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Wang G, Meng F, Chen Y, Lotnyk A, Shen X. Boosting Thermoelectric Performance of Bi 2 Te 3 Material by Microstructure Engineering. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2308056. [PMID: 38059833 PMCID: PMC10853752 DOI: 10.1002/advs.202308056] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/24/2023] [Revised: 11/18/2023] [Indexed: 12/08/2023]
Abstract
Due to the intrinsic contradiction of electrical conductivity and Seebeck coefficient in thermoelectric materials, the enhancement for the power factor (PF) is limited. Since the PF decides the output power, strategies to the enhancement of PF are of paramount importance. In this work, Bi2 Te3 /Sb and Bi2 Te3 /W multilayer films are proposed to enhance the thermoelectric properties. Both systems possess extremely high conductivity of ≈5.6 × 105 S m-1 . Moreover, the electrical conductivity and Seebeck coefficient simultaneously increase as temperature rising, showing the overcome of the intrinsic contradiction. This results in ultrahigh PFs of 1785 µWm-1 K-2 for Bi2 Te3 /W and of 1566 µWm-1 K-2 for Bi2 Te3 /Sb at 600 K. Thermal heating of the Bi2 Te3 /Sb multilayer system shows compositional changes with subsequent formation of Bi-Te-Sb phases, Sb-rich Bi-Te precipitates, and cavities. Contrary, the multilayer structure of the Bi2 Te3 /W films is maintained, while Bi2 Te3 grains of high-crystalline quality are confined between the W layers. In addition, bilayer defects in Bi2 Te3 and smaller cavities at the interface to W layers are also observed. Thus, compositional and confinement effects as well as structural defects result in the ultrahigh PF. Overall, this work demonstrates the strategies on how to obtain ultrahigh PFs of commercial Bi2 Te3 material by microstructure engineering using multilayer structures.
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Affiliation(s)
- Guoxiang Wang
- Laboratory of Infrared Materials and DevicesThe Research Institute of Advanced TechnologiesNingbo UniversityNingboZhejiang315211China
| | - Fanzheng Meng
- Laboratory of Infrared Materials and DevicesThe Research Institute of Advanced TechnologiesNingbo UniversityNingboZhejiang315211China
| | - Yingqi Chen
- Laboratory of Infrared Materials and DevicesThe Research Institute of Advanced TechnologiesNingbo UniversityNingboZhejiang315211China
| | - Andriy Lotnyk
- Laboratory of Infrared Materials and DevicesThe Research Institute of Advanced TechnologiesNingbo UniversityNingboZhejiang315211China
- Leibniz Institute of Surface Engineering (IOM)Permoserstr. 15D‐04318LeipzigGermany
| | - Xiang Shen
- Laboratory of Infrared Materials and DevicesThe Research Institute of Advanced TechnologiesNingbo UniversityNingboZhejiang315211China
- Institute of Ocean EngineeringNingbo UniversityNingboZhejiang315211China
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2
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Wu X, Khan AI, Lee H, Hsu CF, Zhang H, Yu H, Roy N, Davydov AV, Takeuchi I, Bao X, Wong HSP, Pop E. Novel nanocomposite-superlattices for low energy and high stability nanoscale phase-change memory. Nat Commun 2024; 15:13. [PMID: 38253559 PMCID: PMC10803317 DOI: 10.1038/s41467-023-42792-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/03/2023] [Accepted: 10/20/2023] [Indexed: 01/24/2024] Open
Abstract
Data-centric applications are pushing the limits of energy-efficiency in today's computing systems, including those based on phase-change memory (PCM). This technology must achieve low-power and stable operation at nanoscale dimensions to succeed in high-density memory arrays. Here we use a novel combination of phase-change material superlattices and nanocomposites (based on Ge4Sb6Te7), to achieve record-low power density ≈ 5 MW/cm2 and ≈ 0.7 V switching voltage (compatible with modern logic processors) in PCM devices with the smallest dimensions to date (≈ 40 nm) for a superlattice technology on a CMOS-compatible substrate. These devices also simultaneously exhibit low resistance drift with 8 resistance states, good endurance (≈ 2 × 108 cycles), and fast switching (≈ 40 ns). The efficient switching is enabled by strong heat confinement within the superlattice materials and the nanoscale device dimensions. The microstructural properties of the Ge4Sb6Te7 nanocomposite and its high crystallization temperature ensure the fast-switching speed and stability in our superlattice PCM devices. These results re-establish PCM technology as one of the frontrunners for energy-efficient data storage and computing.
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Affiliation(s)
- Xiangjin Wu
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | - Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | - Hengyuan Lee
- Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan
| | - Chen-Feng Hsu
- Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan
| | - Huairuo Zhang
- Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, MD, USA
- Theiss Research, Inc., La Jolla, CA, USA
| | - Heshan Yu
- Department of Materials Science and Engineering, University of Maryland, College Park, MD, USA
- School of Microelectronics, Tianjin University, Tianjin, China
| | - Neel Roy
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | - Albert V Davydov
- Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, MD, USA
| | - Ichiro Takeuchi
- Department of Materials Science and Engineering, University of Maryland, College Park, MD, USA
| | - Xinyu Bao
- Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA
| | - H-S Philip Wong
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA.
- Department of Materials Science & Engineering, Stanford University, Stanford, CA, USA.
- Precourt Institute for Energy, Stanford University, Stanford, CA, USA.
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3
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Cecchi S, Momand J, Dragoni D, Abou El Kheir O, Fagiani F, Kriegner D, Rinaldi C, Arciprete F, Holý V, Kooi BJ, Bernasconi M, Calarco R. Thick Does the Trick: Genesis of Ferroelectricity in 2D GeTe-Rich (GeTe) m (Sb 2 Te 3 ) n Lamellae. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2304785. [PMID: 37988708 PMCID: PMC10767439 DOI: 10.1002/advs.202304785] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2023] [Revised: 09/28/2023] [Indexed: 11/23/2023]
Abstract
The possibility to engineer (GeTe)m (Sb2 Te3 )n phase-change materials to co-host ferroelectricity is extremely attractive. The combination of these functionalities holds great technological impact, potentially enabling the design of novel multifunctional devices. Here an experimental and theoretical study of epitaxial (GeTe)m (Sb2 Te3 )n with GeTe-rich composition is presented. These layered films feature a tunable distribution of (GeTe)m (Sb2 Te3 )1 blocks of different sizes. Breakthrough evidence of ferroelectric displacement in thick (GeTe)m (Sb2 Te3 )1 lamellae is provided. The density functional theory calculations suggest the formation of a tilted (GeTe)m slab sandwiched in GeTe-rich blocks. That is, the net ferroelectric polarization is confined almost in-plane, representing an unprecedented case between 2D and bulk ferroelectric materials. The ferroelectric behavior is confirmed by piezoresponse force microscopy and electroresistive measurements. The resilience of the quasi van der Waals character of the films, regardless of their composition, is also demonstrated. Hence, the material developed hereby gathers in a unique 2D platform the phase-change and ferroelectric switching properties, paving the way for the conception of innovative device architectures.
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Affiliation(s)
- Stefano Cecchi
- Department of Materials ScienceUniversity of Milano‐Bicoccavia R. Cozzi 5520125MilanoItaly
- Paul‐Drude‐Institut für FestkörperelektronikLeibniz‐Institut im Forschungsverbund Berlin e.V.Hausvogteiplatz 5‐710117BerlinGermany
| | - Jamo Momand
- Zernike Institute for Advanced MaterialsUniversity of GroningenNijenborgh 49747 AGGroningenThe Netherlands
| | - Daniele Dragoni
- Department of Materials ScienceUniversity of Milano‐Bicoccavia R. Cozzi 5520125MilanoItaly
| | - Omar Abou El Kheir
- Department of Materials ScienceUniversity of Milano‐Bicoccavia R. Cozzi 5520125MilanoItaly
| | - Federico Fagiani
- Dipartimento di FisicaPolitecnico di MilanoP.zza Leonardo da Vinci 3220133MilanoItaly
| | - Dominik Kriegner
- Institute of Solid State and Materials PhysicsTechnische Universität DresdenHelmholtzstr. 1001069DresdenGermany
- Institute of PhysicsCzech Academy of SciencesCukrovarnická 10/11216200Praha 6Czech Republic
| | - Christian Rinaldi
- Dipartimento di FisicaPolitecnico di MilanoP.zza Leonardo da Vinci 3220133MilanoItaly
| | - Fabrizio Arciprete
- Dipartimento di FisicaUniversità di Roma “Tor Vergata”Via della Ricerca Scientifica 100133RomeItaly
| | - Vaclav Holý
- Department of Condensed Matter PhysicsFaculty of Mathematics and PhysicsCharles University, Ke Karlovu 512116PrahaCzech Republic
- Institute of Condensed Matter PhysicsFaculty of ScienceMasaryk UniversityKotlářská 2611 37BrnoCzech Republic
| | - Bart J. Kooi
- Zernike Institute for Advanced MaterialsUniversity of GroningenNijenborgh 49747 AGGroningenThe Netherlands
| | - Marco Bernasconi
- Department of Materials ScienceUniversity of Milano‐Bicoccavia R. Cozzi 5520125MilanoItaly
| | - Raffaella Calarco
- Paul‐Drude‐Institut für FestkörperelektronikLeibniz‐Institut im Forschungsverbund Berlin e.V.Hausvogteiplatz 5‐710117BerlinGermany
- CNR Institute for Microelectronics and Microsystems–IMMConsiglio Nazionale delle RicercheVia del Fosso del Cavaliere 10000133RomaItaly
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4
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Oh JS, Jo KJ, Kang MC, An BS, Kwon Y, Lim HW, Cho MH, Baik H, Yang CW. Measurement of dielectric function and bandgap of germanium telluride using monochromated electron energy-loss spectroscopy. Micron 2023; 172:103487. [PMID: 37285687 DOI: 10.1016/j.micron.2023.103487] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/27/2023] [Revised: 05/16/2023] [Accepted: 05/30/2023] [Indexed: 06/09/2023]
Abstract
Using a monochromator in transmission electron microscopy, a low-energy-loss spectrum can provide inter- and intra-band transition information for nanoscale devices with high energy and spatial resolutions. However, some losses, such as Cherenkov radiation, phonon scattering, and surface plasmon resonance superimposed at zero-loss peak, make it asymmetric. These pose limitations to the direct interpretation of optical properties, such as complex dielectric function and bandgap onset in the raw electron energy-loss spectra. This study demonstrates measuring the dielectric function of germanium telluride using an off-axis electron energy-loss spectroscopy method. The interband transition from the measured complex dielectric function agrees with the calculated band structure of germanium telluride. In addition, we compare the zero-loss subtraction models and propose a reliable routine for bandgap measurement from raw valence electron energy-loss spectra. Using the proposed method, the direct bandgap of germanium telluride thin film was measured from the low-energy-loss spectrum in transmission electron microscopy. The result is in good agreement with the bandgap energy measured using an optical method.
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Affiliation(s)
- Jin-Su Oh
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea
| | - Kyu-Jin Jo
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea
| | - Min-Chul Kang
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea
| | - Byeong-Seon An
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea
| | - Yena Kwon
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea
| | - Hyeon-Wook Lim
- Department of Physics, Yonsei University, Seoul 03722, the Republic of Korea
| | - Mann-Ho Cho
- Department of Physics, Yonsei University, Seoul 03722, the Republic of Korea
| | - Hionsuck Baik
- Seoul Center, Korea Basic Science Institute (KBSI), Seoul 02841, the Republic of Korea
| | - Cheol-Woong Yang
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, the Republic of Korea.
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5
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Zhang H, Ahmadi M, Ginanjar WW, Blake GR, Kooi BJ. Effects of Intermixing in Sb 2Te 3/Ge 1+xTe Multilayers on the Thermoelectric Power Factor. ACS APPLIED MATERIALS & INTERFACES 2023; 15:22672-22683. [PMID: 37122126 PMCID: PMC10176324 DOI: 10.1021/acsami.3c00869] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Over the past few decades, telluride-based chalcogenide multilayers, such as PbSeTe/PbTe, Bi2Te3/Sb2Te3, and Bi2Te3/Bi2Se3, were shown to be promising high-performance thermoelectric films. However, the stability of performance in operating environments, in particular, influenced by intermixing of the sublayers, has been studied rarely. In the present work, the nanostructure, thermal stability, and thermoelectric power factor of Sb2Te3/Ge1+xTe multilayers prepared by pulsed laser deposition are investigated by transmission electron microscopy and Seebeck coefficient/electrical conductivity measurements performed during thermal cycling. Highly textured Sb2Te3 films show p-type semiconducting behavior with superior power factor, while Ge1+xTe films exhibit n-type semiconducting behavior. The elemental mappings indicate that the as-deposited multilayers have well-defined layered structures. Upon heating to 210 °C, these layer structures are unstable against intermixing of sublayers; nanostructural changes occur on initial heating, even though the highest temperature is close to the deposition temperature. Furthermore, the diffusion is more extensive at domain boundaries leading to locally inclined structures there. The Sb2Te3 sublayers gradually dissolve into Ge1+xTe. This dissolution depends markedly on the relative Ge1+xTe film thickness. Rather, full dissolution occurs rapidly at 210 °C when the Ge1+xTe sublayer is substantially thicker than that of Sb2Te3, whereas the dissolution is very limited when the Ge1+xTe sublayer is substantially thinner. The resulting variations of the nanostructure influence the Seebeck coefficient and electrical conductivity and thus the power factor in a systematic manner. Our results shed light on a previously unreported correlation of the power factor with the nanostructural evolution of unstable telluride multilayers.
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Affiliation(s)
- Heng Zhang
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
| | - Majid Ahmadi
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
| | - Wastu Wisesa Ginanjar
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
| | - Graeme R Blake
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
| | - Bart J Kooi
- Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
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6
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Zhang W, Zhang H, Sun S, Wang X, Lu Z, Wang X, Wang J, Jia C, Schön C, Mazzarello R, Ma E, Wuttig M. Metavalent Bonding in Layered Phase-Change Memory Materials. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2300901. [PMID: 36995041 PMCID: PMC10214272 DOI: 10.1002/advs.202300901] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2023] [Revised: 03/04/2023] [Indexed: 05/27/2023]
Abstract
Metavalent bonding (MVB) is characterized by the competition between electron delocalization as in metallic bonding and electron localization as in covalent or ionic bonding, serving as an essential ingredient in phase-change materials for advanced memory applications. The crystalline phase-change materials exhibits MVB, which stems from the highly aligned p orbitals and results in large dielectric constants. Breaking the alignment of these chemical bonds leads to a drastic reduction in dielectric constants. In this work, it is clarified how MVB develops across the so-called van der Waals-like gaps in layered Sb2 Te3 and Ge-Sb-Te alloys, where coupling of p orbitals is significantly reduced. A type of extended defect involving such gaps in thin films of trigonal Sb2 Te3 is identified by atomic imaging experiments and ab initio simulations. It is shown that this defect has an impact on the structural and optical properties, which is consistent with the presence of non-negligible electron sharing in the gaps. Furthermore, the degree of MVB across the gaps is tailored by applying uniaxial strain, which results in a large variation of dielectric function and reflectivity in the trigonal phase. At last, design strategies are provided for applications utilizing the trigonal phase.
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Affiliation(s)
- Wei Zhang
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Hangming Zhang
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Suyang Sun
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Xiaozhe Wang
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Zhewen Lu
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Xudong Wang
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Jiang‐Jing Wang
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Chunlin Jia
- School of MicroelectronicsState Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | | | | | - En Ma
- Center for Alloy Innovation and Design (CAID)State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong UniversityXi'an710049China
| | - Matthias Wuttig
- Institute of Physics IAJARA‐FITRWTH Aachen University52074AachenGermany
- Peter Grünberg Institute (PGI 10)Forschungszentrum Jülich GmbH52425JülichGermany
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7
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Kim D, Kim Y, Oh JS, Lee C, Lim H, Yang CW, Sim E, Cho MH. Conversion between Metavalent and Covalent Bond in Metastable Superlattices Composed of 2D and 3D Sublayers. ACS NANO 2022; 16:20758-20769. [PMID: 36469438 DOI: 10.1021/acsnano.2c07811] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Reversible conversion over multimillion times in bond types between metavalent and covalent bonds becomes one of the most promising bases for universal memory. As the conversions have been found in metastable states, an extended category of crystal structures from stable states via redistribution of vacancies, research on kinetic behavior of the vacancies is highly in demand. However, it remains lacking due to difficulties with experimental analysis. Herein, the direct observation of the evolution of chemical states of vacancies clarifies the behavior by combining analysis on charge density distribution, electrical conductivity, and crystal structures. Site-switching of vacancies of Sb2Te3 gradually occurs with diverged energy barriers owing to their own activation code: the accumulation of vacancies triggers spontaneous gliding along atomic planes to relieve electrostatic repulsion. Studies on the behavior can be further applied to multiphase superlattices composed of Sb2Te3 (2D) and GeTe (3D) sublayers, which represent superior memory performances, but their operating mechanisms were still under debate due to their complexity. The site-switching is favorable (suppressed) when Te-Te bonds are formed as physisorption (chemisorption) over the interface between Sb2Te3 (2D) and GeTe (3D) sublayers driven by configurational entropic gain (electrostatic enthalpic loss). Depending on the type of interfaces between sublayers, phases of the superlattices are classified into metastable and stable states, where the conversion could only be achieved in the metastable state. From this comprehensive understanding on the operating mechanism via kinetic behaviors of vacancies and the metastability, further studies toward vacancy engineering are expected in versatile materials.
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Affiliation(s)
- Dasol Kim
- Department of Physics, Yonsei University, 03722 Seoul, Republic of Korea
- I. Institute of Physics, Physics of Novel Materials, RWTH Aachen University, 52056 Aachen, Germany
| | - Youngsam Kim
- Department of Chemistry, Yonsei University, 03722 Seoul, Republic of Korea
| | - Jin-Su Oh
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, 16419 Suwon, Republic of Korea
| | - Changwoo Lee
- Department of Physics, Yonsei University, 03722 Seoul, Republic of Korea
| | - Hyeonwook Lim
- Department of Physics, Yonsei University, 03722 Seoul, Republic of Korea
| | - Cheol-Woong Yang
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, 16419 Suwon, Republic of Korea
| | - Eunji Sim
- Department of Chemistry, Yonsei University, 03722 Seoul, Republic of Korea
| | - Mann-Ho Cho
- Department of Physics, Yonsei University, 03722 Seoul, Republic of Korea
- Department of System Semiconductor Engineering, Yonsei University, 03722 Seoul, Republic of Korea
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8
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Yu Y, Xie L, Pennycook SJ, Bosman M, He J. Strain-induced van der Waals gaps in GeTe revealed by in situ nanobeam diffraction. SCIENCE ADVANCES 2022; 8:eadd7690. [PMID: 36367928 PMCID: PMC9651738 DOI: 10.1126/sciadv.add7690] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/03/2022] [Accepted: 09/27/2022] [Indexed: 06/16/2023]
Abstract
Ordered germanium vacancies in germanium telluride thermoelectric material are called van der Waals (vdW) gaps, and they are beneficial for the thermoelectric performance of the material. The vdW gaps have been observed by atomic resolution scanning transmission electron microscopy, but their origin remains unclear, which prevents their extensive application in other materials systems. Here, we report that the occurrence of vdW gaps in germanium telluride is mainly driven by strain from the cubic-to-rhombohedral martensitic transition. Direct strain and structural evidence are given here by in situ nanobeam diffraction and in situ transmission electron microscopy observation. Dislocation theory is used to discuss the origin of vdW gaps. Our work here paves the way for self-assembling two-dimensional ordered vacancies, which establishes a previously unidentified degree of freedom to adjust their electronic and thermal properties.
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Affiliation(s)
- Yong Yu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, Shenzhen 518055, China
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
| | - Lin Xie
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, Shenzhen 518055, China
| | - Stephen J. Pennycook
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
| | - Michel Bosman
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
| | - Jiaqing He
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, Shenzhen 518055, China
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9
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Yu Y, Xu X, Wang Y, Jia B, Huang S, Qiang X, Zhu B, Lin P, Jiang B, Liu S, Qi X, Pan K, Wu D, Lu H, Bosman M, Pennycook SJ, Xie L, He J. Tunable quantum gaps to decouple carrier and phonon transport leading to high-performance thermoelectrics. Nat Commun 2022; 13:5612. [PMID: 36153314 PMCID: PMC9509343 DOI: 10.1038/s41467-022-33330-9] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/26/2022] [Accepted: 09/14/2022] [Indexed: 11/09/2022] Open
Abstract
Thermoelectrics enable direct heat-to-electricity transformation, but their performance has so far been restricted by the closely coupled carrier and phonon transport. Here, we demonstrate that the quantum gaps, a class of planar defects characterized by nano-sized potential wells, can decouple carrier and phonon transport by selectively scattering phonons while allowing carriers to pass effectively. We choose the van der Waals gap in GeTe-based materials as a representative example of the quantum gap to illustrate the decoupling mechanism. The nano-sized potential well of the quantum gap in GeTe-based materials is directly visualized by in situ electron holography. Moreover, a more diffused distribution of quantum gaps results in further reduction of lattice thermal conductivity, which leads to a peak ZT of 2.6 at 673 K and an average ZT of 1.6 (323-723 K) in a GeTe system. The quantum gap can also be engineered into other thermoelectrics, which provides a general method for boosting their thermoelectric performance.
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Affiliation(s)
- Yong Yu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore, Singapore
| | - Xiao Xu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Yan Wang
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Baohai Jia
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Shan Huang
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Xiaobin Qiang
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Bin Zhu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Peijian Lin
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Binbin Jiang
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Shixuan Liu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Xia Qi
- School of Materials Science and Engineering, Shaanxi Normal University; Key Laboratory for Macromolecular Science of Shaanxi Province, 710062, Xi'an, China
| | - Kefan Pan
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Di Wu
- School of Materials Science and Engineering, Shaanxi Normal University; Key Laboratory for Macromolecular Science of Shaanxi Province, 710062, Xi'an, China
| | - Haizhou Lu
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China
| | - Michel Bosman
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore, Singapore
| | - Stephen J Pennycook
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore, Singapore
| | - Lin Xie
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China.
| | - Jiaqing He
- Shenzhen Key Laboratory of Thermoelectric Materials, Department of Physics, Southern University of Science and Technology, 518055, Shenzhen, China.
- Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices, Southern University of Science and Technology, 518055, Shenzhen, China.
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10
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Khan AI, Wu X, Perez C, Won B, Kim K, Ramesh P, Kwon H, Tung MC, Lee Z, Oh IK, Saraswat K, Asheghi M, Goodson KE, Wong HSP, Pop E. Unveiling the Effect of Superlattice Interfaces and Intermixing on Phase Change Memory Performance. NANO LETTERS 2022; 22:6285-6291. [PMID: 35876819 DOI: 10.1021/acs.nanolett.2c01869] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Superlattice (SL) phase change materials have shown promise to reduce the switching current and resistance drift of phase change memory (PCM). However, the effects of internal SL interfaces and intermixing on PCM performance remain unexplored, although these are essential to understand and ensure reliable memory operation. Here, using nanometer-thin layers of Ge2Sb2Te5 and Sb2Te3 in SL-PCM, we uncover that both switching current density (Jreset) and resistance drift coefficient (v) decrease as the SL period thickness is reduced (i.e., higher interface density); however, interface intermixing within the SL increases both. The signatures of distinct versus intermixed interfaces also show up in transmission electron microscopy, X-ray diffraction, and thermal conductivity measurements of our SL films. Combining the lessons learned, we simultaneously achieve low Jreset ≈ 3-4 MA/cm2 and ultralow v ≈ 0.002 in mushroom-cell SL-PCM with ∼110 nm bottom contact diameter, thus advancing SL-PCM technology for high-density storage and neuromorphic applications.
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Affiliation(s)
- Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Xiangjin Wu
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Christopher Perez
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Byoungjun Won
- Department of Electrical and Computer Engineering, Ajou University, Suwon 16499, Republic of Korea
| | - Kangsik Kim
- Center for Multidimensional Carbon Materials, Institute for Basic Science, Ulsan 44919, Republic of Korea
| | - Pranav Ramesh
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Heungdong Kwon
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Maryann C Tung
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Zonghoon Lee
- Center for Multidimensional Carbon Materials, Institute for Basic Science, Ulsan 44919, Republic of Korea
- Department of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea
| | - Il-Kwon Oh
- Department of Electrical and Computer Engineering, Ajou University, Suwon 16499, Republic of Korea
| | - Krishna Saraswat
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Mehdi Asheghi
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Kenneth E Goodson
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - H-S Philip Wong
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
- Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States
- Precourt Institute for Energy, Stanford University, Stanford, California 94305, United States
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11
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Khan AI, Daus A, Islam R, Neilson KM, Lee HR, Wong HSP, Pop E. Ultralow-switching current density multilevel phase-change memory on a flexible substrate. Science 2021; 373:1243-1247. [PMID: 34516795 DOI: 10.1126/science.abj1261] [Citation(s) in RCA: 35] [Impact Index Per Article: 8.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/23/2022]
Abstract
[Figure: see text].
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Affiliation(s)
- Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Alwin Daus
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Raisul Islam
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Kathryn M Neilson
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Hye Ryoung Lee
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA.,Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305 USA
| | - H-S Philip Wong
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA.,Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305 USA.,Precourt Institute for Energy, Stanford University, Stanford, CA 94305, USA
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12
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Kwon H, Khan AI, Perez C, Asheghi M, Pop E, Goodson KE. Uncovering Thermal and Electrical Properties of Sb 2Te 3/GeTe Superlattice Films. NANO LETTERS 2021; 21:5984-5990. [PMID: 34270270 DOI: 10.1021/acs.nanolett.1c00947] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Superlattice-like phase change memory (SL-PCM) promises lower switching current than conventional PCM based on Ge2Sb2Te5 (GST); however, a fundamental understanding of SL-PCM requires detailed characterization of the interfaces within such an SL. Here we explore the electrical and thermal transport of SLs with deposited Sb2Te3 and GeTe alternating layers of various thicknesses. We find up to an approximately four-fold reduction of the effective cross-plane thermal conductivity of the SL stack (as-deposited polycrystalline) compared with polycrystalline GST (as-deposited amorphous and later annealed) due to the thermal interface resistances within the SL. Thermal measurements with varying periods of our SLs show a signature of phonon coherence with a transition from wave-like to particle-like phonon transport, further described by our modeling. Electrical resistivity measurements of such SLs reveal strong anisotropy (∼2000×) between the in-plane and cross-plane directions due to the weakly interacting van der Waals-like gaps. This work uncovers electrothermal transport in SLs based on Sb2Te3 and GeTe for the improved design of low-power PCM.
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Affiliation(s)
- Heungdong Kwon
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Christopher Perez
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Mehdi Asheghi
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
- Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United States
| | - Kenneth E Goodson
- Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States
- Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United States
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13
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Zaytseva YS, Borgardt NI, Prikhodko AS, Zallo E, Calarko R. Electron Microscopy Study of Surface Islands in Epitaxial Ge3Sb2Te6 Layer Grown on a Silicon Substrate. CRYSTALLOGR REP+ 2021. [DOI: 10.1134/s1063774521030317] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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14
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Han G, Liu F, Li W, Huang Y, Sun N, Ye F. Local structure and phase change behavior in interfacial intermixing GeTe-Sb 2Te 3 superlattices. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2020; 32:255401. [PMID: 32050167 DOI: 10.1088/1361-648x/ab7577] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Ge/Sb atomic intermixing in interfacial cationic layers is a common phenomenon for GeTe-Sb2Te3 superlattice (GST-SL) used in memory devices. In this paper, we explored the effect of Ge/Sb intermixing on the phase change behavior of GST-SL upon the heating-quenching procedure. Four interfacial intermixing models of Kooi, Ferro, Petrov and inverted Petrov with different Ge/Sb intermixing ratios (25/75, 50/50 and 75/25) were developed based on the ab initio molecular dynamics. The structural evolution indicated that the Ge/Sb interfacial intermixing could facilitate the structure changes especially for 50/50 Ge/Sb intermixed models. When quenching from 1500 K, more 4-fold Ge-centered octahedrons were produced than tetrahedrons, and the electron localization function further proved that the distorted of Ge(Sb)-centered 6-fold octahedrons were caused by the asymmetrical interactions of Ge-Ge/Sb and Ge-Te. A relatively large Te p orbital contribution in coexisted Ge/Te layer led to a narrower bandgap. In addition, different Ge/Sb atom intermixed ratio which affected the electronic local structure, led to the discrepancy in the initial atom movement of Sb or Ge movement near the gap. The present studies enrich the understanding of Ge/Sb interfacial atomic intermixing effects in GST-SL structural changes.
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Affiliation(s)
- Gang Han
- Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, People's Republic of China. Beijing Engineering Research Center of Applied Laser Technology, Beijing University of Technology, Beijing 100124, People's Republic of China
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15
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Zhang B, Cicmancova V, Kupcik J, Slang S, Rodriguez Pereira J, Svoboda R, Kutalek P, Wagner T. A layered Ge 2Sb 2Te 5 phase change material. NANOSCALE 2020; 12:3351-3358. [PMID: 31984410 DOI: 10.1039/c9nr08745a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
In this study, a universal Ge2Sb2Te5 phase change material was sputtered to obtain a layered structure. The crystalline phase of this material was prepared by annealing. SEM (scanning electron microscopy) and HRTEM (high-resolution transmission electron microscopy) images give confirmed that the sputtered Ge2Sb2Te5 thin film in crystalline phase has multiple layers. The layers can be exfoliated by acetone. The thicknesses of acetone-exfoliated crystalline and amorphous flakes are approx. 10-60 nm.
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Affiliation(s)
- Bo Zhang
- Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 573, 532 10 Pardubice, Czech Republic.
| | - Veronika Cicmancova
- Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Nam. Cs. Legii 565, 530 02 Pardubice, Czech Republic
| | - Jaroslav Kupcik
- Institute of Inorganic Chemistry, ASCR, 250 68 Husinec-ŘeŽ, Czech Republic
| | - Stanislav Slang
- Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Nam. Cs. Legii 565, 530 02 Pardubice, Czech Republic
| | - Jhonatan Rodriguez Pereira
- Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Nam. Cs. Legii 565, 530 02 Pardubice, Czech Republic
| | - Roman Svoboda
- Department of Physical Chemistry Faculty of Chemical Technology, University of Pardubice, Studentska 573, 532 10 Pardubice, Czech Republic
| | - Petr Kutalek
- Joint Laboratory of Solid State Chemistry, University of Pardubice, Studentska 84, 532 10 Pardubice, Czech Republic
| | - Tomas Wagner
- Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 573, 532 10 Pardubice, Czech Republic. and Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Nam. Cs. Legii 565, 530 02 Pardubice, Czech Republic
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16
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Lotnyk A, Behrens M, Rauschenbach B. Phase change thin films for non-volatile memory applications. NANOSCALE ADVANCES 2019; 1:3836-3857. [PMID: 36132100 PMCID: PMC9419560 DOI: 10.1039/c9na00366e] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/11/2019] [Accepted: 09/17/2019] [Indexed: 06/10/2023]
Abstract
The rapid development of Internet of Things devices requires real time processing of a huge amount of digital data, creating a new demand for computing technology. Phase change memory technology based on chalcogenide phase change materials meets many requirements of the emerging memory applications since it is fast, scalable and non-volatile. In addition, phase change memory offers multilevel data storage and can be applied both in neuro-inspired and all-photonic in-memory computing. Furthermore, phase change alloys represent an outstanding class of functional materials having a tremendous variety of industrially relevant characteristics and exceptional material properties. Many efforts have been devoted to understanding these properties with the particular aim to design universal memory. This paper reviews materials science aspects of chalcogenide-based phase change thin films relevant for non-volatile memory applications. Particular emphasis is put on local structure, control of disorder and its impact on material properties, order-disorder transitions and interfacial transformations.
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Affiliation(s)
- A Lotnyk
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
| | - M Behrens
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
| | - B Rauschenbach
- Leibniz Institute of Surface Engineering (IOM) Permoserstr. 15 04318 Leipzig Germany
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17
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Lotnyk A, Dankwort T, Hilmi I, Kienle L, Rauschenbach B. In situ observations of the reversible vacancy ordering process in van der Waals-bonded Ge-Sb-Te thin films and GeTe-Sb 2Te 3 superlattices. NANOSCALE 2019. [PMID: 31135011 DOI: 10.1016/j.scriptamat.2019.03.024] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
Chalcogenide-based thin films are employed in data storage and memory technology whereas van der Waals-bonded layered chalcogenide heterostructures are considered to be a main contender for memory devices with low power consumption. The reduction of switching energy is due to the lowering of entropic losses governed by the restricted motion of atoms in one dimension within the crystalline states. The investigations of switching mechanisms in such superlattices have recently attracted much attention and the proposed models are still under debate. This is partially due to the lack of direct observation of atomic scale processes, which might occur in these chalcogenide systems. This work reports direct, nanoscale observations of the order-disorder processes in van der Waals bonded Ge-Sb-Te thin films and GeTe-Sb2Te3-based superlattices using in situ experiments inside an aberration-corrected transmission electron microscope. The findings reveal a reversible self-assembled reconfiguration of the structural order in these materials. This process is associated with the ordering of randomly distributed vacancies within the studied materials into ordered vacancy layers and with readjustment of the lattice plane distances within the newly formed layered structures, indicating the high flexibility of these layered chalcogenide-based systems. Thus, the ordering process results in the formation of vacancy-bonded building blocks intercalated within van der Waals-bonded units. Moreover, vacancy-bonded building blocks can be reconfigured to the initial structure under the influence of an electron beam, while in situ exposure of the recovered layers to a targeted electron beam leads to the reverse process. Overall, the outcomes provide new insights into local structure and switching mechanism in chalcogenide superlattices.
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Affiliation(s)
- Andriy Lotnyk
- Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318, Leipzig, Germany.
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18
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Lotnyk A, Dankwort T, Hilmi I, Kienle L, Rauschenbach B. In situ observations of the reversible vacancy ordering process in van der Waals-bonded Ge-Sb-Te thin films and GeTe-Sb 2Te 3 superlattices. NANOSCALE 2019; 11:10838-10845. [PMID: 31135011 DOI: 10.1039/c9nr02112d] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
Chalcogenide-based thin films are employed in data storage and memory technology whereas van der Waals-bonded layered chalcogenide heterostructures are considered to be a main contender for memory devices with low power consumption. The reduction of switching energy is due to the lowering of entropic losses governed by the restricted motion of atoms in one dimension within the crystalline states. The investigations of switching mechanisms in such superlattices have recently attracted much attention and the proposed models are still under debate. This is partially due to the lack of direct observation of atomic scale processes, which might occur in these chalcogenide systems. This work reports direct, nanoscale observations of the order-disorder processes in van der Waals bonded Ge-Sb-Te thin films and GeTe-Sb2Te3-based superlattices using in situ experiments inside an aberration-corrected transmission electron microscope. The findings reveal a reversible self-assembled reconfiguration of the structural order in these materials. This process is associated with the ordering of randomly distributed vacancies within the studied materials into ordered vacancy layers and with readjustment of the lattice plane distances within the newly formed layered structures, indicating the high flexibility of these layered chalcogenide-based systems. Thus, the ordering process results in the formation of vacancy-bonded building blocks intercalated within van der Waals-bonded units. Moreover, vacancy-bonded building blocks can be reconfigured to the initial structure under the influence of an electron beam, while in situ exposure of the recovered layers to a targeted electron beam leads to the reverse process. Overall, the outcomes provide new insights into local structure and switching mechanism in chalcogenide superlattices.
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Affiliation(s)
- Andriy Lotnyk
- Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318, Leipzig, Germany.
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19
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Cojocaru-Mirédin O, Hollermann H, Mio AM, Wang AYT, Wuttig M. Role of grain boundaries in Ge-Sb-Te based chalcogenide superlattices. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2019; 31:204002. [PMID: 30769332 DOI: 10.1088/1361-648x/ab078b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Interfacial phase change memory devices based on a distinct nanoscale structure called superlattice have been shown to outperform conventional phase-change devices. This improvement has been attributed to the hetero-interfaces, which play an important role for the superior device characteristics. However, the impact of grain boundaries (GBs), usually present in large amounts in a standard sputter-deposited superlattice film, on the device performance has not yet been investigated. Therefore, in the present work, we investigate the structure and composition of superlattice films by high resolution x-ray diffraction (XRD) cross-linked with state-of-the art methods, such as correlative microscopy, i.e. a combination of high-resolution transmission electron microscopy and atom probe tomography to determine the structure and composition of GBs at the nanometer scale. Two types of GBs have been identified: high-angle grain boundaries (HAGBs) present in the upper part of a 340 nm-thick film and low-angle grain boundaries present in the first 40 nm of the bottom part of the film close to the substrate. We demonstrate that the strongest intermixing takes place at HAGBs, where heterogeneous nucleation of Ge2Sb2Te5 can be clearly determined. Yet, the Ge1Sb2Te4 phase could also be detected in the near vicinity of a low-angle grain boundary. Finally, a more realistic view of the intermixing phenomenon in Ge-Sb-Te based chalcogenide superlattices will be proposed. Moreover, we will discuss the implications of the presence of GBs on the bonding states and device performance.
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20
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Saito Y, Fons P, Mitrofanov KV, Makino K, Tominaga J, Robertson J, Kolobov AV. Chalcogenide van der Waals superlattices: a case example of interfacial phase-change memory. PURE APPL CHEM 2019. [DOI: 10.1515/pac-2019-0105] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/15/2022]
Abstract
Abstract
2D van der Waals chalcogenides such as topological insulators and transition-metal dichalcogenides and their heterostructures are now at the forefront of semiconductor research. In this paper, we discuss the fundamental features and advantages of van der Waals bonded superlattices over conventional superlattices made of 3D materials and describe in more detail one practical example, namely, interfacial phase change memory based on GeTe–Sb2Te3 superlattice structures.
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Affiliation(s)
- Yuta Saito
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
- Department of Engineering , University of Cambridge , Cambridge , United Kingdom of Great Britain and Northern Ireland
| | - Paul Fons
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
| | - Kirill V. Mitrofanov
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
| | - Kotaro Makino
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
| | - Junji Tominaga
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
| | - John Robertson
- Department of Engineering , University of Cambridge , Cambridge , United Kingdom of Great Britain and Northern Ireland
| | - Alexander V. Kolobov
- National Institute of Advanced Industrial Science and Technology , Tsukuba , Japan
- Herzen State Pedagogical University , Faculty of Physics , St. Petersburg , Russian Federation
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21
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Makino K, Kato K, Saito Y, Fons P, Kolobov AV, Tominaga J, Nakano T, Nakajima M. Terahertz generation measurements of multilayered GeTe-Sb 2Te 3 phase change materials. OPTICS LETTERS 2019; 44:1355-1358. [PMID: 30874649 DOI: 10.1364/ol.44.001355] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/16/2019] [Accepted: 02/08/2019] [Indexed: 06/09/2023]
Abstract
Multilayered structures of GeTe and Sb2Te3 phase change material, also referred to as interfacial phase change memory (iPCM), provide superior performance for nonvolatile electrical memory technology in which the atomically controlled structure plays an important role in memory operation. Here, we report on terahertz (THz) wave generation measurements. Three- and 20-layer iPCM samples were irradiated with a femtosecond laser, and the generated THz radiation was observed. The emitted THz pulse was found to be always p polarized independent of the polarization of the excitation pulse. Based on the polarization dependence as well as the flip of the THz field from photoexcited Sb2Te3 and Bi2Te3, the THz emission process can be attributed to the surge current flow due to the built-in surface depletion layer formed in p-type semiconducting iPCM materials.
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22
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Behrens M, Lotnyk A, Gerlach JW, Hilmi I, Abel T, Lorenz P, Rauschenbach B. Ultrafast interfacial transformation from 2D- to 3D-bonded structures in layered Ge-Sb-Te thin films and heterostructures. NANOSCALE 2018; 10:22946-22953. [PMID: 30500030 DOI: 10.1039/c8nr06567e] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
Two-dimensional van-der-Waals-bonded chalcogenide heterostructures have recently received a lot of attention due to promising applications in the fields of photonics, plasmonics and data storage. Of particular interest is the interfacial switching process inherent in these structures, which is assumed to occur locally at the van-der-Waals interfaces and thus represents an intracrystalline transition. However, detailed experimental studies on the underlying mechanism are still lacking. In this work, epitaxially grown thin films consisting of van-der-Waals-bonded Ge-Sb-Te and GeTe/Sb2Te3 based heterostructures are employed as a model system to investigate structural changes induced by a single ns-laser pulse. A combined approach using X-ray diffraction and advanced transmission electron microscopy is applied to study phase transitions within the Ge-Sb-Te-based thin films in detail. The results reveal ultrafast transitions from 2D-bonded layered structures to 3D-bonded structures via a transient molten phase. Moreover, the interface between the 2D- and 3D-bonded structures is well defined by a single van-der-Waals gap, suggesting that the transition can be controlled very precisely in its spatial extent by an appropriate choice of the laser fluence. Overall, the results of this work offer a new perspective on the switching mechanism in Ge-Sb-Te-based materials and demonstrate the potential of van-der-Waals-bonded Ge-Sb-Te compounds to be applied for novel phase-change memory concepts.
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Affiliation(s)
- Mario Behrens
- Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, D-04318 Leipzig, Germany.
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23
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Kowalczyk P, Hippert F, Bernier N, Mocuta C, Sabbione C, Batista-Pessoa W, Noé P. Impact of Stoichiometry on the Structure of van der Waals Layered GeTe/Sb 2 Te 3 Superlattices Used in Interfacial Phase-Change Memory (iPCM) Devices. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1704514. [PMID: 29761644 DOI: 10.1002/smll.201704514] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/26/2017] [Revised: 03/30/2018] [Indexed: 06/08/2023]
Abstract
Van der Waals layered GeTe/Sb2 Te3 superlattices (SLs) have demonstrated outstanding performances for use in resistive memories in so-called interfacial phase-change memory (iPCM) devices. GeTe/Sb2 Te3 SLs are made by periodically stacking ultrathin GeTe and Sb2 Te3 crystalline layers. The mechanism of the resistance change in iPCM devices is still highly debated. Recent experimental studies on SLs grown by molecular beam epitaxy or pulsed laser deposition indicate that the local structure does not correspond to any of the previously proposed structural models. Here, a new insight is given into the complex structure of prototypical GeTe/Sb2 Te3 SLs deposited by magnetron sputtering, which is the used industrial technique for SL growth in iPCM devices. X-ray diffraction analysis shows that the structural quality of the SL depends critically on its stoichiometry. Moreover, high-angle annular dark-field-scanning transmission electron microscopy analysis of the local atomic order in a perfectly stoichiometric SL reveals the absence of GeTe layers, and that Ge atoms intermix with Sb atoms in, for instance, Ge2 Sb2 Te5 blocks. This result shows that an alternative structural model is required to explain the origin of the electrical contrast and the nature of the resistive switching mechanism observed in iPCM devices.
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Affiliation(s)
- Philippe Kowalczyk
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
- Université Grenoble Alpes, CNRS, LTM, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Françoise Hippert
- LNCMI-EMFL-CNRS, Université Grenoble Alpes, INSA, UPS, 25, rue des Martyrs, F 38042, Grenoble Cedex 9, France
| | - Nicolas Bernier
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Cristian Mocuta
- Synchrotron SOLEIL l'Orme des Merisiers, Saint-Aubin - BP 48, F-91192, Gif-sur-Yvette Cedex, France
| | - Chiara Sabbione
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Walter Batista-Pessoa
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
| | - Pierre Noé
- Université Grenoble Alpes, CEA, LETI, 17, rue des Martyrs, F 38054, Grenoble Cedex 9, France
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24
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Wang J, Ronneberger I, Zhou L, Lu L, Deringer VL, Zhang B, Tian L, Du H, Jia C, Qian X, Wuttig M, Mazzarello R, Zhang W. Unconventional two-dimensional germanium dichalcogenides. NANOSCALE 2018; 10:7363-7368. [PMID: 29637969 DOI: 10.1039/c8nr01747f] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
The recently discovered two-dimensional (2D) group IV chalcogenides attract much attention owing to their novel electronic and photonic properties. All the reported materials of this class favor (distorted) octahedral coordination via p bonding; by contrast, in the dichalcogenides where the bonding tendency approaches sp3, no corresponding 2D phase has been realized so far. Here, by engineering the composition of a chalcogenide heterostructure, the hitherto elusive GeTe2 is experimentally observed in a confined 2D environment. Density functional theory simulations predict the existence of a freestanding monolayer of octahedrally coordinated GeTe2 under tensile strain, and the existence of GeSe2 and GeS2 in the same form under equilibrium conditions. These 2D germanium dichalcogenides are either metallic or narrow gap semiconducting, and may lead to new applications in nanoscale electronics.
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Affiliation(s)
- Jiangjing Wang
- Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China.
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Electrical and optical properties of epitaxial binary and ternary GeTe-Sb 2Te 3 alloys. Sci Rep 2018; 8:5889. [PMID: 29650968 PMCID: PMC5897367 DOI: 10.1038/s41598-018-23221-9] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/05/2018] [Accepted: 03/06/2018] [Indexed: 11/13/2022] Open
Abstract
Phase change materials such as pseudobinary GeTe-Sb2Te3 (GST) alloys are an essential part of existing and emerging technologies. Here, we investigate the electrical and optical properties of epitaxial phase change materials: α-GeTe, Ge2Sb2Te5 (GST225), and Sb2Te3. Temperature-dependent Hall measurements reveal a reduction of the hole concentration with increasing temperature in Sb2Te3 that is attributed to lattice expansion, resulting in a non-linear increase of the resistivity that is also observed in GST225. Fourier transform infrared spectroscopy at room temperature demonstrates the presence of electronic states within the energy gap for α-GeTe and GST225. We conclude that these electronic states are due to vacancy clusters inside these two materials. The obtained results shed new light on the fundamental properties of phase change materials such as the high dielectric constant and persistent photoconductivity and have the potential to be included in device simulations.
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Abstract
Metastable rocksalt structured Ge2Sb2Te5 is the most widely used phase-change material for data storage, yet the atomic arrangements of which are still under debate. In this work, we have proposed metastable stacking-polymorphism in cubic Ge2Sb2Te5 based on first-principles calculations. Our results show that cubic Ge2Sb2Te5 is actually polymorphic, varying from randomly distributed vacancies to highly ordered vacancy layers; consequently, the electrical property varies between metallic and semiconducting. These different atomic stackings of cubic Ge2Sb2Te5 can be obtained at different experimental synthetic conditions. The concept of stacking-polymorphic Ge2Sb2Te5 provides important fundamentals for metastable Ge2Sb2Te5 and is useful for tuning the performance of the phase-change materials.
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Affiliation(s)
- Shixiong He
- School of Materials Science and Engineering, and Center for Integrated Computational Materials Engineering, International Research Institute for Multidisciplinary Science, Beihang University , Beijing 100191, China
| | - Linggang Zhu
- School of Materials Science and Engineering, and Center for Integrated Computational Materials Engineering, International Research Institute for Multidisciplinary Science, Beihang University , Beijing 100191, China
| | - Jian Zhou
- School of Materials Science and Engineering, and Center for Integrated Computational Materials Engineering, International Research Institute for Multidisciplinary Science, Beihang University , Beijing 100191, China
| | - Zhimei Sun
- School of Materials Science and Engineering, and Center for Integrated Computational Materials Engineering, International Research Institute for Multidisciplinary Science, Beihang University , Beijing 100191, China
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Kolobov AV, Fons P, Saito Y, Tominaga J. Atomic Reconfiguration of van der Waals Gaps as the Key to Switching in GeTe/Sb 2Te 3 Superlattices. ACS OMEGA 2017; 2:6223-6232. [PMID: 31457867 PMCID: PMC6644333 DOI: 10.1021/acsomega.7b00812] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/18/2017] [Accepted: 09/12/2017] [Indexed: 05/09/2023]
Abstract
Nonvolatile memory, of which phase-change memory (PCM) is a leading technology, is currently a key element of various electronics and portable systems. An important step in the development of conceptually new devices is the class of van der Waals (vdW)-bonded GeTe/Sb2Te3 superlattices (SLs). With their order of magnitude faster switching rates and lower energy consumption compared to those of alloy-based devices, they are widely regarded as the next step in the implementation of PCM. In contrast to conventional PCM, where the SET and RESET states arise from the crystalline and amorphous phases, in SLs, both the SET and RESET states remain crystalline. In an earlier work, the superior performance of SLs was attributed to the reduction of entropic losses associated with the one-dimensional motion of interfacial Ge atoms located in the vicinity of Sb2Te3 quintuple layers. Subsequent experimental studies using transmission electron microscopy revealed that GeTe and Sb2Te3 blocks strongly intermix during the growth of the GeTe phase, challenging the original proposal but at the same time raising new fundamental issues. In this work, we propose a new approach to switching in SLs associated with the reconfiguration of vdW gaps accompanied by local deviation of stoichiometry from the GeTe/Sb2Te3 quasibinary alloys. The model resolves in a natural way the existing controversies, explains the large conductivity contrast between the SET and RESET crystalline states, is not compromised by Ge/Sb intermixing, and provides a new perspective for the industrial development of memory devices based on such SLs. The proposed concept of vdW gap reconfiguration may also be applicable to designing a broad variety of engineered two-dimensional vdW solids.
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Wang JJ, Xu YZ, Mazzarello R, Wuttig M, Zhang W. A Review on Disorder-Driven Metal-Insulator Transition in Crystalline Vacancy-Rich GeSbTe Phase-Change Materials. MATERIALS 2017; 10:ma10080862. [PMID: 28773222 PMCID: PMC5578228 DOI: 10.3390/ma10080862] [Citation(s) in RCA: 40] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/09/2017] [Revised: 07/23/2017] [Accepted: 07/25/2017] [Indexed: 12/14/2022]
Abstract
Metal-insulator transition (MIT) is one of the most essential topics in condensed matter physics and materials science. The accompanied drastic change in electrical resistance can be exploited in electronic devices, such as data storage and memory technology. It is generally accepted that the underlying mechanism of most MITs is an interplay of electron correlation effects (Mott type) and disorder effects (Anderson type), and to disentangle the two effects is difficult. Recent progress on the crystalline Ge₁Sb₂Te₄ (GST) compound provides compelling evidence for a disorder-driven MIT. In this work, we discuss the presence of strong disorder in GST, and elucidate its effects on electron localization and transport properties. We also show how the degree of disorder in GST can be reduced via thermal annealing, triggering a disorder-driven metal-insulator transition. The resistance switching by disorder tuning in crystalline GST may enable novel multilevel data storage devices.
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Affiliation(s)
- Jiang-Jing Wang
- Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China.
| | - Ya-Zhi Xu
- Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China.
| | - Riccardo Mazzarello
- Institute for Theoretical Solid-State Physics, JARA-FIT and JARA-HPC, RWTH Aachen University, 52074 Aachen, Germany.
| | - Matthias Wuttig
- Institute of Physics IA, JARA-FIT and JARA-HPC, RWTH Aachen University, 52074 Aachen, Germany.
| | - Wei Zhang
- Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China.
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