2-Step plasma-enhanced CVD for low-temperature fabrication of silica membranes with high gas-separation performance

On the Mixed Gas Behavior of Organosilica Membranes Fabricated by Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Selective, nanometer-thin organosilica layers created by plasma-enhanced chemical vapor deposition (PECVD) exhibit selective gas permeation behavior. Despite their promising pure gas performance, published data with regard to mixed gas behavior are still severely lacking. This study endeavors to close this gap by investigating the pure and mixed gas behavior depending on temperatures from 0 °C to 60 °C for four gases (helium, methane, carbon dioxide, and nitrogen) and water vapor. For the two permanent gases, helium and methane, the studied organosilica membrane shows a substantial increase in selectivity from α_He/CH4 = 9 at 0 °C to α_He/CH4 = 40 at 60 °C for pure as well as mixed gases with helium permeance of up to 300 GPU. In contrast, a condensable gas such as CO₂ leads to a decrease in selectivity and an increase in permeance compared to its pure gas performance. When water vapor is present in the feed gas, the organosilica membrane shows even stronger deviations from pure gas behavior with a permeance loss of about 60 % accompanied by an increase in ideal selectivity α_He/CO2 from 8 to 13. All in all, the studied organosilica membrane shows very promising results for mixed gases. Especially for elevated temperatures, there is a high potential for separation by size exclusion.

Recent Progress in a Membrane-Based Technique for Propylene/Propane Separation

The similar physico-chemical properties of propylene and propane molecules have made the separation process of propylene/propane challenging. Membrane separation techniques show substantial prospects in propylene/propane separation due to their low energy consumption and investment costs, and they have been proposed to replace or to be combined with the conventional cryogenic distillation process. Over the past decade, organosilica membranes have attracted considerable attention due to their significant features, such as their good molecular sieving properties and high hydrothermal stability. In the present review, holistic insight is provided to summarize the recent progress in propylene/propane separation using polymeric, inorganic, and hybrid membranes, and a particular inspection of organosilica membranes is conducted. The importance of the pore subnano-environment of organosilica membranes is highlighted, and future directions and perspectives for propylene/propane separation are also provided.

Ultrafast Synthesis of Silica-Based Molecular Sieve Membranes in Dielectric Barrier Discharge at Low Temperature and Atmospheric Pressure

Microporous silica membranes have shown promise as potential candidates for energy-efficient chemical separation. Herein, we report the ultrafast synthesis of silica membranes, on the order of minutes, in atmospheric-pressure, low-temperature plasma. Direct deposition in the discharge region of atmospheric-pressure plasma enables the immediate formation of a thin silica layer on a porous substrate. The plasma-deposited layer had a thickness of ∼13 nm and was confined to the immediate surface of the substrate. With an increase in deposition temperature, we observed an increase in the inorganic nature of the plasma-deposited layer and simultaneous improvement in the membrane performance. Consequently, the resulting membranes exhibited outstanding permeance for small-sized gas molecules, such as H₂ (>10^-6 mol m^-2 s^-1 Pa^-1), with a high H₂/SF₆ permeance ratio of ∼6300, providing a nonthermal alternative for the fabrication of silica-based membranes.

Organosilica-Based Membranes in Gas and Liquid-Phase Separation

Organosilica membranes are a type of novel materials derived from organoalkoxysilane precursors. These membranes have tunable networks, functional properties and excellent hydrothermal stability that allow them to maintain high levels of separation performance for extend periods of time in either a gas-phase with steam or a liquid-phase under high temperature. These attributes make them outperform pure silica membranes. In this review, types of precursors, preparation method, and synthesis factors for the construction of organosilica membranes are covered. The effects that these factors exert on characteristics and performance of these membranes are also discussed. The incorporation of metals, alkoxysilanes, or other functional materials into organosilica membranes is an effective and simple way to improve their hydrothermal stability and achieve preferable chemical properties. These hybrid organosilica membranes have demonstrated effective performance in gas and liquid-phase separation.

Plasma-enhanced chemical vapor deposition of amorphous carbon molecular sieve membranes for gas separation

Amorphous carbon membranes were successfully synthesized onto a SiO₂–ZrO₂/α-Al₂O₃ nanoporous substrate via plasma-enhanced chemical vapor deposition (PECVD) at room temperature.