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Peng Q, Ma Z, Cai S, Zhao S, Chen X, Cao Q. Atomistic Insights on Surface Quality Control via Annealing Process in AlGaN Thin Film Growth. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1382. [PMID: 37110967 PMCID: PMC10145358 DOI: 10.3390/nano13081382] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/27/2023] [Revised: 04/13/2023] [Accepted: 04/14/2023] [Indexed: 06/19/2023]
Abstract
Aluminum gallium nitride (AlGaN) is a nanohybrid semiconductor material with a wide bandgap, high electron mobility, and high thermal stability for various applications including high-power electronics and deep ultraviolet light-emitting diodes. The quality of thin films greatly affects their performance in applications in electronics and optoelectronics, whereas optimizing the growth conditions for high quality is a great challenge. Herein, we have investigated the process parameters for the growth of AlGaN thin films via molecular dynamics simulations. The effects of annealing temperature, the heating and cooling rate, the number of annealing rounds, and high temperature relaxation on the quality of AlGaN thin films have been examined for two annealing modes: constant temperature annealing and laser thermal annealing. Our results reveal that for the mode of constant temperature annealing, the optimum annealing temperature is much higher than the growth temperature in annealing at the picosecond time scale. The lower heating and cooling rates and multiple-round annealing contribute to the increase in the crystallization of the films. For the mode of laser thermal annealing, similar effects have been observed, except that the bonding process is earlier than the potential energy reduction. The optimum AlGaN thin film is achieved at a thermal annealing temperature of 4600 K and six rounds of annealing. Our atomistic investigation provides atomistic insights and fundamental understanding of the annealing process, which could be beneficial for the growth of AlGaN thin films and their broad applications.
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Affiliation(s)
- Qing Peng
- School of Science, Harbin Institute of Technology, Shenzhen 518055, China;
- State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China; (Z.M.)
- School of Engineering Science, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Zhiwei Ma
- State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China; (Z.M.)
| | - Shixian Cai
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
| | - Shuai Zhao
- State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China; (Z.M.)
| | - Xiaojia Chen
- School of Science, Harbin Institute of Technology, Shenzhen 518055, China;
| | - Qiang Cao
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
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Zhang L, Li L, Wang Y, Suo Y, Liu S, Gan Z. Atomic simulation of AlGaN film deposition on AlN template. Mol Phys 2019. [DOI: 10.1080/00268976.2019.1702728] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
Affiliation(s)
- Libin Zhang
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Ling Li
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Yifan Wang
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Yalun Suo
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Sheng Liu
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, People’s Republic of China
| | - Zhiyin Gan
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
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Chen C, Meng F, Ou P, Lan G, Li B, Chen H, Qiu Q, Song J. Effect of indium doping on motions of 〈a〉-prismatic edge dislocations in wurtzite gallium nitride. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2019; 31:315701. [PMID: 31018189 DOI: 10.1088/1361-648x/ab1bf3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The influences of indium doping on dynamics of 〈a〉-prismatic edge dislocation along [Formula: see text] shuffle plane in wurtzite GaN have been investigated employing classical molecular dynamics (MD) simulations. The dependence of dislocation motion mode and dislocation velocity on indium doping concentration, temperature, and applied shear stress was clarified. Moreover, the simulation results were further analyzed using elastic theory of dislocation and thermal activation theory of dislocation motion, showing excellent agreement with the simulation. Our findings help gain deep insights into modifying dynamic behaviors of TDs through the alloying doping and offer generic tools to the study of other wurtzite materials of promising application prospects, such as AlGaN and ZnO.
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Affiliation(s)
- Cheng Chen
- Department of Materials Engineering, McGill University, Montréal, Québec H3A0C5, Canada
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Yang B, Li M, Wang J, Zhang J, Liao D, Yue Y. Critical fracture properties of puckered and buckled arsenenes by molecular dynamics simulations. Phys Chem Chem Phys 2019; 21:12372-12379. [PMID: 31140515 DOI: 10.1039/c9cp01605h] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
The pioneering prediction and successful synthesis of monolayer arsenene in recent years have promoted intensive studies on this novel two-dimensional (2D) material. Strain-engineered arsenene monolayer can change its geometric structures with tuned charge distribution, which paves the way for achieving novel electronic properties. The practical applications of the strain-driven topological state in arsenene strongly depend on its critical strain value. In this work, mechanical properties such as fracture strain, fracture strength and Young's modulus of two arsenene structures, i.e. buckled arsenene (b-arsenene) and puckered arsenene (p-arsenene), are comprehensively investigated under different modulators such as system dimension, chirality, temperature, strain rate and random surface defect. A maximum fracture strain reduction of 41.7% from 0.24 to 0.14 is observed in armchair b-arsenene when the temperature increases from 100 to 500 K. The most significant impact factor on the mechanical properties of arseneneis found to be surface defects. A maximum fracture strength reduction of 85.7% is predicted in the armchair b-arsenene when the defect ratio increases from 0 to 5%. On the other hand, the strain rate has a negligible effect on the mechanical properties. Our results provide fundamental knowledge on the critical fracture properties of arsenene.
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Affiliation(s)
- Bo Yang
- National Graphene Center (Guangdong), Guangzhou Special Pressure Equipment Inspection and Research Institute, Guangzhou, Guangdong 510663, China.
| | - Maodong Li
- National Graphene Center (Guangdong), Guangzhou Special Pressure Equipment Inspection and Research Institute, Guangzhou, Guangdong 510663, China.
| | - Jiye Wang
- Weichai Heavy Machinery Co., Weifang, Shandong 261108, China
| | - Jingchao Zhang
- Holland Computing Center, University of Nebraska-Lincoln, Lincoln, NE 68588, USA
| | - Dongmei Liao
- Key Laboratory of Hydraulic Machinery Transients (MOE), School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China.
| | - Yanan Yue
- Key Laboratory of Hydraulic Machinery Transients (MOE), School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China.
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Zhang L, Yan H, Sun K, Liu S, Gan Z. Molecular dynamics simulations of AlN deposition on GaN substrate. Mol Phys 2019. [DOI: 10.1080/00268976.2019.1587025] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
Affiliation(s)
- Libin Zhang
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Han Yan
- School of Mechanical & Electronic Engineering, Wuhan University of Technology, Wuhan, People’s Republic of China
| | - Kuan Sun
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Sheng Liu
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, People’s Republic of China
| | - Zhiyin Gan
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
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Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation. CRYSTALS 2018. [DOI: 10.3390/cryst8070279] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/04/2023]
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