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Hayashi K, Kawamura S, Hashimoto Y, Akao N, Huang Z, Saito W, Tasaki K, Hayashi K, Matsushita T, Miyazaki Y. Effects of Oxygen on Lattice Defects in Single-Crystalline Mg 2Si Thermoelectrics. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1222. [PMID: 37049315 PMCID: PMC10097258 DOI: 10.3390/nano13071222] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/31/2023] [Revised: 03/20/2023] [Accepted: 03/24/2023] [Indexed: 06/19/2023]
Abstract
Lattice defect engineering has attracted attention due to its ability to develop thermoelectric materials with low thermal conductivity. For Mg2Si single crystals (SCs), Si vacancy (VSi) defects can be introduced and consequently result in the formation of dislocation cores. These lattice defects confer Mg2Si SCs with a lower thermal conductivity compared to Mg2Si polycrystals. To reveal a mechanism for the stabilisation of VSi in the Mg2Si SCs, we investigated the effects of oxygen (O) on lattice defects by performing electronic structure calculations, secondary ion mass spectrometry, X-ray photoelectron spectroscopy, and photoelectron holography. On the basis of these calculations, we predicted that O stabilised the formation of VSi when it was located at the Si site or at an interstitial site. All experiments confirmed the presence of O inside the Mg2Si SCs. However, O was suggested to be located not at the specific site in the crystal lattice of Mg2Si but at dislocation cores. The interaction between O and the dislocation cores in the Mg2Si SC is expected to immobilise dislocation cores, leading to the stabilisation of VSi formation.
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Affiliation(s)
- Kei Hayashi
- Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
| | - Sota Kawamura
- Graduate School of Science and Technology, Nara Institute of Science and Technology, Ikoma 630-0192, Japan
| | - Yusuke Hashimoto
- Graduate School of Science and Technology, Nara Institute of Science and Technology, Ikoma 630-0192, Japan
| | - Noboru Akao
- Department of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
| | - Zhicheng Huang
- Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
| | - Wataru Saito
- Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
| | - Kaichi Tasaki
- Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
| | - Koichi Hayashi
- Department of Physical Science and Engineering, Nagoya Institute of Technology, Nagoya 466-8555, Japan
- Japan Synchrotron Radiation Research Institute (JASRI), Sayo 679-5198, Japan
| | - Tomohiro Matsushita
- Graduate School of Science and Technology, Nara Institute of Science and Technology, Ikoma 630-0192, Japan
| | - Yuzuru Miyazaki
- Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Tsutsui K, Matsushita T, Natori K, Muro T, Morikawa Y, Hoshii T, Kakushima K, Wakabayashi H, Hayashi K, Matsui F, Kinoshita T. Individual Atomic Imaging of Multiple Dopant Sites in As-Doped Si Using Spectro-Photoelectron Holography. NANO LETTERS 2017; 17:7533-7538. [PMID: 29149568 DOI: 10.1021/acs.nanolett.7b03467] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
The atomic scale characterization of dopant atoms in semiconductor devices to establish correlations with the electrical activation of these atoms is essential to the advancement of contemporary semiconductor process technology. Spectro-photoelectron holography combined with first-principles simulations can determine the local three-dimensional atomic structures of dopant elements, which in turn affect their electronic states. In the work reported herein, this technique was used to examine arsenic (As) atoms doped into a silicon (Si) crystal. As 3d core level photoelectron spectroscopy demonstrated the presence of three types of As atoms at a total concentration of approximately 1020 cm-3, denoted as BEH, BEM, and BEL. On the basis of Hall effect measurements, the BEH atoms corresponded to electrically active As occupying substitutional sites and exhibiting larger thermal fluctuations than the Si atoms, while the BEM atoms corresponded to electrically inactive As embedded in the AsnV (n = 2-4) type clusters. Finally, the BEL atoms were assigned to electrically inactive As in locally disordered structures.
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Affiliation(s)
- Kazuo Tsutsui
- Institute of Innovative Research, Tokyo Institute of Technology , 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 227-8503, Japan
| | - Tomohiro Matsushita
- Japan Synchrotron Radiation Research Institute (JASRI) , 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
| | - Kotaro Natori
- School of Engineering, Tokyo Institute of Technology , 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 227-8502, Japan
| | - Takayuki Muro
- Japan Synchrotron Radiation Research Institute (JASRI) , 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
| | - Yoshitada Morikawa
- Department of Precision Science and Technology, Osaka University , 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Takuya Hoshii
- School of Engineering, Tokyo Institute of Technology , 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 227-8502, Japan
| | - Kuniyuki Kakushima
- School of Engineering, Tokyo Institute of Technology , 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 227-8502, Japan
| | - Hitoshi Wakabayashi
- School of Engineering, Tokyo Institute of Technology , 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 227-8502, Japan
| | - Kouichi Hayashi
- Department of Physical Science and Engineering, Nagoya Institute of Technology , Gokiso-cho, Showa-ku, Nagoya, Aichi 466-8555, Japan
| | - Fumihiko Matsui
- Graduate School of Materials Science, Nara Institute of Science and Technology , Takayama-cho, Ikoma, Nara 630-0192, Japan
| | - Toyohiko Kinoshita
- Japan Synchrotron Radiation Research Institute (JASRI) , 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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