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Verma AK, Sharma BB. Experimental and Theoretical Insights into Interfacial Properties of 2D Materials for Selective Water Transport Membranes: A Critical Review. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2024; 40:7812-7834. [PMID: 38587122 DOI: 10.1021/acs.langmuir.4c00061] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/09/2024]
Abstract
Interfacial properties, such as wettability and friction, play critical roles in nanofluidics and desalination. Understanding the interfacial properties of two-dimensional (2D) materials is crucial in these applications due to the close interaction between liquids and the solid surface. The most important interfacial properties of a solid surface include the water contact angle, which quantifies the extent of interactions between the surface and water, and the water slip length, which determines how much faster water can flow on the surface beyond the predictions of continuum fluid mechanics. This Review seeks to elucidate the mechanism that governs the interfacial properties of diverse 2D materials, including transition metal dichalcogenides (e.g., MoS2), graphene, and hexagonal boron nitride (hBN). Our work consolidates existing experimental and computational insights into 2D material synthesis and modeling and explores their interfacial properties for desalination. We investigated the capabilities of density functional theory and molecular dynamics simulations in analyzing the interfacial properties of 2D materials. Specifically, we highlight how MD simulations have revolutionized our understanding of these properties, paving the way for their effective application in desalination. This Review of the synthesis and interfacial properties of 2D materials unlocks opportunities for further advancement and optimization in desalination.
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Affiliation(s)
- Ashutosh Kumar Verma
- School of Chemical Engineering, Oklahoma State University, Stillwater, Oklahoma 74078, United States
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Bhowmik S, Govind Rajan A. Chemical vapor deposition of 2D materials: A review of modeling, simulation, and machine learning studies. iScience 2022; 25:103832. [PMID: 35243221 PMCID: PMC8857588 DOI: 10.1016/j.isci.2022.103832] [Citation(s) in RCA: 12] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/24/2022] Open
Abstract
Chemical vapor deposition (CVD) is extensively used to produce large-area two-dimensional (2D) materials. Current research is aimed at understanding mechanisms underlying the nucleation and growth of various 2D materials, such as graphene, hexagonal boron nitride (hBN), and transition metal dichalcogenides (e.g., MoS2/WSe2). Herein, we survey the vast literature regarding modeling and simulation of the CVD growth of 2D materials and their heterostructures. We also focus on newer materials, such as silicene, phosphorene, and borophene. We discuss how density functional theory, kinetic Monte Carlo, and reactive molecular dynamics simulations can shed light on the thermodynamics and kinetics of vapor-phase synthesis. We explain how machine learning can be used to develop insights into growth mechanisms and outcomes, as well as outline the open knowledge gaps in the literature. Our work provides consolidated theoretical insights into the CVD growth of 2D materials and presents opportunities for further understanding and improving such processes
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Wang D, Zhang Z, Huang B, Zhang H, Huang Z, Liu M, Duan X. Few-Layer WS 2-WSe 2 Lateral Heterostructures: Influence of the Gas Precursor Selenium/Tungsten Ratio on the Number of Layers. ACS NANO 2022; 16:1198-1207. [PMID: 34927429 DOI: 10.1021/acsnano.1c08979] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Two-dimensional (2D) lateral heterostructures based on transition metal dichalcogenides (TMDCs) attract great interest due to their properties and potential applications in electronics and optoelectronics, such as p-n rectifying diodes, light-emitting diodes, photovoltaic devices, and bipolar junction transistors. However, the studies of 2D lateral heterostructures have mainly focused on monolayer nanosheets despite bilayer heterostructures exhibiting higher performance in many electronic and optoelectronic devices. It remains a great challenge to synthesize lateral heterostructures with few layers. Here, we report the growth of bilayer-bilayer (bl-bl), bilayer-bilayer-monolayer (bl-bl-mo), bilayer-monolayer (bl-mo), monolayer-bilayer (mo-bl), and monolayer-monolayer (mo-mo) tungsten disulfide (WS2) and tungsten diselenide (WSe2) lateral heterostructures. The selenium/tungsten (Se/W) ratio of WSe2 precursor powders and the growth atmosphere can be changed with the extension of annealing time, which influences the layer number of the heterostructures. More bilayer WSe2 epitaxially grows at the WS2 edge with short annealing time (high Se/W ratio), and more monolayer WSe2 grows at the WS2 edge with long annealing time (low Se/W ratio). The density functional theory (DFT) calculations provide an in-depth understanding of the growth mechanism. This report expands the 2D material lateral heterostructure family, which gives impetus to their applications in electronics and optoelectronics.
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Affiliation(s)
- Di Wang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
| | - Zhengwei Zhang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
| | - Bolong Huang
- Department of Applied Biology and Chemical Technology, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong SAR 999077, China
| | - Hongmei Zhang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
| | - Ziwei Huang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
| | - Miaomiao Liu
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
| | - Xidong Duan
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China
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Li H, Zhao R. Dissociation of ammonia borane and its subsequent nucleation on the Ru(0001) surface Revealed by density functional theoretical simulations. Phys Chem Chem Phys 2022; 24:12226-12235. [DOI: 10.1039/d1cp05957b] [Citation(s) in RCA: 10] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Chemical vapor deposition (CVD) method is widely used in preparation of graphene, hexagonal boron nitride (h-BN) and other 2D materials. To improve the quality of h-BN, it is essential to...
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Santisouk S, Sengdala P, Jiang X, Xue XX, Chen KQ, Feng Y. Tuning the Electrocatalytic Properties of Black and Gray Arsenene by Introducing Heteroatoms. ACS OMEGA 2021; 6:13124-13133. [PMID: 34056462 PMCID: PMC8158797 DOI: 10.1021/acsomega.1c00908] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/19/2021] [Accepted: 05/04/2021] [Indexed: 06/12/2023]
Abstract
On the basis of density functional theory calculations, we explored the catalytic properties of various heteroatom-doped black and gray arsenene toward the oxygen reduction reaction (ORR), the oxygen evolution reaction (OER), and the hydrogen evolution reaction (HER). The calculation results show that pristine black (b-As) and gray arsenene (g-As) exhibit poor catalytic performance because of too weak intermediate adsorption. Heteroatom doping plays a key role in optimizing catalytic performance. Among the candidate dopants O, C, P, S, and Sb, O is the most promising one used in arsenene to improve the ORR and OER catalytic performance. Embedding O atoms could widely tune the binding strength of reactive intermediates and improve the catalytic activity. Single O-doped g-AsO 1 can achieve efficient bifunctional activity for both the OER and the ORR with optimal potential gap. b-AsO 1 and b-AsO 2 exhibit the optimal OER and ORR catalytic performance, respectively. For the HER, double C-doped g-AsC 2 could tune the adsorption of hydrogen to an optimal value and significantly enhance the catalytic performance. These findings indicate that arsenene could provide a new platform to explore high-efficiency electrocatalysts.
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Affiliation(s)
- Sengpajan Santisouk
- Hunan
Provincial Key Laboratory of Low-Dimensional Structural Physics &
Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
| | - Phoxay Sengdala
- Hunan
Provincial Key Laboratory of Low-Dimensional Structural Physics &
Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
| | - Xingxing Jiang
- Hunan
Provincial Key Laboratory of Low-Dimensional Structural Physics &
Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
| | - Xiong-Xiong Xue
- School
of Physics and Optoelectronics, Xiangtan
University, Xiangtan 411105, China
| | - Ke-Qiu Chen
- Hunan
Provincial Key Laboratory of Low-Dimensional Structural Physics &
Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
| | - Yexin Feng
- Hunan
Provincial Key Laboratory of Low-Dimensional Structural Physics &
Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
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6
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Yang Y, Tokina MV, Fang WH, Long R, Prezhdo OV. Influence of tungsten doping on nonradiative electron–hole recombination in monolayer MoSe2 with Se vacancies. J Chem Phys 2020; 153:154701. [DOI: 10.1063/5.0020720] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
Affiliation(s)
- Yating Yang
- College of Chemistry, Key Laboratory of Theoretical and Computational Photochemistry of Ministry of Education, Beijing Normal University, Beijing 100875, People’s Republic of China
| | - Marina V. Tokina
- Department of Chemistry, University of Southern California, Los Angeles, California 90089, USA
| | - Wei-Hai Fang
- College of Chemistry, Key Laboratory of Theoretical and Computational Photochemistry of Ministry of Education, Beijing Normal University, Beijing 100875, People’s Republic of China
| | - Run Long
- College of Chemistry, Key Laboratory of Theoretical and Computational Photochemistry of Ministry of Education, Beijing Normal University, Beijing 100875, People’s Republic of China
| | - Oleg V. Prezhdo
- Department of Chemistry, University of Southern California, Los Angeles, California 90089, USA
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Pan B, Zhang K, Ding C, Wu Z, Fan Q, Luo T, Zhang L, Zou C, Huang S. Universal Precise Growth of 2D Transition-Metal Dichalcogenides in Vertical Direction. ACS APPLIED MATERIALS & INTERFACES 2020; 12:35337-35344. [PMID: 32648731 DOI: 10.1021/acsami.0c08335] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Two-dimensional transition-metal dichalcogenides (TMDs) have been one of the hottest focus of materials due to the most beneficial electronic and optoelectronic properties. Up to now, one of the big challenges is the synthesis of large-area layer-number-controlled single-crystal films. However, the poor understanding of the growth mechanism seriously hampers the progress of the scalable production of TMDs with precisely tunable thickness at an atomic scale. Here, the growth mechanisms in the vertical direction were systemically studied based on the density functional theory (DFT) calculation and an advanced chemical vapor deposition (CVD) growth. As a result, the U-type relation of the TMD layer number to the ratio of metal/chalcogenide is confirmed by the capability of ultrafine tuning of the experimental conditions in the CVD growth. In addition, high-quality uniform monolayer, bilayer, trilayer, and multilayer TMDs in a large area (8 cm2) were efficiently synthesized by applying this modified CVD. Although bilayer TMDs can be obtained at both high and low ratios of metal/chalcogenide based on the suggested mechanism, they demonstrate significantly different optical and electronic transport properties. The modified CVD strategy and the proposed mechanism should be helpful for synthesizing and large-area thickness-controlled TMDs and understanding their growth mechanism and could be used in integrated electronics and optoelectronics.
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Affiliation(s)
- Baojun Pan
- Key Laboratory of Carbon Materials of Zhejiang Province, Institute of New Materials and Industrial Technologies, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China
| | - Kenan Zhang
- School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China
- School of Science, Key Laboratory of High Performance Scientific Computation, Xihua University, Chengdu 610039, China
- State Key Laboratory of Infrared Physics, Chinese Academy of Sciences, Shanghai 200083, China
| | - Changchun Ding
- School of Science, Key Laboratory of High Performance Scientific Computation, Xihua University, Chengdu 610039, China
| | - Zhen Wu
- School of Science, Key Laboratory of High Performance Scientific Computation, Xihua University, Chengdu 610039, China
| | - Qunchao Fan
- School of Science, Key Laboratory of High Performance Scientific Computation, Xihua University, Chengdu 610039, China
| | - Tingyan Luo
- Key Laboratory of Carbon Materials of Zhejiang Province, Institute of New Materials and Industrial Technologies, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China
| | - Lijie Zhang
- Key Laboratory of Carbon Materials of Zhejiang Province, Institute of New Materials and Industrial Technologies, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China
| | - Chao Zou
- Key Laboratory of Carbon Materials of Zhejiang Province, Institute of New Materials and Industrial Technologies, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China
| | - Shaoming Huang
- School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China
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Gan Y, Xue XX, Jiang XX, Xu Z, Chen K, Yu JF, Feng Y. Chemically modified phosphorene as efficient catalyst for hydrogen evolution reaction. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2020; 32:025202. [PMID: 31557744 DOI: 10.1088/1361-648x/ab482b] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Hydrogen gas produced by electrolysis has been considered as an excellent alternative to fossil fuels. Developing non-noble metal catalysts with high electrocatalytic activities is an effective way to reduce the cost of hydrogen production. Recently, black phosphorus (BP) based materials have been reported to have good potential as electrocatalysts for hydrogen evolution reaction (HER). Herein, we systematically study the catalytic performance of monolayer BP (phosphorene) and several chemically modified phosphorenes (N/S/C/O doping and adsorbed NH2/OH functional groups) for HER on the basis of first-principles calculations. For pristine phosphorene, the armchair edge shows much better catalytic activity than the plane site and zigzag edge. The electronic states of phosphorene near the Fermi level are strongly influenced by chemical modifications. Both of doping heteroatoms into the lattice and introducing NH2/OH functional groups can effectively improve the catalytic performance of the plane site and zigzag edge site, but slightly degrade the armchair edge. These theoretical results shed light on the microscopic understanding of the active sites in BP based electrocatalysts for HER and pave the way for further improving their catalytic performance.
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Affiliation(s)
- Yu Gan
- Hunan Provincial Key Laboratory of Low-Dimensional Structural Physics and Devices, School of Physics and Electronics, Hunan University, Changsha 410082, People's Republic of China
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Wree JL, Ciftyurek E, Zanders D, Boysen N, Kostka A, Rogalla D, Kasischke M, Ostendorf A, Schierbaum K, Devi A. A new metalorganic chemical vapor deposition process for MoS2 with a 1,4-diazabutadienyl stabilized molybdenum precursor and elemental sulfur. Dalton Trans 2020; 49:13462-13474. [DOI: 10.1039/d0dt02471f] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/13/2022]
Abstract
Crystalline MoS2 thin films are deposited via MOCVD using a new molybdenum precursor, 1,4-di-tert-butyl-1,4-diazabutadienyl-bis(tert-butylimido)molybdenum(vi) [Mo(NtBu)2(tBu2DAD)], and elemental sulfur.
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Affiliation(s)
- Jan-Lucas Wree
- Inorganic Materials Chemistry
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | - Engin Ciftyurek
- Department of Material Science
- Institute of Experimental Condensed Matter Physics
- Heinrich-Heine-University Düsseldorf
- 40225 Düsseldorf
- Germany
| | - David Zanders
- Inorganic Materials Chemistry
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | - Nils Boysen
- Inorganic Materials Chemistry
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | - Aleksander Kostka
- Center for Interface Dominated Materials (ZGH)
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | | | - Maren Kasischke
- Chair of Applied Laser Technologies
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | - Andreas Ostendorf
- Chair of Applied Laser Technologies
- Ruhr University Bochum
- 44801 Bochum
- Germany
| | - Klaus Schierbaum
- Department of Material Science
- Institute of Experimental Condensed Matter Physics
- Heinrich-Heine-University Düsseldorf
- 40225 Düsseldorf
- Germany
| | - Anjana Devi
- Inorganic Materials Chemistry
- Ruhr University Bochum
- 44801 Bochum
- Germany
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10
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Li F, Feng Y, Li Z, Ma C, Qu J, Wu X, Li D, Zhang X, Yang T, He Y, Li H, Hu X, Fan P, Chen Y, Zheng B, Zhu X, Wang X, Duan X, Pan A. Rational Kinetics Control toward Universal Growth of 2D Vertically Stacked Heterostructures. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2019; 31:e1901351. [PMID: 31095803 DOI: 10.1002/adma.201901351] [Citation(s) in RCA: 37] [Impact Index Per Article: 7.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/28/2019] [Revised: 04/19/2019] [Indexed: 06/09/2023]
Abstract
The rational control of the nucleation and growth kinetics to enable the growth of 2D vertical heterostructure remains a great challenge. Here, an in-depth study is provided toward understanding the growth mechanism of transition metal dichalcogenides (TMDCs) vertical heterostructures in terms of the nucleation and kinetics, where active clusters with a high diffusion barrier will induce the nucleation on top of the TMDC templates to realize vertical heterostructures. Based on this mechanism, in the experiment, through rational control of the metal/chalcogenide ratio in the vapor precursors, effective manipulation of the diffusion barrier of the active clusters and precise control of the heteroepitaxy direction are realized. In this way, a family of vertical TMDCs heterostructures is successfully designed. Optical studies and scanning transmission electron microscopy investigations exhibit that the resulting heterostructures possess atomic sharp interfaces without apparent alloying and defects. This study provides a deep understanding regarding the growth mechanism in terms of the nucleation and kinetics and the robust growth of 2D vertical heterostructures, defining a versatile material platform for fundamental studies and potential device applications.
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Affiliation(s)
- Fang Li
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Yexin Feng
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Ziwei Li
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Chao Ma
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Junyu Qu
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Xueping Wu
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Dong Li
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Xuehong Zhang
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Tiefeng Yang
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Yunqiu He
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Honglai Li
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Xuelu Hu
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Peng Fan
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Ying Chen
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
| | - Biyuan Zheng
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Xiaoli Zhu
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Xiao Wang
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
| | - Xiangfeng Duan
- Department of Chemistry and Biochemistry, University of California, Los Angeles, CA, 90095, USA
| | - Anlian Pan
- Key Laboratory for Micro-Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, School of Physics and Electronic Science, Hunan University, Changsha, Hunan, 410082, China
- College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China
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Xu H, Zhang H, Guo Z, Shan Y, Wu S, Wang J, Hu W, Liu H, Sun Z, Luo C, Wu X, Xu Z, Zhang DW, Bao W, Zhou P. High-Performance Wafer-Scale MoS 2 Transistors toward Practical Application. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1803465. [PMID: 30328296 DOI: 10.1002/smll.201803465] [Citation(s) in RCA: 42] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/27/2018] [Revised: 09/24/2018] [Indexed: 05/13/2023]
Abstract
Atomic thin transition-metal dichalcogenides (TMDs) are considered as an emerging platform to build next-generation semiconductor devices. However, to date most devices are still based on exfoliated TMD sheets on a micrometer scale. Here, a novel chemical vapor deposition synthesis strategy by introducing multilayer (ML) MoS2 islands to improve device performance is proposed. A four-probe method is applied to confirm that the contact resistance decreases by one order of magnitude, which can be attributed to a conformal contact by the extra amount of exposed edges from the ML-MoS2 islands. Based on such continuous MoS2 films synthesized on a 2 in. insulating substrate, a top-gated field effect transistor (FET) array is fabricated to explore key metrics such as threshold voltage (V T ) and field effect mobility (μFE ) for hundreds of MoS2 FETs. The statistical results exhibit a surprisingly low variability of these parameters. An average effective μFE of 70 cm2 V-1 s-1 and subthreshold swing of about 150 mV dec-1 are extracted from these MoS2 FETs, which are comparable to the best top-gated MoS2 FETs achieved by mechanical exfoliation. The result is a key step toward scaling 2D-TMDs into functional systems and paves the way for the future development of 2D-TMDs integrated circuits.
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Affiliation(s)
- Hu Xu
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
| | - Haima Zhang
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
| | - Zhongxun Guo
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
| | - Yuwei Shan
- State Key Laboratory of Surface Physics, Key Laboratory of Micro and Nano Photonic Structures (MOE), Physics Department, Fudan University, Shanghai, 200433, China
| | - Shiwei Wu
- State Key Laboratory of Surface Physics, Key Laboratory of Micro and Nano Photonic Structures (MOE), Physics Department, Fudan University, Shanghai, 200433, China
| | - Jianlu Wang
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Science, 500 Yutian Road, Shanghai, 200083, China
| | - Weida Hu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Science, 500 Yutian Road, Shanghai, 200083, China
| | - Hanqi Liu
- Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Department of Chemistry, Fudan University, Shanghai, 200433, China
| | - Zhengzong Sun
- Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Department of Chemistry, Fudan University, Shanghai, 200433, China
| | - Chen Luo
- Shanghai Key Laboratory of Multidimensional Information Processing, Department of Electronic Engineering, East China Normal University, 500 Dongchuan Road, Shanghai, 200241, China
| | - Xing Wu
- Shanghai Key Laboratory of Multidimensional Information Processing, Department of Electronic Engineering, East China Normal University, 500 Dongchuan Road, Shanghai, 200241, China
| | - Zihan Xu
- Shenzhen 6 Carbon Technology, Shenzhen, 518106, China
| | - David Wei Zhang
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
| | - Wenzhong Bao
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
| | - Peng Zhou
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China
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