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Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. Sci Rep 2020; 10:10392. [PMID: 32587273 PMCID: PMC7316976 DOI: 10.1038/s41598-020-66409-8] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/01/2020] [Accepted: 05/15/2020] [Indexed: 11/17/2022] Open
Abstract
We find that a five-phase (substrate, mixed native oxide and roughness interface layer, metal oxide thin film layer, surface ligand layer, ambient) model with two-dynamic (metal oxide thin film layer thickness and surface ligand layer void fraction) parameters (dynamic dual box model) is sufficient to explain in-situ spectroscopic ellipsometry data measured within and across multiple cycles during plasma-enhanced atomic layer deposition of metal oxide thin films. We demonstrate our dynamic dual box model for analysis of in-situ spectroscopic ellipsometry data in the photon energy range of 0.7–3.4 eV measured with time resolution of few seconds over large numbers of cycles during the growth of titanium oxide (TiO2) and tungsten oxide (WO3) thin films, as examples. We observe cyclic surface roughening with fast kinetics and subsequent roughness reduction with slow kinetics, upon cyclic exposure to precursor materials, leading to oscillations of the metal thin film thickness with small but positive growth per cycle. We explain the cyclic surface roughening by precursor-surface interactions leading to defect creation, and subsequent surface restructuring. Atomic force microscopic images before and after growth, x-ray photoelectron spectroscopy, and x-ray diffraction investigations confirm structural and chemical properties of our thin films. Our proposed dynamic dual box model may be generally applicable to monitor and control metal oxide growth in atomic layer deposition, and we include data for SiO2 and Al2O3 as further examples.
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Bulja S, Kopf R, Tate A, Hu T, Cahill R, Norooziarab M, Kozlov D, Rulikowski P, Templ W. Electro-chromic structure with a high degree of dielectric tunability. Sci Rep 2019; 9:10773. [PMID: 31341233 PMCID: PMC6656740 DOI: 10.1038/s41598-019-47233-1] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/21/2019] [Accepted: 07/11/2019] [Indexed: 11/26/2022] Open
Abstract
In conjunction with their electronically reconfigurable optical properties, inorganic, WO3/LiNbO3/NiO Electro-Chromic materials (EC) have recently been shown to exhibit a degree of electric field induced dielectric tunability at radio frequencies, to the level comparable with more mature bulk-tuneable technologies. However, the full extent of their dielectric tunability remains fully unexplored, due to a fundamental lack of understanding of its intricate tuning mechanisms. The unveiling of their tuning principles is paramount towards a comprehension of not only their optical and radio frequency dielectric tunability, but also for the creation of EC structures with substantial permittivity tuning ratios. Here, we report on an inorganic, WO3 and LiNbO3 – based EC structure with perturbed constituent layers. We developed and synthesised a new EC structure by inserting the chromic layers in the interior of the device and partitioning the electrolyte layer and assigning it to the device’s peripheries. This new arrangement allows for an increase in the dielectric tunability of over three times compared to previously reported standard EC structures in the frequency range from 1–20 GHz.
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Affiliation(s)
- S Bulja
- Bell Labs Ireland, Blanchardstown Industrial Park, Dublin 15, Ireland.
| | - R Kopf
- Bell Labs, 600 Mountain Ave., Murray Hill, NJ, 07974, USA.
| | - A Tate
- Bell Labs, 600 Mountain Ave., Murray Hill, NJ, 07974, USA
| | - T Hu
- Bell Labs, 600 Mountain Ave., Murray Hill, NJ, 07974, USA
| | - R Cahill
- Queen's University Belfast, School of Electronics, Electrical Engineering and Computer Science, BT3 9DT, Belfast, United Kingdom
| | - M Norooziarab
- Trinity College Dublin, School of Physics, 42 Pearse Street, Dublin 2, Ireland
| | - D Kozlov
- Bell Labs Ireland, Blanchardstown Industrial Park, Dublin 15, Ireland
| | - P Rulikowski
- Bell Labs Ireland, Blanchardstown Industrial Park, Dublin 15, Ireland
| | - W Templ
- Bell Labs Germany, Lorenzstrasse, 10, BW, 70435, Stuttgart, Germany
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Annealing-Driven Microstructural Evolution and Its Effects on the Surface and Nanomechanical Properties of Cu-Doped NiO Thin Films. COATINGS 2019. [DOI: 10.3390/coatings9020107] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
The effects of annealing temperature on the structural, surface morphological and nanomechanical properties of Cu-doped (Cu-10 at %) NiO thin films grown on glass substrates by radio-frequency magnetron sputtering are investigated in this study. The X-ray diffraction (XRD) results indicated that the as-deposited Cu-doped NiO (CNO) thin films predominantly consisted of highly defective (200)-oriented grains, as revealed by the broadened diffraction peaks. Progressively increasing the annealing temperature from 300 to 500 °C appeared to drive the films into a more equiaxed polycrystalline structure with enhanced film crystallinity, as manifested by the increased intensities and narrower peak widths of (111), (200) and even (220) diffraction peaks. The changes in the film microstructure appeared to result in significant effects on the surface energy, in particular the wettability of the films as revealed by the X-ray photoelectron spectroscopy and the contact angle of the water droplets on the film surface. The nanoindentation tests further revealed that both the hardness and Young’s modulus of the CNO thin films increased with the annealing temperature, suggesting that the strain state and/or grain boundaries may have played a prominent role in determining the film’s nanomechanical characterizations.
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Devi M, Das B, Barbhuiya MH, Bhuyan B, Dhar SS, Vadivel S. Fabrication of nanostructured NiO/WO3with graphitic carbon nitride for visible light driven photocatalytic hydroxylation of benzene and metronidazole degradation. NEW J CHEM 2019. [DOI: 10.1039/c9nj02904d] [Citation(s) in RCA: 20] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Fabrication of a novel NiO/WO3nanohybrid modified graphitic carbon nitride nanosheets with enhanced photocatalytic activity towards photocatalytic hydroxylation of benzene and degradation of a pharmaceutical waste metronidazole.
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Affiliation(s)
- Meghali Devi
- Department of Chemistry
- National Institute of Technology
- Cachar
- India
| | - Bishal Das
- Department of Chemistry
- National Institute of Technology
- Cachar
- India
| | | | - Bishal Bhuyan
- Department of Chemistry
- National Institute of Technology
- Cachar
- India
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Tuneable dielectric and optical characteristics of tailor-made inorganic electro-chromic materials. Sci Rep 2017; 7:13484. [PMID: 29044187 PMCID: PMC5647452 DOI: 10.1038/s41598-017-13941-9] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/21/2017] [Accepted: 10/03/2017] [Indexed: 11/29/2022] Open
Abstract
Electro-chromic materials (EC) are a new class of electronically reconfigurable thin films that have the ability to reversibly change optical properties by electric charge insertion/extraction. Since their discovery by Deb, they have been employed in applications related to display technology, such as smart windows and mirrors and active optical filters. In this sense, a variety of studies related to the tuneable optical characteristics of EC materials have recently been reported, however, their microwave tuneable dielectric characteristics have been left somewhat unexplored. In 2016 Bulja showed that dc bias voltage induced modulation of the optical characteristics of an inorganic Conductor/WO3/LiNbO3/NiO/Conductor EC cell isaccompanied by the modulation of its high frequency (1–20 GHz) dielectric characteristics. In general, according to the state of the art, cells of different material compositions are needed to produce devices of tailor made characteristics. Here, we report the discovery that the microwave dielectric and the optical characteristics of an EC cell can be engineered to suit a variety of applications without changing their material composition. The obtained results indicate the potential for producing novel, tuneable and tailor-engineered materials that can be used to create next generation agile microwave-optical devices.
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