1
|
Haitjema J, Castellanos S, Lugier O, Bespalov I, Lindblad R, Timm M, Bülow C, Zamudio-Bayer V, Lau JT, von Issendorff B, Hoekstra R, Witte K, Watts B, Schlathölter T, Brouwer AM. Soft X-ray absorption and fragmentation of tin-oxo cage photoresists. Phys Chem Chem Phys 2024; 26:5986-5998. [PMID: 38293812 DOI: 10.1039/d3cp05428d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/01/2024]
Abstract
"Tin-oxo cage" organometallic compounds are considered as photoresists for extreme ultraviolet (EUV) photolithography. To gain insight into their electronic structure and reactivity to ionizing radiation, we trapped bare gas-phase n-butyltin-oxo cage dications [(BuSn)12O14(OH)6]2+ in an ion trap and investigated their fragmentation upon soft X-ray photoabsorption by means of mass spectrometry. In complementary experiments, the tin-oxo cages with hydroxide and trifluoroacetate counter-anions were cast in thin films and studied using X-ray transmission spectroscopy. Quantum-chemical calculations were used to interpret the observed spectra. At the carbon K-edge, a distinct pre-edge absorption band can be attributed to transitions in which electrons are promoted from C1s orbitals to the lowest unoccupied molecular orbitals, which are delocalized orbitals with strong antibonding (Sn-C σ*) character. At higher energies, the most prominent resonant transitions involve C-C and C-H σ* valence states and Rydberg (3s and 3p) states. In the solid state, the onset of continuum ionization is shifted by ∼5 eV to lower energy with respect to the gas phase, due to the electrostatic effect of the counterions. The O K-edge also shows a pre-edge absorption, but it is devoid of any specific features, because there are many transitions from the different O1s orbitals to a large number of vacant orbitals. In the gas phase, formation of the parent [(BuSn)12O14(OH)6]3+ radical ion is not observed at the C K-edge nor at the O K-edge, because the loss of a butyl group from this species is very efficient. We do observe a number of triply charged photofragment ions, some of which have lost up to 5 butyl groups. Structures of these species are proposed based on quantum-chemical calculations, and pathways of formation are discussed. Our results provide insight into the electronic structure of alkyltin-oxo cages, which is a prerequisite for understanding their response to EUV photons and their performance as EUV photoresists.
Collapse
Affiliation(s)
- Jarich Haitjema
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
| | - Sonia Castellanos
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
| | - Olivier Lugier
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
| | - Ivan Bespalov
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
| | - Rebecka Lindblad
- Department of Physics, Lund University, 22100 Lund, Sweden
- Abteilung für Hochempfindliche Röntgenspektroskopie, Helmholtz Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
| | - Martin Timm
- Abteilung für Hochempfindliche Röntgenspektroskopie, Helmholtz Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
| | - Christine Bülow
- Abteilung für Hochempfindliche Röntgenspektroskopie, Helmholtz Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
- Physikalisches Institut, Albert-Ludwigs-Universität Freiburg, Hermann-Herder-Straße 3, 79104 Freiburg, Germany
| | - Vicente Zamudio-Bayer
- Abteilung für Hochempfindliche Röntgenspektroskopie, Helmholtz Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
| | - J Tobias Lau
- Abteilung für Hochempfindliche Röntgenspektroskopie, Helmholtz Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany
- Physikalisches Institut, Albert-Ludwigs-Universität Freiburg, Hermann-Herder-Straße 3, 79104 Freiburg, Germany
| | - Bernd von Issendorff
- Physikalisches Institut, Albert-Ludwigs-Universität Freiburg, Hermann-Herder-Straße 3, 79104 Freiburg, Germany
| | - Ronnie Hoekstra
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
- Zernike Institute for Advanced Materials, Rijksuniversiteit Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands.
| | | | | | - Thomas Schlathölter
- Zernike Institute for Advanced Materials, Rijksuniversiteit Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands.
- University College Groningen, University of Groningen, Hoendiepskade 23/24, 9718 BG Groningen, The Netherlands
| | - Albert M Brouwer
- Advanced Research Center for Nanolithography, P.O. Box 93019, 1090 BA Amsterdam, The Netherlands.
- University of Amsterdam, van't Hoff Institute for Molecular Sciences, P.O. Box 94157, 1090 GD Amsterdam, The Netherlands
| |
Collapse
|
2
|
Matz F, Jagau TC. Molecular Auger Decay Rates from Complex-Variable Coupled-Cluster Theory. J Chem Phys 2022; 156:114117. [DOI: 10.1063/5.0075646] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
Abstract
The emission of an Auger electron is the predominant relaxation mechanism of core-vacant states in molecules composed of light nuclei. In this non-radiative decay process, one valence electron fills the core vacancy while a second valence electron is emitted into the ionization continuum. Because of this coupling to the continuum, core-vacant states represent electronic resonances that can be tackled with standard quantum-chemical methods only if they are approximated as bound states, meaning that Auger decay is neglected. Here, we present an approach to compute Auger decay rates of core-vacant states from coupled-cluster and equation-of-motion coupled-cluster wave functions combined with complex scaling of the Hamiltonian or, alternatively, complex-scaled basis functions. Through energy decomposition analysis, we illustrate how complex-scaled methods are capable of describing the coupling to the ionization continuum without the need to model the wave function of the Auger electron explicitly. In addition, we introduce in this work several approaches for the determination of partial decay widths and Auger branching ratios from complex-scaled coupled-cluster wave functions. We demonstrate the capabilities of our new approach by computations on core-ionized states of neon, water, dinitrogen, and benzene. Coupled-cluster and equation-of-motion coupled-cluster theory in the singles and doubles approximation both deliver excellent results for total decay widths, whereas we find partial widths more straightforward to evaluate with the former method. We also observe that the requirements towards the basis set are less arduous for Auger decay than for other types of resonances so that extensions to larger molecules are readily possible.
Collapse
Affiliation(s)
- Florian Matz
- Katholieke Universiteit Leuven Departement Chemie, Belgium
| | | |
Collapse
|
3
|
Ghosh A, Pal S, Vaval N. Interatomic Coulombic decay in Neon–Helium cluster: a complex absorbing potential based equation-of-motion coupled cluster investigation. Mol Phys 2021. [DOI: 10.1080/00268976.2021.1884300] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/22/2022]
Affiliation(s)
- Aryya Ghosh
- Department of Chemistry, Ashoka University, Sonipat, India
| | - Sourav Pal
- Department of Chemistry, Indian Institute of Science Education and Research Kolkata, Mohanpur, India
| | - Nayana Vaval
- Electronic Structure Theory Group, Physical Chemistry Division, CSIR National Chemical Laboratory, Pune, India
| |
Collapse
|
4
|
Basumallick S, Sajeev Y, Pal S, Vaval N. Negative Ion Resonance States: The Fock-Space Coupled-Cluster Way. J Phys Chem A 2020; 124:10407-10421. [PMID: 33327725 DOI: 10.1021/acs.jpca.0c09148] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
Abstract
The negative ion resonance states, which are electron-molecule metastable compound states, play the most important role in free-electron controlled molecular reactions and low-energy free-electron-induced DNA damage. Their electronic structure is often only poorly described but crucial to an understanding of their reaction dynamics. One of the most important challenges to current electronic structure theory is the computation of negative ion resonance states. As a major step forward, coupled-cluster theories, which are well-known for their ability to produce the best approximate bound state electronic eigen solutions, are upgraded to offer the most accurate and effective approximations for negative ion resonance states. The existing Fock-space coupled-cluster (FSCC) and the equation-of-motion coupled-cluster (EOM-CC) approaches that compute bound states are redesigned for the direct and simultaneous determination of both the kinetic energy of the free electron at which the electron-molecule compound states are resonantly formed and the corresponding autodetachment decay rate of the electron from the metastable compound state. This Feature Article reviews the computation of negative ion resonances using the FSCC approach and, in passing, provides the highlights of the equivalent EOM-CC approach.
Collapse
Affiliation(s)
- Suhita Basumallick
- Department of Chemistry, Indian Institute of Technology Bombay, Powai, Mumbai 400 076, India
| | - Y Sajeev
- Theoretical Chemistry Section, Bhabha Atomic Research Centre, Mumbai 400 094, India
| | - Sourav Pal
- Indian Institute of Science Education and Research Kolkata, Mohanpur, Nadia 741 246, West Bengal, India
| | - Nayana Vaval
- Physical and Materials Chemistry Division, CSIR-National Chemical Laboratory, Pune 411 008, India
| |
Collapse
|
5
|
Howell RW. Advancements in the use of Auger electrons in science and medicine during the period 2015-2019. Int J Radiat Biol 2020; 99:2-27. [PMID: 33021416 PMCID: PMC8062591 DOI: 10.1080/09553002.2020.1831706] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/17/2020] [Revised: 09/01/2020] [Accepted: 09/28/2020] [Indexed: 02/06/2023]
Abstract
Auger electrons can be highly radiotoxic when they are used to irradiate specific molecular sites. This has spurred basic science investigations of their radiobiological effects and clinical investigations of their potential for therapy. Focused symposia on the biophysical aspects of Auger processes have been held quadrennially. This 9th International Symposium on Physical, Molecular, Cellular, and Medical Aspects of Auger Processes at Oxford University brought together scientists from many different fields to review past findings, discuss the latest studies, and plot the future work to be done. This review article examines the research in this field that was published during the years 2015-2019 which corresponds to the period since the last meeting in Japan. In addition, this article points to future work yet to be done. There have been a plethora of advancements in our understanding of Auger processes. These advancements range from basic atomic and molecular physics to new ways to implement Auger electron emitters in radiopharmaceutical therapy. The highly localized doses of radiation that are deposited within a 10 nm of the decay site make them precision tools for discovery across the physical, chemical, biological, and medical sciences.
Collapse
Affiliation(s)
- Roger W Howell
- Division of Radiation Research, Department of Radiology, New Jersey Medical School, Rutgers University, Newark, NJ, USA
| |
Collapse
|
6
|
Closser KD, Ogletree DF, Naulleau P, Prendergast D. The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials. J Chem Phys 2017; 146:164106. [DOI: 10.1063/1.4981815] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
Affiliation(s)
- Kristina D. Closser
- The Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
| | - D. Frank Ogletree
- The Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
| | - Patrick Naulleau
- Center for X-Ray Optics (CXRO), Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
| | - David Prendergast
- The Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
| |
Collapse
|