1
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Sanchez-Cano C, Alvarez-Puebla RA, Abendroth JM, Beck T, Blick R, Cao Y, Caruso F, Chakraborty I, Chapman HN, Chen C, Cohen BE, Conceição ALC, Cormode DP, Cui D, Dawson KA, Falkenberg G, Fan C, Feliu N, Gao M, Gargioni E, Glüer CC, Grüner F, Hassan M, Hu Y, Huang Y, Huber S, Huse N, Kang Y, Khademhosseini A, Keller TF, Körnig C, Kotov NA, Koziej D, Liang XJ, Liu B, Liu S, Liu Y, Liu Z, Liz-Marzán LM, Ma X, Machicote A, Maison W, Mancuso AP, Megahed S, Nickel B, Otto F, Palencia C, Pascarelli S, Pearson A, Peñate-Medina O, Qi B, Rädler J, Richardson JJ, Rosenhahn A, Rothkamm K, Rübhausen M, Sanyal MK, Schaak RE, Schlemmer HP, Schmidt M, Schmutzler O, Schotten T, Schulz F, Sood AK, Spiers KM, Staufer T, Stemer DM, Stierle A, Sun X, Tsakanova G, Weiss PS, Weller H, Westermeier F, Xu M, Yan H, Zeng Y, Zhao Y, Zhao Y, Zhu D, Zhu Y, Parak WJ. X-ray-Based Techniques to Study the Nano-Bio Interface. ACS NANO 2021; 15:3754-3807. [PMID: 33650433 PMCID: PMC7992135 DOI: 10.1021/acsnano.0c09563] [Citation(s) in RCA: 38] [Impact Index Per Article: 12.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/13/2020] [Accepted: 01/25/2021] [Indexed: 05/03/2023]
Abstract
X-ray-based analytics are routinely applied in many fields, including physics, chemistry, materials science, and engineering. The full potential of such techniques in the life sciences and medicine, however, has not yet been fully exploited. We highlight current and upcoming advances in this direction. We describe different X-ray-based methodologies (including those performed at synchrotron light sources and X-ray free-electron lasers) and their potentials for application to investigate the nano-bio interface. The discussion is predominantly guided by asking how such methods could better help to understand and to improve nanoparticle-based drug delivery, though the concepts also apply to nano-bio interactions in general. We discuss current limitations and how they might be overcome, particularly for future use in vivo.
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Affiliation(s)
- Carlos Sanchez-Cano
- Center
for Cooperative Research in Biomaterials (CIC biomaGUNE), Basque Research and Technology Alliance (BRTA), Paseo de Miramon 182, 20014 Donostia San Sebastián, Spain
| | - Ramon A. Alvarez-Puebla
- Universitat
Rovira i Virgili, 43007 Tarragona, Spain
- ICREA, Passeig Lluís
Companys 23, 08010 Barcelona, Spain
| | - John M. Abendroth
- Department
of Materials Science and Engineering, Stanford
University, Stanford, California 94305, United States
| | - Tobias Beck
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Robert Blick
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Yuan Cao
- Department
of Chemical Engineering, University of Michigan, Ann Arbor, Michigan 48109, United States
- Biointerfaces
Institute, University of Michigan, Ann Arbor, Michigan 48109, United States
| | - Frank Caruso
- ARC
Centre of Excellence in Convergent Bio-Nano Science and Technology
and the Department of Chemical Engineering, The University of Melbourne, Parkville, Victoria 3010, Australia
| | - Indranath Chakraborty
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Henry N. Chapman
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Centre
for Ultrafast Imaging, Universität
Hamburg, 22761 Hamburg, Germany
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Chunying Chen
- National
Center for Nanoscience and Technology (NCNST), 100190 Beijing China
| | - Bruce E. Cohen
- The
Molecular Foundry and Division of Molecular Biophysics and Integrated
Bioimaging, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | | | - David P. Cormode
- Radiology
Department, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Daxiang Cui
- School
of Chemistry and Chemical Engineering, Frontiers Science Center for
Transformative Molecules and National Center for Translational Medicine, Shanghai Jiao Tong University, Shanghai 200240, China
| | | | - Gerald Falkenberg
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Chunhai Fan
- School
of Chemistry and Chemical Engineering, Frontiers Science Center for
Transformative Molecules and National Center for Translational Medicine, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Neus Feliu
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- CAN, Fraunhofer Institut, 20146 Hamburg, Germany
| | - Mingyuan Gao
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Elisabetta Gargioni
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Claus-C. Glüer
- Section
Biomedical Imaging, Department of Radiology and Neuroradiology, University Medical Clinic Schleswig-Holstein and Christian-Albrechts-University
Kiel, 24105 Kiel, Germany
| | - Florian Grüner
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Universität
Hamburg and Center for Free-Electron Laser Science, Luruper Chaussee 149, 22761 Hamburg, Germany
| | - Moustapha Hassan
- Karolinska University Hospital, Huddinge, and Karolinska
Institutet, 17177 Stockholm, Sweden
| | - Yong Hu
- College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
| | - Yalan Huang
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Samuel Huber
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Nils Huse
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Yanan Kang
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Ali Khademhosseini
- Terasaki Institute for Biomedical Innovation, Los Angeles, California 90049, United States
| | - Thomas F. Keller
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Christian Körnig
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Universität
Hamburg and Center for Free-Electron Laser Science, Luruper Chaussee 149, 22761 Hamburg, Germany
| | - Nicholas A. Kotov
- Department
of Chemical Engineering, University of Michigan, Ann Arbor, Michigan 48109, United States
- Biointerfaces
Institute, University of Michigan, Ann Arbor, Michigan 48109, United States
- Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109, United States
- Michigan
Institute for Translational Nanotechnology (MITRAN), Ypsilanti, Michigan 48198, United States
| | - Dorota Koziej
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Xing-Jie Liang
- National
Center for Nanoscience and Technology (NCNST), 100190 Beijing China
| | - Beibei Liu
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Sijin Liu
- State Key Laboratory of Environmental Chemistry and Ecotoxicology,
Research Center for Eco-Environmental Sciences, Chinese Academy of Sciences, Beijing 100085 China
| | - Yang Liu
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Ziyao Liu
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Luis M. Liz-Marzán
- Center
for Cooperative Research in Biomaterials (CIC biomaGUNE), Basque Research and Technology Alliance (BRTA), Paseo de Miramon 182, 20014 Donostia San Sebastián, Spain
- Ikerbasque, Basque Foundation for Science, 48013 Bilbao, Spain
- Centro de Investigación Biomédica
en Red de Bioingeniería,
Biomateriales y Nanomedicina (CIBER-BBN), Paseo de Miramon 182, 20014 Donostia-San Sebastián, Spain
| | - Xiaowei Ma
- National
Center for Nanoscience and Technology (NCNST), 100190 Beijing China
| | - Andres Machicote
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Wolfgang Maison
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Adrian P. Mancuso
- European XFEL, 22869 Schenefeld, Germany
- Department of Chemistry and Physics, La
Trobe Institute for Molecular
Science, La Trobe University, Melbourne 3086, Victoria, Australia
| | - Saad Megahed
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Bert Nickel
- Sektion Physik, Ludwig Maximilians Universität
München, 80539 München, Germany
| | - Ferdinand Otto
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Cristina Palencia
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | | | - Arwen Pearson
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Oula Peñate-Medina
- Section
Biomedical Imaging, Department of Radiology and Neuroradiology, University Medical Clinic Schleswig-Holstein and Christian-Albrechts-University
Kiel, 24105 Kiel, Germany
| | - Bing Qi
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Joachim Rädler
- Sektion Physik, Ludwig Maximilians Universität
München, 80539 München, Germany
| | - Joseph J. Richardson
- ARC
Centre of Excellence in Convergent Bio-Nano Science and Technology
and the Department of Chemical Engineering, The University of Melbourne, Parkville, Victoria 3010, Australia
| | - Axel Rosenhahn
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Kai Rothkamm
- Department
of Radiotherapy and Radiation Oncology, University Medical Center Hamburg-Eppendorf, 20246 Hamburg, Germany
| | - Michael Rübhausen
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | | | - Raymond E. Schaak
- Department of Chemistry, Department of Chemical Engineering,
and
Materials Research Institute, The Pennsylvania
State University, University Park, Pensylvania 16802, United States
| | - Heinz-Peter Schlemmer
- Department of Radiology, German Cancer
Research Center (DKFZ), 69120 Heidelberg, Germany
| | - Marius Schmidt
- Department of Physics, University
of Wisconsin-Milwaukee, 3135 N. Maryland Avenue, Milwaukee, Wisconsin 53211, United States
| | - Oliver Schmutzler
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Universität
Hamburg and Center for Free-Electron Laser Science, Luruper Chaussee 149, 22761 Hamburg, Germany
| | | | - Florian Schulz
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - A. K. Sood
- Department of Physics, Indian Institute
of Science, Bangalore 560012, India
| | - Kathryn M. Spiers
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Theresa Staufer
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Universität
Hamburg and Center for Free-Electron Laser Science, Luruper Chaussee 149, 22761 Hamburg, Germany
| | - Dominik M. Stemer
- California NanoSystems Institute, University
of California, Los Angeles, Los Angeles, California 90095, United States
- Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States
| | - Andreas Stierle
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Xing Sun
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- Molecular Science and Biomedicine Laboratory (MBL) State
Key Laboratory of Chemo/Biosensing and Chemometrics College of Chemistry
and Chemical Engineering, Hunan University, Changsha 410082, P.R. China
| | - Gohar Tsakanova
- Institute of Molecular Biology of National
Academy of Sciences of
Republic of Armenia, 7 Hasratyan str., 0014 Yerevan, Armenia
- CANDLE Synchrotron Research Institute, 31 Acharyan str., 0040 Yerevan, Armenia
| | - Paul S. Weiss
- California NanoSystems Institute, University
of California, Los Angeles, Los Angeles, California 90095, United States
- Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States
- Department
of Chemistry and Biochemistry, University
of California, Los Angeles, Los Angeles, California 90095, United States
- Department of Bioengineering, University
of California, Los Angeles, Los Angeles, California 90095, United States
| | - Horst Weller
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- CAN, Fraunhofer Institut, 20146 Hamburg, Germany
| | - Fabian Westermeier
- Deutsches
Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany
| | - Ming Xu
- State Key Laboratory of Environmental Chemistry and Ecotoxicology,
Research Center for Eco-Environmental Sciences, Chinese Academy of Sciences, Beijing 100085 China
| | - Huijie Yan
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Yuan Zeng
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Ying Zhao
- Karolinska University Hospital, Huddinge, and Karolinska
Institutet, 17177 Stockholm, Sweden
| | - Yuliang Zhao
- National
Center for Nanoscience and Technology (NCNST), 100190 Beijing China
| | - Dingcheng Zhu
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
| | - Ying Zhu
- Bioimaging Center, Shanghai Synchrotron Radiation Facility,
Zhangjiang Laboratory, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
- Division of Physical Biology, CAS Key Laboratory
of Interfacial
Physics and Technology, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
| | - Wolfgang J. Parak
- Center
for Cooperative Research in Biomaterials (CIC biomaGUNE), Basque Research and Technology Alliance (BRTA), Paseo de Miramon 182, 20014 Donostia San Sebastián, Spain
- Mathematics,
Informatics, and Natural Sciences (MIN) Faculty, University of Hamburg, 20354 Hamburg, Germany
- School
of Chemistry and Chemical Engineering, Frontiers Science Center for
Transformative Molecules and National Center for Translational Medicine, Shanghai Jiao Tong University, Shanghai 200240, China
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3
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Lo YH, Liao CT, Zhou J, Rana A, Bevis CS, Gui G, Enders B, Cannon KM, Yu YS, Celestre R, Nowrouzi K, Shapiro D, Kapteyn H, Falcone R, Bennett C, Murnane M, Miao J. Multimodal x-ray and electron microscopy of the Allende meteorite. SCIENCE ADVANCES 2019; 5:eaax3009. [PMID: 31555739 PMCID: PMC6754224 DOI: 10.1126/sciadv.aax3009] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/15/2019] [Accepted: 08/23/2019] [Indexed: 06/10/2023]
Abstract
Multimodal microscopy that combines complementary nanoscale imaging techniques is critical for extracting comprehensive chemical, structural, and functional information, particularly for heterogeneous samples. X-ray microscopy can achieve high-resolution imaging of bulk materials with chemical, magnetic, electronic, and bond orientation contrast, while electron microscopy provides atomic-scale spatial resolution with quantitative elemental composition. Here, we combine x-ray ptychography and scanning transmission x-ray spectromicroscopy with three-dimensional energy-dispersive spectroscopy and electron tomography to perform structural and chemical mapping of an Allende meteorite particle with 15-nm spatial resolution. We use textural and quantitative elemental information to infer the mineral composition and discuss potential processes that occurred before or after accretion. We anticipate that correlative x-ray and electron microscopy overcome the limitations of individual imaging modalities and open up a route to future multiscale nondestructive microscopies of complex functional materials and biological systems.
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Affiliation(s)
- Yuan Hung Lo
- Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA
- Department of Bioengineering, University of California, Los Angeles, CA 90095, USA
| | - Chen-Ting Liao
- JILA and Department of Physics, University of Colorado and National Institute of Standards and Technology (NIST), Boulder, CO 80309, USA
| | - Jihan Zhou
- Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA
| | - Arjun Rana
- Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA
| | - Charles S. Bevis
- JILA and Department of Physics, University of Colorado and National Institute of Standards and Technology (NIST), Boulder, CO 80309, USA
| | - Guan Gui
- JILA and Department of Physics, University of Colorado and National Institute of Standards and Technology (NIST), Boulder, CO 80309, USA
| | - Bjoern Enders
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Kevin M. Cannon
- Department of Physics, University of Central Florida, Orlando, FL 32816, USA
| | - Young-Sang Yu
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Richard Celestre
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Kasra Nowrouzi
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - David Shapiro
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Henry Kapteyn
- JILA and Department of Physics, University of Colorado and National Institute of Standards and Technology (NIST), Boulder, CO 80309, USA
| | - Roger Falcone
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Chris Bennett
- Department of Physics, University of Central Florida, Orlando, FL 32816, USA
| | - Margaret Murnane
- JILA and Department of Physics, University of Colorado and National Institute of Standards and Technology (NIST), Boulder, CO 80309, USA
| | - Jianwei Miao
- Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA
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9
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Huang Q, Yi Q, Cao Z, Qi R, Loch RA, Jonnard P, Wu M, Giglia A, Li W, Louis E, Bijkerk F, Zhang Z, Wang Z. High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region. Sci Rep 2017; 7:12929. [PMID: 29018232 PMCID: PMC5635135 DOI: 10.1038/s41598-017-13222-5] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/23/2017] [Accepted: 09/20/2017] [Indexed: 11/13/2022] Open
Abstract
V/Sc multilayer is experimentally demonstrated for the first time as a high reflectance mirror for the soft X-ray water window region. It primarily works at above the Sc-L edge (λ = 3.11 nm) under near normal incidence while a second peak appears at above the V-L edge (λ = 2.42 nm) under grazing incidence. The V/Sc multilayer fabricated with a d-spacing of 1.59 nm and 30 bilayers has a smaller interface width (σ = 0.27 and 0.32 nm) than the conventional used Cr/Sc (σ = 0.28 and 0.47 nm). For V/Sc multilayer with 30 bilayers, the introduction of B4C barrier layers has little improvement on the interface structure. As the number of bilayers increasing to 400, the growth morphology and microstructure of the V/Sc layers evolves with slightly increased crystallization. Nevertheless, the surface roughness remains to be 0.25 nm. A maximum soft X-ray reflectance of 18.4% is measured at λ = 3.129 nm at 9° off-normal incidence using the 400-bilayers V/Sc multilayer. According to the fitted model, an s-polarization reflectance of 5.2% can also be expected at λ = 2.425 nm under 40° incidence. Based on the promising experimental results, further improvement of the reflectance can be achieved by using a more stable deposition system, exploring different interface engineering methods and so on.
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Affiliation(s)
- Qiushi Huang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Qiang Yi
- Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang, 621900, China
| | - Zhaodong Cao
- Shanghai Institute of Laser Plasma, China Academy of Engineering Physics, Shanghai, China
| | - Runze Qi
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Rolf A Loch
- The Max Planck Institute for the Structure and Dynamics of Matter, Center for Free Electron Laser Science, LuruperChaussee 149, Hamburg, 22761, Germany
| | - Philippe Jonnard
- Sorbonne Universités, UPMC Univ Paris 06, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France.,CNRS UMR 7614, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France
| | - Meiyi Wu
- Sorbonne Universités, UPMC Univ Paris 06, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France.,CNRS UMR 7614, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France
| | - Angelo Giglia
- CNR Istituto Officina Materiali, 34149, Trieste, Italy
| | - Wenbin Li
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Eric Louis
- Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands
| | - Fred Bijkerk
- Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands
| | - Zhong Zhang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Zhanshan Wang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China.
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