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For: Van Daele M, Griffiths MBE, Minjauw MM, Barry ST, Detavernier C, Dendooven J. Reaction mechanism of the Me3AuPMe3-H2 plasma-enhanced ALD process. Phys Chem Chem Phys 2020;22:11903-11914. [PMID: 32436930 DOI: 10.1039/c9cp06855d] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
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