMC7349895 DOI: 10.3390/s20123545] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/25/2020] [Revised: 06/17/2020] [Accepted: 06/21/2020] [Indexed: 11/17/2022]
Abstract
A theoretical and experimental study on the design-to-performance characteristics of a compression-mode Pb(Zr,Ti)O3-based piezoelectric accelerometer is presented. Using the metamodeling to approximate the relationship between the design variables and the performances, the constituent components were optimized so that the generated electric voltage, representing sensitivity, could be maximized at different set values of the resonant frequency (25–40 kHz). Four kinds of optimized designs were created and fabricated into the accelerometer modules for empirical validation. The accelerometer modules fabricated according to the optimized designs were highly reliable with a broad range of resonant frequency as well as sufficiently high values of charge sensitivity. The fixed (or mounted) resonant frequency was between 16.1–30.1 kHz based on the impedance measurement. The charge sensitivity decreased from 296.8 to 79.4 pC/g with an increase of the resonant frequency, showing an inverse relation with respect to the resonant frequency. The design-dependent behaviors of the sensitivity and resonant frequency were almost identical in both numerical analysis and experimental investigation. This work shows that the piezoelectric accelerometer can be selectively prepared with best outcomes according to the requirements for the sensitivity and resonant frequency, fundamentally associated with trade-off relation.
Collapse
|
5
|
Lee MK, Han SH, Park KH, Park JJ, Kim WW, Hwang WJ, Lee GJ. Design Optimization of Bulk Piezoelectric Acceleration Sensor for Enhanced Performance. SENSORS 2019; 19:s19153360. [PMID: 31370167 PMCID: PMC6696384 DOI: 10.3390/s19153360] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/04/2019] [Revised: 07/30/2019] [Accepted: 07/30/2019] [Indexed: 11/16/2022]
Abstract
While seeking to achieve high performances of a bulk piezoelectric acceleration sensor, we investigated the behavior of the design variables of the sensor components and optimized the sensor design using a numerical simulation based on piezoelectric analysis and metamodeling. The optimized results demonstrated that there was an exponential dependency in the trade-off relation between two performance indicators, the electric voltage and the resonant frequency, as induced by the design characteristics of the sensor. Among the design variables, a decrease in the base height and epoxy thickness and an increase in the piezo element's inner diameter had a positive effect on two performances, while the head dimensions (diameter and height) exhibited the opposite effect on them. The optimal sensor designs are proposed within the valid range of resonant frequency (25-47.5 kHz). Our redesign of a commercial reference sensor improved the resonant frequency by 13.2% and the electric voltage by 46.1%.
Collapse
Affiliation(s)
- Min-Ku Lee
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea
| | - Seung-Ho Han
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea
| | - Kyu-Hyun Park
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea
| | - Jin-Ju Park
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea
| | - Whung-Whoe Kim
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea
| | - Won-Ju Hwang
- #301, 8, Suseong-ro, Gwonseon-gu, Suwon-si, Gyeonggi-do 16426, Korea
| | - Gyoung-Ja Lee
- Sensor System Research Team, Korea Atomic Energy Research Institute, Daejeon 34057, Korea.
| |
Collapse
|
6
|
Liu Z, Htein L, Gunawardena DS, Chung WH, Lu C, Lee KK, Tam HY. Novel accelerometer realized by a polarization-maintaining photonic crystal fiber for railway monitoring applications. OPTICS EXPRESS 2019; 27:21597-21607. [PMID: 31510233 DOI: 10.1364/oe.27.021597] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/08/2019] [Accepted: 06/12/2019] [Indexed: 06/10/2023]
Abstract
In this paper, we present a novel accelerometer based on the Sagnac interferometer configuration using a polarization-maintaining photonic crystal fiber (PM-PCF), which has a sensitivity of ~8 pm/G, and a resonant frequency exceeding 2.5 kHz. The proposed accelerometer is capable of functioning with a constant sensitivity in a large frequency range from 0 to 1 kHz which is much wider than many FBG-based accelerometers. Experimental results obtained from a field test in railway monitoring, demonstrate a broader frequency range for the proposed accelerometer compared to that of the FBG based accelerometer and is comparable to the conventional piezoelectric sensor. The abrupt change in the acceleration measured by the sensor aids in locating any defect or crack present on the railway track. To the best of our knowledge, this is the first demonstration of an accelerometer based on a fiber interferometer aimed for the railway industry. The proposed accelerometer operating at high accelerations (>40 G) and capable of functioning at a broad frequency range, shows significant potential in being used in applications which require detection of strong and fast vibrations, especially in structural health monitoring of trains and railway tracks in real time.
Collapse
|
7
|
Cui J, Liu Z, Gunawardena DS, Zhao Z, Tam HY. Two-dimensional vector accelerometer based on Bragg gratings inscribed in a multi-core fiber. OPTICS EXPRESS 2019; 27:20848-20856. [PMID: 31510173 DOI: 10.1364/oe.27.020848] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/17/2019] [Accepted: 05/27/2019] [Indexed: 06/10/2023]
Abstract
We propose and demonstrate a novel orientation-sensitive two-dimensional accelerometer based on fiber Bragg gratings inscribed in a multi-core fiber. Through monitoring of the wavelength shifts of three of the seven cores, including the central core and two outer cores which are not aligned in a straight line, information on vibration orientation as well as acceleration can be obtained simultaneously. Performance of the proposed accelerometer in terms of frequency, acceleration and vibration orientation are experimentally investigated. The designed two-dimensional accelerometer is capable of obtaining all these three parameters simultaneously. A sensitivity which is strongly dependent on the orientation is achieved, with a best orientation accuracy of 0.127° over a range of 0-180°. Moreover, the resonance frequency and the sensitivity can be optimized through adjusting the length and weight of the free-fiber. The ease of fabrication as well as the versatility of the proposed sensor makes it potentially useful in dynamic monitoring for industrial applications.
Collapse
|
8
|
Study of Sensitive Parameters on the Sensor Performance of a Compression-Type Piezoelectric Accelerometer Based on the Meta-Model. ENERGIES 2019. [DOI: 10.3390/en12071381] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
Through a numerical analytical approach based on piezoelectric analysis and meta-modeling, this study investigated the effect of the component design of an accelerometer sensor on sensitivity and resonance frequency. The results of the study confirmed that the resonance frequency obtained from the piezoelectric analysis was almost the same as the experimental value of the resonance frequency obtained from the fabricated sensing module and proved the validity of the piezoelectric analysis using a finite element method. Moreover, the results of examining the influence of the component design on the resonance frequency and electrical potential suggested that the diameter and height of the head (seismic mass) had the greatest influence. As the diameter and height of the head increased, the sensitivity increased, but the resonance frequency decreased, which indicates that it is necessary to select an appropriate mass to optimize the sensor performance. In addition, the increase in tail height and epoxy thickness had a positive effect on both the resonance frequency and electric potential, and the base diameter had a negative effect on both of them.
Collapse
|
9
|
Waltermann C, Bethmann K, Doering A, Jiang Y, Baumann AL, Angelmahr M, Schade W. Multiple off-axis fiber Bragg gratings for 3D shape sensing. APPLIED OPTICS 2018; 57:8125-8133. [PMID: 30461760 DOI: 10.1364/ao.57.008125] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/15/2018] [Accepted: 08/27/2018] [Indexed: 06/09/2023]
Abstract
Point-by-point femtosecond laser processed fiber Bragg gratings are arranged around the edge of a standard single-mode optical fiber core. The relative amplitudes of at least three such fiber Bragg gratings are utilized to detect the central position of the mode field within the fiber core and calculate the local curvature of the fiber. An analytical approximation is given, and an experimental validation is performed.
Collapse
|
10
|
Chen F, Qiao X, Wang R, Su D, Rong Q. Orientation-dependent fiber-optic displacement sensor using a fiber Bragg grating inscribed in a side-hole fiber. APPLIED OPTICS 2018; 57:3581-3585. [PMID: 29726534 DOI: 10.1364/ao.57.003581] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/09/2018] [Accepted: 04/10/2018] [Indexed: 06/08/2023]
Abstract
We propose and experimentally demonstrate an orientation-dependent fiber-optic bending sensor. The sensing probe consists of a fiber Bragg grating inscribed in both the fiber core and the surrounding cladding of a section of a side-hole fiber. We utilized a side-illumination technique using a femtosecond laser to achieve the grating structure formation. The transmission intensities of both resonances are highly sensitive bending of the fiber, and the bending response shows orientation dependence. The surrounding temperature fluctuation causes a wavelength shift, but not an intensity variation. Therefore, the proposed sensor can be employed for simultaneous measurement of bending and temperature.
Collapse
|
11
|
Bao W, Rong Q, Chen F, Qiao X. All-fiber 3D vector displacement (bending) sensor based on an eccentric FBG. OPTICS EXPRESS 2018; 26:8619-8627. [PMID: 29715826 DOI: 10.1364/oe.26.008619] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/09/2018] [Accepted: 03/16/2018] [Indexed: 06/08/2023]
Abstract
We demonstrate a fiber-optic 3D vector displacement sensor based on the monitoring of Bragg reflection from an eccentric grating inscribed in a depressed-cladding fiber using the femtosecond laser side-illumination and phase-mask technique. The compact sensing probe consists of a short section of depressed cladding fiber (DCF) containing eccentrically positioned fiber Bragg gratings. The eccentric grating breaks the cylindrical symmetry of the fiber cross-section and further has bending orientation-dependence. The generated fundamental resonance is strongly sensitive to bending of the fiber, and the direction of the bending plane can be determined from its responses. When integrated with axis strain monitoring, the sensor achieves a 3D vector displacement measurement via simple geometric analysis.
Collapse
|