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For: Seleznev D, Kozlov A, Kulevoy T, Sitnikov A, Lazarenko P, Vorobyov Y, Smayev M, Yakubov A, Sherchenkov A, Kozyukhin S. The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. Rev Sci Instrum 2019;90:123313. [PMID: 31893855 DOI: 10.1063/1.5128561] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2019] [Accepted: 12/02/2019] [Indexed: 06/10/2023]

For:	Seleznev D, Kozlov A, Kulevoy T, Sitnikov A, Lazarenko P, Vorobyov Y, Smayev M, Yakubov A, Sherchenkov A, Kozyukhin S. The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. Rev Sci Instrum 2019;90:123313. [PMID: 31893855 DOI: 10.1063/1.5128561] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2019] [Accepted: 12/02/2019] [Indexed: 06/10/2023]

Number	Cited by Other Article(s)
1	Kozyukhin SA. Chemical Modification of Phase Change Memory Materials Based on Complex Chalcogenides. RUSS J INORG CHEM+ 2021. [DOI: 10.1134/s0036023621020108] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse

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Cited by Other Article(s)

Kozyukhin SA. Chemical Modification of Phase Change Memory Materials Based on Complex Chalcogenides. RUSS J INORG CHEM+ 2021. [DOI: 10.1134/s0036023621020108] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]