Subaquatic indirect laser ablation technique for glass processing

Subaquatic indirect Laser-Induced Plasma-Assisted Ablation (SLIPAA) is proposed as a laser-based technique for glass processing. In this configuration, a water layer is added between a metallic target and a soda-lime glass substrate, so the processing of the glass is due to a combination of the ablation mechanism, the shock waves, and the cavitation bubbles. Thus, this method makes it possible to produce higher depth structures than those performed up to now by other standard laser techniques based on ablation, achieving structures in glass with rectangular cross-sectional profiles. Channels of 1 mm width are fabricated, reaching an average maximal depth value of almost 1400 µm at 30 passes of the laser beam while keeping the focal position fixed. Furthermore, the difference between processing the material with and without the addition of the water layer is presented. The influence of the processing parameters on the shape and quality of the fabricated structures is studied by optical and confocal microscopy, microcomputed tomography, and scanning electron microscopy. Compositional analysis of the glass is performed by energy dispersive X-ray technique to assess the transference of material from the metallic target to the fabricated channels. Deeper and more complex structures are obtained by refocusing the laser beam on the target and adding a pulsed flowing water film.

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Laser has been demonstrated to be a mature and versatile tool that presents great flexibility and applicability for the precision engineering of a wide range of materials over other established micromachining techniques. Past decades have witnessed its rapid development and extensive applications ranging from scientific researches to industrial manufacturing. Transparent hard materials remain several major technical challenges for conventional laser processing techniques due to their high hardness, great brittleness, and low optical absorption. A variety of hybrid laser processing technologies, such as laser-induced plasma-assisted ablation, laser-induced backside wet etching, and etching assisted laser micromachining, have been developed to overcome these barriers by introducing additional medium assistance or combining different process steps. This article reviews the basic principles and characteristics of these hybrid technologies. How these technologies are used to precisely process transparent hard materials and their recent advancements are introduced. These hybrid technologies show remarkable benefits in terms of efficiency, accuracy, and quality for the fabrication of microstructures and functional devices on the surface of or inside the transparent hard substrates, thus enabling widespread applications in the fields of microelectronics, bio-medicine, photonics, and microfluidics. A summary and outlook of the hybrid laser technologies are also highlighted.

Ultrashort pulsed laser backside ablation of fused silica

We report on the fabrication of rectangular microchannels with vertical sidewalls in fused silica by laser backside ablation. A 515 nm femtosecond laser is focused by an objective with a NA of 0.5 through the sample on the glass/air interface, allowing processing from the backside into the bulk material. Experimental investigations reveal a logarithmically increasing depth of the channels with an increasing number of scans, while keeping the focal position fixed. A certain number of scans has to be applied to generate rectangular shaped channels while their depth can be controlled by the applied fluence from 2.64 µm to 13.46 µm and a corresponding ablation roughness R_a between 0.20 µm and 0.33 µm. The channel width can be set directly via the number of parallel ablated lines demonstrated in a range from 10 µm to 50 µm. By adjusting the focal position after each scan the channel depth can be extended to 49.77 µm while maintaining a rectangular channel geometry. Finally, concentric rings are ablated to demonstrate the flexibility of the direct writing process.

Picosecond Laser Processing of Photosensitive Glass for Generation of Biologically Relevant Microenvironments

Various material processing techniques have been proposed for fabrication of smart surfaces that can modulate cellular behavior and address specific clinical issues. Among them, laser-based technologies have attracted growing interest due to processing versatility. Latest development of ultrashort pulse lasers with pulse widths from several tens of femtoseconds (fs) to several picoseconds (ps) allows clean microfabrication of a variety of materials at micro- and nanoscale both at surface and in volume. In this study, we addressed the possibility of 3D microfabrication of photosensitive glass (PG) by high repetition rate ps laser-assisted etching (PLAE) to improve the fabrication efficiency for the development of useful tools to be used for specific biological applications. Microfluidic structures fabricated by PLAE should provide the flow aspects, 3D characteristics, and possibility of producing functional structures to achieve the biologically relevant microenvironments. Specifically, the microfluidic structures could induce cellular chemotaxis over extended periods in diffusion-based gradient media. More importantly, the 3D characteristics could reproduce capillaries for in vitro testing of relevant organ models. Single cell trapping and analysis by using the fabricated microfluidic structures are also essential for understanding individual cell behavior within the same population. To this end, this paper demonstrates: (1) generation of 3D structures in glass volume or on surface for fabrication of microfluidic channels, (2) subtractive 3D surface patterning to create patterned molds in a controlled manor for casting polydimethylsiloxane (PDMS) structures and developing single cell microchambers, and (3) designing glass photo-masks to be used for sequel additive patterning of biocompatible nanomaterials with controlled shapes, sizes, and periodicity. Mesenchymal stem cells grown on laser-processed glass surfaces revealed no sign of cytotoxicity, while a collagen thin coating improved cellular adhesion.

Attomolar Sensing Based on Liquid Interface-Assisted Surface-Enhanced Raman Scattering in Microfluidic Chip by Femtosecond Laser Processing

Surface-enhanced Raman scattering (SERS) is a multidisciplinary trace analysis technique based on plasmonic effects. The development of SERS microfluidic chips has been exploited extensively in recent times impacting on applications in diverse fields. However, despite much progress, the excitation of label-free molecules is extremely challenging when analyte concentrations are lower than 1 nM because of the blinking SERS effect. In this paper, a novel analytical strategy which can achieve detection limits at an attomolar level is proposed. This performance improvement is due to the use of a glass microfluidic chip that features an analyte air-solution interface which forms on the SERS substrate in the microfluidic channel, whereby the analyte molecules aggregate locally at the interface during the measurement, hence the term liquid interface-assisted SERS (LI-SERS). The microfluidic chips are fabricated using hybrid femtosecond (fs) laser processing consisting of fs laser-assisted chemical etching, selective metallization, and metal surface nanostructuring. The novel LI-SERS technique can achieve an analytical enhancement factor of 1.5 × 10¹⁴, providing a detection limit below 10^-17 M (<10 aM). The mechanism for the extraordinary enhancement afforded by LI-SERS is attributed to Marangoni convection induced by the photothermal effect.

Biomedical Application of Functional Materials in Organ-on-a-Chip

The organ-on-a-chip (OOC) technology has been utilized in a lot of biomedical fields such as fundamental physiological and pharmacological researches. Various materials have been introduced in OOC and can be broadly classified into inorganic, organic, and hybrid materials. Although PDMS continues to be the preferred material for laboratory research, materials for OOC are constantly evolving and progressing, and have promoted the development of OOC. This mini review provides a summary of the various type of materials for OOC systems, focusing on the progress of materials and related fabrication technologies within the last 5 years. The advantages and drawbacks of these materials in particular applications are discussed. In addition, future perspectives and challenges are also discussed.

Capillary flow in microchannel circuitry of scleral lenses

Continuous monitoring of biomarkers in a quantitative manner at point-of-care settings can advance early diagnosis in medicine. Contact lenses offer a minimally-invasive platform to continuously detect biomarkers in tear fluid. Microfluidic components as lab-on-a-chip technology have the potential to transform contact lenses into fully-integrated multiplexed sensing devices. Here, simple and complex microchannels are created in scleral lenses that perform microfluidic operations via capillary action. The engraving of microchannels in scleral lenses were performed by laser micromilling, where a predictive computational model was developed to simulate the effect of laser power and exposure time on polymer behavior. Experimentally varying the CO2 laser power (1.2-3.6 W) and speed (38-100 mm s-1) allowed the micromilling of concave microchannels with groove depths of 10-240 μm and widths of 35-245 μm on polymetric substrates. The demonstrated laser micromilled circuitry in scleral lenses included linear channels, T/Y junctions, multiplexed arrays, mixers, and spiral channels, as well as serially organized multicomponent channels. Capillary forces acting in the microchannels allowed flowing rhodamine dye within the microfluidic components, which was visualized by optical microscopy in reflection and transmission modes simultaneously. The developed microfluidic components in scleral lenses may enable tear sampling, storage, analysis, and multiplexed detection capabilities for continuous monitoring applications.

Arch-like microsorters with multi-modal and clogging-improved filtering functions by using femtosecond laser multifocal parallel microfabrication

Conventional micropore membranes based size sorting have been widely applied for single-cell analysis. However, only a single filtering size can be achieved and the clogging issue cannot be completely avoided. Here, we propose a novel arch-like microsorter capable of multimodal (high-, band- and low-capture mode) sorting of particles. The target particles can pass through the front filter and are then trapped by the back filter, while the non-target particles can bypass or pass through the microsorter. This 3D arch-like microstructures are fabricated inside a microchannel by femtosecond laser parallel multifocal scanning. The designed architecture allows for particles isolation free of clogging over 20 minutes. Finally, as a proof of concept demonstration, SUM159 breast cancer cells are successfully separated from whole blood.

Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments

Lab-on-a-chip biological platforms have been intensively developed during the last decade since emerging technologies have offered possibilities to manufacture reliable devices with increased spatial resolution and 3D configurations. These biochips permit testing chemical reactions with nanoliter volumes, enhanced sensitivity in analysis and reduced consumption of reagents. Due to the high peak intensity that allows multiphoton absorption, ultrafast lasers can induce local modifications inside transparent materials with high precision at micro- and nanoscale. Subtractive manufacturing based on laser internal modification followed by wet chemical etching can directly fabricate 3D micro-channels in glass materials. On the other hand, additive laser manufacturing by two-photon polymerization of photoresists can grow 3D polymeric micro- and nanostructures with specific properties for biomedical use. Both transparent materials are ideal candidates for biochips that allow exploring phenomena at cellular levels while their processing with a nanoscale resolution represents an excellent opportunity to get more insights on biological aspects. We will review herein the laser fabrication of transparent microfluidic and optofluidic devices for biochip applications and will address challenges associated with their potential. In particular, integrated micro- and optofluidic systems will be presented with emphasis on the functionality for biological applications. It will be shown that ultrafast laser processing is not only an instrument that can tailor appropriate 3D environments to study living microorganisms and to improve cell detection or sorting but also a tool to fabricate appropriate biomimetic structures for complex cellular analyses. New advances open now the avenue to construct miniaturized organs of desired shapes and configurations with the goal to reproduce life processes and bypass in vivo animal or human testing.

Controllable alignment of elongated microorganisms in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser microfabrication

This paper presents a simple technique to fabricate new electrofluidic devices for the three-dimensional (3D) manipulation of microorganisms by hybrid subtractive and additive femtosecond (fs) laser microfabrication (fs laser-assisted wet etching of glass followed by water-assisted fs laser modification combined with electroless metal plating). The technique enables the formation of patterned metal electrodes in arbitrary regions in closed glass microfluidic channels, which can spatially and temporally control the direction of electric fields in 3D microfluidic environments. The fabricated electrofluidic devices were applied to nanoaquariums to demonstrate the 3D electro-orientation of Euglena gracilis (an elongated unicellular microorganism) in microfluidics with high controllability and reliability. In particular, swimming Euglena cells can be oriented along the z-direction (perpendicular to the device surface) using electrodes with square outlines formed at the top and bottom of the channel, which is quite useful for observing the motions of cells parallel to their swimming directions. Specifically, z-directional electric field control ensured efficient observation of manipulated cells on the front side (45 cells were captured in a minute in an imaging area of ~160×120 μm), resulting in a reduction of the average time required to capture the images of five Euglena cells swimming continuously along the z-direction by a factor of ~43 compared with the case of no electric field. In addition, the combination of the electrofluidic devices and dynamic imaging enabled observation of the flagella of Euglena cells, revealing that the swimming direction of each Euglena cell under the electric field application was determined by the initial body angle.