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Zhao W, Zhou H, Li J, Lu Y, Ding Y. Atomic Layer Deposition of CeO 2 Film with a Novel Heteroleptic Ce(III) Complex. Molecules 2024; 29:2987. [PMID: 38998939 PMCID: PMC11243042 DOI: 10.3390/molecules29132987] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/29/2024] [Revised: 06/14/2024] [Accepted: 06/20/2024] [Indexed: 07/14/2024] Open
Abstract
In this paper, four heteroleptic Ce(III) complexes, including Ce(thd)3-phen (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, phen = 1, 10-phenanthroline (1), Ce(thd)3-MEDA (MEDA = N-Methylethylenediamine (2), Ce(thd)3-MOMA (MOMA = N-(2-Methoxyethyl)methylamine (3), and Ce(thd)3-DMDE (DMDE = N,N″-dimethyl ethanol amine (4), were synthesized and characterized with 1H-NMR, elemental analysis, and X-ray single-crystal diffraction. The thermogravimetric analysis and vapor pressure results indicated that the complexing ability of a nitrogen-containing bidentate ligand with a cerium ion was stronger than that of a mixed oxygen-nitrogen-containing bidentate ligand. Complex 2 was selected as an ALD precursor to deposit a CeO2 film on a SiO2/Si (100) wafer. The self-limited deposition results demonstrated that complex 2 was a potential ALD precursor.
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Affiliation(s)
- Wenyong Zhao
- International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China
| | - Hong Zhou
- International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China
| | - Jiahao Li
- International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China
| | - Yuchen Lu
- International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China
| | - Yuqiang Ding
- International Joint Research Center for Photoresponsive Molecules and Materials, School of Chemical and Material Engineering, Jiangnan University, 1800 Lihu Road, Wuxi 214122, China
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Invernizzi C, Tabacchi G, Seraglia R, Benedet M, Roverso M, Maccato C, Bogialli S, Barreca D, Fois E. On the Fragmentation of Ni(II) β-Diketonate-Diamine Complexes as Molecular Precursors for NiO Films: A Theoretical and Experimental Investigation. Molecules 2024; 29:642. [PMID: 38338386 PMCID: PMC10856068 DOI: 10.3390/molecules29030642] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/20/2023] [Revised: 01/22/2024] [Accepted: 01/26/2024] [Indexed: 02/12/2024] Open
Abstract
NiO-based nanomaterials have attracted considerable interest for different applications, which have stimulated the implementation of various synthetic approaches aimed at modulating their chemico-physical properties. In this regard, their bottom-up preparation starting from suitable precursors plays an important role, although a molecular-level insight into their reactivity remains an open issue to be properly tackled. In the present study, we focused on the fragmentation of Ni(II) diketonate-diamine adducts, of interest as vapor-phase precursors for Ni(II) oxide systems, by combining electrospray ionization mass spectrometry (ESI-MS) with multiple collisional experiments (ESI-MSn) and theoretical calculations. The outcomes of this investigation revealed common features in the fragmentation pattern of the target compounds: (i) in the first fragmentation, the three complexes yield analogous base-peak cations by losing a negatively charged diketonate moiety; in these cations, Ni-O and Ni-N interactions are stronger and the Ni positive charge is lower than in the parent neutral complexes; (ii) the tendency of ligand electronic charge to migrate towards Ni further increases in the subsequent fragmentation, leading to the formation of a tetracoordinated Ni environment featuring an interesting cation-π intramolecular interaction.
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Affiliation(s)
- Cristiano Invernizzi
- Department of Science and High Technology, Insubria University and INSTM, 22100 Como, Italy
| | - Gloria Tabacchi
- Department of Science and High Technology, Insubria University and INSTM, 22100 Como, Italy
| | - Roberta Seraglia
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
| | - Mattia Benedet
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
- Department of Chemical Sciences, Padova University and INSTM, 35131 Padova, Italy
| | - Marco Roverso
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
- Department of Chemical Sciences, Padova University and INSTM, 35131 Padova, Italy
| | - Chiara Maccato
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
- Department of Chemical Sciences, Padova University and INSTM, 35131 Padova, Italy
| | - Sara Bogialli
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
- Department of Chemical Sciences, Padova University and INSTM, 35131 Padova, Italy
| | - Davide Barreca
- CNR-ICMATE and INSTM, Department of Chemical Sciences, Padova University, 35131 Padova, Italy
| | - Ettore Fois
- Department of Science and High Technology, Insubria University and INSTM, 22100 Como, Italy
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