Dynamics of porous silicon formation by etching in HF + V2O5solutions

Characterization of Mechanochemical Modification of Porous Silicon with Arginine

Mechanochemistry initiated the reaction of hydrogen-terminated porous silicon (H/por-Si) powder with arginine. Samples were analyzed using Fourier-transform infrared spectroscopy (FTIR), dynamic light scattering (DLS), zeta potential, scanning electron microscopy (SEM), and photoluminescence (PL) spectroscopy. Arginine, which was physisorbed onto the surface of por-Si, blue-shifted the peak PL intensity from ~630 nm for the H/por-Si to ~565 nm for arginine-coated por-Si. Grinding for 4 h reduced >80% of the initially 2–45 µm particles to <500 nm, but was observed to quench the PL. With appropriate rinsing and centrifugation, particles in the 100 nm range were isolated. Rinsing ground powder with water was required to remove the unreacted arginine. Without rinsing, excess arginine induced the aggregation of passivated particles. However, water reacted with the freshly ground por-Si powder producing H2. A zeta potential of +42 mV was measured for arginine-terminated por-Si particles dispersed in deionized water. This positive value was consistent with termination such that NH2 groups extended away from the surface. Furthermore, this result was confirmed by FTIR spectra, which suggested that arginine was bound to silicon through the formation of a covalent Si–O bond.

Metal-Assisted Catalytic Etching (MACE) for Nanofabrication of Semiconductor Powders

Electroless etching of semiconductors has been elevated to an advanced micromachining process by the addition of a structured metal catalyst. Patterning of the catalyst by lithographic techniques facilitated the patterning of crystalline and polycrystalline wafer substrates. Galvanic deposition of metals on semiconductors has a natural tendency to produce nanoparticles rather than flat uniform films. This characteristic makes possible the etching of wafers and particles with arbitrary shape and size. While it has been widely recognized that spontaneous deposition of metal nanoparticles can be used in connection with etching to porosify wafers, it is also possible to produced nanostructured powders. Metal-assisted catalytic etching (MACE) can be controlled to produce (1) etch track pores with shapes and sizes closely related to the shape and size of the metal nanoparticle, (2) hierarchically porosified substrates exhibiting combinations of large etch track pores and mesopores, and (3) nanowires with either solid or mesoporous cores. This review discussed the mechanisms of porosification, processing advances, and the properties of the etch product with special emphasis on the etching of silicon powders.

Synthesis of Silicon Nanoparticles Emitting Yellow-Green Fluorescence for Visualization of pH Change and Determination of Intracellular pH of Living Cells

In order to understand related pathogenesis of some diseases and design new intracellular drug delivery systems, investigation of pH change in living cells in real time is important. In this paper, a new style of fluorescent silicon nanoparticles (SiNPs) as a pH-sensitive probe and for the visualization of the pH changes in cells was designed and prepared using 4-aminophenol as a reducing agent and N-aminoethyl-γ-aminopropyltrimethyl as a silicon source by a one-pot hydrothermal method. It was particularly noteworthy that the fluorescence intensity emitted from the SiNPs positively correlated with the pH value of solutions, making the SiNPs a viable probe used for sensitive sensing of pH. At the same time, a response of the probe to the pH was found in 5.0-10.0, and the SiNPs have an excellent biocompatibility (e.g., ∼74% of cell viability was remained after treatment for 24 h at 500 μg/mL of the SiNPs). The proposed method that could display the change in pH of live cells provided an effective means for visually diagnosing diseases related to intracellular pH.

Response of Photoluminescence of H-Terminated and Hydrosilylated Porous Si Powders to Rinsing and Temperature

The photoluminescence (PL) response of porous Si has potential applications in a number of sensor and bioimaging techniques. However, many questions still remain regarding how to stabilize and enhance the PL signal, as well as how PL responds to environmental factors. Regenerative electroless etching (ReEtching) was used to produce photoluminescent porous Si directly from Si powder. As etched, the material was H-terminated. The intensity and peak wavelength were greatly affected by the rinsing protocol employed. The highest intensity and bluest PL were obtained when dilute HCl(aq) rinsing was followed by pentane wetting and vacuum oven drying. Roughly half of the hydrogen coverage was replaced with –RCOOH groups by thermal hydrosilylation. Hydrosilylated porous Si exhibited greater stability in aqueous solutions than H-terminated porous Si. Pickling of hydrosilylated porous Si in phosphate buffer was used to increase the PL intensity without significantly shifting the PL wavelength. PL intensity, wavelength and peak shape responded linearly with temperature change in a manner that was specific to the surface termination, which could facilitate the use of these parameters in a differential sensor scheme that exploits the inherent inhomogeneities of porous Si PL response.

Porous Nanophotonic Optomechanical Beams for Enhanced Mass Adsorption

We have developed a porous silicon nanocantilever for a nano-optomechanical system (NOMS) with a universal sensing surface for enhanced sensitivity. Using electron beam lithography, we selectively applied a V₂O₅/HF stain etch to the mechanical elements while protecting the silicon-on-insulator photonic ring resonators. This simple, rapid, and electrodeless approach generates tunable device porosity simultaneously with the mechanical release step. By controlling the porous etchant concentration and etch time, the porous etch depth, resonant frequency, and the adsorption surface area could be precisely manipulated. Using this control, cantilever sensors ranging from nonporous to fully porous were fabricated and tested as gas-phase mass sensors of volatile organic compounds coming from a gas chromatography stream. The fully porous cantilever produced a dramatic 10-fold increase in sensing signal and a 6-fold improvement in limit of detection (LOD) compared to an otherwise identical nonporous cantilever. This signal improvement could be separated into mass responsivity increase and adsorption increase components. Allan deviation measurements indicate that a further 4-fold improvement in LOD could be expected upon speeding up characteristic peak response time from 1 s to 50 ms. These results show promise for performance enhancement in nanomechanical sensors for applications in gas sensing, gas chromatography, and mass spectrometry.

Regenerative Electroless Etching of Silicon

Regenerative electroless etching (ReEtching), described herein for the first time, is a method of producing nanostructured semiconductors in which an oxidant (Ox₁ ) is used as a catalytic agent to facilitate the reaction between a semiconductor and a second oxidant (Ox₂ ) that would be unreactive in the primary reaction. Ox₂ is used to regenerate Ox₁ , which is capable of initiating etching by injecting holes into the semiconductor valence band. Therefore, the extent of reaction is controlled by the amount of Ox₂ added, and the rate of reaction is controlled by the injection rate of Ox₂ . This general strategy is demonstrated specifically for the production of highly luminescent, nanocrystalline porous Si from the reaction of V₂ O₅ in HF(aq) as Ox₁ and H₂ O₂ (aq) as Ox₂ with Si powder and wafers.

Preparation and characterization of decyl-terminated silicon nanoparticles encapsulated in lipid nanocapsules

In this Article, we report on the encapsulation of decyl-modified silicon nanoparticles (decyl-SiNPs) into ∼80 nm lipid nanocapsules (LNCs). The decyl-SiNPs were produced by thermal hydrosilylation of hydride-terminated SiNPs (H-SiNPs) liberated from porous silicon. Various techniques, including Fourier transform infrared spectroscopy (FT-IR), transmission electron microscopy (TEM), UV-vis absorption, dynamic light scattering (DLS), and photoluminescence (PL), were used to characterize their size, shape, colloidal, and optical properties. The results indicate that these nanocapsules feature controllable size, good dispersity, high loading rate of SiNPs, colloidal stability in various media, and bright PL. The PL of decyl-SiNPs loaded LNCs was stable upon heating to 80 °C, but was sensitive to basic solutions due to proton-gated emission of the SiNPs arranged at the LNCs interface between the oil phase and the hydrophilic polyethylene glycol moieties of the surfactant. These luminescent nanocapsules are therefore promising candidates as cellular probes for fluorescence imaging. In addition, it was found that TEM imaging of small-sized decyl-SiNPs could be greatly improved by preliminary negative staining of TEM grids with phosphotungstic acid.

Silica cross-linked micelles loading with silicon nanoparticles: preparation and characterization

A new family of luminescent and stable silicon-based nanoparticles (NPs), silica cross-linked pluronic F127 (PF127) micelles loaded with decyl capped silicon nanoparticles (decyl-SiNPs), were synthesized in aqueous media. The decyl-SiNPs were prepared by first liberating hydride terminated SiNPs (H-SiNPs) from a porous silicon matrix followed by their functionalization via hydrosilylation with 1-decene under photochemical activation. The silicon-based NPs exhibit bright photoluminescence (PL) with a quantum yield of ∼3.8% and peaking at ∼2.0 eV, which lies within the transmission window that is useful for biological imaging. They display a hydrodynamic size of ∼25 nm with exterior polyethylene oxide (PEO) blocks stretching out in aqueous media. Chloroform was found to quench the excitation at energy above 4.9 eV by shielding the incident light or relaxing the charge carriers, which highlights that caution against solvent interference should be taken when performing the studies on PL origin and luminescence efficiency of SiNPs. For PF127, the blocks of hydrophilic PEO participate in the PL quenching, while poly(propylene oxide) (PPO) does not. The colloidal solution displays excellent PL stability against salt (NaCl) and temperature but is susceptible to basic solution at pH above 9.

Electroless etching of Si with IO3- and related species

We have previously derived seven requirements for the formulation of effective stain etchants and have demonstrated that Fe3+, Ce4+, and VO2+ + HF solutions are highly effective at producing nanocrystalline porous silicon. Here, we show that Cl2, Br2, I2, ClO3-, BrO3-, IO3-, I-, and I3- induce etching of silicon when added to HF. However, using the strict definition that a pore is deeper than it is wide, we observe little evidence for porous layers of significant thickness but facile formation of pits. Iodate solutions are extremely reactive, and by the combined effects of IO3-, I3-, I2, and I-, these etchants roughen and restructure the substrate to form a variety of structures including (circular, rectangular, or triangular) pits, pyramids, or combinations of pits and pyramids without leaving a porous silicon layer of significant thickness.