A table-top monochromator for tunable femtosecond XUV pulses generated in a semi-infinite gas cell: Experiment and simulations

XUV Absorption Spectroscopy and Photoconversion of a Tin-Oxo Cage Photoresist

Extreme ultraviolet lithography has recently been introduced in high-volume production of integrated circuits for manufacturing the smallest features in high-end computer chips. Hybrid organic/inorganic materials are considered as the next generation of photoresists for this technology, but detailed knowledge about the response of such materials to the ionizing radiation used (13.5 nm, 92 eV) is still scarce. In the present work, we use broadband high-harmonic radiation in the energy range 22-70 eV for absorption spectroscopy and photobleaching (that is, the decrease of absorbance) of thin films of an n-butyltin oxo-cage, a representative of the class of metal-based EUV photoresist. The shape of the absorption spectrum in the range 22-92 eV matches well with the spectrum predicted using tabulated atomic cross sections. The photobleaching results are consistent with loss of the butyl side groups due to the breaking of Sn-C bonds following photoionization. Bleaching is strongest in the low-energy range (<40 eV), where the absorption is largely due to the carbon atoms in the organic groups. At higher energies (42-70 eV), absorption is dominated by the tin atoms, and since these remain in the film after photoconversion, the absorption change in this region is smaller. It is estimated that after prolonged irradiation (up to ∼3 J cm-2 in the range 22-40 eV) about 70% of the hydrocarbon groups are removed from the film. The rate of bleaching is high at the beginning of exposure, but it rapidly decreases with increasing conversion. We rationalize this using density functional theory calculations: the first Sn-C bonds are efficiently cleaved (quantum yield Φ ≈ 0.9), because the highest occupied molecular orbitals (HOMOs) (from which an electron is removed after photoionization) are located on Sn-C sigma bonds. In the photoproducts, the HOMO is localized on tin atoms that have lost their hydrocarbon group (formally reduced to the Sn(II) oxidation state), and holes formed on those tin atoms lead to less efficient cleavage reactions. Our results reveal the primary reaction steps following excitation with ionizing radiation of tin-oxo cages. Our methodology represents a systematic approach of studying and quantitatively assessing the performance of new photoresists and as such enables the development of future EUV photoresists.

Time-Resolved Multielectron Coincidence Spectroscopy of Double Auger-Meitner Decay Following Xe 4d Ionization

We introduce time-resolved multielectron coincidence spectroscopy and apply it to the double Auger-Meitner (AM) emission process following xenon 4d photoionization. The photoelectron and AM electron(s) are measured in coincidence by using a magnetic-bottle time-of-flight spectrometer, enabling an unambiguous assignment of the complete cascade pathways involving two AM electron emissions. In the presence of a near-infrared (NIR) laser pulse, the intermediate Xe^{2+*} state embedded in the Xe^{3+} continuum is probed through single NIR photon absorption and the lifetime of this intermediate Xe^{2+*} state is directly obtained as (109±22)  fs.

Effects of Autoionizing Resonances on Wave-Packet Dynamics Studied by Time-Resolved Photoelectron Spectroscopy

We report a combined experimental and theoretical study on the effect of autoionizing resonances in time-resolved photoelectron spectroscopy. The coherent excitation of N_{2} by ∼14.15  eV extreme-ultraviolet photons prepares a superposition of three dominant adjacent vibrational levels (v^{'}=14-16) in the valence b^{'} ^{1}Σ_{u}^{+} state, which are probed by the absorption of two or three near-infrared photons (800 nm). The superposition manifests itself as coherent oscillations in the measured photoelectron spectra. A quantum-mechanical simulation confirms that two autoionizing Rydberg states converging to the excited A ^{2}Π_{u} and B ^{2}Σ_{u}^{+} N_{2}^{+} cores are accessed by the resonant absorption of near-infrared photons. We show that these resonances apply different filters to the observation of the vibrational wave packet, which results in different phases and amplitudes of the oscillating photoelectron signal depending on the nature of the autoionizing resonance. This work clarifies the importance of resonances in time-resolved photoelectron spectroscopy and particularly reveals the phase of vibrational quantum beats as a powerful observable for characterizing the properties of such resonances.

The ultrafast vibronic dynamics of ammonia's D̃ state

Using vacuum-ultraviolet time-resolved velocity map imaging of photoelectrons, we study ultrafast coupled electronic and nuclear dynamics in low-lying Rydberg states of ammonia. Vibrationally-resolved internal vibrational relaxation (IVR) is observed in a progression of the e' bending modes. This vibrational progression is only observed in the D̃ state, and is lost upon ultrafast internal conversion to the C̃ and B̃ electronic states. Due to the ultrashort time scale of the internal conversion (ca. 64 fs), and the vibronic resolution, the non-adiabatic coupling vectors are identified and verified with ab initio calculations. The time-scale of this IVR process is highly surprising and significant because IVR is usually treated as an incoherent process that proceeds statistically, according to a "Fermi's Golden Rule"-like model, where the process scales with the available degrees of freedom. Here, we show that it can be highly non-statistical, restricted to only a very small subset of vibrational motions.

Different timescales during ultrafast stilbene isomerization in the gas and liquid phases revealed using time-resolved photoelectron spectroscopy

Directly contrasting ultrafast excited-state dynamics in the gas and liquid phases is crucial to understanding the influence of complex environments. Previous studies have often relied on different spectroscopic observables, rendering direct comparisons challenging. Here, we apply extreme-ultraviolet time-resolved photoelectron spectroscopy to both gaseous and liquid cis-stilbene, revealing the coupled electronic and nuclear dynamics that underlie its isomerization. Our measurements track the excited-state wave packets from excitation along the complete reaction path to the final products. We observe coherent excited-state vibrational dynamics in both phases of matter that persist to the final products, enabling the characterization of the branching space of the S₁-S₀ conical intersection. We observe a systematic lengthening of the relaxation timescales in the liquid phase and a red shift of the measured excited-state frequencies that is most pronounced for the complex reaction coordinate. These results characterize in detail the influence of the liquid environment on both electronic and structural dynamics during a complete photochemical transformation.

Intermolecular Coulombic Decay in Liquid Water

We report the first observation of intermolecular Coulombic decay (ICD) in liquid water following inner-valence ionization. By combining a monochromatized tabletop high-harmonic source with a liquid microjet, we record electron-electron coincidence spectra at two photon energies that identify the ICD electrons, together with the photoelectrons originating from the 2a_{1} inner-valence band of liquid water. Our results confirm the importance of ICD as a source of low-energy electrons in bulk liquid water and provide quantitative results for modeling the velocity distribution of the slow electrons that are thought to dominate radiation damage in aqueous environments.

Low-energy electron distributions from the photoionization of liquid water: a sensitive test of electron mean-free paths

The availability of accurate mean free paths for slow electrons (<50 eV) in water is central to the understanding of many electron-driven processes in aqueous solutions, but their determination poses major challenges to experiment and theory alike. Here, we describe a joint experimental and theoretical study demonstrating a novel approach for testing, and, in the future, refining such mean free paths. We report the development of Monte-Carlo electron-trajectory simulations including elastic and inelastic electron scattering, as well as energy loss and secondary-electron production to predict complete photoelectron spectra of liquid water. These simulations are compared to a new set of photoelectron spectra of a liquid-water microjet recorded over a broad range of photon energies in the extreme ultraviolet (20–57 eV). Several previously published sets of scattering parameters are investigated, providing direct and intuitive insights on how they influence the shape of the low-energy electron spectra. A pronounced sensitivity to the escape barrier is also demonstrated. These simulations considerably advance our understanding of the origin of the prominent low-energy electron distributions in photoelectron spectra of liquid water and clarify the influence of scattering parameters and the escape barrier on their shape. They moreover describe the reshaping and displacement of low-energy photoelectron bands caused by vibrationally inelastic scattering. Our work provides a quantitative basis for the interpretation of the complete photoelectron spectra of liquids and opens the path to fully predictive simulations of low-energy scattering in liquid water.

Our study reveals the detailed influence of elastic and inelastic mean-free paths on the complete photoelectron spectra of liquid water, including the low-energy electron distributions and the reshaping of the primary photoelectron bands.

Photoelectron Spectroscopy of Liquid Water with Tunable Extreme-Ultraviolet Radiation: Effects of Electron Scattering

We report the first systematic photoelectron measurements of the three outer-valence bands of liquid water as a function of the ionizing photon energy in the near-threshold region. We use extreme-ultraviolet (XUV) radiation tunable between ∼17.1 and 35.6 eV, obtained through monochromatization of a high-harmonic source. We show that the absolute values of the apparent vertical ionization energies and their respective peak widths show a decreasing trend of their magnitudes with increasing photon energy close to the ionization threshold. We find that the observed effects do not only depend on the electron kinetic energy but are also different for the various outer-valence bands. These observations are consistent with, but not fully explained by, the effects of inelastic electron scattering.

Attosecond spectroscopy of liquid water

Electronic dynamics in liquids are of fundamental importance, but time-resolved experiments have so far remained limited to the femtosecond time scale. We report the extension of attosecond spectroscopy to the liquid phase. We measured time delays of 50 to 70 attoseconds between the photoemission from liquid water and that from gaseous water at photon energies of 21.7 to 31.0 electron volts. These photoemission delays can be decomposed into a photoionization delay sensitive to the local environment and a delay originating from electron transport. In our experiments, the latter contribution is shown to be negligible. By referencing liquid water to gaseous water, we isolated the effect of solvation on the attosecond photoionization dynamics of water molecules. Our methods define an approach to separating bound and unbound electron dynamics from the structural response of the solvent.

Ionization Energy of Liquid Water Revisited

The ionization energy of liquid water is one of its most fundamental properties, an important benchmark for first-principles electronic-structure calculations and a crucial reference in the growing field of liquid-phase photoelectron spectroscopy. Despite this significance, a consensus on its value appears to be missing in the literature. Therefore, we use a monochromatized high-harmonic light source to perform detailed measurements of the ionization energy of liquid water in the presence of a tunable bias voltage applied to the liquid jet. Our results suggest that this simple method is sufficient to simultaneously compensate the effects of the streaming potential and that of the vacuum-level offset between the liquid and the photoelectron spectrometer. Our measurements yield corrected values of the vertical and adiabatic ionization energies of the 1b₁ band of bulk liquid water of 11.67(15) and 10.12(15) eV, respectively. Our method is broadly applicable and is likely to result in corrections to the measured ionization energies of solvated species as well.

A time- and angle-resolved photoemission spectroscopy with probe photon energy up to 6.7 eV

We present the development of a time- and angle-resolved photoemission spectroscopy based on a Yb-based femtosecond laser and a hemispherical electron analyzer. The energy of the pump photon is tunable between 1.4 and 1.9 eV, and the pulse duration is around 30 fs. We use a KBe₂BO₃F₂ nonlinear optical crystal to generate probe pulses, of which the photon energy is up to 6.7 eV, and obtain an overall time resolution of 1 ps and energy resolution of 18 meV. In addition, β-BaB₂O₄ crystals are used to generate alternative probe pulses at 6.05 eV, giving an overall time resolution of 130 fs and energy resolution of 19 meV. We illustrate the performance of the system with representative data on several samples (Bi₂Se₃, YbCd₂Sb₂, and FeSe).

Conical-intersection dynamics and ground-state chemistry probed by extreme-ultraviolet time-resolved photoelectron spectroscopy

Time-resolved photoelectron spectroscopy (TRPES) is a useful approach to elucidate the coupled electronic-nuclear quantum dynamics underlying chemical processes, but has remained limited by the use of low photon energies. Here, we demonstrate the general advantages of XUV-TRPES through an application to NO₂, one of the simplest species displaying the complexity of a non-adiabatic photochemical process. The high photon energy enables ionization from the entire geometrical configuration space, giving access to the true dynamics of the system. Specifically, the technique reveals dynamics through a conical intersection, large-amplitude motion and photodissociation in the electronic ground state. XUV-TRPES simultaneously projects the excited-state wave packet onto many final states, offering a multi-dimensional view of the coupled electronic and nuclear dynamics. Our interpretations are supported by ab initio wavepacket calculations on new global potential-energy surfaces. The presented results contribute to establish XUV-TRPES as a powerful technique providing a complete picture of ultrafast chemical dynamics from photoexcitation to the final products.

New developments in laser-based photoemission spectroscopy and its scientific applications: a key issues review

The significant progress in angle-resolved photoemission spectroscopy (ARPES) in last three decades has elevated it from a traditional band mapping tool to a precise probe of many-body interactions and dynamics of quasiparticles in complex quantum systems. The recent developments of deep ultraviolet (DUV, including ultraviolet and vacuum ultraviolet) laser-based ARPES have further pushed this technique to a new level. In this paper, we review some latest developments in DUV laser-based photoemission systems, including the super-high energy and momentum resolution ARPES, the spin-resolved ARPES, the time-of-flight ARPES, and the time-resolved ARPES. We also highlight some scientific applications in the study of electronic structure in unconventional superconductors and topological materials using these state-of-the-art DUV laser-based ARPES. Finally we provide our perspectives on the future directions in the development of laser-based photoemission systems.

Generation of coherent extreme ultraviolet radiation from α-quartz using 50 fs laser pulses at a 1030 nm wavelength and high repetition rates

Coherent extreme ultraviolet (EUV) radiation using high-harmonic generation (HHG) in α-quartz is demonstrated from 10 to 200 kHz, using 50 fs laser pulses at the center wavelength of 1030 nm. The EUV radiation extends beyond 25 eV in the nondamaging regime. The number of photons generated in a single harmonic order at 15.6 eV is measured to be ≈(3.5±2.5)×10¹⁰ per second which, to the best of our knowledge, is a first and record value reported to date using EUV HHG from solids. This Letter demonstrates one of the first all-solid-state EUV sources based on industrial-grade fiber lasers, enabling the possibility of bringing reliable EUV sources to the mass market.

Angle-resolved photoemission spectroscopy of liquid water at 29.5 eV

Angle-resolved photoemission spectroscopy of liquid water was performed using extreme ultraviolet radiation at 29.5 eV and a time-of-flight photoelectron spectrometer. SiC/Mg coated mirrors were employed to select the single-order 19th harmonic from laser high harmonics, which provided a constant photon flux for different laser polarizations. The instrument was tested by measuring photoemission anisotropy for rare gases and water molecules and applied to a microjet of an aqueous NaI solution. The solute concentration was adjusted to eliminate an electric field gradient around the microjet. The observed photoelectron spectra were analyzed considering contributions from liquid water, water vapor, and an isotropic background. The anisotropy parameters of the valence bands (1b1, 3a1, and 1b2) of liquid water are considerably smaller than those of gaseous water, which is primarily attributed to electron scattering in liquid water.

Time-resolved photoelectron imaging with a femtosecond vacuum-ultraviolet light source: Dynamics in the A∼/B∼- and F∼-bands of SO2

Time-resolved photoelectron imaging is demonstrated using the third harmonic of a 400-nm femtosecond laser pulse as the ionization source. The resulting 133-nm pulses are combined with 266-nm pulses to study the excited-state dynamics in the A∼/B∼- and F∼-band regions of SO₂. The photoelectron signal from the molecules excited to the A∼/B∼-band does not decay for at least several picoseconds, reflecting the population of bound states. The temporal variation of the photoelectron angular distribution (PAD) reflects the creation of a rotational wave packet in the excited state. In contrast, the photoelectron signal from molecules excited to the F∼-band decays with a time constant of 80 fs. This time constant is attributed to the motion of the excited-state wave packet out of the ionization window. The observed time-dependent PADs are consistent with the F∼ band corresponding to a Rydberg state of dominant s character. These results establish low-order harmonic generation as a promising tool for time-resolved photoelectron imaging of the excited-state dynamics of molecules, simultaneously giving access to low-lying electronic states, as well as Rydberg states, and avoiding the ionization of unexcited molecules.