Hemmatian Z, Gentili D, Barbalinardo M, Morandi V, Ortolani L, Ruani G, Cavallini M. AC parallel local oxidation of silicon.
NANOSCALE ADVANCES 2019;
1:3887-3891. [PMID:
36132101 PMCID:
PMC9419026 DOI:
10.1039/c9na00445a]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/17/2019] [Accepted: 09/02/2019] [Indexed: 06/15/2023]
Abstract
Here, we present a suitable advancement of parallel local oxidation nanolithography, demonstrating its feasibility in alternate current mode (AC-PLON). For demonstration, we fabricated model structures consisting of an array of parallel nanostripes of electrochemical SiO x with a controlled roughness. Besides, we proved the repeatability of AC-PLON and its integrability with conventional parallel local oxidation nanolithography.
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