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Barth S, Porrati F, Knez D, Jungwirth F, Jochmann NP, Huth M, Winkler R, Plank H, Gracia I, Cané C. Nanoscale, surface-confined phase separation by electron beam induced oxidation. NANOSCALE 2024; 16:14722-14729. [PMID: 38922329 DOI: 10.1039/d4nr01650e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/27/2024]
Abstract
Electron-assisted oxidation of Co-Si-based focused electron beam induced deposition (FEBID) materials is shown to form a 2-4 nm metal oxide surface layer on top of an electrically insulating silicon oxide layer less than 10 nm thick. Differences between thermal and electron-induced oxidation on the resulting microstructure are illustrated.
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Affiliation(s)
- Sven Barth
- Institute of Physics, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60323 Frankfurt am Main, Germany.
- Institute for Inorganic and Analytical Chemistry, Goethe University Frankfurt, Max-von-Laue-Str. 7, 60438 Frankfurt, Germany
| | - Fabrizio Porrati
- Institute of Physics, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60323 Frankfurt am Main, Germany.
| | - Daniel Knez
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Felix Jungwirth
- Institute of Physics, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60323 Frankfurt am Main, Germany.
- Institute for Inorganic and Analytical Chemistry, Goethe University Frankfurt, Max-von-Laue-Str. 7, 60438 Frankfurt, Germany
| | - Nicolas P Jochmann
- Institute of Physics, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60323 Frankfurt am Main, Germany.
- Institute for Inorganic and Analytical Chemistry, Goethe University Frankfurt, Max-von-Laue-Str. 7, 60438 Frankfurt, Germany
| | - Michael Huth
- Institute of Physics, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60323 Frankfurt am Main, Germany.
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Harald Plank
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Isabel Gracia
- Institut de Microelectrònica de Barcelona (IMB), Centre Nacional de Microelectrònica (CNM), Consejo Superior de Investigaciones Científicas (CSIC), 08193 Barcelona, Spain
| | - Carles Cané
- Institut de Microelectrònica de Barcelona (IMB), Centre Nacional de Microelectrònica (CNM), Consejo Superior de Investigaciones Científicas (CSIC), 08193 Barcelona, Spain
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2
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Boeckers H, Chaudhary A, Martinović P, Walker AV, McElwee-White L, Swiderek P. Electron-induced deposition using Fe(CO) 4MA and Fe(CO) 5 - effect of MA ligand and process conditions. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2024; 15:500-516. [PMID: 38745584 PMCID: PMC11092064 DOI: 10.3762/bjnano.15.45] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/16/2024] [Accepted: 04/18/2024] [Indexed: 05/16/2024]
Abstract
The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. The comparison between Fe(CO)4MA and Fe(CO)5 revealed the effect of the modified ligand architecture on the deposit formation in electron irradiation experiments that mimic FEBID and cryo-FEBID processes. Electron-stimulated desorption and post-irradiation thermal desorption spectrometry were used to obtain insight into the fate of the ligands upon electron irradiation. As a key finding, the deposits obtained from Fe(CO)4MA and Fe(CO)5 were surprisingly similar, and the relative amount of carbon in deposits prepared from Fe(CO)4MA was considerably less than the amount of carbon in the MA ligand. This demonstrates that electron irradiation efficiently cleaves the neutral MA ligand from the precursor. In addition to deposit formation by electron irradiation, the thermal decomposition of Fe(CO)4MA and Fe(CO)5 on an Fe seed layer prepared by EBID was compared. While Fe(CO)5 sustains autocatalytic growth of the deposit, the MA ligand hinders the thermal decomposition in the case of Fe(CO)4MA. The heteroleptic precursor Fe(CO)4MA, thus, offers the possibility to suppress contributions of thermal reactions, which can compromise control over the deposit shape and size in FEBID processes.
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Affiliation(s)
- Hannah Boeckers
- Institute for Applied and Physical Chemistry (IAPC), Faculty 2 (Chemistry/Biology), University of Bremen, Leobener Str. 5, 28359 Bremen, Germany
| | - Atul Chaudhary
- Department of Chemistry, University of Florida, Gainesville, Florida 32611, United States
| | - Petra Martinović
- Institute for Applied and Physical Chemistry (IAPC), Faculty 2 (Chemistry/Biology), University of Bremen, Leobener Str. 5, 28359 Bremen, Germany
| | - Amy V Walker
- Department of Materials Science and Engineering RL10, University of Texas at Dallas, 800 W. Campbell Rd, Richardson, Texas 75080, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, Florida 32611, United States
| | - Petra Swiderek
- Institute for Applied and Physical Chemistry (IAPC), Faculty 2 (Chemistry/Biology), University of Bremen, Leobener Str. 5, 28359 Bremen, Germany
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Kamali A, Bilgilisoy E, Wolfram A, Gentner TX, Ballmann G, Harder S, Marbach H, Ingólfsson O. On the Electron-Induced Reactions of (CH 3)AuP(CH 3) 3: A Combined UHV Surface Science and Gas-Phase Study. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2727. [PMID: 35957158 PMCID: PMC9370483 DOI: 10.3390/nano12152727] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Revised: 07/27/2022] [Accepted: 08/03/2022] [Indexed: 06/15/2023]
Abstract
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH3)AuP(CH3)3 using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit's composition was compared with the fragmentation pathways of this compound through dissociative ionization (DI) under single-collision conditions using quantum chemical calculations to aid the interpretation of these data. Further comparison was made with a previous high-vacuum (HV) FEBID study of this precursor. The average loss of about 2 carbon and 0.8 phosphor per incident was found in DI, which agreed well with the carbon content of the UHV FEBID deposits. However, the UHV deposits were found to be as good as free of phosphor, indicating that the trimethyl phosphate is a good leaving group. Differently, the HV FEBID experiments showed significant phosphor content in the deposits.
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Affiliation(s)
- Ali Kamali
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Elif Bilgilisoy
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Alexander Wolfram
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Thomas Xaver Gentner
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Gerd Ballmann
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Sjoerd Harder
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Hubertus Marbach
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
- Carl Zeiss SMT GmbH, 64380 Roßdorf, Germany
| | - Oddur Ingólfsson
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
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Yu JC, Abdel-Rahman MK, Fairbrother DH, McElwee-White L. Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures. ACS APPLIED MATERIALS & INTERFACES 2021; 13:48333-48348. [PMID: 34633789 DOI: 10.1021/acsami.1c12327] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Focused electron beam-induced deposition (FEBID) and focused ion beam-induced deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged particles (electrons or ions) to create 3D metal-containing nanostructures by decomposing organometallic precursors onto substrates in a low-pressure environment. For many applications, it is important to minimize contamination of these nanostructures by impurities from incomplete ligand dissociation and desorption. This spotlight on applications describes the use of ultra high vacuum surface science studies to obtain mechanistic information on electron- and ion-induced processes in organometallic precursor candidates. The results are used for the mechanism-based design of custom precursors for FEBID and FIBID.
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Affiliation(s)
- Jo-Chi Yu
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
| | - Mohammed K Abdel-Rahman
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
| | - D Howard Fairbrother
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
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Jungwirth F, Porrati F, Schuck AG, Huth M, Barth S. Direct Writing of Cobalt Silicide Nanostructures Using Single-Source Precursors. ACS APPLIED MATERIALS & INTERFACES 2021; 13:48252-48259. [PMID: 34592822 DOI: 10.1021/acsami.1c14117] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Two new precursors for focused electron beam-induced deposition (FEBID) of cobalt silicides have been synthesized and evaluated. The H3SiCo(CO)4 and H2Si(Co(CO)4)2 single-source precursors retain the initial metal ratios and show low sensitivity to changes in the FEBID parameters such as acceleration voltage, beam current, and precursor pressure. The precursors allow the direct writing of material containing ∼55 to 60 at % total metal/metalloid content combined with high growth rates. During the deposition process an average of ∼80% of the carbonyl ligands are cleaved off in these planar deposits. Postgrowth electron curing does not change the deposits' composition, but resistivities decrease after the curing procedure. Temperature-dependent electrical properties indicate the presence of a granular metal for both cured samples and the as-grown Co2Si deposit, while the as-grown CoSi material is on the insulating side of the metal-insulator transition. The observed magnetoresistance behavior is indicative of tunneling magnetoresistance and is substantially reduced upon postgrowth irradiation treatment.
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Affiliation(s)
- Felix Jungwirth
- Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
| | - Fabrizio Porrati
- Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
| | - Alfons G Schuck
- Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
| | - Michael Huth
- Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
| | - Sven Barth
- Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
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Thorman RM, Matsuda SJ, McElwee-White L, Fairbrother DH. Identifying and Rationalizing the Differing Surface Reactions of Low-Energy Electrons and Ions with an Organometallic Precursor. J Phys Chem Lett 2020; 11:2006-2013. [PMID: 32058722 DOI: 10.1021/acs.jpclett.0c00061] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Surface reactions of electrons and ions with physisorbed organometallic precursors are fundamental processes in focused electron and ion beam-induced deposition (FEBID and FIBID, respectively) of metal-containing nanostructures. Markedly different surface reactions occur upon exposure of nanometer-scale films of (η5-Cp)Fe(CO)2Re(CO)5 to low-energy electrons (500 eV) compared to argon ions (860 eV). Electron-induced surface reactions are initiated by electronic excitation and fragmentation of (η5-Cp)Fe(CO)2Re(CO)5, causing half of the CO ligands to desorb. Residual CO ligands decompose under further electron irradiation. In contrast, Ar+-induced surface reactions proceed by an ion-molecule momentum/energy transfer process, causing the desorption of all CO ligands without significant ion-induced precursor desorption. This initial decomposition step is followed by ion-induced sputtering of the deposited atoms. The fundamental insights derived from this study can be used not only to rationalize the composition of deposits made by FEBID and FIBID but also to inform the choice of a charged particle deposition strategy and the design of new precursors for these emerging nanofabrication tools.
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Affiliation(s)
- Rachel M Thorman
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
| | - Scott J Matsuda
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, United States
| | - D Howard Fairbrother
- Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218-2685, United States
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Ferreira da Silva F, Thorman RM, Bjornsson R, Lu H, McElwee-White L, Ingólfsson O. Dissociation of the FEBID precursor cis-Pt(CO) 2Cl 2 driven by low-energy electrons. Phys Chem Chem Phys 2020; 22:6100-6108. [PMID: 32025665 DOI: 10.1039/c9cp06633k] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)2Cl2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)2Cl2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.
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Affiliation(s)
- Filipe Ferreira da Silva
- CEFITEC, Departamento de Física, Faculdade de Ciências e Tecnologia, Universidade NOVA de Lisboa, 2829-516 Caparica, Portugal.
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Yu S, Su W, Wu D, Yao Z, Liu J, Tang J, Wu W. Thermal treatment of flame retardant plastics: A case study on a waste TV plastic shell sample. THE SCIENCE OF THE TOTAL ENVIRONMENT 2019; 675:651-657. [PMID: 31039499 DOI: 10.1016/j.scitotenv.2019.04.264] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/26/2019] [Revised: 03/13/2019] [Accepted: 04/17/2019] [Indexed: 05/28/2023]
Abstract
In this work, the combustion and pyrolysis characteristics of a waste TV plastic shell sample were investigated using a powerful Thermogravimetric-Fourier Infrared Spectrum-Mass Spectrum (TG-FTIR-MS) technique. The decomposition mechanisms of plastic waste and fate of bromines in both thermal processes were probed as well. The TG analysis revealed that the combustion rate was larger than that of pyrolysis at temperature of 456 °C below, whereas it decreased at temperature of 456-605 °C. As a result, the total weight loss was equivalent at temperature of 605 °C for both processes. The FTIR analysis indicated the plastic combusted vigorously at 300-500 °C and 800-900 °C. As a comparison, it decomposed drastically at 300-400 °C and 500-900° in pyrolysis. The MS analysis showed that the release of brominated products HBr, CH3Br, C2H5Br, C3H5Br, C3H7Br and C3H5BrO increased with an increase of temperature and reached maximum at 400-600 °C in both thermal processes. The release intensities of larger molecules C6H5Br, C6H5BrO and C6H4Br2 were in the descending order of C6H5Br > C6H4Br2 > C6H5BrO. It was not significant in the evolved products and decomposition pathway for both thermal processes. The entire decomposition of TV plastic shell sample could be divided into three stages, taking account of the evolved products. The backbone in acrylonitrile butadiene styrene resin and tetrabromobisphenol A first broke at 350 °C below, resulting in the form of 2-bromophenol, styrene, acrylonitrile and polybutadiene. Subsequently, the resulted 2-bromophenol debrominated forming HBr, which further reacted with hydrocarbons resulting in various brominated derivates. In addition, many small molecules, including CO2, CO and CH4 were generated in this stage. Further increasing temperature to 550 °C above, larger brominated derivates decomposed and smaller molecules predominated.
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Affiliation(s)
- Shaoqi Yu
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
| | - Weiping Su
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
| | - Daidai Wu
- Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, China
| | - Zhitong Yao
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; Key Laboratory for Solid Waste Management and Environment Safety, Ministry of Education of China, Tsinghua University, Beijing 100084, China.
| | - Jie Liu
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
| | - Junhong Tang
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
| | - Weihong Wu
- College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
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