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Guo L, Liu R, He Z, Li S, Tan T, Tao C. Influence of PUB2 on the Leveling Effect of Chip Copper Connection Electroplating: Mechanism and Applications. ACS OMEGA 2024; 9:14092-14100. [PMID: 38559988 PMCID: PMC10976400 DOI: 10.1021/acsomega.3c09548] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/30/2023] [Revised: 02/24/2024] [Accepted: 03/04/2024] [Indexed: 04/04/2024]
Abstract
The copper connectivity technique is essential for achieving electrical interconnection in wafer level packaging (WLP), system in packaging (SiP), and 3D packaging. The essential processing material for copper connectivity is a copper sulfate electroplating solution in which organic additives play a crucial role in the regularity of copper electrodeposition. In this study, electrochemical tests, X-ray diffraction, 3D profiling, and scanning electron microscopy were used to investigate the leveling effect and mechanism of polyquaternary ammonium urea-containing polymer (PUB2) in the process of copper electrodeposition on-chip copper connections. PUB2 has excellent polarization ability on the target surface, remains unaffected by the sulfur additive SPS and poly(ethylene glycol), and displays a strong ability to regulate the copper deposition rate of through-holes and surface wiring. The waviness of the wafer surface wiring was reduced from 130 to approximately 70 nm after optimizing the PUB2 concentration, and the surface roughness was reduced from 10 to approximately 7 nm. The coating was dispersed evenly, and the rate of through-hole filling was improved by 57%. This study not only examined PUB2 leveling performance and mechanisms but also devised a research method and system for electroplating additives to facilitate the development and application of new electroplating additives.
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Affiliation(s)
- Lanfeng Guo
- School
of Chemistry and Chemical Engineering, Chongqing
University, Chongqing 400044, China
- Hubei
Sinophorus Electronic Materials Co., Ltd., Hubei 443007, China
| | - Renlong Liu
- School
of Chemistry and Chemical Engineering, Chongqing
University, Chongqing 400044, China
| | - Zhaobo He
- Hubei
Sinophorus Electronic Materials Co., Ltd., Hubei 443007, China
| | - Shaoping Li
- Hubei
Sinophorus Electronic Materials Co., Ltd., Hubei 443007, China
| | - Tong Tan
- School
of Chemistry and Chemical Engineering, Chongqing
University, Chongqing 400044, China
| | - Changyuan Tao
- School
of Chemistry and Chemical Engineering, Chongqing
University, Chongqing 400044, China
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2
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Li X, Yin X, Li J, Yuan B, Xiang C, Zou P, Wang L. Synthesis of coplanar quaternary ammonium salts with excellent electrochemical properties based on an anthraquinone skeleton and their application in copper plating. Electrochim Acta 2022. [DOI: 10.1016/j.electacta.2022.141541] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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3
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Xiang J, Wang Y, Zeng C, Xu Y, Yang W, Tian L, Ruan H, Yang Q. Effects of Fe(III) and Cu(I) on Electrodeposition and Microstructure Characterization for Acid Plating Bath. Electrocatalysis (N Y) 2022. [DOI: 10.1007/s12678-022-00743-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/03/2022]
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4
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Sun Y, Pan J, Liu L, Fang Y, Han G, Liu J. Improvement of performance stability of electrolytic copper foils by bi-component additives. J APPL ELECTROCHEM 2022. [DOI: 10.1007/s10800-022-01707-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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5
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Teng X, Tao Z, Long Z, Liu G, Tao X. 1-(4-Hydroxyphenyl)-2 H-tetrazole-5-thione as a leveler for acid copper electroplating of microvia. RSC Adv 2022; 12:16153-16164. [PMID: 35733656 PMCID: PMC9152711 DOI: 10.1039/d2ra02274e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/08/2022] [Accepted: 05/24/2022] [Indexed: 11/21/2022] Open
Abstract
Microvia filling by copper electroplating was performed using plating solution with 1-(4-hydroxyphenyl)-2H-tetrazole-5-thione (HPTT) as the leveler. Galvanostatic Measurements (GMs), Linear Sweep Voltammetry (LSV) and Electrochemical Impedance Spectroscopy (EIS) tests were carried out to investigate the electrochemical behaviors of HPTT and its synergistic effect with other additives, in comparison with 1-phenyltetrazole-5-thione (PMT). GMs showed a convection-dependent interaction between PEP and HPTT. LSV and EIS tests indicated both HPTT and PMT enhanced the inhibition effect of PEP, and the synergistic effect of HPTT and PEP was stronger than that of PMT. Cross-section images illustrated the filling rate of the microvia with a 150 μm diameter and a 75 μm depth was 95.6% in 60 minutes with HPTT as the leveler. Frontier Molecular Orbitals (FMO) and Electrostatic Potential (ESP) of HPTT and PMT using quantum chemical calculations predicted the reaction sites for electrophilic and nucleophilic attack. Quantum chemical calculations suggested that HPTT is easier than PMT to bond to a copper surface and PEP. Microvia filling by copper electroplating was performed using plating solution with 1-(4-hydroxyphenyl)-2H-tetrazole-5-thione (HPTT) as the leveler.![]()
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Affiliation(s)
- Xulingjie Teng
- Department of Applied Chemistry, School of Materials and Energy, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054, China
| | - Zhihua Tao
- Department of Applied Chemistry, School of Materials and Energy, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054, China
| | - Zhiyuan Long
- Department of Applied Chemistry, School of Materials and Energy, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054, China
| | - Guanting Liu
- Department of Applied Chemistry, School of Materials and Energy, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054, China
| | - Xuefei Tao
- Jiangxi Vocational College of Finance and Economics, Jiujiang, 332000, China
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6
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Jin SH, Yoon Y, Jo Y, Lee S, Moon H, Seok S, Kim MJ, Kim JJ, Lee MH. The effects of polyvinylpyrrolidone molecular weight on defect-free filling of through-glass vias (TGVs). J IND ENG CHEM 2021. [DOI: 10.1016/j.jiec.2021.01.046] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
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7
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Electroplated Functional Materials with 3D Nanostructures Defined by Advanced Optical Lithography and Their Emerging Applications. APPLIED SCIENCES-BASEL 2020. [DOI: 10.3390/app10248780] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/09/2023]
Abstract
Electroplating has been favored to date as a surface treatment technology in various industries in the development of semiconductors, automobiles, ships, and steel due to its advantages of being a simple, solution-based process, with low cost and high throughput. Recently, classical electroplating has been reborn as an advanced manufacturing process for functional materials by combining it with unconventional optical three-dimensional (3D) nanofabrication techniques capable of generating polymer templates with high-resolution 3D periodic nanostructures. The bottom-up filling behavior of electroplating rising from a seed layer makes it possible to densely fill the nanoporous network of the template with heterogeneous inorganic materials. At this time, understanding and optimizing the process parameters (e.g., additive, current density, type of current waveform, etc.) of electroplating is critical for defect control. In addition, since electroplating is generally performed near room temperature, unlike other thin film deposition techniques, structural damage to the polymer template by heat during electroplating is almost negligible. Based on the excellent compatibility of electroplating and optical 3D nanofabrication, innovative functional materials with 3D periodic nanostructures targeting electrochemical or energy-related applications have been created. In this mini review, a strategy for producing functional materials with 3D periodic nanostructures through a templating process will be covered, and the recent cases of successful applications to electrodes for energy storage devices, electrocatalysts, and thermoelectric materials will be summarized. We will also discuss technical issues that need to be considered in the process to improve the quality of the resulting functional materials with 3D nanoarchitectures.
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Li J, Zhou G, Hong Y, Wang C, He W, Wang S, Chen Y, Wen Z, Wang Q. Copolymer of Pyrrole and 1,4-Butanediol Diglycidyl as an Efficient Additive Leveler for Through-Hole Copper Electroplating. ACS OMEGA 2020; 5:4868-4874. [PMID: 32201772 PMCID: PMC7081329 DOI: 10.1021/acsomega.9b03691] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/31/2019] [Accepted: 02/06/2020] [Indexed: 06/10/2023]
Abstract
A copolymer comprising of pyrrole and 1,4-butanediol diglycidyl ether (PBDGE) was designed and synthesized as a leveler to improve the throwing power for printed circuit board (PCB) through-hole electroplating. The results of linear sweep voltammetry (LSV), galvanostatic measurements (GMs), and cyclic voltammetry (CV) reveal the strong coordination effect of PBDGE with other additives and confirm the advantageous performance of PBDGE to effectively assist the electroplating of through-hole. An increment of 35.5% in the throwing power was achieved under the addition of PBDGE in through-hole plating. Additionally, the reaction mechanism was studied by quantum chemical calculations and molecular dynamics (MD) simulations, indicating that the pyrrole rings of the PBDGE molecule are adsorbed on the copper surface as the adsorption sites to balance the copper plating regardless of the through-hole position differences.
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Affiliation(s)
- Jing Li
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Guoyun Zhou
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Yan Hong
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Chong Wang
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Wei He
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Shouxu Wang
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Yuanming Chen
- School
of Materials and Energy, University of Electronic
Science and Technology of China, Chengdu 610054, P. R. China
| | - Zesheng Wen
- Ganzhou
Sun&Lynn Circuit Co. Ltd., Ganzhou 341000, P. R.
China
- Shenzhen
Sun&Lynn Circuit Co. Ltd., Shenzhen 518104, P. R.
China
| | - Quanyong Wang
- Ganzhou
Sun&Lynn Circuit Co. Ltd., Ganzhou 341000, P. R.
China
- Shenzhen
Sun&Lynn Circuit Co. Ltd., Shenzhen 518104, P. R.
China
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9
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Wang K, Feng J, Xu J, Li J, Mai M, Wang X, Wang L. Engineering aromatic heterocycle strategy: Improving copper electrodeposition performance via tuning the bandgap of diketopyrrolopyrrole-based leveler. Tetrahedron 2020. [DOI: 10.1016/j.tet.2019.130882] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
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10
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Zhou G, Gou X, Jin X, Wang S, He W, Wang S, Deng L, Chen S, Liu G. Low fractal dimension modified drilling‐hole wall for PTFE high‐frequency board copper plating with plasma treatment. J Appl Polym Sci 2019. [DOI: 10.1002/app.48052] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
Affiliation(s)
- Guoyun Zhou
- School of Materials and EnergyUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Xueping Gou
- School of Materials and EnergyUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Xiaofeng Jin
- National Center of Quality Supervision and Testing for Printed Circuit Board Tongling 244000 People's Republic of China
- National Center of Quality Supervision and Testing for Copper‐Lead‐Zinc and Products Tongling 244000 People's Republic of China
| | - Shuai Wang
- School of Materials and EnergyUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Wei He
- School of Materials and EnergyUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Shouxu Wang
- School of Materials and EnergyUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Longjiang Deng
- National Engineering Research Center of Electromagnetic Radiation Control MaterialsUniversity of Electronic Science and Technology of China Chengdu 610054 People's Republic of China
| | - Shijin Chen
- Bomin Electronics Co., Ltd. Meizhou 514000 People's Republic of China
| | - Gen Liu
- Bomin Electronics Co., Ltd. Meizhou 514000 People's Republic of China
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11
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Lv J, Zhao X, Jie X, Li J, Wei X, Chen B, Hong G, Wu W, Wang L. Fatty Acid Quaternary Ammonium Surfactants Based on Renewable Resources as a Leveler for Copper Electroplating. ChemElectroChem 2019. [DOI: 10.1002/celc.201900116] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Affiliation(s)
- Jinge Lv
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Xuehua Zhao
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Xu Jie
- State Key Laboratory of Chemical Engineering and School of Chemical EngineeringEast China University of Science and Technology Shanghai 200237 China
| | - Jun Li
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Xiaochuan Wei
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Biao Chen
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Gang Hong
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Wenjun Wu
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
| | - Limin Wang
- Key Laboratory for Advanced Materials Institute of Fine Chemical School of Chemistry & Molecular EngineeringEast China University of Science and Technology No. 130, Meilong Road Shanghai 200237 China
- Key Laboratory of Organofluorine Chemistry Shanghai Institute of Organic ChemistryThe Chinese Academy of Sciences 345 Lingling Road Shanghai 200032 China
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12
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The effect of tricyclazole as a novel leveler for filling electroplated copper microvias. J Electroanal Chem (Lausanne) 2018. [DOI: 10.1016/j.jelechem.2018.08.042] [Citation(s) in RCA: 22] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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13
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In situ observation of Cu electrodeposition and dissolution on Au(100) by high-speed atomic force microscopy. Electrochem commun 2018. [DOI: 10.1016/j.elecom.2018.05.019] [Citation(s) in RCA: 16] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
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