Performance advances in interferometric optical profilers for imaging and testing

Characterization of Functional Materials Using Coherence Scanning Interferometry and Environmental Chambers

Functional materials are challenging to characterize because of the presence of small structures and inhomogeneous materials. If interference microscopy was initially developed for use for the optical profilometry of homogeneous, static surfaces, it has since been considerably improved in its capacity to measure a greater variety of samples and parameters. This review presents our own contributions to extending the usefulness of interference microscopy. For example, 4D microscopy allows real-time topographic measurement of moving or changing surfaces. High-resolution tomography can be used to characterize transparent layers; local spectroscopy allows the measurement of local optical properties; and glass microspheres improve the lateral resolution of measurements. Environmental chambers have been particularly useful in three specific applications. The first one controls the pressure, temperature, and humidity for measuring the mechanical properties of ultrathin polymer films; the second controls automatically the deposition of microdroplets for measuring the drying properties of polymers; and the third one employs an immersion system for studying changes in colloidal layers immersed in water in the presence of pollutants. The results of each system and technique demonstrate that interference microscopy can be used for more fully characterizing the small structures and inhomogeneous materials typically found in functional materials.

Laser-induced ultrasonic imaging for measurements of solid surfaces in optically opaque liquids [Invited]

The paper describes a novel laser ultrasonic profilometry method which uses pulsed laser radiation for imaging of the surface profile of solid objects in optically opaque liquids by scattering of ultrasonic waves. Algorithms for the construction of laser ultrasonic images and for profile segmentation are presented. An experimental setup for profile measurements is described. It allows reconstructing of laser ultrasonic images with a frame rate of 10 Hz and performing an automated 3D scanning of samples. The results of the experimental testing of laser ultrasonic profilometry on duralumin samples are presented. The approximation error of duralumin cylinder surface profile measurements in water is 15 μm. The results are compared to those obtained by x-ray tomography.

A novel interferometric method for the study of the viscoelastic properties of ultra-thin polymer films determined from nanobubble inflation

Glass formation and glassy behavior remain as the important areas of investigation in soft matter physics with many aspects which are still not completely understood, especially at the nanometer size-scale. In the present work, we show an extension of the "nanobubble inflation" method developed by O'Connell and McKenna [Rev. Sci. Instrum. 78, 013901 (2007)] which uses an interferometric method to measure the topography of a large array of 5 μm sized nanometer thick films subjected to constant inflation pressures during which the bubbles grow or creep with time. The interferometric method offers the possibility of making measurements on multiple bubbles at once as well as having the advantage over the AFM methods of O'Connell and McKenna of being a true non-contact method. Here we demonstrate the method using ultra-thin films of both poly(vinyl acetate) (PVAc) and polystyrene (PS) and discuss the capabilities of the method relative to the AFM method, its advantages and disadvantages. Furthermore we show that the results from experiments on PVAc are consistent with the prior work on PVAc, while high stress results with PS show signs of a new non-linear response regime that may be related to the plasticity of the ultra-thin film.

Monitoring bacterial biofilms with a microfluidic flow chip designed for imaging with white-light interferometry

There is a need for imaging and sensing instrumentation that can monitor transitions in a biofilm structure in order to better understand biofilm development and emergent properties such as anti-microbial resistance. Herein, we describe the design, manufacture, and use of a microfluidic flow cell to visualize the surface structure of bacterial biofilms with white-light interferometry (WLI). The novel imaging chip enabled the use of this non-disruptive imaging method for the capture of high resolution three-dimensional profile images of biofilm growth over time. The fine axial resolution (3 nm) and the wide field of view (>1 mm by 1 mm) enabled the detection of biofilm formation as early as 3 h after inoculation of the flow cell with a live bacterial culture (Pseudomonas fluorescens). WLI imaging facilitated the monitoring of the early stages of biofilm development and subtle variations in the structure of mature biofilms. Minimally-invasive imaging enabled the monitoring of biofilm structure with surface metrology metrics (e.g., surface roughness). The system was used to observe a transition in the biofilm structure that occurred in response to exposure to a common antiseptic. In the future, WLI and the biofilm imaging cell described herein may be used to test the effectiveness of biofilm-specific therapies to combat common diseases associated with biofilm formation such as cystic fibrosis and periodontitis.

Comparison of envelope detection techniques in coherence scanning interferometry

The aim of this work is to make a comparison of the most current signal processing techniques used to analyze the fringe signal in coherence scanning interferometry (CSI), a major technique for optical surface roughness measurements. We focus here on classical AM-FM signal-processing algorithms such as the Hilbert transform (HT), the five-sample adaptive (FSA), and the continuous wavelet transform (CWT). We have recently also introduced a new family of compact and robust algorithms using the Teager-Kaiser energy operator (TKEO). We propose an improved version of TKEO using a combination of different techniques of pre-filtering and demodulation processing to remove the noise and offset component and to retrieve the fringe envelope to either determine the surface height information or to separate adjacent transparent layers. In particular, as a pre-filtering approach, we have focused on empirical mode decomposition in combination with the Savitzky-Golay filter. An added Gaussian post-filtering is helpful for a precise peak extraction. The experimental results show that TKEO performs better than CWT in terms of computation time and provides a better surface extraction than HT and FSA. Results have been obtained on synthetic and real data taken from a layer of resin on a silicon substrate.

In situ non-destructive measurement of biofilm thickness and topology in an interferometric optical microscope

Biofilms are ubiquitous and impact the environment, human health, dental hygiene, and a wide range of industrial processes. Biofilms are difficult to characterize when fully hydrated, especially in a non-destructive manner, because of their soft structure and water-like bulk properties. Herein a method of measuring and monitoring the thickness and topology of live biofilms of using white light interferometry is described. Using this technique, surface morphology, surface roughness, and biofilm thickness were measured over time without while the biofilm continued to grow. The thickness and surface topology of a P. putida biofilm were monitored growing from initial colonization to a mature biofilm. Measured thickness followed expected trends for bacterial growth. Surface roughness also increased over time and was a leading indicator of biofilm growth.

Full-field parallel interferometry coherence probe microscope for high-speed optical metrology

Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.

High-axial-resolution, full-field optical coherence microscopy using tungsten halogen lamp and liquid-crystal-based achromatic phase shifter

A high-axial-resolution, full-field optical coherence microscope (FFOCM) for topography and tomography applications is presented. The FFOCM is based on a polarization Linnik interference microscope equipped with a tungsten halogen lamp. The phase difference between the reference and test beams in the microscope is precisely and quickly shifted by using an achromatic liquid-crystal phase shifter (LCPS). The cross-sectional amplitude and phase maps of an interferogram are retrieved by using a three-step phase-shifting technique. The LCPS consists of three identical nematic liquid-crystal (NLC) cells sandwiched between two quarter-wave plates so that it functions as a typical quarter-half-quarter phase shifter. Instead of using high-cost NLC cells with precise thickness of half-wave retardation, a method is proposed to operate thicker NLC cells without scarifying the axial resolution. Experimental results reveal that the FFOCM is able to perform three-dimensional micrometer-resolution imaging.

Picosecond supercontinuum light source for stroboscopic white-light interferometry with freely adjustable pulse repetition rate

We present a picosecond supercontinuum light source designed for stroboscopic white-light interferometry. This source offers a potential for high-resolution characterization of vibrational fields in electromechanical components with frequencies up to the GHz range. The light source concept combines a gain-switched laser diode, the output of which is amplified in a two-stage fiber amplifier, with supercontinuum generation in a microstructured optical fiber. Implemented in our white-light interferometer setup, optical pulses with optimized spectral properties and below 310 ps duration are used for stroboscopic illumination at freely adjustable repetition rates. The performance of the source is demonstrated by characterizing the surface vibration field of a square-plate silicon MEMS resonator at 3.37 MHz. A minimum detectable vibration amplitude of less than 100 pm is reached.

Stroboscopic white-light interferometry of vibrating microstructures

We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.

Challenges for nanomechanical sensors in biological detection

Nanomechanical biosensing relies on changes in the movement and deformation of micro- and nanoscale objects when they interact with biomolecules and other biological targets. This field of research has provided ever-increasing records in the sensitivity of label-free detection but it has not yet been established as a practical alternative for biological detection. We analyze here the latest advancements in the field, along with the challenges remaining for nanomechanical biosensors to become a commonly used tool in biology and biochemistry laboratories.

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

3D surface profiling and high resolution imaging for refining the florin rings and epicuticular wax crystals of Pinus koraiensis needles

3D surface profiling and high resolution imaging were performed to refine the Florin rings and epicuticular wax crystals of Pinus koraiensis needles. Needles were collected from four-year-old seedlings and air-dried for surface observations. Field emission scanning electron microscopy revealed that stomata were found on the abaxial (lower) surface of needles. Measured as ca. 40 μm long, they were largely elliptical or oval-shaped. Epicuticular wax crystals were present in the epistomatal chambers as well as on the surrounding epidermis. Rodlets were prevalently found on the stomatal bands and furrows as well as within the epistomatal chambers. The presence of wax tubules was ascertained by the distinct terminal openings at their ends. The occurrence of wax ridges was evident on the epidermis near the saw-tooth margins (nonstomatal areas). No distinct wax ridges were detected on the dewaxed needles. Raised Florin rings were distinct on the stomata. White light scanning interferometry showed that the diameter and width of stomata were ca. 44.02 ± 3.33 μm and 32.10 ± 3.30 μm, respectively. Measured from the neighboring epidermis to the stomatal aperture, the mean height of the stoma reached ca. 6.23 ± 1.28 μm. Focus variation metrology allowed measuring the mean elevation angle of the stoma, reaching ca. 41.41 ± 11.25°. This is the first report on a novel approach to the establishment of quantitative criteria of Florin ring classification by nontactile 3D surface profiling beyond the previous qualitative descriptions of Florin rings of coniferous species.

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

We present an instrument based on the scanning of a laser beam and the measurement of the reflected beam deflection that enables the readout of arrays of nanomechanical systems without limitation in the geometry of the sample, with high sensitivity and a spatial resolution of few micrometers. The measurement of nanoscale deformations on surfaces of cm(2) is performed automatically, with minimal need of user intervention for optical alignment. To exploit the capability of the instrument for high throughput biological and chemical sensing, we have designed and fabricated a two-dimensional array of 128 cantilevers. As a proof of concept, we measure the nanometer-scale bending of the 128 cantilevers, previously coated with a thin gold layer, induced by the adsorption and self-assembly on the gold surface of several self-assembled monolayers. The instrument is able to provide the static and dynamic responses of cantilevers with subnanometer resolution and at a rate of up to ten cantilevers per second. The instrumentation and the fabricated chip enable applications for the analysis of complex biological systems and for artificial olfaction.