Accelerating Gas Adsorption on 3D Percolating Carbon Nanotubes

Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis

Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-CNT integration, a key requirement is the development of necessary post-processing steps on CMOS chips for fabricating CMOS-MEMS polysilicon heaters that can locally generate the required CNT synthesis temperatures (~650-900 °C). In our post-CMOS processing, a subtractive fabrication technique is used for micromachining the polysilicon heaters, where the passivation layers in CMOS are used as masks to protect the electronics. For dielectric etching, it is necessary to achieve high selectivity, uniform etching and a good etch rate to fully expose the polysilicon layers without causing damage. We achieved successful post-CMOS processing by developing two-step reactive ion etching (RIE) of the SiO2 dielectric layer and making design improvements to a second-generation CMOS chip. After the dry etching process, CMOS-MEMS microheaters are partially suspended by SiO2 wet etching with minimum damage to the exposed aluminium layers, to obtain high thermal isolation. The fabricated microheaters are then successfully utilized for synthesizing CNTs by a local thermal CVD process. The CMOS post-processing challenges and design aspects to fabricate CMOS-MEMS polysilicon microheaters for such high-temperature applications are detailed in this article. Our developed process for heterogeneous monolithic integration of CMOS-CNT shows promise for wafer-level manufacturing of CNT-based sensors by incorporating additional steps in an already existing foundry CMOS process.

Pillar[n]arene-Mimicking/Assisted/Participated Carbon Nanotube Materials

The recent progress in pillar[n]arene-assisted/participated carbon nanotube hybrid materials were initially summarized and discussed. The molecular structure of pillar[n]arene could serve different roles in the fabrication of attractive carbon nanotube-based materials. Firstly, pillar[n]arene has the ability to provide the structural basis for enlarging the cylindrical pillar-like architecture by forming one-dimensional, rigid, tubular, oligomeric/polymeric structures with aromatic moieties as the linker, or forming spatially "closed", channel-like, flexible structures by perfunctionalizing with peptides and with intramolecular hydrogen bonding. Interestingly, such pillar[n]arene-based carbon nanotube-resembling structures were used as porous materials for the adsorption and separation of gas and toxic pollutants, as well as for artificial water channels and membranes. In addition to the art of organic synthesis, self-assembly based on pillar[n]arene, such as self-assembled amphiphilic molecules, is also used to promote and control the dispersion behavior of carbon nanotubes in solution. Furthermore, functionalized pillar[n]arene derivatives integrated carbon nanotubes to prepare advanced hybrid materials through supramolecular interactions, which could also incorporate various compositions such as Ag and Au nanoparticles for catalysis and sensing.

Visible-Light-Activated Response Originating from Carrier-Mobility Modulation of NO2 Gas Sensors Based on MoS2 Monolayers

Some gas sensors exhibit significant increases in their sensitivity and response/recovery rates under light illumination. This photoactivation of the gas response is considered a promising alternative to conventional thermal activation, which requires high power consumption. Thin layers of molybdenum disulfide (MoS₂) are known to exhibit an effective photoactivated gas response under visible light. However, the mechanism of the photoactivated response has not yet been studied in detail. In this study, we fabricated field-effect-transistor (FET) gas sensors based on MoS₂ monolayers and investigated their photoactivated gas responses to NO₂ gas under illumination at various irradiances of visible light. A photocurrent was generated mainly due to the photovoltaic effect, which decreased upon exposure to NO₂. The conductance-based sensor response showed a dependence on NO₂ concentration according to the Langmuir adsorption isotherm, thereby suggesting that the response is proportional to the surface coverage of NO₂ molecules on the MoS₂ layer. The response and recovery rates showed a linear increase with increasing irradiance. Analysis based on the Langmuir adsorption model revealed that both photostimulated adsorption and desorption are involved in the photoactivated response. In contrast, despite the strong dependence of the photocurrent on the irradiance, the magnitude of the sensor response was independent of the irradiance. Based on this result and the change in transfer characteristics of the FET during NO₂ exposure, we concluded that the fast response/recovery of the photoactivated response is due to the carrier mobility modulation of MoS₂, which is caused by the dipole scattering of adsorbed NO₂ molecules.

Diatomite-Templated Synthesis of Freestanding 3D Graphdiyne for Energy Storage and Catalysis Application

Graphdiyne (GDY), a new kind of two-dimensional (2D) carbon allotropes, has extraordinary electrical, mechanical, and optical properties, leading to advanced applications in the fields of energy storage, photocatalysis, electrochemical catalysis, and sensors. However, almost all reported methods require metallic copper as a substrate, which severely limits their large-scale application because of the high cost and low specific surface area (SSA) of copper substrate. Here, freestanding three-dimensional GDY (3DGDY) is successfully prepared using naturally abundant and inexpensive diatomite as template. In addition to the intrinsic properties of GDY, the fabricated 3DGDY exhibits a porous structure and high SSA that enable it to be directly used as a lithium-ion battery anode material and a 3D scaffold to create Rh@3DGDY composites, which would hold great potential applications in energy storage and catalysts, respectively.