Wet Etching of Silicon in Planar Nanochannels

Silicon (Si) alkaline etching constitutes a fundamental process in the semiconductor industry. Although its etching kinetics on plain substrates have been thoroughly investigated, the kinetics of Si wet etching in nanoconfinements have yet to be fully explored despite its practical importance in three-dimensional (3-D) semiconductor manufacturing. Herein, we report the systematic study of potassium hydroxide (KOH) wet etching kinetics of amorphous silicon (a-Si)-filled two-dimensional (2-D) planar nanochannels. Our findings reveal that the etching rate would increase with the increase in nanochannel height before reaching a plateau, indicating a strong nonlinear confinement effect. Through investigation using etching solutions with different ionic strengths and/or different temperatures, we further find that both electrostatic interactions and the hydration layer inside the nanoconfinement contribute to the confinement-dependent etching kinetics. Our results offer fresh perspectives into the kinetic study of reactions in nanoconfinements and will shed light on the optimization of etching processes in the semiconductor industry.

Breakdown of Langmuir Adsorption Isotherm in Small Closed Systems

For more than a century, monolayer adsorptions in which adsorbate molecules and adsorbing sites behave ideally have been successfully described by Langmuir's adsorption isotherm. For example, the amount of adsorbed material, as a function of concentration of the material which is not adsorbed, obeys Langmuir's equation. In this paper, we argue that this relation is valid only for macroscopic systems. However, when particle numbers of adsorbate molecules and/or adsorbing sites are small, Langmuir's model fails to describe the chemical equilibrium of the system. This is because the kinetics of forming, or the probability of observing, occupied sites arises from two-body interactions, and as such, ought to include cross-correlations between particle numbers of the adsorbate and adsorbing sites. The effect of these correlations, as reflected by deviations in predicting composition when correlations are ignored, increases with decreasing particle numbers and becomes substantial when only few adsorbate molecules, or adsorbing sites, are present in the system. In addition, any change that augments the fraction of occupied sites at equilibrium (e.g., smaller volume, lower temperature, or stronger adsorption energy) further increases the discrepancy between observed properties of small systems and those predicted by Langmuir's theory. In contrast, for large systems, these cross-correlations become negligible, and therefore when expressing properties involving two-body processes, it is possible to consider independently the concentration of each component. By applying statistical mechanics concepts, we derive a general expression of the equilibrium constant for adsorption. It is also demonstrated that in ensembles in which total numbers of particles are fixed, the magnitudes of fluctuations in particle numbers alone can predict the average chemical composition of the system. Moreover, an alternative adsorption equation, predicting the average fraction of occupied sites from the value of the equilibrium constant, is proposed. All derived relations were tested against results obtained by Monte Carlo simulations.

Green AOT reverse micelles as nanoreactors for alkaline phosphatase. The hydrogen bond "dances" between water and the enzyme, the reaction product, and the reverse micelles interface

In this work, we present an investigation of the influence of water encapsulated in 1,4-bis-2-ethylhexylsulfosuccinate/methyl laurate and 1,4-bis-2-ethylhexylsulfosuccinate/isopropyl myristate reverse micelles on the enzymatic hydrolysis of 1-naphthyl phosphate by alkaline phosphatase. Our results show that the enzyme is active in the biocompatible reverse micelles studied and that the Michaelis-Menten kinetic model is valid in all systems. We found that both micellar systems studied have a particular behavior toward pH and that the penetration of external solvents into the interfaces is crucial to understanding the effect. Methyl laurate does not disrupt the interface and is not necessary to control the pH value since alkaline phosphatase in the center of the micelles is always solvated similarly. In contrast, isopropyl myristate disrupts the interfaces so that the water and 1-naphthol molecules cannot form hydrogen bond interactions with the polar head of the surfactant. Then, when the water is at pH = 7, the 1-naphthol moves away to the interfaces inhibiting alkaline phosphatase which is not observable when the water is at pH = 10. Our study shows that the concept of pH cannot be used directly in a confined environment. In addition, our research is of great importance in the field of reactions that occur in reverse micelles, catalyzed by enzymes.

Evaluating the mechanism of nucleation and growth of silver nanoparticles in a polymer membrane under continuous precursor supply: tuning of multiple to single nucleation pathway

Size controlled synthesis of nanoparticles in a structured media, such as a membrane, has not yet been achieved successfully in comparison to that in solution due to the lack of mechanistic investigations on the nucleation and growth of nanoparticles in these media. Slower diffusion of precursor and monomer species inside these structured media complicates the nanoparticle formation mechanism. We herein report a novel experimental approach to reveal the mechanism of nucleation and growth during the synthesis of silver nanoparticles in a Nafion-117 membrane using radiolabeling and small angle X-ray scattering (SAXS). The study has been conducted under the conditions of continuous supply of precursor (silver citrate). Repetitive "LaMer type" nucleations have been found to occur in the membrane leading to the formation of polydispersed spherical nanoparticles as evident from time resolved small angle X-ray scattering. These repetitive nucleations have been shown to be responsible for continuous birth of new seeds, which grow to larger particles, mainly by random coagulation introducing non-uniformity in the growth profile of nanoparticles. The additional nucleation events have been successfully ceased by careful tuning of reaction temperature and precursor concentration, thereby eliminating the nanoparticle growth by random coagulation. This has led to the formation of silver nanoparticles with improved morphology and size distributions, which has been manifested in remarkable improvement in the optical quality of the silver nanoparticles. The present study is the first of its kind showing the crucial role of the membrane host in retarding the reaction kinetics which allowed successful probing of temporal variation of monomer concentration during nucleation and growth using a radiotracer. This was hitherto difficult to probe in solution due to its ultrafast kinetics. Additionally, using the experimental monomer concentrations during nucleation, the free energy of activation (ΔGcrit) and the critical radius (rcrit) for nucleation have been estimated and found to be 73 kJ mol-1 and 6.6 Å, respectively. The present work validates the well known theoretical model by La Mer for the synthesis of nanoparticles in a membrane under continuous precursor supply.

Catalytic Reduction of 4-Nitrophenol Using Silver Nanoparticles with Adjustable Activity

We report on the development of ultrasmall core-shell silver nanoparticles synthesized by an upscaled modification of the polyol process. It is foreseen to use these thoroughly characterized particles as reference material to compare the catalytic and biological properties of functionalized silver nanoparticles. Small-angle X-ray scattering (SAXS) analysis reveals a narrow size distribution of the silver cores with a mean radius of Rc = 3.0 nm and a distribution width of 0.6 nm. Dynamic light scattering (DLS) provides a hydrodynamic radius of RH = 10.0 nm and a PDI of 0.09. The particles' surface is covered with poly(acrylic acid) (PAA) forming a shell with a thickness of 7.0 nm, which provides colloidal stability lasting for more than 6 months at ambient conditions. The PAA can be easily exchanged by biomolecules to modify the surface functionality. Replacements of PAA with glutathione (GSH) and bovine serum albumin (BSA) have been performed as examples. We demonstrate that the silver particles effectively catalyze the reduction of 4-nitrophenol to 4-aminophenol with sodium borohydride. With PAA as stabilizer, the catalytic activity of 436 ± 24 L g(-1) s(-1) is the highest reported in the literature for silver nanoparticles. GSH and BSA passivate the surface substantially, resulting in a catalytic activity of 77.6 ± 0.9 and 3.47 ± 0.50 L g(-1) s(-1), respectively.

Time resolved growth of membrane stabilized silver NPs and their catalytic activity

Growth kinetics of membrane stabilized silver nanoparticles have been studied for the first time with time resolved in situ SAXS. The catalytic application of nanocomposite membranes thus formed has also been explored.