Sahu BB, Yin Y, Han JG, Shiratani M. Low temperature synthesis of silicon quantum dots with plasma chemistry control in dual frequency non-thermal plasmas.
Phys Chem Chem Phys 2016;
18:15697-710. [DOI:
10.1039/c6cp01856d]
[Citation(s) in RCA: 14] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/22/2022]
Abstract
The design of advanced plasma processes by plasma and radical control is essential for the controlled low-temperature deposition of different size QDs.
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