1
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Kang MC, Islam F, Yan J, Vaknin D, McQueeney RJ, Lu P, Zhou L. Atomic-Scale Characterization of Dilute Dopants in Topological Insulators via STEM-EDS Using Registration and Cell Averaging Techniques. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2024; 30:807-816. [PMID: 39196820 DOI: 10.1093/mam/ozae078] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/09/2024] [Revised: 07/19/2024] [Accepted: 08/06/2024] [Indexed: 08/30/2024]
Abstract
Magnetic dopants in three-dimensional topological insulators (TIs) offer a promising avenue for realizing the quantum anomalous Hall effect (QAHE) without the necessity for an external magnetic field. Understanding the relationship between site occupancy of magnetic dopant elements and their effect on macroscopic property is crucial for controlling the QAHE. By combining atomic-scale energy-dispersive X-ray spectroscopy (EDS) maps obtained by aberration-corrected scanning transmission electron microscopy (AC-STEM) and novel data processing methodologies, including semi-automatic lattice averaging and frame registration, we have determined the substitutional sites of Mn atoms within the 1.2% Mn-doped Sb2Te3 crystal. More importantly, the methodology developed in this study extends beyond Mn-doped Sb2Te3 to other quantum materials, traditional semiconductors, and even electron irradiation sensitive materials.
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Affiliation(s)
| | - Farhan Islam
- Ames National Laboratory, Ames, IA 50011, USA
- Department of Physics and Astronomy, Iowa State University, Ames, IA 50011, USA
| | - Jiaqiang Yan
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
| | | | - Robert J McQueeney
- Ames National Laboratory, Ames, IA 50011, USA
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
| | - Ping Lu
- Sandia National Laboratories, Albuquerque, NM 87185, USA
| | - Lin Zhou
- Ames National Laboratory, Ames, IA 50011, USA
- Department of Materials Science and Engineering, Iowa State University, IA 50011, USA
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2
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Wan X, Zhang C, Li J, Zhang Z, Wang Q, Wang H, Liu J, Zhong H. Exploring charge transfer and schottky barrier modulation at monolayer Ge 2Sb 2Te 5-metal interfaces. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2024; 36:505501. [PMID: 39241805 DOI: 10.1088/1361-648x/ad7804] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/01/2024] [Accepted: 09/06/2024] [Indexed: 09/09/2024]
Abstract
Monolayer Ge2Sb2Te5exhibits great potential in non-volatile memory technology due to its excellent electronic properties and phase-change characteristics, while the fundamental nature of Ge2Sb2Te5-metal contacts has not been well understood yet. Here, we provide a comprehensiveab initiostudy of the electronic properties between monolayer Ge2Sb2Te5and Pt, Pd, Au, Cu, Cr, Ag, and W contacts based on first-principles calculations. We find that the strong interaction interfaces formed between monolayer Ge2Sb2Te5and Pt, Pd, Cr, and W contacts show chemical bonding and strong charge transfer. In contrast, no apparent chemical bonding and weak charge transfer are observed in the weak interaction interfaces formed with Au, Cu, and Ag. Additionally, our study reveals the presence of a pronounced Fermi level pinning effect between monolayer Ge2Sb2Te5and metals, with pinning factors ofSn=0.325andSp=0.350. By increasing the interlayer distance, an effective transition fromn-type Ohmic contact ton-type Schottky contact is facilitated because the band edge of Ge2Sb2Te5is shifted upwards. Our study not only provides a theoretical basis for selecting suitable metal electrodes in Ge2Sb2Te5-based devices but also holds significant implications for understanding Schottky barrier height modulation between semiconductors and metals.
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Affiliation(s)
- Xiaoying Wan
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
| | - Chengqi Zhang
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
| | - Jiahui Li
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
| | - Zhaofu Zhang
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, People's Republic of China
- Suzhou Institute of Wuhan University, Suzhou, Jiangsu 215123, People's Republic of China
| | - Qingbo Wang
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
| | - Hai Wang
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
| | - Jun Liu
- Xincun Technology (Wuhan) Co., LTD, Wuhan 430075, People's Republic of China
| | - Hongxia Zhong
- School of Mathematics and Physics, China University of Geosciences, Wuhan 430074, People's Republic of China
- Shenzhen Research Institute, China University of Geosciences, Shenzhen 518057, People's Republic of China
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3
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Jiang TT, Wang XD, Wang JJ, Zhang HY, Lu L, Jia C, Wuttig M, Mazzarello R, Zhang W, Ma E. In situ characterization of vacancy ordering in Ge-Sb-Te phase-change memory alloys. FUNDAMENTAL RESEARCH 2024; 4:1235-1242. [PMID: 39431143 PMCID: PMC11489497 DOI: 10.1016/j.fmre.2022.09.010] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/17/2022] [Revised: 06/23/2022] [Accepted: 09/20/2022] [Indexed: 11/28/2022] Open
Abstract
Tailoring the degree of structural disorder in Ge-Sb-Te alloys is important for the development of non-volatile phase-change memory and neuro-inspired computing. Upon crystallization from the amorphous phase, these alloys form a cubic rocksalt-like structure with a high content of intrinsic vacancies. Further thermal annealing results in a gradual structural transition towards a layered structure and an insulator-to-metal transition. In this work, we elucidate the atomic-level details of the structural transition in crystalline GeSb2Te4 by in situ high-resolution transmission electron microscopy experiments and ab initio density functional theory calculations, providing a comprehensive real-time and real-space view of the vacancy ordering process. We also discuss the impact of vacancy ordering on altering the electronic and optical properties of GeSb2Te4, which is relevant to multilevel storage applications. The phase evolution paths in Ge-Sb-Te alloys and Sb2Te3 are illustrated using a summary diagram, which serves as a guide for designing phase-change memory devices.
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Affiliation(s)
- Ting-Ting Jiang
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - Xu-Dong Wang
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - Jiang-Jing Wang
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
- Institute of Physics IA, RWTH Aachen University, Aachen 52074, Germany
| | - Han-Yi Zhang
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - Lu Lu
- The School of Microelectronics, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong, University, Xi'an 710049, China
| | - Chunlin Jia
- The School of Microelectronics, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong, University, Xi'an 710049, China
| | - Matthias Wuttig
- Institute of Physics IA, RWTH Aachen University, Aachen 52074, Germany
- JARA-FIT and JARA-HPC, RWTH Aachen University, Aachen 52056, Germany
- Peter Grünberg Institute (PGI 10), Forschungszentrum Jülich GmbH, Jülich 52425, Germany
| | | | - Wei Zhang
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - En Ma
- Center for Alloy Innovation and Design (CAID), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
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4
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Modi G, Meng AC, Rajagopalan S, Thiruvengadam R, Davies PK, Stach EA, Agarwal R. Controlled Self-Assembly of Nanoscale Superstructures in Phase-Change Ge-Sb-Te Nanowires. NANO LETTERS 2024; 24:5799-5807. [PMID: 38701332 DOI: 10.1021/acs.nanolett.4c00878] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2024]
Abstract
Controlled growth of semiconductor nanowires with atomic precision offers the potential to tune the material properties for integration into scalable functional devices. Despite significant progress in understanding the nanowire growth mechanism, definitive control over atomic positions of its constituents, structure, and morphology via self-assembly remains challenging. Here, we demonstrate an exquisite control over synthesis of cation-ordered nanoscale superstructures in Ge-Sb-Te nanowires with the ability to deterministically vary the nanowire growth direction, crystal facets, and periodicity of cation ordering by tuning the relative precursor flux during synthesis. Furthermore, the role of anisotropy on material properties in cation-ordered nanowire superstructures is illustrated by fabricating phase-change memory (PCM) devices, which show significantly different growth direction dependent amorphization current density. This level of control in synthesizing chemically ordered nanoscale superstructures holds potential to precisely modulate fundamental material properties such as the electronic and thermal transport, which may have implications for PCM, thermoelectrics, and other nanoelectronic devices.
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Affiliation(s)
- Gaurav Modi
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Andrew C Meng
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Srinivasan Rajagopalan
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Rangarajan Thiruvengadam
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Peter K Davies
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Eric A Stach
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Ritesh Agarwal
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
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5
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Song WX, Tang Q, Zhao J, Veron M, Zhou X, Zheng Y, Cai D, Cheng Y, Xin T, Liu ZP, Song Z. Tuning the Crystallization Mechanism by Composition Vacancy in Phase Change Materials. ACS APPLIED MATERIALS & INTERFACES 2024. [PMID: 38498850 DOI: 10.1021/acsami.3c18538] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/20/2024]
Abstract
Interface-influenced crystallization is crucial to understanding the nucleation- and growth-dominated crystallization mechanisms in phase-change materials (PCMs), but little is known. Here, we find that composition vacancy can reduce the interface energy by decreasing the coordinate number (CN) at the interface. Compared to growth-dominated GeTe, nucleation-dominated Ge2Sb2Te5 (GST) exhibits composition vacancies in the (111) interface to saturate or stabilize the Te-terminated plane. Together, the experimental and computational results provide evidence that GST prefers (111) with reduced CN. Furthermore, the (8 - n) bonding rule, rather than CN6, in the nuclei of both GeTe and GST results in lower interface energy, allowing crystallization to be observed at the simulation time in general PCMs. In comparison to GeTe, the reduced CN in the GST nuclei further decreases the interface energy, promoting faster nucleation. Our findings provide an approach to designing ultrafast phase-change memory through vacancy-stabilized interfaces.
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Affiliation(s)
- Wen-Xiong Song
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Qiongyan Tang
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Jin Zhao
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Muriel Veron
- University Grenoble Alpes, CNRS, SIMAP, 38000 Grenoble, France
| | - Xilin Zhou
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Yonghui Zheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Daolin Cai
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Yan Cheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Tianjiao Xin
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Zhi-Pan Liu
- Department of Chemistry, Fudan University, Shanghai 200433, China
| | - Zhitang Song
- National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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6
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Liu C, Tang Q, Zheng Y, Zhao J, Song W, Cheng Y. Effect of vacancy ordering on the grain growth of Ge 2Sb 2Te 5film. NANOTECHNOLOGY 2023; 34:155703. [PMID: 36652702 DOI: 10.1088/1361-6528/acb446] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/20/2022] [Accepted: 01/18/2023] [Indexed: 06/17/2023]
Abstract
Ge2Sb2Te5(GST) is the most widely used matrix material in phase change random access memory (PCRAM). In practical PCRAM device, the formed large hexagonal phase in GST material is not preferred, especially when the size of storage architecture is continually scaling down. In this report, with the aid of spherical-aberration corrected transmission electron microscopy (Cs-TEM), the grain growth behavior during thein situheating process in GST alloy is investigated. Generally, the metastable face-centered-cubic (f-) grain tends to grow up with increasing temperature. However, a part of f-phase nanograins with {111} surface plane does not grow very obviously. Thus, the grain size distribution at high temperature shows a large average grain size as well as a large standard deviation. When the vacancy ordering layers forms at the grain boundary area in the nanograins, which is parallel to {111} surface plane, it could stabilize and refine these f-phase grains. By elaborating the relationship between the grain growth and the vacancy ordering process in GST, this work offers a new perspective for the grain refinement in GST-based PCRAM devices.
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Affiliation(s)
- Cheng Liu
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, People's Republic of China
| | - Qiongyan Tang
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, People's Republic of China
| | - Yonghui Zheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, People's Republic of China
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, People's Republic of China
- Chongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, People's Republic of China
| | - Jin Zhao
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, People's Republic of China
| | - Wenxiong Song
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, People's Republic of China
| | - Yan Cheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, People's Republic of China
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7
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Liu C, Zheng Y, Xin T, Zheng Y, Wang R, Cheng Y. The Relationship between Electron Transport and Microstructure in Ge 2Sb 2Te 5 Alloy. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:582. [PMID: 36770543 PMCID: PMC9919368 DOI: 10.3390/nano13030582] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/15/2022] [Revised: 01/20/2023] [Accepted: 01/26/2023] [Indexed: 06/18/2023]
Abstract
Phase-change random-access memory (PCRAM) holds great promise for next-generation information storage applications. As a mature phase change material, Ge2Sb2Te5 alloy (GST) relies on the distinct electrical properties of different states to achieve information storage, but there are relatively few studies on the relationship between electron transport and microstructure. In this work, we found that the first resistance dropping in GST film is related to the increase of carrier concentration, in which the atomic bonding environment changes substantially during the crystallization process. The second resistance dropping is related to the increase of carrier mobility. Besides, during the cubic to the hexagonal phase transition, the nanograins grow significantly from ~50 nm to ~300 nm, which reduces the carrier scattering effect. Our study lays the foundation for precisely controlling the storage states of GST-based PCRAM devices.
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Affiliation(s)
- Cheng Liu
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Yonghui Zheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
- Chongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, China
| | - Tianjiao Xin
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Yunzhe Zheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Rui Wang
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Yan Cheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
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8
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Li S, Chen L, Gui X, He D, Hu J, Huang Z, Lin S, Tu Y, Dong Y. Molecular Dynamics Simulation for Thiolated Poly(ethylene glycol) at Low‐Temperature Based on the Density Functional Tight‐Binding Method. ADVANCED THEORY AND SIMULATIONS 2022. [DOI: 10.1002/adts.202200281] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- Shi Li
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- School of Chemical and Environmental Engineering Anhui Polytechnic University Wuhu 241000 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
| | - Lei Chen
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
| | - Xuefeng Gui
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
- Guangdong Provincial Key Laboratory of Organic Polymer Materials for Electronics Guangzhou 510650 P. R. China
- CAS Engineering Laboratory for Special Fine Chemicals Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
| | - Daguang He
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
| | - Jiwen Hu
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
- Guangdong Provincial Key Laboratory of Organic Polymer Materials for Electronics Guangzhou 510650 P. R. China
- CAS Engineering Laboratory for Special Fine Chemicals Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
| | - Zhenzhu Huang
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
- Guangdong Provincial Key Laboratory of Organic Polymer Materials for Electronics Guangzhou 510650 P. R. China
- CAS Engineering Laboratory for Special Fine Chemicals Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
| | - Shudong Lin
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
- Guangdong Provincial Key Laboratory of Organic Polymer Materials for Electronics Guangzhou 510650 P. R. China
- CAS Engineering Laboratory for Special Fine Chemicals Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
| | - Yuanyuan Tu
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- University of Chinese Academy of Sciences Beijing 100049 P. R. China
- Guangdong Provincial Key Laboratory of Organic Polymer Materials for Electronics Guangzhou 510650 P. R. China
- CAS Engineering Laboratory for Special Fine Chemicals Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
| | - Yonglu Dong
- Guangzhou Institute of Chemistry Chinese Academy of Sciences Guangzhou 510650 P. R. China
- Incubator of Nanxiong CAS Co. Ltd. Nanxiong 512400 P. R. China
- Management Committee of Shaoguan NanXiong Hi‐Tech Industry Development Zone Nanxiong 512400 P. R. China
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9
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Cheng Y, Zheng Y, Song Z. Reversible switching in bicontinuous structure for phase change random access memory application. NANOSCALE 2021; 13:4678-4684. [PMID: 33620359 DOI: 10.1039/d0nr09139a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
SiSbTe phase change materials (PCMs) have excellent thermal stabilities. Their properties and microstructures are strongly affected by their Si content. Si3.3Sb2Te3 (SST) gives the best electrical performance, at Si contents of around 40%. Here, use of a combination of an advanced three-dimensional (3D) tomography technique and transmission electron microscopy clearly showed that a crystallized SST film has a uniform equiaxed-structure in 3D space, and consists of a reversible Sb2Te3 (ST) phase and an amorphous (a-) Si phase, which are well nested with each other. The a-Si nest localizes structure switching and diffusion of the host element in the nano-area. The most innovative aspect is significant retention of the metastable face-centered cubic (f-) ST phase, even above 370 °C, in this bicontinuous system. Specifically, the a-Si frame is stable and the ST phase switches between a- and f-structures under external stimulation. This promotes faster SET speed and low-power RESET consumption. Our results give new insights into PCM systems. They suggest that bicontinuous structures are potential candidates for use in phase-change random access memory devices, especially in automotive electronics applications that require a high data retention ability.
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Affiliation(s)
- Yan Cheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China. and State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Yonghui Zheng
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China.
| | - Zhitang Song
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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10
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Cheng Y, Cai D, Zheng Y, Yan S, Wu L, Li C, Song W, Xin T, Lv S, Huang R, Lv H, Song Z, Feng S. Microscopic Mechanism of Carbon-Dopant Manipulating Device Performance in CGeSbTe-Based Phase Change Random Access Memory. ACS APPLIED MATERIALS & INTERFACES 2020; 12:23051-23059. [PMID: 32340441 DOI: 10.1021/acsami.0c02507] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Carbon (C)-doped Ge2Sb2Te5 material is a potential candidate in phase change random access memory (PCRAM) because of its superb thermal stability and ultrahigh cycle endurance. Unfortunately, the role and distribution evolution of C-dopant is still not fully understood, especially in practical industrial devices. In this report, with the aid of advanced spherical aberration corrected transmission electron microscopy, the mechanism of microstructure evolution manipulated by C-dopant is clearly defined. The grain-inner C atoms distinctly increase cationic migration energy barriers, which is the fundamental reason for promoting the thermal stability of metastable face-centered-cubic phase and postponing its transition to the hexagonal structure. By current pulses stimulation, the stochastic grain-outer C clusters tend to aggregate in the active area by breaking C-Ge bonding; thus, grain growth and elemental segregation are effectively suppressed to improve device reliability, for example, lower SET resistance, shorter SET time, and enlarged RESET/SET ratio. In short, the visual distribution variations of C-dopant can manipulate the performance of the PCRAM device, having much broader implications for optimizing its microstructure transition and understanding C-doped material system.
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Affiliation(s)
- Yan Cheng
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Daolin Cai
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Yonghui Zheng
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
- Erich Schmid Institute of Materials Science, Austrian Academy of Science, Leoben 8700, Austria
| | - Shuai Yan
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Lei Wu
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Chao Li
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Wenxiong Song
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Tianjiao Xin
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Shilong Lv
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Rong Huang
- Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai 200241, China
| | - Hangbing Lv
- Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
| | - Zhitang Song
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Songlin Feng
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
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11
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Behrens M, Lotnyk A, Bryja H, Gerlach JW, Rauschenbach B. Structural Transitions in Ge 2Sb 2Te 5 Phase Change Memory Thin Films Induced by Nanosecond UV Optical Pulses. MATERIALS (BASEL, SWITZERLAND) 2020; 13:E2082. [PMID: 32369916 PMCID: PMC7254329 DOI: 10.3390/ma13092082] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/01/2020] [Revised: 04/26/2020] [Accepted: 04/28/2020] [Indexed: 11/16/2022]
Abstract
Ge-Sb-Te-based phase change memory alloys have recently attracted a lot of attention due to their promising applications in the fields of photonics, non-volatile data storage, and neuromorphic computing. Of particular interest is the understanding of the structural changes and underlying mechanisms induced by short optical pulses. This work reports on structural changes induced by single nanosecond UV laser pulses in amorphous and epitaxial Ge2Sb2Te5 (GST) thin films. The phase changes within the thin films are studied by a combined approach using X-ray diffraction and transmission electron microscopy. The results reveal different phase transitions such as crystalline-to-amorphous phase changes, interface assisted crystallization of the cubic GST phase and structural transformations within crystalline phases. In particular, it is found that crystalline interfaces serve as crystallization templates for epitaxial formation of metastable cubic GST phase upon phase transitions. By varying the laser fluence, GST thin films consisting of multiple phases and different amorphous to crystalline volume ratios can be achieved in this approach, offering a possibility of multilevel data storage and realization of memory devices with very low resistance drift. In addition, this work demonstrates amorphization and crystallization of GST thin films by using only one UV laser with one single pulse duration and one wavelength. Overall, the presented results offer new perspectives on switching pathways in Ge-Sb-Te-based materials and show the potential of epitaxial Ge-Sb-Te thin films for applications in advanced phase change memory concepts.
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Affiliation(s)
- Mario Behrens
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Andriy Lotnyk
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
- Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China
| | - Hagen Bryja
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Jürgen W. Gerlach
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
| | - Bernd Rauschenbach
- Department of Precision Surfaces, Leibniz Institute of Surface Engineering (IOM), Permoserstr 15, 04318 Leipzig, Germany; (H.B.); (J.W.G.); (B.R.)
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Behrens M, Lotnyk A, Gerlach JW, Ehrhardt M, Lorenz P, Rauschenbach B. Direct Measurement of Crystal Growth Velocity in Epitaxial Phase-Change Material Thin Films. ACS APPLIED MATERIALS & INTERFACES 2019; 11:41544-41550. [PMID: 31612702 DOI: 10.1021/acsami.9b16111] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Central to the use of Ge-Sb-Te based phase-change materials for data storage applications is their crystallization capability since it determines memory writing time. Although being intensively studied to identify intrinsic limits and develop strategies to enhance memory performance, the crystallization process in these materials is still not fully explored. Therefore, this study focuses on the determination of crystal growth dynamics in an epitaxial phase-change material thin film model system offering the advantage of high crystalline quality and application-relevant sizing. By introducing a method that combines time-resolved reflectivity measurements with high-resolution scanning transmission electron microscopy, crystal growth velocities upon fast cooling after single ns-laser pulse irradiation of the prototypical phase-change material Ge2Sb2Te5 are determined. As a result, an increase in crystal growth velocity from 0.4 to 1.7 m/s with increasing laser fluence is observed with a maximum rate of 1.7 m/s as the upper detectable limit of the studied material.
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Affiliation(s)
- Mario Behrens
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
| | - Andriy Lotnyk
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
| | - Jürgen W Gerlach
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
| | - Martin Ehrhardt
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
| | - Pierre Lorenz
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
| | - Bernd Rauschenbach
- Leibniz Institute of Surface Engineering (IOM) , Permoserstr. 15 , D-04318 Leipzig , Germany
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Lotnyk A, Behrens M, Rauschenbach B. Phase change thin films for non-volatile memory applications. NANOSCALE ADVANCES 2019; 1:3836-3857. [PMID: 36132100 PMCID: PMC9419560 DOI: 10.1039/c9na00366e] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/11/2019] [Accepted: 09/17/2019] [Indexed: 06/10/2023]
Abstract
The rapid development of Internet of Things devices requires real time processing of a huge amount of digital data, creating a new demand for computing technology. Phase change memory technology based on chalcogenide phase change materials meets many requirements of the emerging memory applications since it is fast, scalable and non-volatile. In addition, phase change memory offers multilevel data storage and can be applied both in neuro-inspired and all-photonic in-memory computing. Furthermore, phase change alloys represent an outstanding class of functional materials having a tremendous variety of industrially relevant characteristics and exceptional material properties. Many efforts have been devoted to understanding these properties with the particular aim to design universal memory. This paper reviews materials science aspects of chalcogenide-based phase change thin films relevant for non-volatile memory applications. Particular emphasis is put on local structure, control of disorder and its impact on material properties, order-disorder transitions and interfacial transformations.
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Affiliation(s)
- A Lotnyk
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
| | - M Behrens
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
| | - B Rauschenbach
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
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Lotnyk A, Dankwort T, Hilmi I, Kienle L, Rauschenbach B. In situ observations of the reversible vacancy ordering process in van der Waals-bonded Ge-Sb-Te thin films and GeTe-Sb 2Te 3 superlattices. NANOSCALE 2019; 11:10838-10845. [PMID: 31135011 DOI: 10.1039/c9nr02112d] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
Chalcogenide-based thin films are employed in data storage and memory technology whereas van der Waals-bonded layered chalcogenide heterostructures are considered to be a main contender for memory devices with low power consumption. The reduction of switching energy is due to the lowering of entropic losses governed by the restricted motion of atoms in one dimension within the crystalline states. The investigations of switching mechanisms in such superlattices have recently attracted much attention and the proposed models are still under debate. This is partially due to the lack of direct observation of atomic scale processes, which might occur in these chalcogenide systems. This work reports direct, nanoscale observations of the order-disorder processes in van der Waals bonded Ge-Sb-Te thin films and GeTe-Sb2Te3-based superlattices using in situ experiments inside an aberration-corrected transmission electron microscope. The findings reveal a reversible self-assembled reconfiguration of the structural order in these materials. This process is associated with the ordering of randomly distributed vacancies within the studied materials into ordered vacancy layers and with readjustment of the lattice plane distances within the newly formed layered structures, indicating the high flexibility of these layered chalcogenide-based systems. Thus, the ordering process results in the formation of vacancy-bonded building blocks intercalated within van der Waals-bonded units. Moreover, vacancy-bonded building blocks can be reconfigured to the initial structure under the influence of an electron beam, while in situ exposure of the recovered layers to a targeted electron beam leads to the reverse process. Overall, the outcomes provide new insights into local structure and switching mechanism in chalcogenide superlattices.
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Affiliation(s)
- Andriy Lotnyk
- Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318, Leipzig, Germany.
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