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Mleczko MJ, Zhang C, Lee HR, Kuo HH, Magyari-Köpe B, Moore RG, Shen ZX, Fisher IR, Nishi Y, Pop E. HfSe 2 and ZrSe 2: Two-dimensional semiconductors with native high-κ oxides. SCIENCE ADVANCES 2017; 3:e1700481. [PMID: 28819644 PMCID: PMC5553816 DOI: 10.1126/sciadv.1700481] [Citation(s) in RCA: 80] [Impact Index Per Article: 11.4] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2017] [Accepted: 07/12/2017] [Indexed: 05/21/2023]
Abstract
The success of silicon as a dominant semiconductor technology has been enabled by its moderate band gap (1.1 eV), permitting low-voltage operation at reduced leakage current, and the existence of SiO2 as a high-quality "native" insulator. In contrast, other mainstream semiconductors lack stable oxides and must rely on deposited insulators, presenting numerous compatibility challenges. We demonstrate that layered two-dimensional (2D) semiconductors HfSe2 and ZrSe2 have band gaps of 0.9 to 1.2 eV (bulk to monolayer) and technologically desirable "high-κ" native dielectrics HfO2 and ZrO2, respectively. We use spectroscopic and computational studies to elucidate their electronic band structure and then fabricate air-stable transistors down to three-layer thickness with careful processing and dielectric encapsulation. Electronic measurements reveal promising performance (on/off ratio > 106; on current, ~30 μA/μm), with native oxides reducing the effects of interfacial traps. These are the first 2D materials to demonstrate technologically relevant properties of silicon, in addition to unique compatibility with high-κ dielectrics, and scaling benefits from their atomically thin nature.
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Affiliation(s)
- Michal J. Mleczko
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Chaofan Zhang
- Department of Physics, Stanford University, Stanford, CA 94305, USA
- Stanford Institute for Materials and Energy Sciences, Stanford Linear Accelerator Center National Accelerator Laboratory, Menlo Park, CA 94025, USA
| | - Hye Ryoung Lee
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA
| | - Hsueh-Hui Kuo
- Stanford Institute for Materials and Energy Sciences, Stanford Linear Accelerator Center National Accelerator Laboratory, Menlo Park, CA 94025, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA
| | - Blanka Magyari-Köpe
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
| | - Robert G. Moore
- Stanford Institute for Materials and Energy Sciences, Stanford Linear Accelerator Center National Accelerator Laboratory, Menlo Park, CA 94025, USA
| | - Zhi-Xun Shen
- Department of Physics, Stanford University, Stanford, CA 94305, USA
- Stanford Institute for Materials and Energy Sciences, Stanford Linear Accelerator Center National Accelerator Laboratory, Menlo Park, CA 94025, USA
- Department of Applied Physics, Stanford University, Stanford, CA 94305, USA
| | - Ian R. Fisher
- Stanford Institute for Materials and Energy Sciences, Stanford Linear Accelerator Center National Accelerator Laboratory, Menlo Park, CA 94025, USA
- Department of Applied Physics, Stanford University, Stanford, CA 94305, USA
| | - Yoshio Nishi
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA
- Precourt Institute for Energy, Stanford University, Stanford, CA 94305, USA
- Corresponding author.
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Kidd TE, O'Shea A, Beck B, He R, Delaney C, Shand PM, Strauss LH, Stollenwerk A, Hurley N, Spurgeon K, Gu G. Universal method for creating optically active nanostructures on layered materials. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2014; 30:5939-5945. [PMID: 24793140 DOI: 10.1021/la501013x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
The ability to form patterned surface nanostructures has revolutionized the miniaturization of electronics and led to the discovery of emergent behaviors unseen in macroscopic systems. However, the creation of such nanostructures typically requires multiple processing steps, a high level of technical expertise, and highly sophisticated equipment. In this work, we have discovered a simple method to create nanostructures with control size and positioning in a single processing step using a standard scanning electron microscope. The technique can be applied to a wide range of systems and was successful in every layered material tested. Patterned nanostructures were formed on graphite, topological insulators, novel superconductors, and layered transition metal dichalcogenides. The nanostructures were formed via the incorporation of carbon nanoparticles into the samples in a novel form of intercalation. It appears that the electron beam interacts with residual organic molecules available on the sample surface, making it possible for them to intercalate between the layers in their crystal structure and break down into carbon. These carbon nanoparticles have strong broad-wavelength interactions in the visible light range, making these nanostructures easily detectable in an optical microscope and of interest for a range of nanoscale electro-optical devices.
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Affiliation(s)
- Timothy E Kidd
- Physics Department, University of Northern Iowa , Cedar Falls, Iowa 50614-0150, United States
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Borghesi A, Chen-jia C, Guizzetti G, Nosenzo L, Reguzzoni E, Stella A, Lévy F. Thermoreflectance studies of transition-metal dichalcogenides between 1 and 9 eV. PHYSICAL REVIEW. B, CONDENSED MATTER 1986; 33:2422-2428. [PMID: 9938578 DOI: 10.1103/physrevb.33.2422] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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