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Konstantinova TG, Andronic MM, Baklykov DA, Stukalova VE, Ezenkova DA, Zikiy EV, Bashinova MV, Solovev AA, Lotkov ES, Ryzhikov IA, Rodionov IA. Deep multilevel wet etching of fused silica glass microstructures in BOE solution. Sci Rep 2023; 13:5228. [PMID: 36997654 PMCID: PMC10063648 DOI: 10.1038/s41598-023-32503-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/31/2023] [Accepted: 03/28/2023] [Indexed: 04/01/2023] Open
Abstract
Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its chemical resistance, optical, electrical, and mechanical performance. Wet etching is the key method for fabricating of such microdevices. Protective mask integrity is a big challenge due extremely aggressive properties of etching solution. Here, we propose multilevel microstructures fabrication route based on fused silica deep etching through a stepped mask. First, we provide an analysis of a fused silica dissolution mechanism in buffered oxide etching (BOE) solution and calculate the main fluoride fractions like [Formula: see text], [Formula: see text], [Formula: see text] as a function of pH and NH4F:HF ratio. Then, we experimentally investigate the influence of BOE composition (1:1-14:1) on the mask resistance, etch rate and profile isotropy during deep etching through a metal/photoresist mask. Finally, we demonstrate a high-quality multilevel over-200 μm etching process with the rate up to 3 μm/min, which could be of a great interest for advanced microdevices with flexure suspensions, inertial masses, microchannels, and through-wafer holes.
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Affiliation(s)
- T G Konstantinova
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia
| | - M M Andronic
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
| | - D A Baklykov
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia
| | - V E Stukalova
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
| | - D A Ezenkova
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia
| | - E V Zikiy
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia
| | - M V Bashinova
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
| | - A A Solovev
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
| | - E S Lotkov
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia
| | - I A Ryzhikov
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia
| | - I A Rodionov
- FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.
- Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia.
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Wang J, Jiang H, Pan L, Gu X, Xiao C, Liu P, Tang Y, Fang J, Li X, Lu C. Rapid on-site nucleic acid testing: On-chip sample preparation, amplification, and detection, and their integration into all-in-one systems. Front Bioeng Biotechnol 2023; 11:1020430. [PMID: 36815884 PMCID: PMC9930993 DOI: 10.3389/fbioe.2023.1020430] [Citation(s) in RCA: 7] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/16/2022] [Accepted: 01/12/2023] [Indexed: 02/04/2023] Open
Abstract
As nucleic acid testing is playing a vital role in increasingly many research fields, the need for rapid on-site testing methods is also increasing. The test procedure often consists of three steps: Sample preparation, amplification, and detection. This review covers recent advances in on-chip methods for each of these three steps and explains the principles underlying related methods. The sample preparation process is further divided into cell lysis and nucleic acid purification, and methods for the integration of these two steps on a single chip are discussed. Under amplification, on-chip studies based on PCR and isothermal amplification are covered. Three isothermal amplification methods reported to have good resistance to PCR inhibitors are selected for discussion due to their potential for use in direct amplification. Chip designs and novel strategies employed to achieve rapid extraction/amplification with satisfactory efficiency are discussed. Four detection methods providing rapid responses (fluorescent, optical, and electrochemical detection methods, plus lateral flow assay) are evaluated for their potential in rapid on-site detection. In the final section, we discuss strategies to improve the speed of the entire procedure and to integrate all three steps onto a single chip; we also comment on recent advances, and on obstacles to reducing the cost of chip manufacture and achieving mass production. We conclude that future trends will focus on effective nucleic acid extraction via combined methods and direct amplification via isothermal methods.
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Affiliation(s)
- Jingwen Wang
- Key Laboratory of Specialty Agri-products Quality and Hazard Controlling Technology of Zhejiang Province, College of Life Sciences, China Jiliang University, Hangzhou, China
| | - Han Jiang
- Key Laboratory of Specialty Agri-products Quality and Hazard Controlling Technology of Zhejiang Province, College of Life Sciences, China Jiliang University, Hangzhou, China
| | - Leiming Pan
- Zhejiang Hongzheng Testing Co., Ltd., Ningbo, China
| | - Xiuying Gu
- Zhejiang Gongzheng Testing Center Co., Ltd., Hangzhou, China
| | - Chaogeng Xiao
- Institute of Food Science, Zhejiang Academy of Agricultural Science, Hangzhou, China
| | - Pengpeng Liu
- Key Laboratory of Biosafety detection for Zhejiang Market Regulation, Zhejiang Fangyuan Testing Group LO.T, Hangzhou, China
| | - Yulong Tang
- Hangzhou Tiannie Technology Co., Ltd., Hangzhou, China
| | - Jiehong Fang
- Key Laboratory of Specialty Agri-products Quality and Hazard Controlling Technology of Zhejiang Province, College of Life Sciences, China Jiliang University, Hangzhou, China
| | - Xiaoqian Li
- Key Laboratory of Specialty Agri-products Quality and Hazard Controlling Technology of Zhejiang Province, College of Life Sciences, China Jiliang University, Hangzhou, China
| | - Chenze Lu
- Key Laboratory of Specialty Agri-products Quality and Hazard Controlling Technology of Zhejiang Province, College of Life Sciences, China Jiliang University, Hangzhou, China
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Li H, Raza A, Yuan S, AlMarzooqi F, Fang NX, Zhang T. Biomimetic on-chip filtration enabled by direct micro-3D printing on membrane. Sci Rep 2022; 12:8178. [PMID: 35581265 PMCID: PMC9114119 DOI: 10.1038/s41598-022-11738-z] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/24/2022] [Accepted: 04/25/2022] [Indexed: 11/09/2022] Open
Abstract
Membrane-on-chip is of growing interest in a wide variety of high-throughput environmental and water research. Advances in membrane technology continuously provide novel materials and multi-functional structures. Yet, the incorporation of membrane into microfluidic devices remains challenging, thus limiting its versatile utilization. Herein, via micro-stereolithography 3D printing, we propose and fabricate a "fish gill" structure-integrated on-chip membrane device, which has the self-sealing attribute at structure-membrane interface without extra assembling. As a demonstration, metallic micromesh and polymeric membrane can also be easily embedded in 3D printed on-chip device to achieve anti-fouling and anti-clogging functionality for wastewater filtration. As evidenced from in-situ visualization of structure-fluid-foulant interactions during filtration process, the proposed approach successfully adopts the fish feeding mechanism, being able to "ricochet" foulant particles or droplets through hydrodynamic manipulation. When benchmarked with two common wastewater treatment scenarios, such as plastic micro-particles and emulsified oil droplets, our biomimetic filtration devices exhibit 2 ~ 3 times longer durability for high-flux filtration than devices with commercial membrane. This proposed 3D printing-on-membrane approach, elegantly bridging the fields of microfluidics and membrane science, is instrumental to many other applications in energy, sensing, analytical chemistry and biomedical engineering.
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Affiliation(s)
- Hongxia Li
- Department of Mechanical Engineering, Masdar Institute, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, UAE
| | - Aikifa Raza
- Department of Mechanical Engineering, Masdar Institute, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, UAE
| | - Shaojun Yuan
- College of Chemical Engineering, Sichuan University, Chengdu, 610065, China
| | - Faisal AlMarzooqi
- Department of Chemical Engineering, Masdar Institute, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, UAE
| | - Nicholas X Fang
- Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139, USA
| | - TieJun Zhang
- Department of Mechanical Engineering, Masdar Institute, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, UAE.
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