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Ito H, Araki H, Wada A, Yamamoto A, Suzuki T, Saitoh H. Sticking probability of CN(X2Σ+) radicals onto amorphous carbon nitride films formed from the decomposition of BrCN induced by the microwave discharge flow of Ar. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2012; 86:256-265. [PMID: 22057299 DOI: 10.1016/j.saa.2011.10.033] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/26/2011] [Revised: 10/05/2011] [Accepted: 10/14/2011] [Indexed: 05/31/2023]
Abstract
The sticking probability, s, of CN(X(2)Σ(+)) radicals onto amorphous carbon nitride (a-CN(x)) films with high [N]/([N]+[C]) ratios (≤0.5) was evaluated. CN(X(2)Σ(+)) radicals were generated from the decomposition of BrCN with the microwave discharge flow of Ar in the two experimental configurations, I and II, where the distance between the tip of the nozzle introducing BrCN is close (≈10 mm) to and distant (≈0.3 m) from the laser-beam path or the Si substrate, respectively. For each configuration, s was evaluated both under the desiccated and H(2)O-added conditions from the number density of CN(X(2)Σ(+)) evaluated from the intensity of the CN(A(2)Π(i)-X(2)Σ(+)) laser-induced fluorescence spectrum calibrated against Rayleigh scattering intensity of Ar, the flow speed measured by a time-resolved emission, and the film mass. The [N]/([N]+[C]) ratios of films were evaluated as 0.4-0.5 and 0.3 in the configurations I and II, respectively, from the compositional analysis using Rutherford back scattering and elastic recoil detection analysis together with the XPS analysis. The variation of s under various experimental conditions was discussed based on the electron densities in the reaction region and the relative density of the hydrogen-termination structures of the film surface.
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Affiliation(s)
- Haruhiko Ito
- Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
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Ito H, Oda K, Kawamura Y, Saitoh H. Measurements of density and sticking probability of CN(X(2)Sigma(+)) radicals by laser-induced fluorescence spectroscopy. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2007; 67:39-47. [PMID: 16920392 DOI: 10.1016/j.saa.2006.05.036] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/26/2006] [Accepted: 05/05/2006] [Indexed: 05/11/2023]
Abstract
CN(X(2)Sigma(+)) radicals were produced by the decomposition of BrCN with the microwave discharge flow of Ar under the conditions of Ar pressure in the range of 0.40-0.70 Torr. The laser-induced fluorescence (LIF) spectra of the CN(A(2)Pi(i)-X(2)Sigma(+)), 4-0, 5-1, and 7-2 bands were observed, and their intensities were calibrated against Rayleigh-scattering intensity by Ar atoms, from which the CN(X(2)Sigma(+)) radical density (n(CN(X))) was determined as (0.67+/-0.25) x 10(18) to (4.42+/-0.83) x 10(18) m(-3). Hydrogenated amorphous carbon nitride (a-CN(x):H) films were formed by depositing the CN(X(2)Sigma(+)) radicals on Si substrates in the same reaction system as LIF. The sticking probability (s) of the CN(X(2)Sigma(+)) radicals onto the a-CN(x):H films was determined by using n(CN(X)), the flow speed, and the weight (w) of a-CN(x):H. The s value was determined as (6.4+/-6.4) x 10(-2) to (2.5+/-1.2) x 10(-2), where the errors are predominantly determined by those in n(CN(X)) and w. The procedure described in the present study will provide a methodology to determine the sticking probability of the precursor radicals of the film formation based on the gas-phase LIF spectroscopy.
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Affiliation(s)
- Haruhiko Ito
- Department of Chemistry, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan.
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Bergmann K, Demtroder W. Inelastic cross sections of excited molecules. III. Absolute cross sections for rotational and vibrational transitions in the Na2(B1Πu) state. ACTA ACUST UNITED AC 2001. [DOI: 10.1088/0022-3700/5/11/015] [Citation(s) in RCA: 49] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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Morrill JS, Benesch WM. Role of N2(A’ 5Σ+g) in the enhancement of N2B 3Πg(V=10) populations in the afterglow. J Chem Phys 1994. [DOI: 10.1063/1.468347] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Kanda K, Suzuki K, Ito H, Kondow T, Kuchitsu K. Pressure Dependence of the CN(B 2Σ +–X 2Σ +) Emission Spectra in an Ar Flowing Afterglow. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN 1994. [DOI: 10.1246/bcsj.67.2665] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Perturbations in the CN(B2Σ+ − X2Σ+) tail band system Part 4. The B2Σ+ ∼ A2Πi perturbations in the υB = 11, 14–16, 18 and 19 levels. J Mol Struct 1994. [DOI: 10.1016/0022-2860(94)08223-5] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Ito H, Ozaki Y, Suzuki K, Kondow T, Kuchitsu K. Emission spectrum of the CN(B 2Σ+–X 2Σ+) tail band system: B 2Σ+∼4Π perturbations in the vB=9, 12, and 17 levels. J Chem Phys 1992. [DOI: 10.1063/1.462838] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Kanda K, Ito H, Suzuki K, Kondow T, Kuchitsu K. Pressure-Dependent Intensity Anomalies in the B2Σ+∼4Π Perturbed Rotational Lines of the CN (B2Σ+-X2Σ+) 14-14 Band. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN 1992. [DOI: 10.1246/bcsj.65.481] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Nagata T, Kondow T, Kuchitsu K, Tabayashi K, Shobatake K. Collision energy dependence of the cross sections for production of CN(B 2Σ+) in the reactions of Ar(3P0,2) and Kr(3P0,2) with BrCN. J Chem Phys 1991. [DOI: 10.1063/1.461180] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Perturbations in the CN(B 2Σ+−X 2Σ+) tail band system. Vibrational assignment of the B 2Σ+ ∼ 4Π perturbation. Chem Phys Lett 1987. [DOI: 10.1016/0009-2614(87)87346-3] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Ozaki Y, Ito H, Suzuki K, Kondow T, Kuchitsu K. Rotational perturbations in the CN (B 2Σ+-X 2Σ+) tail band system. II. Identification of the CN (4Π) state and its vibrational levels. Chem Phys 1983. [DOI: 10.1016/0301-0104(83)85170-2] [Citation(s) in RCA: 32] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
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Analysis of anomalous vibrational and rotational distributions in the CN(B2Σ+) state produced in the reaction of Ar(3P0,2) metastables with BrCN. Chem Phys 1980. [DOI: 10.1016/0301-0104(80)80109-1] [Citation(s) in RCA: 25] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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Hennessy R, Ono Y, Simons J. A crossed molecular beam study of the chemiluminescent reaction Xe(3P2,0) + BrCN → Xe(1S0) + Br + CN(B2Σ+). Chem Phys Lett 1980. [DOI: 10.1016/0009-2614(80)80461-1] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Smith JH, Robinson DW. The OH and OD laser: Collision‐induced energy transfer pumping. J Chem Phys 1978. [DOI: 10.1063/1.435726] [Citation(s) in RCA: 25] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022] Open
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Suzuki K, Kuchitsu K. Formation of CN(B2Σ+) in the Reaction of Acetonitrile with Metastable Ar(3P2,0) Atoms. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN 1977. [DOI: 10.1246/bcsj.50.1449] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Huo WM, Dillon MA. Effect of the reverse reaction on the experimental determination of energy transfer rate constants. J Chem Phys 1977. [DOI: 10.1063/1.434392] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Zamir E, Szöke A, Osgood R. Fluorescence and dissociative energy transfer in high pressure Ar–HCN mixtures excited by relativistic electrons. J Chem Phys 1976. [DOI: 10.1063/1.432964] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Miller TA, Freund RS, Field RW. The identification and characterization of the 4E+ state of CN. J Chem Phys 1976. [DOI: 10.1063/1.433569] [Citation(s) in RCA: 23] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Tokue I, Kuchitsu K. Formation of CN (B2Σ) by the electron impact dissociation of cyanides. Rotational perturbation. Chem Phys Lett 1975. [DOI: 10.1016/0009-2614(75)87016-3] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]
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Tokue I, Kuchitsu K. Formation of CN(B2Σ) by the electron impact dissociation of cyanides. Rotational energy distribution of CN(B2Σ) from HCN. Chem Phys Lett 1975. [DOI: 10.1016/0009-2614(75)85295-x] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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West GA, Berry MJ. CN photodissociation and predissociation chemical lasers: Molecular electronic and vibrational laser emissions. J Chem Phys 1974. [DOI: 10.1063/1.1681793] [Citation(s) in RCA: 74] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Urisu T, Kuchitsu K. Violet and red emission bands of the CN radicals formed in the collision of metastable argon atoms with cyanides. ACTA ACUST UNITED AC 1974. [DOI: 10.1016/0047-2670(74)85006-9] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Duewer WH, Setser DW. Infrared chemiluminescence and energy partitioning from reactions of fluorine atoms with hydrides of carbon, silicon, oxygen, sulfur, nitrogen, and phosphorus. J Chem Phys 1973. [DOI: 10.1063/1.1679506] [Citation(s) in RCA: 81] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022] Open
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Coxon JA, Setser DW, Duewer WH. Excitation of CN violet (B 2Σ+−X 2Σ+) and red (A 2Πi−X 2Σ+) bands by reaction of Ar and Xe metastable atoms with CN‐containing compounds. J Chem Phys 1973. [DOI: 10.1063/1.1679499] [Citation(s) in RCA: 68] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Richardson WC, Setser DW. Penning ionization optical spectroscopy: Metastable helium (He 2 3S) atoms with nitrogen, carbon monoxide, oxygen, hydrogen chloride, hydrogen bromide, and chlorine. J Chem Phys 1973. [DOI: 10.1063/1.1679437] [Citation(s) in RCA: 118] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022] Open
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Urisu T, Kuchitsu K. Rotational excitation and the energy distribution of CN(B2Σ) produced by the reaction of metastable Ar(3P0,2) atoms with HCN. Chem Phys Lett 1973. [DOI: 10.1016/0009-2614(73)80183-6] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Urisu T, Kuchitsu K. EMISSION SPECTRA OF THE CN RADICAL PRODUCED BY THE REACTION OF METASTABLE ARGON ATOMS WITH CH3CN AND HCN. CHEM LETT 1972. [DOI: 10.1246/cl.1972.813] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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