Sreeremya TS, Prabhakaran M, Ghosh S. Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP.
RSC Adv 2015. [DOI:
10.1039/c5ra12319d]
[Citation(s) in RCA: 17] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Ceria nanostructures synthesized through simple synthetic protocols showed morphology dependence in the chemical mechanical planarization of glass by virtue of their diverse surface properties.
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