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Qu J, Liu X. Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials. SCANNING 2021; 2021:4426254. [PMID: 34211620 PMCID: PMC8208868 DOI: 10.1155/2021/4426254] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/07/2021] [Revised: 05/18/2021] [Accepted: 05/22/2021] [Indexed: 06/13/2023]
Abstract
Functional nanomaterials possess exceptional mechanical, electrical, and optical properties which have significantly benefited their diverse applications to a variety of scientific and engineering problems. In order to fully understand their characteristics and further guide their synthesis and device application, the multiphysical properties of these nanomaterials need to be characterized accurately and efficiently. Among various experimental tools for nanomaterial characterization, scanning electron microscopy- (SEM-) based platforms provide merits of high imaging resolution, accuracy and stability, well-controlled testing conditions, and the compatibility with other high-resolution material characterization techniques (e.g., atomic force microscopy), thus, various SEM-enabled techniques have been well developed for characterizing the multiphysical properties of nanomaterials. In this review, we summarize existing SEM-based platforms for nanomaterial multiphysical (mechanical, electrical, and electromechanical) in situ characterization, outline critical experimental challenges for nanomaterial optical characterization in SEM, and discuss potential demands of the SEM-based platforms to characterizing multiphysical properties of the nanomaterials.
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Affiliation(s)
- Juntian Qu
- State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
- Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China
- Department of Mechanical Engineering, McGill University, Montreal, H3A 0G4, Canada
| | - Xinyu Liu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, M5S 3G8, Canada
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Abstract
Nanorobotics, which has long been a fantasy in the realm of science fiction, is now a reality due to the considerable developments in diverse fields including chemistry, materials, physics, information and nanotechnology in the past decades. Not only different prototypes of nanorobots whose sizes are nanoscale are invented for various biomedical applications, but also robotic nanomanipulators which are able to handle nano-objects obtain substantial achievements for applications in biomedicine. The outstanding achievements in nanorobotics have significantly expanded the field of medical robotics and yielded novel insights into the underlying mechanisms guiding life activities, remarkably showing an emerging and promising way for advancing the diagnosis & treatment level in the coming era of personalized precision medicine. In this review, the recent advances in nanorobotics (nanorobots, nanorobotic manipulations) for biomedical applications are summarized from several facets (including molecular machines, nanomotors, DNA nanorobotics, and robotic nanomanipulators), and the future perspectives are also presented.
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Korayem MH, Mahmoodi Z, Mohammadi M. 3D investigation of dynamic behavior and sensitivity analysis of the parameters of spherical biological particles in the first phase of AFM-based manipulations with the consideration of humidity effect. J Theor Biol 2018; 436:105-119. [PMID: 28941867 DOI: 10.1016/j.jtbi.2017.09.016] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/02/2016] [Revised: 09/14/2017] [Accepted: 09/18/2017] [Indexed: 11/28/2022]
Abstract
The imaging and manipulation tools being the same in an AFM has necessitated the modeling and simulation of the AFM-based manipulation processes. In earlier studies, the dynamic behavior of biological particles in the course of manipulation has been modeled and simulated two-dimensionally. Now, with the advancements made in the modeling techniques, a 3D model of the manipulation of biological particles is more accurate than its 2D counterpart. In this paper, the effect of humidity has been taken into consideration in the three-dimensional modeling of the manipulation. By employing this model, the equations for the motion modes of particles (sliding, rolling, and spinning) at the onset of movement have been derived and the critical force magnitude has been obtained. In order to reduce the potential damage to the manipulated biological particle, the maximum radius of the tip has been determined. The effective parameters in this process have been extracted by performing sensitivity analysis using the Sobol method. In comparison to the results obtained for a dry environment, the results obtained by simulating the manipulation of a yeast particle in a wet environment shows that the critical force for the onset of particle movement diminishes by considering the moisture effect (high humidity levels). The parameters influencing the magnitude of the critical force include the particle radius, particle material, surface energy of the chosen substrate, amount of preload and the contact angle. Also, the results of the performed sensitivity analysis indicate a very high influence of particle radius on the critical manipulation force and a very low impact of cantilever width on the critical force.
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Affiliation(s)
- M H Korayem
- Robotics Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran.
| | - Z Mahmoodi
- Robotics Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran
| | - M Mohammadi
- Robotics Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran
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Zhou C, Deng L, Cheng L, Cao Z, Wang S, Tan M. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization. SCANNING 2017; 2017:3982503. [PMID: 29109809 PMCID: PMC5661803 DOI: 10.1155/2017/3982503] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/15/2017] [Accepted: 05/08/2017] [Indexed: 06/07/2023]
Abstract
In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
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Affiliation(s)
- Chao Zhou
- State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
| | - Lu Deng
- School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China
| | - Long Cheng
- State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
| | - Zhiqiang Cao
- State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
| | - Shuo Wang
- State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
| | - Min Tan
- State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
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Shi C, Luu DK, Yang Q, Liu J, Chen J, Ru C, Xie S, Luo J, Ge J, Sun Y. Recent advances in nanorobotic manipulation inside scanning electron microscopes. MICROSYSTEMS & NANOENGINEERING 2016; 2:16024. [PMID: 31057824 PMCID: PMC6444728 DOI: 10.1038/micronano.2016.24] [Citation(s) in RCA: 33] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/23/2016] [Revised: 04/02/2016] [Accepted: 04/05/2016] [Indexed: 05/27/2023]
Abstract
A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.
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Affiliation(s)
- Chaoyang Shi
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Devin K Luu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Qinmin Yang
- Department of Control Science and Engineering, Zhejiang University, Hangzhou 310058, China
| | - Jun Liu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Jun Chen
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Changhai Ru
- Robotics and Microsystems Center, Soochow University, Suzhou 215021, China
| | - Shaorong Xie
- School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
| | - Jun Luo
- School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
| | - Ji Ge
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Yu Sun
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
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Li M, Liu L, Xi N, Wang Y. Biological Applications of a Nanomanipulator Based on AFM: In situ visualization and quantification of cellular behaviors at the single-molecule level. IEEE NANOTECHNOLOGY MAGAZINE 2015. [DOI: 10.1109/mnano.2015.2441110] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/22/2022]
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In Situ Nanocharacterization of Yeast Cells Using ESEM and FIB. Fungal Biol 2015. [DOI: 10.1007/978-3-319-22437-4_6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/22/2022]
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Shen Y, Fukuda T. State of the art: micro-nanorobotic manipulation in single cell analysis. ACTA ACUST UNITED AC 2014. [DOI: 10.1186/s40638-014-0021-4] [Citation(s) in RCA: 25] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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