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For: Garrison BJ, Goddard WA. Dissociation energetics of SiF systems of relevance to etching reactions. J Chem Phys 1987. [DOI: 10.1063/1.453706] [Citation(s) in RCA: 28] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
Number Cited by Other Article(s)
1
A theoretical study on laser cooling of silicon monofluoride. Chem Phys 2017. [DOI: 10.1016/j.chemphys.2017.01.007] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
2
Li J, Wang M, Yang C, Ma M, Tong D. Theoretical study of spectroscopic constants and anharmonic force field of SiF2. J Mol Model 2015;21:108. [DOI: 10.1007/s00894-015-2657-6] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/20/2014] [Accepted: 03/16/2015] [Indexed: 11/30/2022]
3
Kishi R, Negishi Y, Kawamata H, Iwata S, Nakajima A, Kaya K. Geometric and electronic structures of fluorine bound silicon clusters. J Chem Phys 1998. [DOI: 10.1063/1.475343] [Citation(s) in RCA: 34] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
4
Accurate D0 values for SiF and SiF+. Chem Phys Lett 1998. [DOI: 10.1016/s0009-2614(98)00166-3] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
5
Boehm RC, Kress JD, Martin RL, Hay PJ. A theoretical study of bond energies in model Si-H-Cl molecules using density functional approaches for representing Si surface chemistry. J Comput Chem 1997. [DOI: 10.1002/(sici)1096-987x(199712)18:16<2075::aid-jcc11>3.0.co;2-n] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
6
Negishi Y, Kawamata H, Hayase T, Gomei M, Kishi R, Hayakawa F, Nakajima A, Kaya K. Photoelectron spectroscopy of germanium-fluorine binary cluster anions: the HOMO-LUMO gap estimation of Gen clusters. Chem Phys Lett 1997. [DOI: 10.1016/s0009-2614(97)00284-4] [Citation(s) in RCA: 66] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
7
King RA, Mastryukov VS, Schaefer HF. The electron affinities of the silicon fluorides SiFn (n=1–5). J Chem Phys 1996. [DOI: 10.1063/1.471846] [Citation(s) in RCA: 70] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]  Open
8
Kawamata H, Negishi Y, Kishi R, Iwata S, Nakajima A, Kaya K. Photoelectron spectroscopy of silicon–fluorine binary cluster anions (SinF−m). J Chem Phys 1996. [DOI: 10.1063/1.472377] [Citation(s) in RCA: 56] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
9
Pak Y, Woods RC. Coupled cluster calculations of the potential energy surfaces and spectroscopic constants of SiF2, PF+2, SO2, PO−2, and ClO+2. J Chem Phys 1996. [DOI: 10.1063/1.471794] [Citation(s) in RCA: 34] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]  Open
10
Lutrus CK, Oshiro T, Hagen DE. Simulation of bulk silicon crystals and Si(111) surfaces with application to a study of fluorine coverage of the surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1993;48:15086-15091. [PMID: 10008040 DOI: 10.1103/physrevb.48.15086] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
11
Gutsev GL. A density functional investigation on the structure and stability of the SiFnand SiF−nseries,n=1–5. J Chem Phys 1993. [DOI: 10.1063/1.466135] [Citation(s) in RCA: 30] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
12
Michels H, Hobbs R. Electronic structure and thermochemistry of silicon hydride and silicon fluoride anions. Chem Phys Lett 1993. [DOI: 10.1016/0009-2614(93)89019-e] [Citation(s) in RCA: 26] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
13
A theoretical investigation of the electronic and geometrical structure of silicon fluorides SiF n and their anions SiF n ?,n=1?6. Russ Chem Bull 1993. [DOI: 10.1007/bf00699970] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
14
Comparative study of the structures and energies of the SiX3, GeX3 and SnX3 series of radicals (X = H, F, Cl). Chem Phys 1992. [DOI: 10.1016/0301-0104(92)80070-c] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
15
Šurkus A. Application of the generalized potential energy function for solving the inverse spectroscopic problem: the ground-state potential of SiF+. Chem Phys Lett 1991. [DOI: 10.1016/0009-2614(91)87145-2] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
16
Curtiss LA, Jones C, Trucks GW, Raghavachari K, Pople JA. Gaussian‐1 theory of molecular energies for second‐row compounds. J Chem Phys 1990. [DOI: 10.1063/1.458892] [Citation(s) in RCA: 606] [Impact Index Per Article: 17.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
17
Peterson KA, Woods RC, Rosmus P, Werner H. Spectroscopic properties of theX 1Σ+anda 3Π electronic states of CF+, SiF+, and CCl+by multireference configuration interaction. J Chem Phys 1990. [DOI: 10.1063/1.459066] [Citation(s) in RCA: 28] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]  Open
18
Peterson KA, Woods RC. Anabinitiostudy of the 24 electron radicals PF, SO, NCl, SF+, ClO+, SiF−, PO−, NS−, and CCl−in theirX 3∑−electronic states. J Chem Phys 1990. [DOI: 10.1063/1.459065] [Citation(s) in RCA: 50] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
19
Weber TA, Stillinger FH. Dynamical branching during fluorination of the dimerized Si(100) surface: A molecular dynamics study. J Chem Phys 1990. [DOI: 10.1063/1.458348] [Citation(s) in RCA: 65] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
20
Ignacio EW, Schlegel HB. Heats of formation of SiHmFn calculated by ab initio molecular orbital methods. J Chem Phys 1990. [DOI: 10.1063/1.458518] [Citation(s) in RCA: 32] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
21
Ravenek W, Baerends EJ. Interaction of F and Cl with silicon surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1988;38:12508-12513. [PMID: 9946195 DOI: 10.1103/physrevb.38.12508] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
22
Petrmichl RH, Peterson KA, Woods RC. The microwave spectrum of SiF+. J Chem Phys 1988. [DOI: 10.1063/1.455597] [Citation(s) in RCA: 36] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
23
Peterson KA, Woods RC. Predictions of the rotational and vibrational spectra of SiF+, PO+, and NS+ by Mo/ller–Plesset perturbation theory. J Chem Phys 1988. [DOI: 10.1063/1.455636] [Citation(s) in RCA: 36] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
24
Weber ME, Armentrout PB. Energetics and dynamics in the reaction of Si+ with SiF4. Thermochemistry of SiFx and SiF+x (x=1, 2, 3). J Chem Phys 1988. [DOI: 10.1063/1.454387] [Citation(s) in RCA: 36] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
25
Garrison BJ, Goddard III. Reaction mechanism for fluorine etching of silicon. PHYSICAL REVIEW. B, CONDENSED MATTER 1987;36:9805-9808. [PMID: 9942884 DOI: 10.1103/physrevb.36.9805] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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