Fabrication and characterization of microlenses realized by a modified LIGA process

Fabricating SU-8 Photoresist Microstructures with Controlled Convexity-Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

We present a simple, robust, and cheap microfabrication method, based on thermally manipulating capillary action in poly(dimethylsiloxane) (PDMS) microholes, for preparing SU-8 curved microstructures. The microstructure morphology including convexity-concavity and curvature can be controlled via tuning the formation temperature. The convex SU-8 microspherical crowns with a height of 40 μm were formed at 10 °C, whereas the concave SU-8 microspherical crowns with a height of 90 μm were formed at 100 °C. The morphology of the microstructures is dictated by the thermally controlled combination of the pressure difference across the interface, contact angle, and surface tension. The fabricated microstructures with a spherical surface can be used as a microlens array or a mold for producing a microlens array. The clear and uniform images were observed using the generated microlens arrays. The equilibrium morphology of the microstructures can be predicted by numerical simulation, which can lessen the number of experiments and thus the design cost. The proposed method has the potential to find applications in industrial fields.

Radiation-induced melting in coherent X-ray diffractive imaging at the nanoscale

Coherent X-ray diffraction techniques play an increasingly significant role in the imaging of nanoscale structures, ranging from metallic and semiconductor to biological objects. In material science, X-rays are usually considered to be of a low-destructive nature, but under certain conditions they can cause significant radiation damage and heat loading on the samples. The qualitative literature data concerning the tolerance of nanostructured samples to synchrotron radiation in coherent diffraction imaging experiments are scarce. In this work the experimental evidence of a complete destruction of polymer and gold nanosamples by the synchrotron beam is reported in the case of imaging at 1-10 nm spatial resolution. Numerical simulations based on a heat-transfer model demonstrate the high sensitivity of temperature distribution in samples to macroscopic experimental parameters such as the conduction properties of materials, radiation heat transfer and convection. However, for realistic experimental conditions the calculated rates of temperature rise alone cannot explain the melting transitions observed in the nanosamples. Comparison of these results with the literature data allows a specific scenario of the sample destruction in each particular case to be presented, and a strategy for damage reduction to be proposed.

Simple fabrication of micro lens arrays

Microporous polymer films with a hexagonal arrangement of pores were prepared by simple casting of various polymer solutions under humid conditions. Hexagonally packed micropores were prepared by using condensed water droplets as templates on the surface of polymer solutions. Spherical micro lens arrays (MLAs) were fabricated simply by molding from the resulting honeycomb structures. By peeling off the upper layer with adhesive tape, the pillars were severed, forming pins on each layer, and a hexagonal array of pincushion structures was generated by this procedure. Hemispherical MLAs were also fabricated by molding the pincushion structures. The hemispherical MLAs projected clearer miniaturized images than spherical MLAs.