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For: Qi J, Zimmerman DT, Weisel GJ, Willis BG. Nucleation and growth of copper selective-area atomic layer deposition on palladium nanostructures. J Chem Phys 2017;147:154702. [DOI: 10.1063/1.4996188] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]  Open
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