Proposed triaxial atomic force microscope contact-free tweezers for nanoassembly

Electric Field-Assisted Agglomeration of Trace Nanoparticle Impurities for Ultrahigh Purity Chemicals

With the advancement of semiconductor manufacturing technology, the effects of trace impurities in industrial chemicals have grown significantly. In industrial processes, conventional purification methods, such as filtration and distillation, have reached their limits for removing nanoparticles from aqueous and acidic solutions. Especially, silicon and silicate are two fundamental byproducts in semiconductor fabrication processes. Assembly and subsequent removal of these materials at the nanoparticle level have been confronted with significant challenges. Therefore, it is imperative to develop technologies to effectively control and remove these impurities for next-generation manufacturing processes. In this study, we explored the use of electric field-assisted assembly to agglomerate silicate and silicon nanoparticles in industry-standard aqueous and acidic solutions. By applying an alternating current electric field, we induced dipole moments in the nanoparticles, which led to their agglomeration. Notably, nanoparticles smaller than 4 nm grew into significantly larger ones, with submicroparticle sizes exceeding 87 nm for silicate and reaching 130 nm for silicon. Through systematic analysis of the size distribution changes, we identified optimal agglomeration times of 10 min for silicate and 20 min for silicon, revealing effective agglomeration within the frequency range of 1-1000 kHz. The agglomerated particles were stable for 5 days. Our electric field-assisted approach to obtain assembled nanoparticles that can be subsequently removed by conventional purification processes holds promise for enhancing future microfabrication processes, such as semiconductor manufacturing, potentially improving the manufacturing yield and uniformity by reducing the number of trace particles that can act as defective sites.

V-shaped active plasmonic meta-polymers

We report the design and fabrication of V-shaped plasmonic meta-polymers on a glass substrate or silicon wafer using a surface functionalization approach. The efficacy of the assembly method is examined by analyzing the surface enhanced Raman scattering by an individual V-shaped antenna experimentally and using computational simulations to determine the polarization dependence of local electromagnetic field enhancement.

Shape-selective deposition and assembly of anisotropic nanoparticles

We report the large-area assembly of anisotropic gold nanoparticles into lithographically defined templates with control over their angular position using a capillary force-based approach. We elucidate the role of the geometry of the templates in the assembly of anisotropic nanoparticles consisting of different shapes and sizes. These insights allow us to design templates that immobilize individual triangular nanoprisms and concave nanocubes in a shape-selective manner and filter undesired impurity particles from a mixture of triangular prisms and other polyhedra. Furthermore, by studying the assembly of two particles in the same template, we elucidate the importance of interparticle forces in this method. These advances allow for the construction of face-to-face and edge-to-edge nanocube dimers as well as triangular nanoprism bowtie antennas. As an example of the fundamental studies enabled by this assembly method, we investigate the surface-enhanced Raman scattering (SERS) of face-to-face concave cube dimers both experimentally and computationally and reveal a strong polarization dependence of the local field enhancement.

Triaxial AFM probes for noncontact trapping and manipulation

We show that a triaxial atomic force microscopy probe creates a noncontact trap for a single particle in a fluid via negative dielectrophoresis. A zero in the electric field profile traps the particle above the probe surface, avoiding adhesion, and the repulsive region surrounding the zero pushes other particles away, preventing clustering. Triaxial probes are promising for three-dimensional assembly and for selective imaging of a particular property of a sample using interchangeable functionalized particles.