Fabrication of three-dimensional hierarchical nanostructures using template-directed colloidal assembly

Templated Assembly of Nanoparticles into Continuous Arrays

The templated assembly of nanoparticles has been limited so far to yield only discontinuous nanoparticle clusters confined within lithographically patterned cavities. Here, we explored the templated assembly of nanoparticles into continuous 2D structures, using lithographically patterned templates with topographical features sized as the assembled nanoparticles. We found that these features act as nucleation centers, whose exact arrangement determines four possible assembly regimes (i) rotated, (ii) disordered, (iii) closely packed, and (iv) unpacked. These regimes produce structures strikingly different from their geometry, orientation, long-range and short-range orders, and packing density. Interestingly, for templates with relatively distant nucleation centers, these four regimes are replaced with three new ones, which produce large monocrystalline domains that are either (i) uniformly rotated, (ii) uniformly aligned, or (iii) nonuniformly rotated relative to the nucleation lattice. We rationalized our experimental data using a mathematical model, which examines all the alignment possibilities between the nucleation centers and the ideal hexagonal assembly. Our finding provides a new approach for the à la carte obtainment of various nanoscale structures unachievable by natural self-assembly and opens a route for the fabrication of numerous functional nanodevices and nanosystems that could not be realized so far by the standard bottom-up approach.

Continuous roll-to-roll patterning of three-dimensional periodic nanostructures

In this work, we introduce a roll-to-roll system that can continuously print three-dimensional (3D) periodic nanostructures over large areas. This approach is based on Langmuir-Blodgett assembly of colloidal nanospheres, which diffract normal incident light to create a complex intensity pattern for near-field nanolithography. The geometry of the 3D nanostructure is defined by the Talbot effect and can be precisely designed by tuning the ratio of the nanosphere diameter to the exposure wavelength. Using this system, we have demonstrated patterning of 3D photonic crystals with a 500 nm period on a 50 × 200 mm² flexible substrate, with a system throughput of 3 mm/s. The patterning yield is quantitatively analyzed by an automated electron beam inspection method, demonstrating long-term repeatability of an up to 88% yield over a 4-month period. The inspection method can also be employed to examine pattern uniformity, achieving an average yield of up to 78.6% over full substrate areas. The proposed patterning method is highly versatile and scalable as a nanomanufacturing platform and can find application in nanophotonics, nanoarchitected materials, and multifunctional nanostructures.

Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures

The advance of nanotechnology is firmly rooted in the development of cost-effective, versatile, and easily accessible nanofabrication techniques. The ability to pattern complex two-dimensional and three-dimensional nanostructured materials are particularly desirable, since they can have novel physical properties that are not found in bulk materials. This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography. In these techniques, the near-field interactions of light and colloids are the sole mechanisms employed to generate the intensity distributions for patterning. Based on both 'bottom-up' self-assembly and 'top-down' lithography approaches, these processes are highly versatile and can take advantage of a number of optical effects, allowing the complex 3D nanostructures to be patterned using single exposures. There are several key advantages including low equipment cost, facile structure design, and patterning scalability, which will be discussed in detail. We will outline the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials.

Nanoscratching technique for highly oriented liquid crystal materials

A simple, fast, and cost-effective technique to obtain highly oriented thermotropic and lyotropic liquid crystal (LC) phases using a simple nanoscratching method is presented. Highly aligned linear nanogrooves are fabricated by scratching substrates such as normal, indium tin oxide (ITO), curved glasses, and ITO-coated polyethylene terephthalate (PET) film using diamond lapping films. To demonstrate the feasibility of the platform, typical thermotropic and lyotropic LC materials in the nematic phase are used to demonstrate the well-aligned domains along with the resulting scratched nanogrooves. The polarised optical microscopy (POM) images show excellent dark and bright states depending on the sample rotation, proving that the LC molecules are well aligned. The electro-optical performance of the twisted nematic (TN) mode LC display fabricated using the nanogrooves is also measured and indicates reliable results compared with that of the conventional device. Indeed, scratch-induced nanogrooves are well generated on the curved substrate and ITO-coated PET film to show versatility of our technique. Our platform can suggest a new nanofabrication way to make various electro-optical devices as well as other patterning applications.

Shape-Selective Assembly of Anisotropic, Deformable Microcomponents Using Bottom-Up Micromanufacturing

A technique for shape-selective directed assembly of anisotropic, deformable, chemically-identical microcomponents onto patterned rigid templates based on shape and size differences is modeled and demonstrated. The assembly method not only controls the selective placement of the components, but also aligns the components with the assembly sites. Unlike the assembly of isotropic (spherical) microcomponents, in which only size differences can be used to discriminate among chemically-identical components to achieve selective placement, differences in both shape and size can enable selectivity in the assembly of anisotropic (non-spherical) microcomponents. The present selective directed assembly is driven by shape-matching to a microfabricated template to provide selectivity, uniform chemical surface functionalization to promote assembly, and megasonic excitation to prevent assembly into poorly shape-matched binding sites. A theoretical framework quantifies the predicted selectivity of this approach and predicts that it will be effective for many material combinations, including hydrogels and bio-compatible polymers. Experiments demonstrate successful directed assembly of cylindrical, hydrogel colloidal microcomponents with 26 μm mean diameter and 50 μm length into silicon templates patterned with hemicylindrical assembly sites. During the assembly, tapered microcomponents with 150 μm length and a nominal diameter of 26 μm that decreases along the components' lengths were successfully excluded from hemicylindrical assembly sites. These results provide the first demonstration of selective directed assembly of non-spherical microcomponents by this approach. The assembly shows high local yields in agreement with theory.

Designing unit cell in three-dimensional periodic nanostructures using colloidal lithography

Colloidal phase-shift lithography, the illumination of a two-dimensional (2D) ordered array of self-assembled colloidal nanospheres, is an effective method for the fabrication of periodic three-dimensional (3D) nanostructures. In this work, we investigate the design and control of the unit-cell geometry by examining the relative ratio of the illumination wavelength and colloidal nanosphere diameter. Using analytical and finite-difference time-domain (FDTD) modeling, we examine the effect of the wavelength-diameter ratio on intensity pattern, lattice constants, and unit-cell geometry. These models were validated by experimental fabrication for various combination of wavelength and colloid diameter. The developed models and fabrication tools can facilitate the design and engineering of 3D periodic nanostructure for photonic crystals, volumetric electrodes, and porous materials.

Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography

A multi-level nanophotonic structure is a major goal in providing advanced optical functionalities as found in photonic crystals and metamaterials. A three-level nano-grating phase mask has been fabricated in an electron-beam resist (ma-N) to meet the requirement of holographic generation of a diamond-like 3D nanostructure in photoresist by a single exposure step. A 2D mask with 600 nm periodicity is presented for generating first order diffracted beams with a preferred π/2 phase shift on the X- and Y-axes and with sufficient 1(st) order diffraction efficiency of 3.5% at 800 nm wavelength for creating a 3D periodic nanostructure in SU-8 photoresist. The resulting 3D structure is anticipated to provide an 8% complete photonic band gap (PBG) upon silicon inversion. A thin SiO2 layer was used to isolate the grating layers and multiple spin-coating steps served to planarize the final resist layer. A reversible soft coating (aquaSAVE) was introduced to enable SEM inspection and verification of each insulating grating layer. This e-beam lithographic method is extensible to assembling multiple layers of a nanophotonic structure.