Effect of topological patterning on self-rolling of nanomembranes

3D Chiral Micro-Pinwheels Based on Rolling-Up Kirigami Technology

Expanding micro-/nanostructures into 3D ones results not only in boosting structural integration level with compact geometry but also enhancing a device's complexity and functionality. Herein, a synergetic 3D micro-/nanoshape transformation is proposed by combining kirigami and rolling-up techniques, or rolling-up kirigami, for the first time. As an example, micro-pinwheels with multiple flabella are patterned on pre-stressed bilayer membranes and rolled up into 3D structures. The flabella are designed when they are patterned on a 2D thin film, facilitating the integration of micro-/nanoelement and other functionalization processes during 2D patterning, which is typically much easier than post-shaping an as-fabricated 3D structure by removing redundant materials or 3D printing. The dynamic rolling-up process is simulated using elastic mechanics with a movable releasing boundary. Mutual competition and cooperation among flabella are observed during the whole release process. More importantly, the mutual conversion between translation and rotation offers a reliable platform for developing parallel microrobots and adaptive 3D micro-antennas. Additionally, 3D chiral micro-pinwheel arrays integrated into a microfluidic chip are successfully applied to detect organic molecules in solution using a terahertz apparatus. With an extra actuation, active micro-pinwheels can potentially serve as a base to functionalize 3D kirigami as tunable devices.

Fabrication of magnetic helical microribbons made of nickel thin films sandwiched between silicon nitride layers for microswimming applications

Helical swimming is adopted by microswimming robots since it is an efficient mechanism and commonly observed among microorganisms swimming at low Reynolds numbers. However, manufacturing of micro-helices made of sub-micron magnetic thin layers is neither straightforward nor well-established, advanced materials and methods are necessary to obtain such structures as reported in the literature. In this paper, a topological patterning method utilizing basic microfabrication methods is presented for the self-assembly of magnetic micro-helices made of a sandwiched nickel thin film (50-150 nm) between two silicon nitride layers. Strain mismatch between the thin films and the geometric anisotropy introduced by the slanted patterns on the top nitride layer result in self-rolled-up helical microribbons. Moreover, inspired by the actual release process during the wet-etching of the microribbon from the substrate, moving boundary conditions are incorporated in a numerical model to simulate the self-rolling of trilayer ribbons. The simulation results are compared and validated by experimental data within 7% error for all cases, including the geometries that do not result in a helical shape. The swimming performance of the magnetized micro-helix is demonstrated inside a capillary glass tube experimentally and cross-validated with a numerical model.

Magnetic origami creates high performance micro devices

Self-assembly of two-dimensional patterned nanomembranes into three-dimensional micro-architectures has been considered a powerful approach for parallel and scalable manufacturing of the next generation of micro-electronic devices. However, the formation pathway towards the final geometry into which two-dimensional nanomembranes can transform depends on many available degrees of freedom and is plagued by structural inaccuracies. Especially for high-aspect-ratio nanomembranes, the potential energy landscape gives way to a manifold of complex pathways towards misassembly. Therefore, the self-assembly yield and device quality remain low and cannot compete with state-of-the art technologies. Here we present an alternative approach for the assembly of high-aspect-ratio nanomembranes into microelectronic devices with unprecedented control by remotely programming their assembly behavior under the influence of external magnetic fields. This form of magnetic Origami creates micro energy storage devices with excellent performance and high yield unleashing the full potential of magnetic field assisted assembly for on-chip manufacturing processes.

Despite the potential of self-assembly strategies for fabricating 3D micro-electronic devices, technological limitations prohibit widespread industrial adoption. Here, the authors report the magnetic field-assisted Origami-based assembly of high-performance devices with high yield.