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Zhang G, Rebohle L, Ganss F, Dawidowski W, Guziewicz E, Koh JH, Helm M, Zhou S, Liu Y, Prucnal S. P-Type ZnO Films Made by Atomic Layer Deposition and Ion Implantation. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1069. [PMID: 38998674 PMCID: PMC11243417 DOI: 10.3390/nano14131069] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/27/2024] [Revised: 06/19/2024] [Accepted: 06/20/2024] [Indexed: 07/14/2024]
Abstract
Zinc oxide (ZnO) is a wide bandgap semiconductor that holds significant potential for various applications. However, most of the native point defects in ZnO like Zn interstitials typically cause an n-type conductivity. Consequently, achieving p-type doping in ZnO is challenging but crucial for comprehensive applications in the field of optoelectronics. In this work, we investigated the electrical and optical properties of ex situ doped p-type ZnO films. The p-type conductivity has been realized by ion implantation of group V elements followed by rapid thermal annealing (RTA) for 60 s or flash lamp annealing (FLA) on the millisecond time scale in nitrogen or oxygen ambience. The phosphorus (P)-doped ZnO films exhibit stable p-type doping with a hole concentration in the range of 1014 to 1018 cm-3, while antimony (Sb) implantation produces only n-type layers independently of the annealing procedure. Microstructural studies of Sb-doped ZnO show the formation of metallic clusters after ms range annealing and SbZn-oxides after RTA.
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Affiliation(s)
- Guoxiu Zhang
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
- Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing 400044, China
| | - Lars Rebohle
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
- Helmholtz-Innovation Laboratory Blitzlab, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstrasse 400, 01328 Dresden, Germany
| | - Fabian Ganss
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
| | - Wojciech Dawidowski
- Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
| | - Elzbieta Guziewicz
- Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland
| | - Jung-Hyuk Koh
- Department of Intelligent Energy and Industry, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Manfred Helm
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
- Institute of Applied Physics, Technische Universität Dresden, 01062 Dresden, Germany
| | - Shengqiang Zhou
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
| | - Yufei Liu
- Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing 400044, China
- Faculty of Science and Engineering, Bay Campus, Swansea University, Swansea SA1 8EN, UK
| | - Slawomir Prucnal
- Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
- Helmholtz-Innovation Laboratory Blitzlab, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstrasse 400, 01328 Dresden, Germany
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2
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Choi G, Sohn S, Park I. Electrostatic Induction Nanogenerator Boosted by One-Dimensional Metastructure: Application to Energy and Information Transmitting Smart Tag System. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2205141. [PMID: 36683241 PMCID: PMC10104663 DOI: 10.1002/advs.202205141] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/07/2022] [Revised: 12/24/2022] [Indexed: 06/17/2023]
Abstract
The recent application of the internet of things demands the ubiquitous utilization of data and electrical power. Even with the development of a wide variety of energy-harvesting technologies, few studies have reported a device transporting electrical energy and data simultaneously. This paper reports an electrostatic induction nanogenerator (ESING) consisting of a one-dimensional metastructure that can modulate the output voltage based on the resonance of ultrasound waves to transmit energy and data simultaneously. The ESING device is fabricated using electronegative poly(vinylidene fluoride) (PVDF) membrane using a phase inversion process. The output voltage from the ESING device exhibits periodic resonant peaks as the gap between the PVDF membrane and the Al electrode changes, showing an up to 35-fold difference between the maximum and minimum output voltages depending on the resonance state. The energy and electrical signal can be transmitted simultaneously in free space because the ESING converts energy from high-frequency ultrasound waves. This paper provides proof of concept for a data and energy-transferable smart tag device based on ESING devices exhibiting resonant and non-resonant states. A device consisting of four ESINGs for a 4-bit signal is implemented to demonstrate 16 signals.
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Affiliation(s)
- Geon‐Ju Choi
- Department of Materials Science and EngineeringSeoul National University of Science and TechnologySeoul01811Republic of Korea
| | - Sang‐Hyun Sohn
- Department of Materials Science and EngineeringSeoul National University of Science and TechnologySeoul01811Republic of Korea
| | - Il‐Kyu Park
- Department of Materials Science and EngineeringSeoul National University of Science and TechnologySeoul01811Republic of Korea
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3
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Jiang H, Liu S, Liang L, Lu W. Oxygen plasma assisted enhanced photoresponse of ZnO nanowires fabricated by catalyst-free chemical vapor deposition. RSC Adv 2018; 8:28928-28933. [PMID: 35547970 PMCID: PMC9084413 DOI: 10.1039/c8ra05040f] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/12/2018] [Accepted: 08/01/2018] [Indexed: 11/21/2022] Open
Abstract
Photocurrent of the ZnO nanowire-based photodetectors was enhanced 8 times by modifying the surface of nanowires with oxygen plasma.
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Affiliation(s)
- Haitao Jiang
- School of Electronics and Information
- Northwestern Polytechnical University
- Xi'an 710129
- PR China
- JiaoZuo Normal College
| | - Shibin Liu
- School of Electronics and Information
- Northwestern Polytechnical University
- Xi'an 710129
- PR China
| | - Liyuan Liang
- Key Laboratory of Multi-Scale Manufacturing Technology
- Chongqing Institute of Green and Intelligent Technology
- Chinese Academy of Sciences
- Chongqing
- China
| | - Wenqiang Lu
- Key Laboratory of Multi-Scale Manufacturing Technology
- Chongqing Institute of Green and Intelligent Technology
- Chinese Academy of Sciences
- Chongqing
- China
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4
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Cao Z, Wang Y, Li Z, Yu N. Hydrothermal Synthesis of ZnO Structures Formed by High-Aspect-Ratio Nanowires for Acetone Detection. NANOSCALE RESEARCH LETTERS 2016; 11:347. [PMID: 27460595 PMCID: PMC4961658 DOI: 10.1186/s11671-016-1563-x] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/22/2016] [Accepted: 07/21/2016] [Indexed: 05/04/2023]
Abstract
Snowflake-like ZnO structures originating from self-assembled nanowires were prepared by a low-temperature aqueous solution method. The as-grown hierarchical ZnO structures were investigated by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The results showed that the snowflake-like ZnO structures were composed of high-aspect-ratio nanowires. Furthermore, gas-sensing properties to various testing gases of 10 and 50 ppm were measured, which confirms that the ZnO structures were of good selectivity and response to acetone and could serve for acetone sensor to detect low-concentration acetone.
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Affiliation(s)
- Zhen Cao
- College of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun, 130022 China
| | - Yong Wang
- National Key Laboratory on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun, 130022 China
| | - Zhanguo Li
- National Key Laboratory on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun, 130022 China
| | - Naisen Yu
- Liaoning Key Laboratory of Optoelectronic Films and Materials, School of Physics and Materials Engineering, Dalian Nationalities University, Dalian, 116600 China
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Chang TC, Hong KB, Lai YY, Chou YH, Wang SC, Lu TC. ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling. NANOSCALE RESEARCH LETTERS 2016; 11:319. [PMID: 27364999 PMCID: PMC4929116 DOI: 10.1186/s11671-016-1526-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/17/2016] [Accepted: 06/24/2016] [Indexed: 06/06/2023]
Abstract
We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.
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Affiliation(s)
- Tsu-Chi Chang
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
| | - Kuo-Bin Hong
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
| | - Ying-Yu Lai
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
| | - Yu-Hsun Chou
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
| | - Shing-Chung Wang
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
| | - Tien-Chang Lu
- Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300 Taiwan
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6
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Sin DY, Park IK, Ahn HJ. Enhanced electrochemical performance of phosphorus incorporated carbon nanofibers by the spin-on dopant method. RSC Adv 2016. [DOI: 10.1039/c6ra06782d] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Phosphorus-incorporated carbon nanofibers (CNFs) were successfully fabricated by using electrospinning and spin-on dopant (SOD) procedures together for electrochemical capacitors (ECs).
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Affiliation(s)
- Dong-Yo Sin
- Department of Materials Science and Engineering
- Seoul National University of Science and Technology
- Seoul 139-743
- South Korea
| | - Il-Kyu Park
- Department of Materials Science and Engineering
- Seoul National University of Science and Technology
- Seoul 139-743
- South Korea
| | - Hyo-Jin Ahn
- Department of Materials Science and Engineering
- Seoul National University of Science and Technology
- Seoul 139-743
- South Korea
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7
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Hong WK, Yoon J, Lee T. Hydrogen plasma-mediated modification of the electrical transport properties of ZnO nanowire field effect transistors. NANOTECHNOLOGY 2015; 26:125202. [PMID: 25736097 DOI: 10.1088/0957-4484/26/12/125202] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We investigated the effects of hydrogen plasma treatment on the electrical transport properties of ZnO nanowire field effect transistors (FETs) with a back gate configuration. After hydrogen plasma treatment of the FET devices, the effective carrier density and mobility of the nanowire FETs increased with a threshold voltage shift toward a negative gate bias direction. This can be attributed to the desorption of oxygen molecules adsorbed on the surface of the nanowire channel, to passivation and to doping effects due to the incorporation of energetic hydrogen ions generated in plasma.
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Affiliation(s)
- Woong-Ki Hong
- Jeonju Center, Korea Basic Science Institute, Jeonju, Jeollabuk-do 561-180, Korea
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Hasan MR, Baek SH, Seong KS, Kim JH, Park IK. Hierarchical ZnO nanorods on Si micropillar arrays for performance enhancement of piezoelectric nanogenerators. ACS APPLIED MATERIALS & INTERFACES 2015; 7:5768-5774. [PMID: 25619331 DOI: 10.1021/am5085379] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Enhanced output power from a ZnO nanorod (NR)-based piezoelectric nanogenerator (PNG) is demonstrated by forming a heterojunction with Si micropillar (MP) array. The length of the SiMP array, which was fabricated by electrochemical etching, was increased systematically from 5 to 20 μm by controlling the etching time. Our structural and optical investigations showed that the ZnO NRs were grown hierarchically on the SiMPs, and their crystalline quality was similar regardless of the length of the underlying SiMPs. The peak output voltage from the ZnO NR-based PNG was greatly increased by ∼5.7 times, from 0.7 to 4.0 V, as the length of the SiMP arrays increased from 0 (flat substrate) to 20 μm. The enhancement mechanism was explained based on the series connection of the ZnO NRs regarded as a single source of piezoelectric potential by creating a heterojunction onto the SiMP arrays.
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Affiliation(s)
- Md Roqibul Hasan
- †Department of Electronic Engineering, Yeungnam University, Gyeongbuk 712-749, South Korea
| | | | - Kwang Su Seong
- †Department of Electronic Engineering, Yeungnam University, Gyeongbuk 712-749, South Korea
| | | | - Il-Kyu Park
- †Department of Electronic Engineering, Yeungnam University, Gyeongbuk 712-749, South Korea
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9
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Jeong Y, Sim M, Shin JH, Choi JW, Sohn JI, Cha SN, Choi H, Moon C, Jang JE. Psychological tactile sensor structure based on piezoelectric nanowire cell arrays. RSC Adv 2015. [DOI: 10.1039/c5ra05744b] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
To produce artificial psychological feeling, especially ‘pain’, an electrical structure that mimics human skin has been studied.
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Affiliation(s)
- Yeri Jeong
- Department of Information & Communication Engineering
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
- Samsung Display
| | - Minkyung Sim
- Department of Information & Communication Engineering
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
| | - Jeong Hee Shin
- Department of Information & Communication Engineering
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
| | - Ji-Woong Choi
- Department of Information & Communication Engineering
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
| | - Jung Inn Sohn
- Department of Electrical Engineering Science
- University of Oxford
- Oxford
- UK
| | - Seung Nam Cha
- Department of Electrical Engineering Science
- University of Oxford
- Oxford
- UK
| | - Hongsoo Choi
- Department of Robotics Engineering
- DGIST-ETH Microrobot Research Center
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
| | - Cheil Moon
- Department of Brain & Cognitive Sciences
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
| | - Jae Eun Jang
- Department of Information & Communication Engineering
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- Korea
- Department of Robotics Engineering
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10
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Baek SH, Nam GH, Park IK. Morphology controlled growth of ZnAl-layered double hydroxide and ZnO nanorod hybrid nanostructures by solution method. RSC Adv 2015. [DOI: 10.1039/c5ra10374f] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Morphological evolution of ZnAl-based hybrid nanostructures from ZnAl layered double hydroxide to ZnO nanorods grown by a hydrothermal method depending on the thickness of the Al2O3/ZnO double seed layer.
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Affiliation(s)
- Seong-Ho Baek
- Energy Research Division
- Daegu Gyeongbuk Institute of Science & Technology (DGIST)
- Daegu 711-873
- South Korea
| | - Gwang-Hee Nam
- Department of Electronic Engineering
- Yeungnam University
- South Korea
| | - Il-Kyu Park
- Department of Electronic Engineering
- Yeungnam University
- South Korea
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Emerging Applications of Liquid Crystals Based on Nanotechnology. MATERIALS 2014; 7:2044-2061. [PMID: 28788555 PMCID: PMC5453269 DOI: 10.3390/ma7032044] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/27/2014] [Revised: 02/25/2014] [Accepted: 02/28/2014] [Indexed: 11/16/2022]
Abstract
Diverse functionalities of liquid crystals (LCs) offer enormous opportunities for their potential use in advanced mobile and smart displays, as well as novel non-display applications. Here, we present snapshots of the research carried out on emerging applications of LCs ranging from electronics to holography and self-powered systems. In addition, we will show our recent results focused on the development of new LC applications, such as programmable transistors, a transparent and active-type two-dimensional optical array and self-powered display systems based on LCs, and will briefly discuss their novel concepts and basic operating principles. Our research will give insights not only into comprehensively understanding technical and scientific applications of LCs, but also developing new discoveries of other LC-based devices.
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