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Number Cited by Other Article(s)
1
Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control. Nat Commun 2022;13:7597. [PMID: 36494441 PMCID: PMC9734176 DOI: 10.1038/s41467-022-35428-6] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/16/2022] [Accepted: 12/01/2022] [Indexed: 12/13/2022]  Open
2
Yu P, Beer SMJ, Devi A, Coll M. Fabrication of GdxFeyOz films using an atomic layer deposition-type approach. CrystEngComm 2021. [DOI: 10.1039/d0ce01252a] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
3
Elliott SD, Dey G, Maimaiti Y. Classification of processes for the atomic layer deposition of metals based on mechanistic information from density functional theory calculations. J Chem Phys 2018;146:052822. [PMID: 28178842 DOI: 10.1063/1.4975085] [Citation(s) in RCA: 24] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]  Open
4
Fang G, Xu L, Cao Y, Li A. Theoretical design and computational screening of precursors for atomic layer deposition. Coord Chem Rev 2016. [DOI: 10.1016/j.ccr.2016.05.011] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
5
Elliott SD, Dey G, Maimaiti Y, Ablat H, Filatova EA, Fomengia GN. Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2016;28:5367-80. [PMID: 26689290 DOI: 10.1002/adma.201504043] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/19/2015] [Revised: 10/26/2015] [Indexed: 05/27/2023]
6
Theoretical study on the initial reaction mechanisms of ansa-metallocene zirconium precursor on hydroxylated Si(1 0 0) surface. J Mol Model 2016;22:117. [PMID: 27138945 DOI: 10.1007/s00894-016-2979-z] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/11/2016] [Accepted: 04/06/2016] [Indexed: 10/21/2022]
7
Luo Y, Wu Y, Wang Y, Sun H, Xie Z, Zhang W, Gao Z. Ethanol promoted titanocene Lewis acid catalyzed synthesis of quinazoline derivatives. RSC Adv 2016. [DOI: 10.1039/c6ra14583c] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]  Open
8
Wu Y, Wang X, Luo Y, Wang J, Jian Y, Sun H, Zhang G, Zhang W, Gao Z. Solvent strategy for unleashing the Lewis acidity of titanocene dichloride for rapid Mannich reactions. RSC Adv 2016. [DOI: 10.1039/c5ra27094d] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/08/2023]  Open
9
Seisenbaeva GA, Kessler VG. Precursor directed synthesis--"molecular" mechanisms in the Soft Chemistry approaches and their use for template-free synthesis of metal, metal oxide and metal chalcogenide nanoparticles and nanostructures. NANOSCALE 2014;6:6229-44. [PMID: 24681614 DOI: 10.1039/c3nr06336d] [Citation(s) in RCA: 46] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
10
Potts S, Kessels W. Energy-enhanced atomic layer deposition for more process and precursor versatility. Coord Chem Rev 2013. [DOI: 10.1016/j.ccr.2013.06.015] [Citation(s) in RCA: 50] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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