Fabrication of a thin PDMS film with complex liquid metal electrodes embedded and its application as skin sensors

Flexible Humidity Sensor Based on a Graphene Oxide-Carbon Nanotube-Modified Co3O4 Nanoparticle-Embedded Laser-Induced Graphene Electrode

To meet evolving humidity monitoring needs, the development of flexible, high-performance humidity sensors is crucial. This study introduces an innovative flexible humidity sensor using a single-step laser scribing technique to fabricate a flexible in situ Co3O4 nanoparticle-embedded laser-induced graphene (Co3O4-LIG) composite electrode. Compared to conventional LIG electrodes, the Co3O4-LIG electrode exhibits improved conductivity and hydrophilicity, enhancing charge transfer and water molecule affinity. The unique two-dimensional structure and exceptional water permeability of graphene oxide (GO) combine with the rapid water response and high specific surface area of carboxylated multiwalled carbon nanotubes (MWCNTs), thereby assuming a crucial function in the modification and optimization of the performance of humidity sensors. Through the application of a homogenously blended aqueous solution comprising GO and MWCNTs in precise proportions onto the Co3O4-LIG composite electrode, an excellent humidity-responsive layer is established, culminating in the realization of a cutting-edge GO-MWCNTs@Co3O4-LIG flexible humidity sensor. Noteworthy attributes of this sensor include a heightened sensitivity [959.1% (ΔR/R0)], rapid response and recovery times (within 5 and 26 s, respectively), and a noteworthy linearity (R2 = 0.994) across a relative humidity range of 14 to 95%. The findings presented herein offer valuable insights and a practical blueprint for the design and production of flexible humidity sensors.

A liquid metal based, integrated parallel electroosmotic micropump cluster drive system

The application of liquid metal in a microfluidic system enables the fabrication of highly integrated on-chip electroosmotic micropumps (EOPs). In this work, a low-voltage driveable integrated parallel EOP cluster drive system is proposed. This system consists of two layers, a branch-channel layer and a trunk-channel layer. The lower branch-channel layer contains separate parallel pumping channels and a pair of comb liquid metal electrodes. The separated branch channels are connected together through the trunk channels in the upper layer. With this structural arrangement, the parallel micropumps form an integrated micropump cluster for larger pumping capacity. The distance between the pumping channel and the electrode next to it is controlled to 20 μm. To guide the pump design, parametric studies are performed and fully discussed. According to the experimental results, the micropump cluster can be driven at a low voltage of 0.5 V, and the flow rate reaches 274 nL min-1 at 5 V. In addition, the paper finally proposes an electrode protection strategy and an integrated pump-valve drive system which is expected to solve the shortcoming of electroosmotic pumps in terms of long-time storage and driving.

Functional PDMS Elastomers: Bulk Composites, Surface Engineering, and Precision Fabrication

Polydimethylsiloxane (PDMS)-the simplest and most common silicone compound-exemplifies the central characteristics of its class and has attracted tremendous research attention. The development of PDMS-based materials is a vivid reflection of the modern industry. In recent years, PDMS has stood out as the material of choice for various emerging technologies. The rapid improvement in bulk modification strategies and multifunctional surfaces has enabled a whole new generation of PDMS-based materials and devices, facilitating, and even transforming enormous applications, including flexible electronics, superwetting surfaces, soft actuators, wearable and implantable sensors, biomedicals, and autonomous robotics. This paper reviews the latest advances in the field of PDMS-based functional materials, with a focus on the added functionality and their use as programmable materials for smart devices. Recent breakthroughs regarding instant crosslinking and additive manufacturing are featured, and exciting opportunities for future research are highlighted. This review provides a quick entrance to this rapidly evolving field and will help guide the rational design of next-generation soft materials and devices.

Rational Design of Conductive Pathways in Flexible Tactile Sensors via Indirect 3D-Printing of Liquid Metal for High-Precision Monitoring and Recognition

Highly sensitive and conformal sensors are essential for the implementation of human-machine interfaces, health monitoring, and rehabilitation prostheses. The proper adjustment of conductive pathways in the sensing materials is essential for their sensitive transduction of mechanical stimuli into electrical signals. However, the rational, precise, and wide-range control of electrical networks within traditional conductive composites is difficult due to the randomly distributed fillers. Herein, we adopt an indirect 3D-printing method to fabricate pressure sensors with various microchannels for liquid metal (LM) to form consistent and tunable conductive pathways. LM is highly conductive, fluidic, and incompressible at ambient conditions, which guarantees the reliable regulation and function of our pressure sensor. Additive manufacturing provides a facile way to construct complicated microchannels with different lengths, different orientations, cross-sectional sizes, depth-width ratios, and shapes, which can effectively modulate the sensitivity and the sensing range. Under the optimized structural configurations, our sensor achieves a high sensitivity of 1.139 kPa-1, a detection range of 0-68 kPa (loading process), and stability of over 5000 cycles, whose sensing performance is better than most microchannel-filled LM sensors. It can achieve high-accuracy monitoring of pulse, speaking and gestures, and exhibit a full recognition of objects under the assistance of machine learning. This work can provide new ideas on the design of conductive pathways in flexible electronics and expand the application of recyclable LM in human-machine interfaces.

Texture-structure-based liquid metal filling for blind-end microchannels and its application on multi-layer chips

This research work reports a novel method to achieve fast liquid metal (LM) injection in blind-end microchannels which is especially suitable for multi-layer microfluidic chips. This method is based on a texture-like surface bonding technology. The texture-like surface is fabricated on a polydimethylsiloxane (PDMS) slab with standard soft-lithography technology and bonded with another PDMS slab with microelectrode patterns on it. When injected with LM, the texture-like structure can prevent the LM from entering but allows the air inside to be released during the injection to achieve perfect blind-end complex LM electrodes. The experimental results show that it can achieve fast and perfect LM injection in the blind-end pattern and can also prevent the large area of the flat chamber from collapsing during bonding. We also parametrically studied the texture structure's size for bonding strength between the texture structure and the blank PDMS surface. In addition, we integrate three layers of blind-end complex liquid metal patterns into one multi-layer chip using this technology and later use this structure to realize series connection of two LM-based electroosmotic micropumps (EOP). Compared with the conventional LM-based EOP, the structure of the EOP chip was greatly simplified and resulted in a higher level of integration.

Liquid Metal-Based Electrode Array for Neural Signal Recording

Neural electrodes are core devices for research in neuroscience, neurological diseases, and neural-machine interfacing. They build a bridge between the cerebral nervous system and electronic devices. Most of the neural electrodes in use are based on rigid materials that differ significantly from biological neural tissue in flexibility and tensile properties. In this study, a liquid-metal (LM) -based 20-channel neural electrode array with a platinum metal (Pt) encapsulation material was developed by microfabrication technology. The in vitro experiments demonstrated that the electrode has stable electrical properties and excellent mechanical properties such as flexibility and bending, which allows the electrode to form conformal contact with the skull. The in vivo experiments also recorded electroencephalographic signals using the LM-based electrode from a rat under low-flow or deep anesthesia, including the auditory-evoked potentials triggered by sound stimulation. The auditory-activated cortical area was analyzed using source localization technique. These results indicate that this 20-channel LM-based neural electrode array satisfies the demands of brain signal acquisition and provides high-quality-electroencephalogram (EEG) signals that support source localization analysis.

Pressure Driven Rapid Reconfigurable Liquid Metal Patterning

This paper proposes a method for pressure driven rapid reconfigurable liquid metal patterning. A sandwich structure of "pattern-film-cavity" is designed to complete this function. Both sides of the highly elastic polymer film are bonded with two PDMS slabs. One PDMS slab has microchannels patterned on the surface. The other PDMS slab has a large cavity on its surface for liquid metal storage. These two PDMS slabs are bonded together, face to face, with the polymer film in the middle. In order to control the distribution of the liquid metal in the microfluidic chip, the elastic film will deform under the high pressure of the working medium in the microchannels and then extrude the liquid metal into different patterns in the cavity. This paper studies the factors of liquid metal patterning in detail, including external control conditions, such as the type and pressure of the working medium and the critical dimensions of the chip structure. Moreover, both a single-pattern and a double-pattern chip are fabricated in this paper, which can form or reconfigure the liquid metal pattern within 800 ms. Based on the above methods, reconfigurable antennas of two frequencies are designed and fabricated. Meanwhile, their performance is simulated and tested by simulation and vector network tests. The operating frequencies of the two antennas are respectively significantly switching between 4.66 GHz and 9.97 GHz.