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For: SLOAN THOMASW, SHANTHIKUMAR JGEORGE. Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs. ACTA ACUST UNITED AC 2002. [DOI: 10.1080/07408170208928861] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]

For:	SLOAN THOMASW, SHANTHIKUMAR JGEORGE. Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs. ACTA ACUST UNITED AC 2002. [DOI: 10.1080/07408170208928861] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]

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(The first 100,000 artilces are displayed in RCA.)