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Lin W, Tang C, Wang F, Zhu Y, Wang Z, Li Y, Wu Q, Lei S, Zhang Y, Hou J. Building Low-Cost, High-Performance Flexible Photodetector Based on Tetragonal Phase VO 2 (A) Nanorod Networks. MATERIALS (BASEL, SWITZERLAND) 2023; 16:6688. [PMID: 37895670 PMCID: PMC10607982 DOI: 10.3390/ma16206688] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/24/2023] [Revised: 09/30/2023] [Accepted: 10/10/2023] [Indexed: 10/29/2023]
Abstract
We present a straightforward and cost-effective method for the fabrication of flexible photodetectors, utilizing tetragonal phase VO2 (A) nanorod (NR) networks. The devices exhibit exceptional photosensitivity, reproducibility, and stability in ambient conditions. With a 2.0 V bias voltage, the device demonstrates a photocurrent switching gain of 1982% and 282% under irradiation with light at wavelengths of 532 nm and 980 nm, respectively. The devices show a fast photoelectric response with rise times of 1.8 s and 1.9 s and decay times of 1.2 s and 1.7 s for light at wavelengths of 532 nm and 980 nm, respectively. In addition, the device demonstrates exceptional flexibility across large-angle bending and maintains excellent mechanical stability, even after undergoing numerous extreme bending cycles. We discuss the electron transport process within the nanorod networks, and propose a mechanism for the modulation of the barrier height induced by light. These characteristics reveal that the fabricated devices hold the potential to serve as a high-performance flexible photodetector.
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Affiliation(s)
- Wenhui Lin
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Chaoyang Tang
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Feiyu Wang
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Yiyu Zhu
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Zhen Wang
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Yifan Li
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Qiuqi Wu
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Shuguo Lei
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
| | - Yi Zhang
- School of Energy Science and Engineering, Nanjing Tech University, Nanjing 211816, China
| | - Jiwei Hou
- Department of Physics, School of Physical and Mathematical Science, Nanjing Tech University, Nanjing 211816, China; (W.L.); (C.T.); (F.W.); (Y.Z.); (Z.W.); (Y.L.); (Q.W.); (S.L.)
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Pratomo U, Pratama RA, Irkham I, Sulaeman AP, Mulyana JY, Primadona I. 3D-ZnO Superstructure Decorated with Carbon-Based Material for Efficient Photoelectrochemical Water-Splitting under Visible-Light Irradiation. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1380. [PMID: 37110965 PMCID: PMC10146915 DOI: 10.3390/nano13081380] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/08/2023] [Revised: 03/27/2023] [Accepted: 04/14/2023] [Indexed: 06/19/2023]
Abstract
The depletion of fossil fuels is a worldwide problem that has led to the discovery of alternative energy sources. Solar energy is the focus of numerous studies due to its huge potential power and environmentally friendly nature. Furthermore, one such area of study is the production of hydrogen energy by engaging photocatalysts using the photoelectrochemical (PEC) method. 3-D ZnO superstructures are extensively explored, showing high solar light-harvesting efficiency, more reaction sites, great electron transportation, and low electron-hole recombination. However, further development requires the consideration of several aspects, including the morphological effects of 3D-ZnO on water-splitting performance. This study reviewed various 3D-ZnO superstructures fabricated through different synthesis methods and crystal growth modifiers, as well as their advantages and limitations. Additionally, a recent modification by carbon-based material for enhanced water-splitting efficiency has been discussed. Finally, the review provides some challenging issues and future perspectives on the improvement of vectorial charge carrier migration and separation between ZnO as well as carbon-based material, using rare earth metals, which appears to be exciting for water-splitting.
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Affiliation(s)
- Uji Pratomo
- Department of Chemistry, Faculty of Mathematics and Natural Sciences, Universitas Padjadjaran, Jl. Raya Bandung Sumedang Km.21, Kabupaten Sumedang 45363, Indonesia; (U.P.); (R.A.P.); (I.I.); (A.P.S.)
| | - Rifky Adhia Pratama
- Department of Chemistry, Faculty of Mathematics and Natural Sciences, Universitas Padjadjaran, Jl. Raya Bandung Sumedang Km.21, Kabupaten Sumedang 45363, Indonesia; (U.P.); (R.A.P.); (I.I.); (A.P.S.)
| | - Irkham Irkham
- Department of Chemistry, Faculty of Mathematics and Natural Sciences, Universitas Padjadjaran, Jl. Raya Bandung Sumedang Km.21, Kabupaten Sumedang 45363, Indonesia; (U.P.); (R.A.P.); (I.I.); (A.P.S.)
| | - Allyn Pramudya Sulaeman
- Department of Chemistry, Faculty of Mathematics and Natural Sciences, Universitas Padjadjaran, Jl. Raya Bandung Sumedang Km.21, Kabupaten Sumedang 45363, Indonesia; (U.P.); (R.A.P.); (I.I.); (A.P.S.)
| | - Jacob Yan Mulyana
- Department of Applied Chemistry, Graduate School of Urban Environmental Sciences, Tokyo Metropolitan University, 1-1 Minamiosawa, Hachioji, Tokyo 192-0397, Japan;
- School of Education, Faculty of Arts and Education, Deakin University, 221 Burwood Hwy, Burwood, VIC 3125, Australia
| | - Indah Primadona
- Research Center for Advanced Material, National Research and Innovation Agency, Kawasan Sains dan Teknologi BJ. Habibie, Tangerang Selatan 15314, Indonesia
- Collaboration Research Center for Advanced Energy Materials, National Research and Innovation Agency-Institut Teknologi Bandung, Bandung 40132, Indonesia
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El-Mahalawy AM, Abdel-Khalek H, Amin FM, Abd‑El Salam M. Dynamics of charge carriers and photoresponse of TPD/n-Si hybrid structure for visible-blind UV self-biased photodetection applications. SYNTHETIC METALS 2021; 278:116842. [DOI: 10.1016/j.synthmet.2021.116842] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
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Kunwar S, Pandit S, Kulkarni R, Mandavkar R, Lin S, Li MY, Lee J. Hybrid Device Architecture Using Plasmonic Nanoparticles, Graphene Quantum Dots, and Titanium Dioxide for UV Photodetectors. ACS APPLIED MATERIALS & INTERFACES 2021; 13:3408-3418. [PMID: 33399456 DOI: 10.1021/acsami.0c19058] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
In this work, a nanoscale device architecture is demonstrated for a UV photodetector application on sapphire (0001), incorporating the plasmonic hybrid nanoparticles (HNPs), graphene quantum dots (GQDs), and titanium oxide (TiO2) for the first time. The hybrid GQDs/TiO2/HNPs photodetector exhibits the photocurrent of 1.58 × 10-5 A under the 1.64 mW/mm2 of 275 nm illumination at 10 V, which is around two order increase from the bare TiO2 device. The proposed architecture demonstrates a low dark current of ∼1 × 10-10 A at 10 V and thus the device demonstrates an excellent photo to dark current ratio along with the improved rise and fall time on the order of several hundred millisecond. The enhanced performance of device architecture is attributed to the efficient utilization of localized surface plasmon resonance (LSPR) induced hot carriers as well as scattered photons from the plasmonic HNPs that are fully encapsulated by the photoactive TiO2 layers. Furthermore, the addition of GQDs on the TiO2 can offer an additional photon absorption pathway. The proposed hybrid architecture of GQDs/TiO2/HNPs demonstrates the integration of the photon absorption and carrier transfer properties of plasmonic HNPs, GQDs, and TiO2 for an enhanced ultraviolet (UV) photoresponse. The photocurrent enhancement mechanisms of the hybrid device architecture are thoroughly investigated based on the finite-difference time domain (FDTD) simulation along with the energy band analysis. This work demonstrates a great potential of the hybrid device architecture for high-performance UV photodetectors.
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Affiliation(s)
- Sundar Kunwar
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
| | - Sanchaya Pandit
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
| | - Rakesh Kulkarni
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
| | - Rutuja Mandavkar
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
| | - Shusen Lin
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
| | - Ming-Yu Li
- School of Science, Wuhan University of Technology, Wuhan, Hubei 430070, China
| | - Jihoon Lee
- Department of Electronic Engineering, College of Electronics and Information, Kwangwoon University, Nowon-gu Seoul 01897, South Korea
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Liu S, Li MY, Zhang J, Su D, Huang Z, Kunwar S, Lee J. Self-Assembled Al Nanostructure/ZnO Quantum Dot Heterostructures for High Responsivity and Fast UV Photodetector. NANO-MICRO LETTERS 2020; 12:114. [PMID: 34138130 PMCID: PMC7770880 DOI: 10.1007/s40820-020-00455-9] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/22/2020] [Accepted: 05/01/2020] [Indexed: 05/02/2023]
Abstract
HIGHLIGHTS High performance Al nanostructures/ZnO quantum dots heterostructure photodetectors with a controllable geometry of the Al nanostructures are demonstrated. Light utilization of the photoactive layers is significantly boosted with the Al nanostructures. The light confinement effect is inherently determined by the geometries of the Al nanostructures. ABSTRACT Light confinement induced by spontaneous near-surface resonance is inherently determined by the location and geometry of metallic nanostructures (NSs), offering a facile and effective approach to break through the limitation of the light-mater interaction within the photoactive layers. Here, we demonstrate high-performance Al NS/ZnO quantum dots (Al/ZnO) heterostructure UV photodetectors with controllable morphologies of the self-assembled Al NSs. The Al/ZnO heterostructures exhibit a superior light utilization than the ZnO/Al heterostructures, and a strong morphological dependence of the Al NSs on the optical properties of the heterostructures. The inter-diffusion of Al atoms into ZnO matrixes is of a great benefit for the carrier transportation. Consequently, the optimal photocurrent of the Al/ZnO heterostructure photodetectors is significantly increased by 275 times to ~ 1.065 mA compared to that of the pristine ZnO device, and an outstanding photoresponsivity of 11.98 A W−1 is correspondingly achieved under 6.9 mW cm−2 UV light illumination at 10 V bias. In addition, a relatively fast response is similarly witnessed with the Al/ZnO devices, paving a path to fabricate the high-performance UV photodetectors for applications. [Image: see text] ELECTRONIC SUPPLEMENTARY MATERIAL The online version of this article (10.1007/s40820-020-00455-9) contains supplementary material, which is available to authorized users.
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Affiliation(s)
- Sisi Liu
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China
| | - Ming-Yu Li
- School of Science, Wuhan University of Technology, Wuhan, 430070, People's Republic of China.
| | - Jianbing Zhang
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China
| | - Dong Su
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China
| | - Zhen Huang
- Wuhan National Laboratory for Optoelectronics (WNLO) and School of Engineering Sciences, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China
| | - Sundar Kunwar
- College of Electonics and Information, Kwangwoon University, Nowon-gu, Seoul, 01897, Republic of Korea
| | - Jihoon Lee
- College of Electonics and Information, Kwangwoon University, Nowon-gu, Seoul, 01897, Republic of Korea
- Institute of Nanoscale Science and Engineering, University of Arkansas, Fayetteville, AR, 72701, USA
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Wang J, Fan S, Xia Y, Yang C, Komarneni S. Room-temperature gas sensors based on ZnO nanorod/Au hybrids: Visible-light-modulated dual selectivity to NO 2 and NH 3. JOURNAL OF HAZARDOUS MATERIALS 2020; 381:120919. [PMID: 31369934 DOI: 10.1016/j.jhazmat.2019.120919] [Citation(s) in RCA: 44] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/16/2019] [Revised: 07/13/2019] [Accepted: 07/23/2019] [Indexed: 05/07/2023]
Abstract
Gas sensors play vital roles in air pollution monitoring. Despite considerable progress in improving the room-temperature gas sensing sensitivities and rates of materials, comparably less attention is paid to the sensor selectivity. Here, ultrathin ZnO nanorods (˜15 nm) were synthesized by a nanoseed-assisted wet chemical approach and subsequently functionalized by Au nanoparticles by a photoreduction method. The hybrid material exhibited visible-light-activity owing to the surface plasmon resonance (SPR) effects of Au nanoparticles. The ZnO/Au hybrids were assembled into a high-performance, optically-controlled gas sensor operating at room temperature, which was found to be more selective to NH3 in dark but showed high selectivity to NO2 under visible-light illumination (λ = 532 nm). Moreover, the sensors exhibited high response and short response and recovery times as well as excellent reversibility and selectivity at room temperature. Such visible-light-modulated dual gas selectivity could be mainly attributed to the opposite direction of electron transfer between ZnO and Au nanoparticles in dark and under visible-light illumination, which led to the different surface depletion characteristics of the ZnO nanorods. In addition, the ultrathin diameters of nanorods also synergistically contributed to the light-controlled dual gas selectivity. The presently developed light modulation strategy provides an alternative approach to highly-selective and dual-functional gas sensors operating at room temperature.
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Affiliation(s)
- Jing Wang
- Key Laboratory of Synthetic and Biological Colloids, Ministry of Education, School of Chemical and Material Engineering, Jiangnan University, Wuxi 214122, China.
| | - Saiying Fan
- Key Laboratory of Synthetic and Biological Colloids, Ministry of Education, School of Chemical and Material Engineering, Jiangnan University, Wuxi 214122, China
| | - Yi Xia
- Research Center for Analysis and Measurement, Kunming University of Science and Technology, Kunming 650093, China
| | - Cheng Yang
- Key Laboratory of Synthetic and Biological Colloids, Ministry of Education, School of Chemical and Material Engineering, Jiangnan University, Wuxi 214122, China
| | - Sridhar Komarneni
- Department of Ecosystem Science and Management and Materials Research Institute, 204 Energy and the Environment Laboratory, The Pennsylvania State University, University Park, PA 16802, USA.
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Yeh CC, Zan HW, Soppera O. Solution-Based Micro- and Nanoscale Metal Oxide Structures Formed by Direct Patterning for Electro-Optical Applications. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2018; 30:e1800923. [PMID: 30073719 DOI: 10.1002/adma.201800923] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/08/2018] [Revised: 04/26/2018] [Indexed: 06/08/2023]
Abstract
Due to their transparency and tunable electrical, optical, and magnetic properties, metal oxide thin films and structures have many applications in electro-optical devices. In recent years, solution processing combined with direct-patterning techniques such as micro-/nanomolding, inkjet printing, e-jet printing, e-beam writing, and photopatterning has drawn much attention because of the inexpensive and simple fabrication process that avoids using capital-intensive vacuum deposition systems and chemical etching. Furthermore, practical applications of solution direct-patterning techniques with metal oxide structures are demonstrated in thin-film transistors and biochemical sensors on a wide range of substrates. Since direct-patterning techniques enable low-cost fabrication of nanoscale metal oxide structures, these methods are expected to accelerate the development of nanoscale devices and systems based on metal oxide components in important application fields such as flexible electronics, the Internet of Things (IoT), and human health monitoring. Here, a review of the fabrication procedures, advantages, limitations, and applications of the main direct-patterning methods for making metal oxide structures is presented. The goal is to highlight the examples with the most promising perspective from the recent literature.
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Affiliation(s)
- Chun-Cheng Yeh
- Institut de Science des Matériaux de Mulhouse (IS2M), CNRS - UMR 7361, Université de Haute Alsace, 15 rue Jean Starcky, 68057, Mulhouse, France
| | - Hsiao-Wen Zan
- Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, 30010, Republic of China
| | - Olivier Soppera
- Institut de Science des Matériaux de Mulhouse (IS2M), CNRS - UMR 7361, Université de Haute Alsace, 15 rue Jean Starcky, 68057, Mulhouse, France
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Liu S, Li MY, Su D, Yu M, Kan H, Liu H, Wang X, Jiang S. Broad-Band High-Sensitivity ZnO Colloidal Quantum Dots/Self-Assembled Au Nanoantennas Heterostructures Photodetectors. ACS APPLIED MATERIALS & INTERFACES 2018; 10:32516-32525. [PMID: 30165735 DOI: 10.1021/acsami.8b09442] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/18/2023]
Abstract
Tunable plasmonic resonance induced by the collective oscillation of the electrons on metallic nanostructures can excellently enhance the light response of ZnO films, which provides an effective way to break through the limitation of the performance of ZnO photodetectors. Here, broad-band high-performance ZnO/Au heterostructures photodetectors with various morphologies of self-assembled Au nanoantennas are fabricated via a facile approach under the spin-coated ZnO colloidal quantum dots films. With a systematic control on growth condition, the self-assembled Au nanoantennas undergo a drastic evolution from the corrugated nanomounds to the island-like nanostructures, and the light absorption of the resulting ZnO/Au heterostructures correspondingly exhibits a strongly morphological dependence on the Au nanoantennas. Meanwhile, the photoresponse of the ZnO-based photodetectors is significantly improved throughout a wide spectrum between UV and visible regions owing to the enhanced light absorption induced by the localized surface plasmon resonance. As a result, the optimal switch ratio of the ZnO/Au heterostructures photodetector increases by 1 order to ∼1.13 × 105 than that of the pristine ZnO one because of the obviously increased photocurrent ( Iph) and comparable dark current, thus leading to ∼9.1 and ∼4.9 times increases in the photoresponsivity and the normalized detectivity. Meanwhile, the significant increases in the Iph of ∼5.2 and ∼9.7 times are likewise observed with the ZnO/Au heterostructures under 530 nm and white-light illumination. This work can offer a handy and effective approach for the fabrication of ultrasensitive ZnO-based photodetectors within a broad-band wavelength by utilizing the Au plasmonic nanostructures.
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Affiliation(s)
- Sisi Liu
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | - Ming-Yu Li
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | - Dong Su
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | - Muni Yu
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | | | - Huan Liu
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | - Xian Wang
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
| | - Shenglin Jiang
- School of Optical and Electronic Information , Huazhong University of Science and Technology , Wuhan , Hubei 430074 , China
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Xu F, Ho HP. Light-Activated Metal Oxide Gas Sensors: A Review. MICROMACHINES 2017; 8:mi8110333. [PMID: 30400523 PMCID: PMC6190203 DOI: 10.3390/mi8110333] [Citation(s) in RCA: 59] [Impact Index Per Article: 8.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/11/2017] [Revised: 11/08/2017] [Accepted: 11/13/2017] [Indexed: 11/16/2022]
Abstract
Conductometric gas sensors facilitated by photons have been investigated for decades. Light illumination may enhance device attributes including operational temperature, sensing sensitivity and selectivity. This paper aims to provide an overview on the progress of light-activated gas sensors, with a specific focus on sensors based on metal oxides. The material systems that have been studied include pure metal oxides, heterostructures of semiconductor-metal oxides and metal-metal oxides, and metal oxides with dopant. Other reported works on the use of different nanostructures such as one-dimensional and porous nanostructures, study of sensing mechanisms and the interplay between various factors are also summarized. Possible directions for further improvement of sensing properties, through optimizing the size of nanomaterials, film thickness, light intensity and wavelength are discussed. Finally, we point out that the main challenge faced by light-activated gas sensors is their low optical response, and we have analyzed the feasibility of using localized surface plasmon resonance to solve this drawback. This article should offer readers some key and instructive insights into the current and future development of light-activated gas sensors.
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Affiliation(s)
- Fang Xu
- Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, New Territories, Hong Kong, China.
| | - Ho-Pui Ho
- Department of Biomedical Engineering, The Chinese University of Hong Kong, Shatin, New Territories, Hong Kong, China.
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Zhang J, Zhang L, Han L, Tian ZW, Tian ZQ, Zhan D. Electrochemical nanoimprint lithography: when nanoimprint lithography meets metal assisted chemical etching. NANOSCALE 2017; 9:7476-7482. [PMID: 28530294 DOI: 10.1039/c7nr01777d] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
The functional three dimensional micro-nanostructures (3D-MNS) play crucial roles in integrated and miniaturized systems because of the excellent physical, mechanical, electric and optical properties. Nanoimprint lithography (NIL) has been versatile in the fabrication of 3D-MNS by pressing thermoplastic and photocuring resists into the imprint mold. However, direct nanoimprint on the semiconductor wafer still remains a great challenge. On the other hand, considered as a competitive fabrication method for erect high-aspect 3D-MNS, metal assisted chemical etching (MacEtch) can remove the semiconductor by spontaneous corrosion reaction at the metal/semiconductor/electrolyte 3-phase interface. Moreover, it was difficult for MacEtch to fabricate multilevel or continuously curved 3D-MNS. The question of the consequences of NIL meeting the MacEtch is yet to be answered. By employing a platinum (Pt) metalized imprint mode, we demonstrated that using electrochemical nanoimprint lithography (ECNL) it was possible to fabricate not only erect 3D-MNS, but also complex 3D-MNS with multilevel stages with continuously curved surface profiles on a gallium arsenide (GaAs) wafer. A concave microlens array with an average diameter of 58.4 μm and height of 1.5 μm was obtained on a ∼1 cm2-area GaAs wafer. An 8-phase microlens array was fabricated with a minimum stage of 57 nm and machining accuracy of 2 nm, presenting an excellent optical diffraction property. Inheriting all the advantages of both NIL and MacEtch, ECNL has prospective applications in the micro/nano-fabrications of semiconductors.
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Affiliation(s)
- Jie Zhang
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), and Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China.
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Tian L, Luo X, Yin M, Li D, Xue X, Wang H. Enhanced CMOS image sensor by flexible 3D nanocone anti-reflection film. Sci Bull (Beijing) 2017; 62:130-135. [PMID: 36659484 DOI: 10.1016/j.scib.2016.12.008] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/01/2016] [Revised: 12/07/2016] [Accepted: 12/08/2016] [Indexed: 01/21/2023]
Abstract
Complementary metal oxide semiconductor (CMOS) image sensors (CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera (DSLR), smart phones and so on, owing to their high level of integration, random accessibility, and low-power operation. It needs to be installed with the cover glass in practical applications to protect the sensor from damage, mechanical issues, and environmental conditions, which, however, limits the accuracy and usability of the sensor due to the reflection in the optical path from air-to-cover glass-to-air. In this work, the flexible 3D nanocone anti-reflection (AR) film with controlled aspect ratio was firstly employed to reduce the light reflection at air/cover glass/air interfaces by directly attaching onto the front and rear sides of the CIS cover glass. As both the front and rear sides of cover glass were coated by the AR film, the output image quality was found to be improved with external quantum efficiency increased by 7%, compared with that without AR film. The mean digital data value, root-mean-square contrast, and dynamic range are increased by 45.14%, 38.61% and 57, respectively, for the output image with AR films. These results provide a novel and facile pathway to improve the CIS performance and also could be extended to rational design of other image sensors and optoelectronic devices.
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Affiliation(s)
- Li Tian
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
| | - Xiaolei Luo
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China; School of Environmental and Chemical Engineering, Shanghai University, Shanghai 200444, China
| | - Min Yin
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China.
| | - Dongdong Li
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China.
| | - Xinzhong Xue
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
| | - Hui Wang
- Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
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Bo R, Nasiri N, Chen H, Caputo D, Fu L, Tricoli A. Low-Voltage High-Performance UV Photodetectors: An Interplay between Grain Boundaries and Debye Length. ACS APPLIED MATERIALS & INTERFACES 2017; 9:2606-2615. [PMID: 28032752 DOI: 10.1021/acsami.6b12321] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Abstract
Accurate detection of UV light by wearable low-power devices has many important applications including environmental monitoring, space to space communication, and defense. Here, we report the structural engineering of ultraporous ZnO nanoparticle networks for fabrication of very low-voltage high-performance UV photodetectors. A record high photo- to dark-current ratio of 3.3 × 105 and detectivity of 3.2 × 1012 Jones at an ultralow operation bias of 2 mV and low UV-light intensity of 86 μW·cm-2 are achieved by controlling the interplay between grain boundaries and surface depletion depth of ZnO nanoscale semiconductors. An optimal window of structural properties is determined by varying the particle size of ultraporous nanoparticle networks from 10 to 42 nm. We find that small electron-depleted nanoparticles (≤40 nm) are necessary to minimize the dark-current; however, the rise in photocurrent is tampered with decreasing particle size due to the increasing density of grain boundaries. These findings reveal that nanoparticles with a size close to twice their Debye length are required for high photo- to dark-current ratio and detectivity, while further decreasing their size decreases the photodetector performance.
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Affiliation(s)
- Renheng Bo
- Nanotechnology Research Laboratory, Research School of Engineering, Australian National University , Canberra, Australia
| | - Noushin Nasiri
- Nanotechnology Research Laboratory, Research School of Engineering, Australian National University , Canberra, Australia
| | - Hongjun Chen
- Nanotechnology Research Laboratory, Research School of Engineering, Australian National University , Canberra, Australia
| | - Domenico Caputo
- Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome , Rome, Italy
| | - Lan Fu
- Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University , Canberra, Australia
| | - Antonio Tricoli
- Nanotechnology Research Laboratory, Research School of Engineering, Australian National University , Canberra, Australia
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