Fabrication of polarization-dependent reflective metamaterial by focused ion beam milling

Cracking-assisted fabrication of nanoscale patterns for micro/nanotechnological applications

Cracks are frequently observed in daily life, but they are rarely welcome and are considered as a material failure mode. Interestingly, cracks cause critical problems in various micro/nanofabrication processes such as colloidal assembly, thin film deposition, and even standard photolithography because they are hard to avoid or control. However, increasing attention has been given recently to control and use cracks as a facile, low-cost strategy for producing highly ordered nanopatterns. Specifically, cracking is the breakage of molecular bonds and occurs simultaneously over a large area, enabling fabrication of nanoscale patterns at both high resolution and high throughput, which are difficult to obtain simultaneously using conventional nanofabrication techniques. In this review, we discuss various cracking-assisted nanofabrication techniques, referred to as crack lithography, and summarize the fabrication principles, procedures, and characteristics of the crack patterns such as their position, direction, and dimensions. First, we categorize crack lithography techniques into three technical development levels according to the directional freedom of the crack patterns: randomly oriented, unidirectional, or multidirectional. Then, we describe a wide range of novel practical devices fabricated by crack lithography, including bioassay platforms, nanofluidic devices, nanowire sensors, and even biomimetic mechanosensors.

Electro-optic switching in metamaterial by liquid crystal

Electro-optic switching of reflection and refraction is experimentally demonstrated in metasurface liquid crystal cell. Negative metasurface is fabricated by focused-ion-beam milling, and twisted nematic cells are constructed with complementary double-split ring resonator and V-shape slot antenna metasurface. By application of an external voltage, electro-optic switchings are achieved in reflection and refraction. It has a strong implication for applications in spatial light modulation and wavelength division multiplexer/demultiplexer in a near-IR spectral range.

Electro-optic switching in phase-discontinuity complementary metasurface twisted nematic cell

Electro-optic switching of refraction is experimentally demonstrated in a phase-discontinuity complementary metasurface twisted nematic cell. The phase-discontinuity complementary metasurface is fabricated by focused-ion-beam milling, and a twisted nematic cell is constructed with complementary V-shape slot antenna metasurface. By application of an external voltage, switching is achieved between ordinary refraction and extraordinary refraction satisfying the generalized Snell's law. It has a strong implication for applications in spatial light modulation and wavelength division multiplexer/demultiplexer in a near-IR spectral range.

Direct modification of colloidal hole-masks for locally ordered hetero-assemblies of nanostructures over large areas

We have developed a direct mask modification method applicable in hole-mask nanostructure fabrication. It is demonstrated that by using this technique the size, material, relative location and ordering of individual subunits can be controlled and varied independently to generate hetero-assemblies of nanostructures including chiral structures over large areas.

Reflection resonance switching in metamaterial twisted nematics cell

Electric switching of reflection resonances at near-IR spectral range is experimentally demonstrated in a reflective metamaterial twisted nematic liquid crystal cell. Reflective metamaterial composed of nano-sized double-split ring resonator aperture is fabricated by a focused ion beam milling. Two-fold rotational symmetry of double-split ring resonators allows for two orthogonal polarization-dependent reflection resonances in the reflective metamaterial. With an external voltage of 10V across 12μm cell gap, a full switching is achieved between two reflection resonances. Dynamic measurements show the time constants of switch-on and switch-off are in the order of 100ms and 10ms, respectively.