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For: Chen XB, Zhang QS, Kang D, Zhang WJ. On the dynamics of piezoactuated positioning systems. Rev Sci Instrum 2008;79:116101. [PMID: 19045914 DOI: 10.1063/1.2982238] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Number Cited by Other Article(s)
1
Yang L, Li J. Robust output feedback control with disturbance estimation for piezoelectric actuators. Neurocomputing 2016. [DOI: 10.1016/j.neucom.2015.10.088] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
2
State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration. ACTUATORS 2013. [DOI: 10.3390/act2010001] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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