On the dual role of the Knudsen layer and unsteady, adiabatic expansion in pulse sputtering phenomena

PLD plasma plume analysis: a summary of the PSI contribution

We report on the properties of laser-induced plasma plumes generated by ns pulsed excimer lasers as used for pulsed laser deposition to prepare thin oxide films. A focus is on the time and spatial evolution of chemical species in the plasma plume as well as the mechanisms related to the plume expansion. The overall dynamics of such a plume is governed by the species composition in particular if three or more elements are involved. We studied the temporal evolution of the plume, the composition of the chemical species in the plasma, as well as their electric charge. In particular, ionized species can have an important influence on film growth. Likewise, the different oxygen sources contributing to the overall oxygen content of an oxide film are presented and discussed. Important for the growth of oxide thin films is the compositional transfer of light element such as oxygen or Li. We will show and discuss how to monitor these light elements using plasma spectroscopy and plasma imaging and outline some consequences of our experimental results.

SUPPLEMENTARY INFORMATION

The online version contains supplementary material available at 10.1007/s00339-023-06408-4.

New Insight into the Gas Phase Reaction Dynamics in Pulsed Laser Deposition of Multi-Elemental Oxides

The gas-phase reaction dynamics and kinetics in a laser induced plasma are very much dependent on the interactions of the evaporated target material and the background gas. For metal (M) and metal–oxygen (MO) species ablated in an Ar and O₂ background, the expansion dynamics in O₂ are similar to the expansion dynamics in Ar for M⁺ ions with an MO⁺ dissociation energy smaller than O₂. This is different for metal ions with an MO⁺ dissociation energy larger than for O₂. This study shows that the plume expansion in O₂ differentiates itself from the expansion in Ar due to the formation of MO⁺ species. It also shows that at a high oxygen background pressure, the preferred kinetic energy range to form MO species as a result of chemical reactions in an expanding plasma, is up to 5 eV.

Laser Ablation of Aluminum Near the Critical Regime: A Computational Gas-Dynamical Model with Temperature-Dependent Physical Parameters

The complexity of the phenomena simultaneously occurring, from the very first instants of high-power laser pulse interaction with the target up to the phase explosion, along with the strong changes in chemical-physical properties of matter, makes modeling laser ablation a hard task, especially near the thermodynamic critical regime. In this work, we report a computational model of an aluminum target irradiated in vacuum by a gaussian-shaped pulse of 20 ns duration, with a peak intensity of the order of GW/cm2. This continuum model covers laser energy deposition and temperature evolution in the irradiated target, along with the mass removal mechanism involved, and the vaporized material expansion. Aluminum was considered to be a case study due to the vast literature on the temperature dependence of its thermodynamic, optical, and transport properties that were used to estimate time-dependent values of surface-vapor quantities (vapor pressure, vapor density, vapor and surface temperature) and vapor gas-dynamical quantities (density, velocity, pressure) as it expands into vacuum. Very favorable agreement is reported with experimental data regarding: mass removal and crater depth due to vaporization, generated recoil momentum, and vapor flow velocity expansion.

Preventing Evaporation Products for High-Quality Metal Film in Directed Energy Deposition: A Review

Directed energy deposition (DED), a type of additive manufacturing (AM) is a process that enables high-speed deposition using laser technology. The application of DED extends not only to 3D printing, but also to the 2D surface modification by direct laser-deposition dissimilar materials with a sub-millimeter thickness. One of the reasons why DED has not been widely applied in the industry is the low velocity with a few m/min, but thin-DED has been developed to the extent that it can be over 100 m/min in roller deposition. The remaining task is to improve quality by reducing defects. Thus far, defect studies on AM, including DED, have focused mostly on preventing pores and crack defects that reduce fatigue strength. However, evaporation products, fumes, and spatters, were often neglected despite being one of the main causes of porosity and defects. In high-quality metal deposition, the problems caused by evaporation products are difficult to solve, but they have not yet caught the attention of metallurgists and physicists. This review examines the effect of the laser, material, and process parameters on the evaporation products to help obtain a high-quality metal film layer in thin-DED.

Tip-enhanced ablation and ionization mass spectrometry for nanoscale chemical analysis

Spectroscopic methods with nanoscale lateral resolution are becoming essential in the fields of physics, chemistry, geology, biology, and materials science. However, the lateral resolution of laser-based mass spectrometry imaging (MSI) techniques has so far been limited to the microscale. This report presents the development of tip-enhanced ablation and ionization time-of-flight mass spectrometry (TEAI-TOFMS), using a shell-isolated apertureless silver tip. The TEAI-TOFMS results indicate the capability and reproducibility of the system for generating nanosized craters and for acquiring the corresponding mass spectral signals. Multi-elemental analysis of nine inorganic salt residues and MSI of a potassium salt residue pattern at a 50-nm lateral resolution were achieved. These results demonstrate the opportunity for the distribution of chemical compositions at the nanoscale to be visualized.

Interpretation of time-of-flight distributions for neutral particles under pulsed laser evaporation using direct Monte Carlo simulation

A theoretical study of the time-of-flight (TOF) distributions under pulsed laser evaporation in vacuum has been performed. A database of TOF distributions has been calculated by the direct simulation Monte Carlo (DSMC) method. It is shown that describing experimental TOF signals through the use of the calculated TOF database combined with a simple analysis of evaporation allows determining the irradiated surface temperature and the rate of evaporation. Analysis of experimental TOF distributions under laser ablation of niobium, copper, and graphite has been performed, with the evaluated surface temperature being well agreed with results of the thermal model calculations. General empirical dependences are proposed, which allow indentifying the regime of the laser induced thermal ablation from the TOF distributions for neutral particles without invoking the DSMC-calculated database.

Nanosecond and Femtosecond UV Laser Ablation of CdTe (100): Time-Of-Flight and Angular Distributions

Angularly resolved time-of-flight (TOF) measurements have been used to probe the velocity and angular distributions of Cd atoms and Te2 molecules ejected from CdTe (100) substrates under irradiation by 248 nm nanosecond and sub-picosecond laser pulses. These experiments employ a dye laser TOF mass spectrometer with resonance enhanced multiphoton ionization for sensitive, high resolution detection of the desorbed products. The velocity distributions are well described by Maxwell-Boltzmann distributions for low fluence nanosecond (<60 mJ/cm2) and sub-picosecond (<3.3 mJ/cm2) pulses. Angular flux distributions for nanosecond irradiation are observed to be highly forward peaked about the surface normal, whereas, for sub-picosecond irradiation the distribution approaches cos3θ.

Laser-Solid Interaction and Dynamics of the Laser-Ablated Materials

Rapid transformations through the liquid and vapor phases induced by laser-solid interactions are described by our thermal model with the Clausius-Clapeyron equation to determine the vaporization temperature under different surface pressure condition. Hydrodynamic behavior of the vapor during and after ablation is described by gas dynamic equations. these two models are coupled. Modeling results show that lower background pressure results lower laser energy density threshold for vaporization. the ablation rate and the amount of materials removed are proportional to the laser energy density above its threshold. We also demonstrate a dynamic source effect that accelerates the unsteady expansion of laser-ablated material in the direction perpendicular to the solid. a dynamic partial ionization effect is studied as well. a self-similar theory shows that the maximum expansion velocity is proportional to cs/α, where 1 – α is the slope of the velocity profile. Numerical hydrodynamic modeling is in good agreement with the theory. With these effects, α. is reduced. therefore, the expansion front velocity is significantly higher than that from conventional models. the results are consistent with experiments. We further study the plume propagates in high background gas condition. Under appropriate conditions, the plume is slowed down, separates with the background, is backward moving, and hits the solid surface. then, it splits to be two parts when it rebounds from the surface. the results from the modeling will be compared with experimental observations where possible.

Dynamics of laser-ablated carbon plasma: formation of C2 and CN

We report time-resolved imaging of a laser-ablated carbon plasma plume to investigate the expansion dynamics of C(2) and CN in an ambient atmosphere of nitrogen gas at various pressures. An attempt is made to locate C(2) and CN species in the carbon plasma plume and correlate them with the results of spectroscopic observations. The ablated C(2) and CN species decelerate due to collisions with nitrogen gas and are localized in the slower part (approximately 300 ns) of the expanding plume. Further expansion (<700 ns) of the plasma reveals the concentration of C(2) species on the periphery of the plume, whereas CN dominates at the core of the plume. However, at times greater than 700 ns, the collisions and recombination processes dominate in the plume and C(2) expands slower than CN. The plume dynamics is studied in terms of shock-wave and drag models.

Product Screening of Fast Reactions in IR-Laser-Heated Liquid Water Filaments in a Vacuum by Mass Spectrometry

In the present article a novel approach for rapid product screening of fast reactions in IR-laser-heated liquid microbeams in a vacuum is highlighted. From absorbed energies, a shock wave analysis, high-speed laser stroboscopy, and thermodynamic data of high-temperature water the enthalpy, temperature, density, pressure, and the reaction time window for the hot water filament could be characterized. The experimental conditions (30 kbar, 1750 K, density approximately 1 g/cm3) present during the lifetime of the filament (20-30 ns) were extreme and provided a unique environment for high-temperature water chemistry. For the probe of the reaction products liquid beam desorption mass spectrometry was employed. A decisive feature of the technique is that ionic species, as well as neutral products and intermediates may be detected (neutrals as protonated aggregates) via time-of-flight mass spectrometry without any additional ionization laser. After the explosive disintegration of the superheated beam, high-temperature water reactions are efficiently quenched via expansion and evaporative cooling. For first exploratory experiments for chemistry in ultrahigh-temperature, -pressure and -density water, we have chosen resorcinol as a benchmark system, simple enough and well studied in high-temperature water environments much below 1000 K. Contrary to oxidation reactions usually present under less extreme and dense supercritical conditions, we have observed hydration and little H-atom abstraction during the narrow time window of the experiment. Small amounts of radicals but no ionic intermediates other than simple proton adducts were detected. The experimental findings are discussed in terms of the energetic and dense environment and the small time window for reaction, and they provide firm evidence for additional thermal reaction channels in extreme molecular environments.

Measurement of mitochondrial DNA synthesis in vivo using a stable isotope-mass spectrometric technique

We describe here a new stable isotope-mass spectrometric technique for measuring mitochondrial DNA (mtDNA) synthesis. Growing (2-4 mo old) and weight-stable (8-10 mo old) Sprague-Dawley rats were primed with (2)H(2)O (deuterated water) to 2.0-2.5% body water enrichment, via intraperitoneal injection, and then given 4% (2)H(2)O in drinking water for 3-11 wk. Mitochondria were isolated from cardiac and hindlimb muscle, and mtDNA was isolated and enzymatically hydrolyzed to deoxyribonucleosides. PCR confirmed the absence of nuclear DNA contamination. The isotopic enrichment of the deoxyribose moiety of deoxyadenosine was determined by GC-MS analysis, and percent new mtDNA was calculated by comparison to genomic DNA enrichments in a tissue with nearly complete turnover (bone marrow). Initial label incorporation into deoxyadenosine of mtDNA was linear, and turnover of mtDNA was observed in nongrowing adult female rats (1.1-1.3% new mtDNA per day in cardiac and skeletal muscle). Die-away curves of mtDNA after discontinuing (2)H(2)O administration gave a similar turnover rate constant. Human subjects were also given (2)H(2)O for up to 6 wk, and mitochondria from platelets were isolated. Incubation with DNase removed any contaminating genomic DNA; platelet mtDNA exhibited linear incorporation from (2)H(2)O and reached plateau values identical to those in genomic DNA from fully turned over cells (circulating monocytes). In conclusion, replication of mtDNA can be directly measured in vivo in rodents and humans without the use of radioactivity. Use of this technique may allow improved understanding of the regulation of mitochondrial biogenesis in health and disease.

Direction-selective free expansion of laser-produced plasmas from planar targets

Direction-selective expansion of laser-produced plasmas from planar slab targets of Al, Ni, Mo, and Ta are reported. Angular distributions of the particles emitted from the targets, produced by a 130 mJ, 5 nsec, Nd:YAG laser, were obtained by means of a retarding potential analyzer and a quartz crystal. It was observed that the angular distributions of the particles had mainly three characteristics. For a given laser energy and a given target element, the angular distribution showed more preferential focusing toward the target normal as the value of the focal spot size B increased. Second, for a given laser energy and a given focal spot size, the focusing was more pronounced toward the target normal as the atomic mass number of the target materials increased. Third, for a given energy, a given focal spot size and a given element, the particles with higher ionization states were much more focused toward the target normal. Our experimental results confirm the Monte Carlo simulation results of the earlier works taking into account collision and recombination processes.

Laser-generated plasma plume expansion: combined continuous-microscopic modeling

The physical phenomena involved in the interaction of a laser-generated plasma plume with a background gas are studied numerically. A three-dimensional combined model is developed to describe the plasma plume formation and its expansion in vacuum or into a background gas. The proposed approach takes advantages of both continuous and microscopic descriptions. The simulation technique is suitable for the simulation of high-rate laser ablation for a wide range of background pressure. The model takes into account the mass diffusion and the energy exchange between the ablated and background species, as well as the collective motion of the ablated species and the background-gas particles. The developed approach is used to investigate the influence of the background gas on the expansion dynamics of the plume obtained during the laser ablation of aluminum. At moderate pressures, both plume and gas compressions are weak and the process is mainly governed by the diffusive mixing. At higher pressures, the interaction is determined by the plume-gas pressure interplay, the plume front is strongly compressed, and its center exhibits oscillations. In this case, the snowplough effect takes place, leading to the formation of a compressed gas layer in front of the plume. The background pressure needed for the beginning of the snowplough effect is determined from the plume and gas density profiles obtained at various pressures. Simulation results are compared with experimentally measured density distributions. It is shown that the calculations suggest localized formation of molecules during reactive laser ablation.

Low-power resonant laser ablation of copper

We emphasize two points: (l) the properties and mechanisms of very low-fluence ablation of copper surfaces and (2) the sensitivity and selectivity of resonant laser ablation (RLA). We present results for ablation of bulk copper and copper thin films; spot-size effects; the effects of surface-sample preparation and beam polarization; and an accurate measurement of material removal rates, typically ≤ 10(-3) Å at 35 mJ/cm(2). Velocity distributions were Maxwellian, with peak velocities ≈ 1-2 × 10(5) cm/s. In addition, we discuss the production of diffractionlike surface features, and the probable participation of nonthermal desorption mechanisms. RLA is shown to be a sensitive and useful diagnostic for studies of low-fluence laser-material interactions.

Ablation, Melting, and Smoothing of Polycrystalline Alumina by Pulsed Excimer Laser Radiation

The effects of pulsed XeCl (308 nm) laser radiation on polycrystalline Al2O3 (alumina, 99.6% pure) and single-crystal Al2O3 (sapphire) are studied as a function of laser fluence. No laser etching ofeither material is detected below a threshold fluence value, which is much lower for alumina than for sapphire. Above this threshold, laser etching of both materials is observed following a number of incubation (induction) pulses. This number is much larger for sapphire than for alumina but decreases with increasing fluence for both materials. Laser etching rates for the two materials are similar at high fluences and after the incubation period. Scanning electron microscope images show that alumina melts and flows under repeated irradiation at fluences ≥0.7 J/cm2. Atomic force microscopy and surface profilometry reveal significant smoothing of the as-received polycrystalline alumina surface after repeated irradiations at moderate fluences (∼1−3 J/cm2). Ion probe measurements for alumina in vacuum confirm the incubation behavior, and reveal that at fixed fluence the (positive) charge collected per pulse saturates after a sufficient number of pulses, as does the etch-plume velocity. The results are interpreted in terms of laser-generation of a sufficient concentration of absorption centers before efficient ablation/etching of these wide bandgap materials can occur.