2
|
Terauchi M, Koshiya S, Satoh F, Takahashi H, Handa N, Murano T, Koike M, Imazono T, Koeda M, Nagano T, Sasai H, Oue Y, Yonezawa Z, Kuramoto S. Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2014; 20:692-697. [PMID: 24625988 DOI: 10.1017/s1431927614000439] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.
Collapse
Affiliation(s)
- Masami Terauchi
- 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan
| | - Shogo Koshiya
- 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan
| | - Futami Satoh
- 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan
| | | | - Nobuo Handa
- 2JEOL Ltd.,3-1-2 Musashino,Akishima,Tokyo 196-8558,Japan
| | | | - Masato Koike
- 3Quantum Beam Science Directorate,Japan Atomic Energy Agency,8-1-7 Umemidai,Kizugawa,Kyoto 619-0215,Japan
| | - Takashi Imazono
- 3Quantum Beam Science Directorate,Japan Atomic Energy Agency,8-1-7 Umemidai,Kizugawa,Kyoto 619-0215,Japan
| | - Masaru Koeda
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| | - Tetsuya Nagano
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| | - Hiroyuki Sasai
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| | - Yuki Oue
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| | - Zeno Yonezawa
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| | - Satoshi Kuramoto
- 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan
| |
Collapse
|