1
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Dou H, Lin Z, Hu Z, Tsai BK, Zheng D, Song J, Lu J, Zhang X, Jia Q, MacManus-Driscoll JL, Ye PD, Wang H. Self-Assembled Au Nanoelectrodes: Enabling Low-Threshold-Voltage HfO 2-Based Artificial Neurons. NANO LETTERS 2023; 23:9711-9718. [PMID: 37875263 PMCID: PMC10636789 DOI: 10.1021/acs.nanolett.3c02217] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2023] [Revised: 09/20/2023] [Indexed: 10/26/2023]
Abstract
Filamentary-type resistive switching devices, such as conductive bridge random-access memory and valence change memory, have diverse applications in memory and neuromorphic computing. However, the randomness in filament formation poses challenges to device reliability and uniformity. To overcome this issue, various defect engineering methods have been explored, including doping, metal nanoparticle embedding, and extended defect utilization. In this study, we present a simple and effective approach using self-assembled uniform Au nanoelectrodes to controll filament formation in HfO2 resistive switching devices. By concentrating the electric field near the Au nanoelectrodes within the BaTiO3 matrix, we significantly enhanced the device stability and reduced the threshold voltage by up to 45% in HfO2-based artificial neurons compared to the control devices. The threshold voltage reduction is attributed to the uniformly distributed Au nanoelectrodes in the insulating matrix, as confirmed by COMSOL simulation. Our findings highlight the potential of nanostructure design for precise control of filamentary-type resistive switching devices.
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Affiliation(s)
- Hongyi Dou
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Zehao Lin
- Elmore
School of Electrical Engineering, Purdue
University, West Lafayette, Indiana 47907, United States
| | - Zedong Hu
- Elmore
School of Electrical Engineering, Purdue
University, West Lafayette, Indiana 47907, United States
| | - Benson Kunhung Tsai
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Dongqi Zheng
- Elmore
School of Electrical Engineering, Purdue
University, West Lafayette, Indiana 47907, United States
| | - Jiawei Song
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Juanjuan Lu
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Xinghang Zhang
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Quanxi Jia
- Department
of Materials Design and Innovation, School of Engineering and Applied
Sciences, University at Buffalo, The State
University of New York, Buffalo, New York 14260, United States
| | | | - Peide D. Ye
- Elmore
School of Electrical Engineering, Purdue
University, West Lafayette, Indiana 47907, United States
| | - Haiyan Wang
- School
of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Elmore
School of Electrical Engineering, Purdue
University, West Lafayette, Indiana 47907, United States
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2
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Kundale SS, Kamble GU, Patil PP, Patil SL, Rokade KA, Khot AC, Nirmal KA, Kamat RK, Kim KH, An HM, Dongale TD, Kim TG. Review of Electrochemically Synthesized Resistive Switching Devices: Memory Storage, Neuromorphic Computing, and Sensing Applications. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1879. [PMID: 37368309 DOI: 10.3390/nano13121879] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/03/2023] [Revised: 06/09/2023] [Accepted: 06/13/2023] [Indexed: 06/28/2023]
Abstract
Resistive-switching-based memory devices meet most of the requirements for use in next-generation information and communication technology applications, including standalone memory devices, neuromorphic hardware, and embedded sensing devices with on-chip storage, due to their low cost, excellent memory retention, compatibility with 3D integration, in-memory computing capabilities, and ease of fabrication. Electrochemical synthesis is the most widespread technique for the fabrication of state-of-the-art memory devices. The present review article summarizes the electrochemical approaches that have been proposed for the fabrication of switching, memristor, and memristive devices for memory storage, neuromorphic computing, and sensing applications, highlighting their various advantages and performance metrics. We also present the challenges and future research directions for this field in the concluding section.
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Affiliation(s)
- Somnath S Kundale
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
| | - Girish U Kamble
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
| | - Pradnya P Patil
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
| | - Snehal L Patil
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
| | - Kasturi A Rokade
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
| | - Atul C Khot
- School of Electrical Engineering, Korea University, Anam-dong, Seoul 02841, Republic of Korea
| | - Kiran A Nirmal
- School of Electrical Engineering, Korea University, Anam-dong, Seoul 02841, Republic of Korea
| | - Rajanish K Kamat
- Department of Electronics, Shivaji University, Kolhapur 416004, India
- Department of Physics, Dr. Homi Bhabha State University, 15, Madam Cama Road, Mumbai 400032, India
| | - Kyeong Heon Kim
- Department of Convergence Electronic Engineering, Gyeongsang National University, Jinjudae-ro 501, Jinju 52828, Republic of Korea
| | - Ho-Myoung An
- Department of Electronics, Osan University, 45, Cheonghak-ro, Osan-si 18119, Republic of Korea
| | - Tukaram D Dongale
- Computational Electronics and Nanoscience Research Laboratory, School of Nanoscience and Biotechnology, Shivaji University, Kolhapur 416004, India
- School of Electrical Engineering, Korea University, Anam-dong, Seoul 02841, Republic of Korea
| | - Tae Geun Kim
- School of Electrical Engineering, Korea University, Anam-dong, Seoul 02841, Republic of Korea
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3
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Mauro N, Utzeri MA, Varvarà P, Cavallaro G. Functionalization of Metal and Carbon Nanoparticles with Potential in Cancer Theranostics. Molecules 2021; 26:3085. [PMID: 34064173 PMCID: PMC8196792 DOI: 10.3390/molecules26113085] [Citation(s) in RCA: 26] [Impact Index Per Article: 8.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/30/2021] [Revised: 05/17/2021] [Accepted: 05/18/2021] [Indexed: 01/19/2023] Open
Abstract
Cancer theranostics is a new concept of medical approach that attempts to combine in a unique nanoplatform diagnosis, monitoring and therapy so as to provide eradication of a solid tumor in a non-invasive fashion. There are many available solutions to tackle cancer using theranostic agents such as photothermal therapy (PTT) and photodynamic therapy (PDT) under the guidance of imaging techniques (e.g., magnetic resonance-MRI, photoacoustic-PA or computed tomography-CT imaging). Additionally, there are several potential theranostic nanoplatforms able to combine diagnosis and therapy at once, such as gold nanoparticles (GNPs), graphene oxide (GO), superparamagnetic iron oxide nanoparticles (SPIONs) and carbon nanodots (CDs). Currently, surface functionalization of these nanoplatforms is an extremely useful protocol for effectively tuning their structures, interface features and physicochemical properties. This approach is much more reliable and amenable to fine adjustment, reaching both physicochemical and regulatory requirements as a function of the specific field of application. Here, we summarize and compare the most promising metal- and carbon-based theranostic tools reported as potential candidates in precision cancer theranostics. We focused our review on the latest developments in surface functionalization strategies for these nanosystems, or hybrid nanocomposites consisting of their combination, and discuss their main characteristics and potential applications in precision cancer medicine.
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Affiliation(s)
- Nicolò Mauro
- Lab of Biocompatible Polymers, Department of Biological, Chemical and Pharmaceutical Sciences and Technologies (STEBICEF), University of Palermo, via Archirafi 32, 90123 Palermo, Italy; (M.A.U.); (P.V.); (G.C.)
| | - Mara Andrea Utzeri
- Lab of Biocompatible Polymers, Department of Biological, Chemical and Pharmaceutical Sciences and Technologies (STEBICEF), University of Palermo, via Archirafi 32, 90123 Palermo, Italy; (M.A.U.); (P.V.); (G.C.)
| | - Paola Varvarà
- Lab of Biocompatible Polymers, Department of Biological, Chemical and Pharmaceutical Sciences and Technologies (STEBICEF), University of Palermo, via Archirafi 32, 90123 Palermo, Italy; (M.A.U.); (P.V.); (G.C.)
| | - Gennara Cavallaro
- Lab of Biocompatible Polymers, Department of Biological, Chemical and Pharmaceutical Sciences and Technologies (STEBICEF), University of Palermo, via Archirafi 32, 90123 Palermo, Italy; (M.A.U.); (P.V.); (G.C.)
- Advanced Technologies Network Center, University of Palermo, Viale delle Scienze, Ed. 18, 90128 Palermo, Italy
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4
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Li Y, Tang J, Gao B, Sun W, Hua Q, Zhang W, Li X, Zhang W, Qian H, Wu H. High-Uniformity Threshold Switching HfO 2-Based Selectors with Patterned Ag Nanodots. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2020; 7:2002251. [PMID: 33240773 PMCID: PMC7675059 DOI: 10.1002/advs.202002251] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/15/2020] [Revised: 08/06/2020] [Indexed: 06/11/2023]
Abstract
High-performance selector devices are essential for emerging nonvolatile memories to implement high-density memory storage and large-scale neuromorphic computing. Device uniformity is one of the key challenges which limit the practical applications of threshold switching selectors. Here, high-uniformity threshold switching HfO2-based selectors are fabricated by using e-beam lithography to pattern controllable Ag nanodots (NDs) with high order and uniform size in the cross-point region. The selectors exhibit excellent bidirectional threshold switching performance, including low leakage current (<1 pA), high on/off ratio (>108), high endurance (>108 cycles), and fast switching speed (≈75 ns). The patterned Ag NDs in the selector help control the number of Ag atoms diffusing into HfO2 and confine the positions to form reproducible filaments. According to the statistical analysis, the Ag NDs selectors show much smaller cycle-to-cycle and device-to-device variations (C V < 10%) compared to control samples with nonpatterned Ag thin film. Furthermore, when integrating the Ag NDs selector with resistive switching memory in one-selector-one-resistor (1S1R) structure, the reduced selector variation helps significantly reduce the bit error rate in 1S1R crossbar array. The high-uniformity Ag NDs selectors offer great potential in the fabrication of large-scale 1S1R crossbar arrays for future memory and neuromorphic computing applications.
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Affiliation(s)
- Yujia Li
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
- Faculty of Information TechnologyBeijing University of TechnologyBeijing100124China
| | - Jianshi Tang
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
- Beijing National Research Center for Information Science and Technology (BNRist)Tsinghua UniversityBeijing100084China
| | - Bin Gao
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
- Beijing National Research Center for Information Science and Technology (BNRist)Tsinghua UniversityBeijing100084China
| | - Wen Sun
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
| | - Qilin Hua
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
| | - Wenbin Zhang
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
| | - Xinyi Li
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
| | - Wanrong Zhang
- Faculty of Information TechnologyBeijing University of TechnologyBeijing100124China
| | - He Qian
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
- Beijing National Research Center for Information Science and Technology (BNRist)Tsinghua UniversityBeijing100084China
| | - Huaqiang Wu
- Institute of MicroelectronicsBeijing Innovation Center for Future Chips (ICFC)Tsinghua UniversityBeijing100084China
- Beijing National Research Center for Information Science and Technology (BNRist)Tsinghua UniversityBeijing100084China
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5
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Ishibe T, Maeda Y, Terada T, Naruse N, Mera Y, Kobayashi E, Nakamura Y. Resistive switching memory performance in oxide hetero-nanocrystals with well-controlled interfaces. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 2020; 21:195-204. [PMID: 32284769 PMCID: PMC7144302 DOI: 10.1080/14686996.2020.1736948] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/31/2019] [Revised: 02/28/2020] [Accepted: 02/28/2020] [Indexed: 05/28/2023]
Abstract
For realization of new informative systems, the memristor working like synapse has drawn much attention. We developed isolated high-density Fe3O4 nanocrystals on Ge nuclei/Si with uniform and high resistive switching performance using low-temperature growth. The Fe3O4 nanocrystals on Ge nuclei had a well-controlled interface (Fe3O4/GeOx/Ge) composed of high-crystallinity Fe3O4 and high-quality GeOx layers. The nanocrystals showed uniform resistive switching characteristics (high switching probability of ~90%) and relatively high Off/On resistance ratio (~58). The high-quality interface enables electric field application to Fe3O4 and GeOx near the interface, which leads to effective positively charged oxygen vacancy movement, resulting in high-performance resistive switching. Furthermore, we successfully observed memory effect in nanocrystals with well-controlled interface. The experimental confirmation of the memory effect existence even in ultrasmall nanocrystals is significant for realizing non-volatile nanocrystal memory leading to neuromorphic devices.
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Affiliation(s)
- Takafumi Ishibe
- Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
| | - Yoshiki Maeda
- Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
| | - Tsukasa Terada
- Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
| | - Nobuyasu Naruse
- Department of Fundamental Bioscience, Shiga University of Medical Science, Otsu, Shiga, Japan
| | - Yutaka Mera
- Department of Fundamental Bioscience, Shiga University of Medical Science, Otsu, Shiga, Japan
| | | | - Yoshiaki Nakamura
- Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
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6
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Wlaźlak E, Marzec M, Zawal P, Szaciłowski K. Memristor in a Reservoir System-Experimental Evidence for High-Level Computing and Neuromorphic Behavior of PbI 2. ACS APPLIED MATERIALS & INTERFACES 2019; 11:17009-17018. [PMID: 30986023 DOI: 10.1021/acsami.9b01841] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Lead halides in an asymmetric layered structure form memristive devices which are controlled by the electronic structure of the PbX2|metal interface. In this paper, we explain the mechanism that stands behind the I- V pinched hysteresis loop of the device and shortly present its synaptic-like plasticity (spike-timing-dependent plasticity and spike-rate-dependent plasticity) and nonvolatile memory effects. This memristive element was incorporated into a reservoir system, in particular, the echo-state network with delayed feedback, which exhibits brain-like recurrent behavior and demonstrates metaplasticity as one of the available learning mechanisms. It can serve as a classification system that classifies input signals according to their amplitude.
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Affiliation(s)
- E Wlaźlak
- Faculty of Chemistry , Jagiellonian University , ul. Gronostajowa 2 , 30-060 Kraków , Poland
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7
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Bae J, Lee J, Zhou Q, Kim T. Micro-/Nanofluidics for Liquid-Mediated Patterning of Hybrid-Scale Material Structures. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2019; 31:e1804953. [PMID: 30600554 DOI: 10.1002/adma.201804953] [Citation(s) in RCA: 13] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2018] [Revised: 09/17/2018] [Indexed: 06/09/2023]
Abstract
Various materials are fabricated to form specific structures/patterns at the micro-/nanoscale, which exhibit additional functions and performance. Recent liquid-mediated fabrication methods utilizing bottom-up approaches benefit from micro-/nanofluidic technologies that provide a high controllability for manipulating fluids containing various solutes, suspensions, and building blocks at the microscale and/or nanoscale. Here, the state-of-the-art micro-/nanofluidic approaches are discussed, which facilitate the liquid-mediated patterning of various hybrid-scale material structures, thereby showing many additional advantages in cost, labor, resolution, and throughput. Such systems are categorized here according to three representative forms defined by the degree of the free-fluid-fluid interface: free, semiconfined, and fully confined forms. The micro-/nanofluidic methods for each form are discussed, followed by recent examples of their applications. To close, the remaining issues and potential applications are summarized.
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Affiliation(s)
- Juyeol Bae
- Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Ulsan, 44919, Republic of Korea
| | - Jongwan Lee
- Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Ulsan, 44919, Republic of Korea
| | - Qitao Zhou
- Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Ulsan, 44919, Republic of Korea
| | - Taesung Kim
- Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Ulsan, 44919, Republic of Korea
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8
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Sèbe G, Simon A, Dhuiège B, Faure C. Cu2+-loaded cellulose micro-beads applied to the direct patterning of metallic surfaces using a fast and convenient process. Carbohydr Polym 2019; 207:492-501. [DOI: 10.1016/j.carbpol.2018.12.024] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/11/2018] [Revised: 11/18/2018] [Accepted: 12/10/2018] [Indexed: 11/30/2022]
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9
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Zaffora A, Cho DY, Lee KS, Di Quarto F, Waser R, Santamaria M, Valov I. Electrochemical Tantalum Oxide for Resistive Switching Memories. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2017; 29:1703357. [PMID: 28984996 DOI: 10.1002/adma.201703357] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/16/2017] [Revised: 08/18/2017] [Indexed: 06/07/2023]
Abstract
Redox-based resistive switching memories (ReRAMs) are strongest candidates for the next-generation nonvolatile memories fulfilling the criteria for fast, energy efficient, and scalable green IT. These types of devices can also be used for selector elements, alternative logic circuits and computing, and memristive and neuromorphic operations. ReRAMs are composed of metal/solid electrolyte/metal junctions in which the solid electrolyte is typically a metal oxide or multilayer oxides structures. Here, this study offers an effective and cheap electrochemical approach to fabricate Ta/Ta2 O5 -based devices by anodizing. This method allows to grow high-quality and dense oxide thin films onto a metallic substrates with precise control over morphology and thickness. Electrochemical-oxide-based devices demonstrate superior properties, i.e., endurance of at least 106 pulse cycles and/or 103 I-V sweeps maintaining a good memory window with a low dispersion in ROFF and RON values, nanosecond fast switching, and data retention of at least 104 s. Multilevel programing capability is presented with both I-V sweeps and pulse measurements. Thus, it is shown that anodizing has a great prospective as a method for preparation of dense oxide films for resistive switching memories.
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Affiliation(s)
- Andrea Zaffora
- Electrochemical Materials Science Laboratory, DICAM, Palermo University, Palermo, 90128, Italy
| | - Deok-Yong Cho
- IPIT and Department of Physics, Chonbuk National University, Jeonju, 54896, South Korea
| | - Kug-Seung Lee
- Pohang Accelerator Laboratory, Pohang, 37673, South Korea
| | - Francesco Di Quarto
- Electrochemical Materials Science Laboratory, DICAM, Palermo University, Palermo, 90128, Italy
| | - Rainer Waser
- Institut für Werkstoffe der Elektrotechnik 2, RWTH Aachen University, 52074, Aachen, Germany
- Peter Grünberg Institute, Forschungszentrum Jülich, 52425, Jülich, Germany
| | - Monica Santamaria
- Electrochemical Materials Science Laboratory, DICAM, Palermo University, Palermo, 90128, Italy
| | - Ilia Valov
- Institut für Werkstoffe der Elektrotechnik 2, RWTH Aachen University, 52074, Aachen, Germany
- Peter Grünberg Institute, Forschungszentrum Jülich, 52425, Jülich, Germany
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10
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Huang YJ, Lee SC. Graphene/h-BN Heterostructures for Vertical Architecture of RRAM Design. Sci Rep 2017; 7:9679. [PMID: 28851911 PMCID: PMC5575158 DOI: 10.1038/s41598-017-08939-2] [Citation(s) in RCA: 22] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/19/2017] [Accepted: 07/17/2017] [Indexed: 12/02/2022] Open
Abstract
The development of RRAM is one of the mainstreams for next generation non-volatile memories to replace the conventional charge-based flash memory. More importantly, the simpler structure of RRAM makes it feasible to be integrated into a passive crossbar array for high-density memory applications. By stacking up the crossbar arrays, the ultra-high density of 3D horizontal RRAM (3D-HRAM) can be realized. However, 3D-HRAM requires critical lithography and other process for every stacked layer, and this fabrication cost overhead increases linearly with the number of stacks. Here, it is demonstrated that the 2D material-based vertical RRAM structure composed of graphene plane electrode/multilayer h-BN insulating dielectric stacked layers, AlOx/TiOx resistive switching layer and ITO pillar electrode exhibits reliable device performance including forming-free, low power consumption (Pset = ~2 μW and Preset = ~0.2 μW), and large memory window (>300). The scanning transmission electron microscopy indicates that the thickness of multilayer h-BN is around 2 nm. Due to the ultrathin-insulating dielectric and naturally high thermal conductivity characteristics of h-BN, the vertical structure combining the graphene plane electrode with multilayer h-BN insulating dielectric can pave the way toward a new area of ultra high-density memory integration in the future.
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Affiliation(s)
- Yi-Jen Huang
- Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan
| | - Si-Chen Lee
- Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan.
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11
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Akbari M, Kim MK, Kim D, Lee JS. Reproducible and reliable resistive switching behaviors of AlOX/HfOX bilayer structures with Al electrode by atomic layer deposition. RSC Adv 2017. [DOI: 10.1039/c6ra26872b] [Citation(s) in RCA: 43] [Impact Index Per Article: 6.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
The resistive switching behaviors of AlOX/HfOX bilayer structures were investigated.
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Affiliation(s)
- Masoud Akbari
- Department of Materials Science and Engineering
- Pohang University of Science and Technology (POSTECH)
- Pohang 790-784
- Republic of Korea
| | - Min-Kyu Kim
- Department of Materials Science and Engineering
- Pohang University of Science and Technology (POSTECH)
- Pohang 790-784
- Republic of Korea
| | - Dongshin Kim
- Department of Materials Science and Engineering
- Pohang University of Science and Technology (POSTECH)
- Pohang 790-784
- Republic of Korea
| | - Jang-Sik Lee
- Department of Materials Science and Engineering
- Pohang University of Science and Technology (POSTECH)
- Pohang 790-784
- Republic of Korea
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12
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Kim MK, Lee JS. Design of Electrodeposited Bilayer Structures for Reliable Resistive Switching with Self-Compliance. ACS APPLIED MATERIALS & INTERFACES 2016; 8:32918-32924. [PMID: 27934194 DOI: 10.1021/acsami.6b08915] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Programmable memory characteristics of electrodeposited CuOx-based resistive random access memory (ReRAM) can be significantly improved by adopting a bilayer structure with a built-in current limiter. To control the on-current and enhance the device uniformity, the bilayer structure of Pt/CuOx (switching layer)/CuOx (current limiter)/Pt is proposed. This structure is synthesized by controlling solution pH during electrochemical deposition (ECD). The bilayer structure of Pt/CuOx (synthesized at pH 9)/CuOx (synthesized at pH 11.5)/Pt exhibits reliable and uniform self-compliant resistive switching behavior. The origin of resistive switching is attributed to formation and rupture of conductive filaments in the CuOx (pH 9) layer. However, the CuOx (pH 11.5) layer acts as the resistor without resistive switching to control the overall resistance in ReRAM. Reversible "on" and "off" switching occurs with a switching time of 100 ns. Devices based on the bilayer structure showed long data retention and good endurance. This simple use of ECD to improve the memory characteristics of electrodeposited ReRAM offers the opportunity to realize reliable and self-compliant memory devices with low-cost solution processes.
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Affiliation(s)
- Min-Kyu Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH) , Pohang 790-784, Korea
| | - Jang-Sik Lee
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH) , Pohang 790-784, Korea
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13
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Sun X, Wu C, Shuai Y, Pan X, Luo W, You T, Bogusz A, Du N, Li Y, Schmidt H. Plasma-Induced Nonvolatile Resistive Switching with Extremely Low SET Voltage in TiO xF y with AgF Nanoparticles. ACS APPLIED MATERIALS & INTERFACES 2016; 8:32956-32962. [PMID: 27934191 DOI: 10.1021/acsami.6b11049] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Low power consumption is crucial for the application of resistive random access memory. In this work, we present the bipolar resistive switching in an Ag/TiOxFy/Ti/Pt stack with extremely low switch-on voltage of 0.07 V. Operating current as low as 10 nA was also obtained by conductive atomic force microscopy. The highly defective TiOxFy layer was fabricated by plasma treatment using helium, oxygen, and carbon tetrafluoride orderly. During the electroforming process, AgF nanoparticles were formed due to the diffusion of Ag+ which reacted with the adsorbed F- in the TiOxFy layer. These nanoparticles are of great importance to resistive switching performance because they are believed to be conductive phases and become part of the conducting path when the sample is switched to a low-resistance state.
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Affiliation(s)
- Xiangyu Sun
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Chuangui Wu
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Yao Shuai
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Xinqiang Pan
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Wenbo Luo
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Tiangui You
- Material Systems for Nanoelectronics, Technische Universität Chemnitz , Chemnitz 09126, Germany
| | - Agnieszka Bogusz
- Material Systems for Nanoelectronics, Technische Universität Chemnitz , Chemnitz 09126, Germany
| | - Nan Du
- Material Systems for Nanoelectronics, Technische Universität Chemnitz , Chemnitz 09126, Germany
| | - Yanrong Li
- State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China , Chengdu 610054, P.R. China
| | - Heidemarie Schmidt
- Material Systems for Nanoelectronics, Technische Universität Chemnitz , Chemnitz 09126, Germany
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Han UB, Lee JS. Integration scheme of nanoscale resistive switching memory using bottom-up processes at room temperature for high-density memory applications. Sci Rep 2016; 6:28966. [PMID: 27364856 PMCID: PMC4929478 DOI: 10.1038/srep28966] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/15/2016] [Accepted: 06/07/2016] [Indexed: 11/09/2022] Open
Abstract
A facile and versatile scheme is demonstrated to fabricate nanoscale resistive switching memory devices that exhibit reliable bipolar switching behavior. A solution process is used to synthesize the copper oxide layer into 250-nm via-holes that had been patterned in Si wafers. Direct bottom-up filling of copper oxide can facilitate fabrication of nanoscale memory devices without using vacuum deposition and etching processes. In addition, all materials and processes are CMOS compatible, and especially, the devices can be fabricated at room temperature. Nanoscale memory devices synthesized on wafers having 250-nm via-holes showed reproducible resistive switching programmable memory characteristics with reasonable endurance and data retention properties. This integration strategy provides a solution to overcome the scaling limit of current memory device fabrication methods.
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Affiliation(s)
- Un-Bin Han
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, Korea
| | - Jang-Sik Lee
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, Korea
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