Combining parallel pattern generation of electrohydrodynamic lithography with serial addressing

Electrohydrodynamic Nanopatterning: A Novel Solvent-Assisted Technique for Unconventional Substrates

Electrohydrodynamic (EHD)-driven patterning is a pioneering lithographic technique capable of replicating and modifying micro/nanostructures efficiently. However, this process is currently restricted to conventional substrates, as it necessitates a uniform and robust electric field over a large area. Consequently, the use of nontraditional substrates, such as those that are flexible, nonflat, or have high insulation, has been notably limited. In our study, we extend the applicability of EHD-driven patterning by introducing a solvent-assisted capillary peel-and-transfer method that allows the successful removal of diverse EHD-induced structures from their original substrates. Compared with the traditional route, our process boasts a success rate close to 100%. The detached structures can then be efficiently transferred to nonconventional substrates, overcoming the limitations of the traditional EHD process. Our method exhibits significant versatility, as evidenced by successful transfer of structures with engineered wettability and patterned structures composed of metals and metal oxides onto nonconventional substrates.

Rapid Electrohydrodynamic-Driven Pattern Replication over a Large Area via Ultrahigh Voltage Pulses

Despite the prospects of electrohydrodynamic instability patterning (EHIP), poor process parameter controllability is a significant challenge in uniform large-scale nanopatterning. Herein, we introduce a EHIP process using an ultrahigh electric field (>108 V/m) to effectively accelerate the pattern growth evolution. Owing to the strong dependence on a temporal parameter (1/τm) of the field strength, our method not only reduces the completion time of pattern growth but also overcomes critical parametric restrictions on the pattern replication, thereby enhancing the replicated pattern quality in three dimensions. The pattern can be uniformly replicated over the entire film surface even without a perfectly uniform air gap, which has been severely difficult in the conventional method. To further demonstrate how straightforward yet versatile our approach is, we applied our EHIP approach to successfully replicate the densely packed nanostructures of cicada wings.

Pattern formation in thin polymeric films via electrohydrodynamic patterning

The free surface of a thin polymeric film is often unstable and deforms into various micro-/nano-patterns under an externally applied electric field. This paper reviews a recent patterning technique, electrohydrodynamic patterning (EHDP), a straightforward, cost-effective and contactless bottom-up method. The theoretical and numerical studies of EHDP are shown. How the characteristic wavelength and the characteristic time depend on both the external conditions (such as voltage, film thickness, template-substrate spacing) and the initial polymer properties (such as rheological property, electrical property and surface tension) is theoretically and experimentally discussed. Various possible strategies for fabricating high-aspect-ratio or hierarchical patterns are theoretically and experimentally reviewed. Aligning and ordering of the anisotropic polymers by EHDP is emphasized. A perspective, including novelty and limitations of the methods, particularly in comparison to some conventional patterning techniques, and a possible future direction of research, is presented.