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Liu B, Han L, Xu H, Su JJ, Zhan D. Ultrasonic-Assisted Electrochemical Nanoimprint Lithography: Forcing Mass Transfer to Enhance the Localized Etching Rate of GaAs. Chem Asian J 2023; 18:e202300491. [PMID: 37493590 DOI: 10.1002/asia.202300491] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/01/2023] [Revised: 07/25/2023] [Accepted: 07/25/2023] [Indexed: 07/27/2023]
Abstract
Electrochemical nanoimprint lithography (ECNL) has emerged as a promising technique for fabricating three-dimensional micro/nano-structures (3D-MNSs) directly on semiconductor wafers. This technique is based on a localized corrosion reaction induced by the contact potential across the metal/semiconductor boundaries. The anodic etching of semiconductor and the cathodic reduction of electron acceptors occur at the metal/semiconductor/electrolyte interface and the Pt mold surface, respectively. However, the etching rate is limited by the mass transfer of species in the ultrathin electrolyte layer between the mold and the workpiece. To overcome this challenge, we introduce the ultrasonics effect into the ECNL process to facilitate the mass exchange between the ultrathin electrolyte layer and the bulk solution, thereby improving the imprinting efficiency. Experimental investigations demonstrate a positive linear relationship between the reciprocal of the area duty ratio of the mold and the imprinting efficiency. Furthermore, the introduction of ultrasonics improves the imprinting efficiency by approximately 80 %, irrespective of the area duty ratio. The enhanced imprinting efficiency enables the fabrication of 3D-MNSs with higher aspect ratios, resulting in a stronger light trapping effect. These results indicate the prospective applications of ECNL in semiconductor functional devices, such as photoelectric detection and photovoltaics.
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Affiliation(s)
- Bing Liu
- Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, 361005, Fujian, China
| | - Lianhuan Han
- Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, 361005, Fujian, China
| | - Hantao Xu
- Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Jian-Jia Su
- Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Dongping Zhan
- Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
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Wu Q, Ran J, Zheng T, Wu H, Liao Y, Wang F, Chen S. MXene V 2C-coated runway-type microfiber knot resonator for an all-optical temperature sensor. RSC Adv 2023; 13:19366-19372. [PMID: 37383689 PMCID: PMC10293882 DOI: 10.1039/d3ra03190j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/13/2023] [Accepted: 06/17/2023] [Indexed: 06/30/2023] Open
Abstract
We present an all-optical temperature sensor device made of an MXene V2C integrated runway-type microfiber knot resonator (MKR) for the first time. MXene V2C is coated on the surface of the microfiber by optical deposition. The experimental results show that the normalized temperature sensing efficiency is ∼1.65 dB °C-1 mm-1. The high sensing efficiency of the temperature sensor we proposed benefits from the efficient coupling of the highly photothermal material MXene and the runway-type resonator structure, which provides a better idea for the preparation of all-fiber sensor devices.
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Affiliation(s)
- Qing Wu
- Heilongjiang Province Key Laboratory of Laser Spectroscopy Technology and Application, Harbin University of Science and Technology Harbin 150080 China
| | - Junhong Ran
- Heilongjiang Province Key Laboratory of Laser Spectroscopy Technology and Application, Harbin University of Science and Technology Harbin 150080 China
| | - Tong Zheng
- Heilongjiang Province Key Laboratory of Laser Spectroscopy Technology and Application, Harbin University of Science and Technology Harbin 150080 China
- School of Artificial Intelligence, Beijing Technology and Business University Beijing 100048 China
| | - Haibin Wu
- Heilongjiang Province Key Laboratory of Laser Spectroscopy Technology and Application, Harbin University of Science and Technology Harbin 150080 China
| | - Yubo Liao
- School of Physics and Electronic Information, Gannan Normal University Ganzhou Jiangxi 341000 China
| | - Fengpeng Wang
- School of Physics and Electronic Information, Gannan Normal University Ganzhou Jiangxi 341000 China
| | - Si Chen
- School of Physics and Electronic Information, Gannan Normal University Ganzhou Jiangxi 341000 China
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Zhou J, Husseini DA, Li J, Lin Z, Sukhishvili S, Coté GL, Gutierrez-Osuna R, Lin PT. Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds. Anal Chem 2022; 94:11008-11015. [DOI: 10.1021/acs.analchem.2c01463] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Junchao Zhou
- The Department of Electrical & Computer Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Diana Al Husseini
- The Department of Materials Science & Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Junyan Li
- The Department of Electrical & Computer Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Zhihai Lin
- The Department of Electrical & Computer Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Svetlana Sukhishvili
- The Department of Materials Science & Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Gerard L. Coté
- The Department of Biomedical Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Ricardo Gutierrez-Osuna
- The Department of Computer Science & Engineering, Texas A&M University, College Station, Texas 77843, United States
| | - Pao Tai Lin
- The Department of Electrical & Computer Engineering, Texas A&M University, College Station, Texas 77843, United States
- The Department of Materials Science & Engineering, Texas A&M University, College Station, Texas 77843, United States
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Infrared Spectroscopy–Quo Vadis? APPLIED SCIENCES-BASEL 2022. [DOI: 10.3390/app12157598] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
Given the exquisite capability of direct, non-destructive label-free sensing of molecular transitions, IR spectroscopy has become a ubiquitous and versatile analytical tool. IR application scenarios range from industrial manufacturing processes, surveillance tasks and environmental monitoring to elaborate evaluation of (bio)medical samples. Given recent developments in associated fields, IR spectroscopic devices increasingly evolve into reliable and robust tools for quality control purposes, for rapid analysis within at-line, in-line or on-line processes, and even for bed-side monitoring of patient health indicators. With the opportunity to guide light at or within dedicated optical structures, remote sensing as well as high-throughput sensing scenarios are being addressed by appropriate IR methodologies. In the present focused article, selected perspectives on future directions for IR spectroscopic tools and their applications are discussed. These visions are accompanied by a short introduction to the historic development, current trends, and emerging technological opportunities guiding the future path IR spectroscopy may take. Highlighted state-of-the art implementations along with novel concepts enhancing the performance of IR sensors are presented together with cutting-edge developments in related fields that drive IR spectroscopy forward in its role as a versatile analytical technology with a bright past and an even brighter future.
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Mobini E, Espinosa DHG, Vyas K, Dolgaleva K. AlGaAs Nonlinear Integrated Photonics. MICROMACHINES 2022; 13:mi13070991. [PMID: 35888808 PMCID: PMC9323658 DOI: 10.3390/mi13070991] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/09/2022] [Revised: 06/06/2022] [Accepted: 06/13/2022] [Indexed: 01/18/2023]
Abstract
Practical applications implementing integrated photonic circuits can benefit from nonlinear optical functionalities such as wavelength conversion, all-optical signal processing, and frequency-comb generation, among others. Numerous nonlinear waveguide platforms have been explored for these roles; the group of materials capable of combining both passive and active functionalities monolithically on the same chip is III–V semiconductors. AlGaAs is the most studied III–V nonlinear waveguide platform to date; it exhibits both second- and third-order optical nonlinearity and can be used for a wide range of integrated nonlinear photonic devices. In this review, we conduct an extensive overview of various AlGaAs nonlinear waveguide platforms and geometries, their nonlinear optical performances, as well as the measured values and wavelength dependencies of their effective nonlinear coefficients. Furthermore, we highlight the state-of-the-art achievements in the field, among which are efficient tunable wavelength converters, on-chip frequency-comb generation, and ultra-broadband on-chip supercontinuum generation. Moreover, we overview the applications in development where AlGaAs nonlinear functional devices aspire to be the game-changers. Among such applications, there is all-optical signal processing in optical communication networks and integrated quantum photonic circuits.
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Affiliation(s)
- Ehsan Mobini
- Department of Physics, University of Ottawa, Ottawa, ON K1N 6N5, Canada;
| | - Daniel H. G. Espinosa
- School of Electrical Engineering and Computer Science, University of Ottawa, Ottawa, ON K1N 6N5, Canada; (D.H.G.E.); (K.V.)
| | - Kaustubh Vyas
- School of Electrical Engineering and Computer Science, University of Ottawa, Ottawa, ON K1N 6N5, Canada; (D.H.G.E.); (K.V.)
| | - Ksenia Dolgaleva
- Department of Physics, University of Ottawa, Ottawa, ON K1N 6N5, Canada;
- School of Electrical Engineering and Computer Science, University of Ottawa, Ottawa, ON K1N 6N5, Canada; (D.H.G.E.); (K.V.)
- Correspondence:
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Freitag S, Baumgartner B, Radel S, Schwaighofer A, Varriale A, Pennacchio A, D'Auria S, Lendl B. A thermoelectrically stabilized aluminium acoustic trap combined with attenuated total reflection infrared spectroscopy for detection of Escherichia coli in water. LAB ON A CHIP 2021; 21:1811-1819. [PMID: 33949396 DOI: 10.1039/d0lc01264e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Acoustic trapping is a non-contact particle manipulation method that holds great potential for performing automated assays. We demonstrate an aluminium acoustic trap in combination with attenuated total reflection Fourier-transform infrared spectroscopy (ATR-FTIR) for detection of E. coli in water. The thermal conductivity of aluminium was exploited to thermo-electrically heat and hold the acoustic trap at the desired assay temperature of 37 °C. Systematic characterisation and optimisation of the acoustic trap allowed high flow rates while maintaining high acoustic trapping performance. The ATR element serves not only as a reflector for ultrasound standing wave generation but also as a sensing interface. The enzyme conversion induced by alkaline phosphatase-labelled bacteria was directly monitored in the acoustic trap using ATR-FTIR spectroscopy. Sequential injection analysis allowed automated liquid handling, including non-contact bacteria retention, washing and enzyme-substrate exchange within the acoustic trap. The presented method was able to detect E. coli concentrations as low as 1.95 × 106 bacteria per mL in 197 min. The demonstrated ultrasound assisted assay paves the way to fully automated bacteria detection devices based on acoustic trapping combined with ATR-FTIR spectroscopy.
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Affiliation(s)
- Stephan Freitag
- Research Division of Environmental Analytics, Process Analytics and Sensors, Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9/164-UPA, 1060 Vienna, Austria.
| | - Bettina Baumgartner
- Research Division of Environmental Analytics, Process Analytics and Sensors, Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9/164-UPA, 1060 Vienna, Austria.
| | - Stefan Radel
- Research Division of Environmental Analytics, Process Analytics and Sensors, Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9/164-UPA, 1060 Vienna, Austria.
| | - Andreas Schwaighofer
- Research Division of Environmental Analytics, Process Analytics and Sensors, Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9/164-UPA, 1060 Vienna, Austria.
| | - Antonio Varriale
- Institute of Food Science, CNR, Via Roma 64, 83100 Avellino, Italy
| | | | - Sabato D'Auria
- Institute of Food Science, CNR, Via Roma 64, 83100 Avellino, Italy
| | - Bernhard Lendl
- Research Division of Environmental Analytics, Process Analytics and Sensors, Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9/164-UPA, 1060 Vienna, Austria.
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