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Xu K, Jiang C, Ban Q, Dai P, Fan Y, Yang S, Zhang Y, Wang J, Wang Y, Chen X, Zeng J, Wang F. Microsphere-Based Microsensor for Miniature Motors' Vibration Measurement. SENSORS (BASEL, SWITZERLAND) 2023; 23:9196. [PMID: 38005582 PMCID: PMC10675563 DOI: 10.3390/s23229196] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/23/2023] [Revised: 11/01/2023] [Accepted: 11/13/2023] [Indexed: 11/26/2023]
Abstract
We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is incident on the microsphere surface, the microsphere induces the phenomenon of photonic nanojet (PNJ), which causes light to pass through the front. The PNJ's full width at half maximum is narrow, surpassing the diffraction limit, enables precise focusing on the MMS surface, and enhances the scattered or reflected light emitted from the MMS surface. With two of the proposed microsensors, the axial and radial vibration of the MMS are measured simultaneously. The performance of the microsensor has been calibrated with a standard vibration source, demonstrating measurement errors of less than 1.5%. The microsensor is expected to be used in a confined space for the vibration measurement of miniature motors in industry.
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Affiliation(s)
- Kaichuan Xu
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Chunlei Jiang
- College of Electrical and Information Engineering, Northeast Petroleum University, Daqing 163318, China;
| | - Qilu Ban
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Pan Dai
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Yaqiang Fan
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Shijie Yang
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Yue Zhang
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Jiacheng Wang
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Yu Wang
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Xiangfei Chen
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
| | - Jie Zeng
- State Key Laboratory of Mechanics and Control for Aerospace Structures, Nanjing University of Aeronautics and Astronautics, No. 29 Yudao Street, Nanjing 210016, China;
| | - Feng Wang
- Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China; (K.X.); (P.D.); (J.W.); (X.C.)
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