Ultra-high-aspect-orthogonal and tunable three dimensional polymeric nanochannel stack array for BioMEMS applications

Simulation and Analysis of Anodized Aluminum Oxide Membrane Degradation

Microelectromechanical systems (MEMS)-based filter with microchannels enables the removal of various microorganisms, including viruses and bacteria, from fluids. Membranes with porous channels can be used as filtration interfaces in MEMS hemofilters or mini-dialyzers. The main problems associated with the filtration process are optimization of membrane geometry and fouling. A nanoporous aluminum oxide membrane was fabricated using an optimized two-step anodization process. Computational strength modeling and analysis of the membrane with specified parameters were performed using the ANSYS structural module. A fuzzy simulation was performed for the numerical analysis of flux through the membrane. The membrane was then incorporated with the prototype for successive filtration. The fluid flux and permeation analysis of the filtration process have been studied. Scanning electron microscope (SEM) micrographs of membranes have been obtained before and after the filtration cycles. The SEM results indicate membrane fouling after multiple cycles, and thus the flux is affected. This type of fabricated membrane and setup are suitable for the separation and purification of various fluids. However, after several filtration cycles, the membrane was degraded. It requires a prolonged chemical cleaning. High-density water has been used for filtration purposes, so this MEMS-based filter can also be used as a mini-dialyzer and hemofilter in various applications for filtration. Such a demonstration also opens up a new strategy for maximizing filtration efficiency and reducing energy costs for the filtration process by using a layered membrane setup.

Eco friendly nanofluidic platforms using biodegradable nanoporous materials

Splendid advancement of micro/nanofluidic researches in the field of bio- and chemical-analysis enables various ubiquitous applications such as bio-medical diagnostics and environmental monitoring, etc. In such devices, nanostructures are the essential elements so that the nanofabrication methods have been major issues since the last couple of decades. However, most of nanofabrication methods are sophisticated and expensive due to the requirement of high-class cleanroom facilities, while low-cost and biocompatible materials have been already introduced in the microfluidic platforms. Thus, an off-the-shelf and biodegradable material for those nanostructures can complete the concept of an eco-friendly micro/nanofluidic platform. In this work, biodegradable materials originated from well-known organisms such as human nail plate and denatured hen egg (albumen and yolk) were rigorously investigated as a perm-selective nanoporous membrane. A simple micro/nanofluidic device integrated with such materials was fabricated to demonstrate nanofluidic phenomena. These distinctive evidences (the visualization of ion concentration polarization phenomenon, ohmic/limiting/over-limiting current behavior and surface charge-governed conductance) can fulfill the requirements of functional nanostructures for the nanofluidic applications. Therefore, while these materials were less robust than nano-lithographically fabricated structures, bio-oriented perm-selective materials would be utilized as a one of key elements of the biodegradable and eco friendly micro/nanofluidic applications.

Direct Fabrication of Freestanding and Patterned Nanoporous Junctions in a 3D Micro-Nanofluidic Device for Ion-Selective Transport

In the field of micro-nanofluidics, a freestanding configuration of a nanoporous junction is highly demanded to increase the design flexibility of the microscale device and the interfacial area between the nanoporous junction and microchannels, thereby improving the functionality and performance. This work first reports direct fabrication and incorporation of a freestanding nanoporous junction in a microfluidic device by performing an electrolyte-assisted electrospinning process to fabricate a freestanding nanofiber membrane and subsequently impregnating the nanofiber membrane with a nanoporous precursor material followed by a solidification process. This process also enables to readily control the geometry of the nanoporous junction depending on its application. By these advantages, vertically stacked 3D micro-nanofluidic devices with complex configurations are easily achieved. To demonstrate the broad applicability of this process in various research fields, a reverse electrodialysis-based energy harvester and an ion concentration polarization-based preconcentrator are produced. The freestanding Nafion-polyvinylidene fluoride nanofiber membrane (F-NPNM) energy harvester generates a high power (59.87 nW) owing to the enlarged interfacial area. Besides, 3D multiplexed and multi-stacked F-NPNM preconcentrators accumulate multiple preconcentrated plugs that can increase the operating sample volume and the degree of freedom of handling. Hence, the proposed process is expected to contribute to numerous research fields related to micro-nanofluidics in the future.

Elimination of pseudo-negative conductance by coercive steady state in perm-selective ion transportation

Ion concentration polarization (ICP) has drawn unprecedented attention due to its new underlying physics and engineering applications such as biomolecular preconcentrator and electrofluidic desalination. Typically, the current-voltage characteristic of ICP has three distinctive regimes with a positive slope in all regimes, but an unintentional negative slope ("overshoot current") was often observed in the Ohmic/limiting regime. This phenomenon impeded an exact estimation of electrokinetic properties of the ICP platform. Therefore, in this work, we eliminated overshoot current by limiting the length of the diffuse layer using a coercive injection of a fresh electrolyte solution. Both the visualization of ICP layer propagation and the measurement of current-voltage characteristics verifying the time for reaching the steady state within an effective length of a microchannel played a critical role. The most relevant parameter was shown to be the diffusion relaxation time which was directly correlated with the sweep rate of an external voltage. Using this new measurement platform, one can significantly reduce the time and labor for the electrokinetic studies and applications based on them.

An on-demand micro/nano-convertible channel using an elastomeric nanostructure for multi-purpose use

Recently, nanochannels have been widely adopted in microfluidic systems, especially for biosensing and bio-concentrators. Here, we report an on-demand micro/nano-convertible channel, which consists of a simple configuration of elastic nanostructure underneath a single microchannel. By the degree of pressure applied by a pushrod, the microchannel starts to compress into a size-tunable micro- or nano-porous channel. In this approach, under an electric field, we have successfully derived the electrokinetic characteristics of three different regimes: (1) microchannel regime, (2) microporous regime, and (3) nanochannel regime. Utilizing the practical advantage of the transition between regimes with its low cost and easy integration, we demonstrate the pre-concentration and label-free sensing of DNA using a single on-demand convertible channel. Moreover, we demonstrate an ionic diode by applying asymmetric pressure on the elastic nanostructure to create an asymmetric geometry. We believe that the on-demand convertible channel holds potential for promising applications in bioanalytical and iontronic fields.

Non-lithographic nanofluidic channels with precisely controlled circular cross sections

Nanofluidic channels have received growing interest due to their potential for applications in the manipulation of nanometric objects, such as DNA, proteins, viruses, exosomes, and nanoparticles. Although significant advances in nanolithography-based fabrication techniques over the past few decades have allowed us to explore novel nanofluidic transport phenomena and unique applications, the development of new technologies enabling the low-cost preparation of nanochannels with controllable and reproducible shapes and dimensions is still lacking. Thus, we herein report the application of a nanofiber printed using a near-field electrospinning method as a sacrificial mold for the preparation of polydimethylsiloxane nanochannels with circular cross sections. Control of the size and shape of these nanochannels allowed the preparation of nanochannels with channel widths ranging from 70-368 nm and height-to-width ratios of 0.19-1.00. Capillary filling tests confirmed the excellent uniformity and reproducibility of the nanochannels. These results therefore are expected to inspire novel nanofluidic studies due to the simple and low-cost nature of this fabrication process, which allows precise control of the shape and dimensions of the circular cross section.

Nanofluidics: A New Arena for Materials Science

A significant growth of research in nanofluidics is achieved over the past decade, but the field is still facing considerable challenges toward the transition from the current physics-centered stage to the next application-oriented stage. Many of these challenges are associated with materials science, so the field of nanofluidics offers great opportunities for materials scientists to exploit. In addition, the use of unusual effects and ultrasmall confined spaces of well-defined nanofluidic environments would offer new mechanisms and technologies to manipulate nanoscale objects as well as to synthesize novel nanomaterials in the liquid phase. Therefore, nanofluidics will be a new arena for materials science. In the past few years, burgeoning progress has been made toward this trend, as overviewed in this article, including materials and methods for fabricating nanofluidic devices, nanofluidics with functionalized surfaces and functional material components, as well as nanofluidics for manipulating nanoscale materials and fabricating new nanomaterials. Many critical challenges as well as fantastic opportunities in this arena lie ahead. Some of those, which are of particular interest, are also discussed.

Experimental verification of simultaneous desalting and molecular preconcentration by ion concentration polarization

While the ion concentration polarization (ICP) phenomenon has been intensively researched for the last decade, a complete picture of ion and analyte distributions near nanoporous membranes is strongly desired, not only for fundamental nano-electrokinetic studies but also for the development of lab-on-a-chip applications. Since direct concentration measurements, using either time-consuming collection or microelectrodes, are limited due to low throughput (<nL min^-1 in typical micro/nanofluidic device) and Faradaic reactions, respectively, we measured the concentration changes of prefilled solutions in individual reservoirs in this work. As a result, analytes larger than the size of nanopores were completely repelled by the ICP layer, 65% of cations were transported through the nanoporous membrane to sustain the ICP phenomenon, and the remaining anions were consumed by electrode reactions for electro-neutrality requirements. These combined effects would enable the perfect recovery of a target analyte and the removal of unnecessary salts simultaneously. Using this scenario, the novel concept of an ink recycler was also demonstrated in this work. We showed that 40% of unnecessary salt, which causes serious deterioration of inkjet heads, was removed, while the concentration of ink molecules was doubled in a single-step operation. This simultaneous desalting and molecular preconcentration mechanism would be a key operational strategy of various refinery/purification applications for drug discovery and the chemical industry, etc.

A concentration-independent micro/nanofluidic active diode using an asymmetric ion concentration polarization layer

Over the past decade, nanofluidic diodes that rectify ionic currents (i.e. greater current in one direction than in the opposite direction) have drawn significant attention in biomolecular sensing, switching and energy harvesting devices. To obtain current rectification, conventional nanofluidic diodes have utilized complex nanoscale asymmetry such as nanochannel geometry, surface charge density, and reservoir concentration. Avoiding the use of sophisticated nano-asymmetry, micro/nanofluidic diodes using microscale asymmetry have been recently introduced; however, their diodic performance is still impeded by (i) low (even absent) rectification effects at physiological concentrations over 100 mM and strong dependency on the bulk concentration, and (ii) the fact that they possess only passive predefined rectification factors. Here, we demonstrated a new class of micro/nanofluidic diode with an ideal perm-selective nanoporous membrane based on ion concentration polarization (ICP) phenomenon. Thin side-microchannels installed near a nanojunction served as mitigators of the amplified electrokinetic flows generated by ICP and induced convective salt transfer to the nanoporous membrane, leading to actively controlled micro-scale asymmetry. Using this device, current rectifications were successfully demonstrated in a wide range of electrolytic concentrations (10^-5 M to 3 M) as a function of the fluidic resistance of the side-microchannels. Noteworthily, it was confirmed that the rectification factors were independent from the bulk concentration due to the ideal perm-selectivity. Moreover, the rectification of the presenting diode was actively controlled by adjusting the external convective flows, while that of the previous diode was passively determined by invariant nanoscale asymmetry.

Stabilization of ion concentration polarization layer using micro fin structure for high-throughput applications

Ion concentration polarization (ICP) has been extensively researched concerning new fundamentals in nanoscale electrokinetics and novel engineering applications. While biomedical and environmental ICP applications have a number of advantages compared to conventional methods, the technique has suffered from the critical limitation of low processing capacity because it has been usually presented in a micro/nanofluidic platform. In this paper, we devised micro fin structures inside a macroscale high-throughput ICP device and successfully demonstrated a stable formation of ICP layer and its performance. Since the fin structures created surface conductive fluidic circumstances and assisted in physically suppressing undesirable electrokinetic vortices generated in this fluidic regime, ICP was stably generated even in this macroscale system. Finally, batch-type droplet ICP preconcentrator and continuous-type ICP separator were introduced as examples for high-throughput millimeter-scale ICP devices using the implanted fin structures.

Porous microwells for geometry-selective, large-scale microparticle arrays

Large-scale microparticle arrays (LSMAs) are key for material science and bioengineering applications. However, previous approaches suffer from trade-offs between scalability, precision, specificity and versatility. Here, we present a porous microwell-based approach to create large-scale microparticle arrays with complex motifs. Microparticles are guided to and pushed into microwells by fluid flow through small open pores at the bottom of the porous well arrays. A scaling theory allows for the rational design of LSMAs to sort and array particles on the basis of their size, shape, or modulus. Sequential particle assembly allows for proximal and nested particle arrangements, as well as particle recollection and pattern transfer. We demonstrate the capabilities of the approach by means of three applications: high-throughput single-cell arrays; microenvironment fabrication for neutrophil chemotaxis; and complex, covert tags by the transfer of an upconversion nanocrystal-laden LSMA.

Unconventional micro-/nanofabrication technologies for hybrid-scale lab-on-a-chip

Micro-/nanofabrication-based lab-on-a-chip (LOC) technologies have recently been substantially advanced and have become widely used in various inter-/multidisciplinary research fields, including biological, (bio-)chemical, and biomedical fields. However, such hybrid-scale LOC devices are typically fabricated using microfabrication and nanofabrication processes in series, resulting in increased cost and time and low throughput issues. In this review, after briefly introducing the conventional micro-/nanofabrication technologies, we focus on unconventional micro-/nanofabrication technologies that allow us to produce either in situ micro-/nanoscale structures or master molds for additional replication processes to easily and conveniently create novel LOC devices with micro- or nanofluidic channel networks. In particular, microfabrication methods based on crack-assisted photolithography and carbon-microelectromechanical systems (C-MEMS) are described in detail because of their superior features from the viewpoint of the throughput, batch fabrication process, and mixed-scale channels/structures. In parallel with previously reported articles on conventional micro-/nanofabrication technologies, our review of unconventional micro-/nanofabrication technologies will provide a useful and practical fabrication guideline for future hybrid-scale LOC devices.

Development of an Integrated Evaluation System for a Stretchable Strain Sensor

Recently, much research has been focused on stretchable or flexible electronic sensors for the measurement of strain or deformation on movable and variably shaped objects. In this research, to evaluate the performance of stretchable strain sensors, we have designed an integrated evaluation system capable of simultaneously measuring the change in stress and conductance of a strain sensor. Using the designed system, we have successfully evaluated the deformation characteristics, sensing range and sensing sensitivity of a stretchable strain sensor. We believe that the developed integrated evaluation system could be a useful tool for performance evaluation of stretchable strain sensors.

Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template

The fabrication of nanostructures having diameters of sub-5 nm is very a important issue for bottom-up nanofabrication of nanoscale devices. In this work, we report a highly controllable method to create sub-5 nm nano-trenches and nanowires by combining area-selective atomic layer deposition (ALD) with single-walled carbon nanotubes (SWNTs) as templates. Alumina nano-trenches having a depth of 2.6 ∼ 3.0 nm and SiO2 nano-trenches having a depth of 1.9 ∼ 2.2 nm fully guided by the SWNTs have been formed on SiO2/Si substrate. Through infilling ZnO material by ALD in alumina nano-trenches, well-defined ZnO nanowires having a thickness of 3.1 ∼ 3.3 nm have been fabricated. In order to improve the electrical properties of ZnO nanowires, as-fabricated ZnO nanowires by ALD were annealed at 350 °C in air for 60 min. As a result, we successfully demonstrated that as-synthesized ZnO nanowire using a specific template can be made for various high-density resistive components in the nanoelectronics industry.

Pseudo 1-D Micro/Nanofluidic Device for Exact Electrokinetic Responses

Conventionally, a 1-D micro/nanofluidic device, whose nanochannel bridged two microchannels, was widely chosen in the fundamental electrokinetic studies; however, the configuration had intrinsic limitations of the time-consuming and labor intensive tasks of filling and flushing the microchannel due to the high fluidic resistance of the nanochannel bridge. In this work, a pseudo 1-D micro/nanofluidic device incorporating air valves at each microchannel was proposed for mitigating these limitations. High Laplace pressure formed at liquid/air interface inside the microchannels played as a virtual valve only when the electrokinetic operations were conducted. The identical electrokinetic behaviors of the propagation of ion concentration polarization layer and current-voltage responses were obtained in comparison with the conventional 1-D micro/nanofluidic device by both experiments and numerical simulations. Therefore, the suggested pseudo 1-D micro/nanofluidic device owned not only experimental conveniences but also exact electrokinetic responses.

Mixed-scale channel networks including Kingfisher-beak-shaped 3D microfunnels for efficient single particle entrapment

Reproducible research results for nanofluidics and their applications require viable fabrication technologies to produce nanochannels integrated with microchannels that can guide fluid flow and analytes into/out of the nanochannels. We present the simple fabrication of mixed-scale polydimethylsiloxane (PDMS) channel networks consisting of nanochannels and microchannels via a single molding process using a monolithic mixed-scale carbon mold. The monolithic carbon mold is fabricated by pyrolyzing a polymer mold patterned by photolithography. During pyrolysis, the polymer mold shrinks by ∼90%, which enables nanosized carbon molds to be produced without a complex nanofabrication process. Because of the good adhesion between the polymer mold and the Si substrate, non-uniform volume reduction occurs during pyrolysis resulting in the formation of curved carbon mold side walls. These curved side walls and the relatively low surface energy of the mold provide efficient demolding of the PDMS channel networks. In addition, the trigonal prismatic shape of the polymer is converted into to a Kingfisher-beak-shaped carbon structure due to the non-uniform volume reduction. The transformation of this mold architecture produces a PDMS Kingfisher-beak-shaped 3D microfunnel that connects the microchannel and the nanochannel smoothly. The smooth reduction in the cross-sectional area of the 3D microfunnels enables efficient single microparticle trapping at the nanochannel entrance; this is beneficial for studies of cell transfection.

Capillarity ion concentration polarization as spontaneous desalting mechanism

To overcome a world-wide water shortage problem, numerous desalination methods have been developed with state-of-the-art power efficiency. Here we propose a spontaneous desalting mechanism referred to as the capillarity ion concentration polarization. An ion-depletion zone is spontaneously formed near a nanoporous material by the permselective ion transportation driven by the capillarity of the material, in contrast to electrokinetic ion concentration polarization which achieves the same ion-depletion zone by an external d.c. bias. This capillarity ion concentration polarization device is shown to be capable of desalting an ambient electrolyte more than 90% without any external electrical power sources. Theoretical analysis for both static and transient conditions are conducted to characterize this phenomenon. These results indicate that the capillarity ion concentration polarization system can offer unique and economical approaches for a power-free water purification system.

A novel nanochannel fabrication for nanofluidic applications using synchrotron radiation via a micro patterned X-ray mask

Extremely long nano-sized channels were fabricated based on a novel X-ray mask fabrication method. Using the fabricated nanochannels, the generation of ion concentration polarization, a novel transport phenomenon in nanofluidics, was investigated.

Recent advancements in ion concentration polarization

Advancements in ion concentration polarization made over the past three years are highlighted.

Rapid, High-Resolution 3D Interference Printing of Multilevel Ultralong Nanochannel Arrays for High-Throughput Nanofluidic Transport

3D interference printing enables the single-step production of multilayered ultralong nanochannel arrays with nanoscale regularity. The superior depth-of-focus of this technique realizes a state-of-the-art nanostructure which has intensively stacked 32 layers of inch-long, horizonontal nanochannels with sub-100 nm holes in a monolithic matrix (≈15 μm). This exceptional structure can be integrated into microfluidic devices, facilitating high-flux rheological platforms using nanocapillarity.

A tunable submicro-optofluidic polymer filter based on guided-mode resonance

Optical filters with reconfigurable spectral properties are highly desirable in a wide range of applications. We propose and experimentally demonstrate a tunable submicro-optofluidic polymer guided-mode resonance (PGMR) filter. The device is composed of a periodic grating sandwiched between a high index waveguide layer and a low index capping layer, which integrates submicro-fluidic channel arrays and a PGMR filter elegantly. A finite difference time domain (FDTD) method is employed to understand the spectral properties and determine appropriate device parameters. We fabricated the polymer guided-mode resonance filter with a method combining two-beam interference lithography, floating nanofilm transfer and thermal bonding techniques. Experimental results show that our tunable submicro-optofluidic PGMR filters can provide a broad spectral tuning range (13.181 nm), a narrow bandwidth (<2.504 nm), and a high reflection efficiency (>85%) in the visible region. Such submicro-optofluidic PGMR filters are highly compatible with existing nano/microfluidic technologies and would be valuable for the integrated flexible optical system.

Sub-10 nm transparent all-around-gated ambipolar ionic field effect transistor

In this paper, we developed a versatile ionic field effect transistor (IFET) which has an ambipolar function for manipulating molecules regardless of their polarity and can be operated at a wide range of electrolytic concentrations (10(-5) M-1 M). The IFET has circular nanochannels radially covered by gate electrodes, called "all-around-gate", with an aluminum oxide (Al2O3) oxide layer of a near-zero surface charge. Experimental and numerical validations were conducted for characterizing the IFET. We found that the versatility originated from the zero-charge density of the oxide layer and all-around-gate structure which increased the efficiency of the gate effect 5 times higher than a previously developed planar-gate by capacitance calculations. Our numerical model adapted Poisson-Nernst-Planck-Stokes (PNPS) formulations with additional nonlinear constraints of a fringing field effect and a counter-ion condensation and the experimental and numerical results were well matched. The device can control the transportation of ions at concentrations up to 1 M electrolyte which resembles a backflow of a shale gas extraction process. Furthermore, while traditional IFETs can manipulate either positively or negatively charged species depending on the inherently large surface charge of oxide layer, the presenting device and mechanism provide effective means to control the motion of both negatively and positively charged molecules which is important in biomolecule transport through nanochannels, medical diagnosis system and point-of-care system, etc.